排序方式: 共有4条查询结果,搜索用时 15 毫秒
1
1.
Semi-quantitative study on the Staebler--Wronski effect of hydrogenated amorphous silicon films prepared with HW-ECR-CVD system 总被引:1,自引:0,他引:1 下载免费PDF全文
The method of numerical simulation is used to fit the relationship between
the photoconductivity in films and the illumination time. The generation and
process rule of kinds of different charged defect states during illumination
are revealed. It is found surprisingly that the initial photoconductivity
determines directly the total account of photoconductivity degradation of
sample. 相似文献
2.
A series of a-Si:H films are deposited by hot wire assisted microwave
electron cyclotron resonant chemical vapour deposition
(HW-MWECR-CVD), subsequently exposed under simulated illumination for
three hours. This paper studies the microstructure change during
illumination by Fourier Transformation Infrared (FTIR) spectra. There
are two typical transformation tendencies of microstructure after
illumination. It proposes a model of light induced structural change
based on the experimental results. It is found that all samples
follow the same mechanism during illumination, and intrinsic
structure of samples affect the total H content. 相似文献
3.
用热丝辅助微波电子回旋共振化学气相沉积方法制备出高晶化体积分数的氢化微晶硅(μc-Si:H)薄膜.拉曼散射和X射线衍射技术对样品的微观结构测量分析表明,当反应气体中SiH4浓度在3.6%—50%之间大范围变化时,μc-Si:H薄膜均具有高的晶化体积分数.进一步的分析表明,在SiH4浓度较大时制备的薄膜,其结构以非晶-微晶的过渡相为主.薄膜易于晶化或生长为过渡相的主要原因是微波电子回旋共振使SiH4气体高度分解,等离子体高度电离.
关键词:
微波电子回旋共振化学气相沉积
氢化微晶硅薄膜
拉曼散射
X射线衍射 相似文献
4.
1