双激光脉冲打靶形成Gd等离子体的极紫外光谱辐射

高端芯片制造所需要的极紫外光刻技术位于我国当前面临35项"卡脖子"关键核心技术之首.高转换效率的极紫外光源是极紫外光刻系统的重要组成部分.本文通过采用双激光脉冲打靶技术实现较强的6.7 nm极紫外光输出.首先,理论计算Gd¹⁸⁺—Gd²⁷⁺离子最外层4d壳层的4p-4d和4d-4f能级之间跃迁、以及Gd¹⁴⁺—Gd¹⁷⁺离子最外层4f壳层的4d-4f能级之间跃迁对波长为6.7 nm附近极紫外光的贡献.其后开展实验研究,结果表明,随着双脉冲之间延时的逐渐增加,波长为6.7 nm附近的极紫外光辐射强度呈现先减弱、后增加、之后再减弱的变化趋势,在双脉冲延时为100 ns处产生的极紫外光辐射最强.并且,在延时为100 ns处产生的光谱效率最高,相比于单脉冲激光产生的光谱效率提升了33%.此外,发现双激光脉冲打靶技术可以有效地减弱等离子体的自吸收效应,获得的6.7 nm附近极紫外光谱宽度均小于单激光脉冲打靶的情形,且在脉冲延时为30 ns时刻所产生的光谱宽度最窄,约为单独主脉冲产生极紫外光谱宽度的1/3.同时...     

Phase Transitions in the Diluted Two-Dimensional Potts Model with the Number of Spin States q = 3 on a Square Lattice

Physics of the Solid State - The phase transitions in the two-dimensional diluted Potts model with the number of spin states q = 3 are studied by computer simulation method. The systems...     

Determination of Vardenafil in Pure and Dosage Forms by Spectrophotometry

Journal of Applied Spectroscopy - Three simple, sensitive, precise, and rapid spectrophotometric methods are developed and optimized for the assay of vardenafil in pharmaceutical formulations. The...     

Determination of Polycyclic Aromatic Hydrocarbons in Soils and Bottom Sediments by Gas Chromatography–Mass Spectrometry with QuEChERS Sample Preparation

Journal of Analytical Chemistry - The work is dedicated to the determination of polyaromatic hydrocarbons (PAHs) in soils and bottom sediments by gas chromatography–mass spectrometry using...     

Asymptotic Behavior of Least Energy Solutions for a Fractional Laplacian Eigenvalue Problem on ℝN

Acta Mathematica Sinica, English Series - We are interested in the existence and asymptotic behavior for the least energy solutions of the following fractional eigenvalue problem $$\left({\rm{P}}...     

Quantum Key Distribution with Untrusted Detectors Accessible to an Eavesdropper

JETP Letters - A simple fundamental modification of quantum key distribution protocols has been proposed: it is not required to protect the results of avalanche detectors from an eavesdropper, but...     

Optimal Control of Nonlinear Fractional-Order Systems with Multiple Time-Varying Delays

Journal of Optimization Theory and Applications - This paper considers an optimal control problem governed by nonlinear fractional-order systems with multiple time-varying delays and subject to...     

Dynamic stability of a class of fractional-order nonlinear systems via fixed point theory

In this paper, the problem of the uniform stability for a class of fuzzy fractional-order genetic regulatory networks with random discrete delays, distributed delays, and parameter uncertainties is studied. Although there is a portion of literature on using fixed point theorems to study the stability of fractional neural networks, most of them required the fractional order to be in $\left(\frac{1}{2},1\right)$. However, the case of the fractional-order belonging to $(0,\frac{1}{2})$ has not been discussed. To solve it, this work proposes a novel idea of using fixed point theory to study the stability of fuzzy (0,1) order neural networks, the problem of the uniqueness of the solution of the considered genetic regulatory networks is resolved, and a novel sufficient condition to guarantee the uniform stability of above genetic regulatory networks is also derived. Eventually, an example is given to demonstrate that the obtained result is effective.     

On Laser-Induced High-Order Wave Mixing and Harmonic Generation in a Graphene Quantum Dot

JETP Letters - We present results of numerical investigations of high-order wave mixing/harmonic generation (HWM/HHG) with many-body interaction processes derived by a strong two-frequency circular...     

Superior diffusion kinetics and electrochemical properties of α/β–type NaMn0.89Co0.11O2 as cathode for sodium-ion batteries

Journal of Solid State Electrochemistry - Sodium-ion batteries have emerged as an exciting alternative to commercially dominant lithium-ion batteries for electric vehicles and other applications....