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就如何在4英寸热氧化硅衬底上沉积高质量的磁性隧道结纳米多层薄膜材料和如何利用光刻方法微加工制备均匀性较好的磁性隧道结方面做了初步研究,并对磁性隧 道结的磁电性质及其工作特性进行了初步测量和讨论.利用现有的光刻设备和工艺条 件在4英寸热氧化硅衬底上直接制备出的磁性隧道结,其结电阻与面积的积 矢的绝对误差在10% 以内,隧穿磁电阻的绝对误差在7% 以内,样品的磁性隧道结性质具有较好的均匀性和一致性,可以满足研制磁随机存储器存储单元演示器件的基本要求.
关键词:
磁性隧道结
隧穿磁电阻
磁随机存储器
4英寸热氧化硅衬底 相似文献
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以Gd2O3、K2CO3、MoO3为原料,采用高温熔盐法,合成了一个含钾的稀土钼酸盐KGd(MoO4)2。通过X射线单晶衍射法测定了它在室温下的晶体结构,并测定了它的光学性质。结构分析表明它属于三斜晶系,空间群为P1,a=0.52923(6)nm,b=0.69210(6)nm,c=1.06889(7)nm,α=75.79(8)°,β=76.79(5)°,γ=67.60(4)°,Z=2,R1(alldata)=0.0258。结构中的K和Gd原子位于各自的晶体学位置,不存在调制结构的现象。此外,我们用得到的晶体学数据,通过密度泛函理论研究了化合物的能带结构、态密度、介电常数,其结果和实验数据相吻合。 相似文献
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Magnetic tunnel junctions (MTJs) with structures of Ta(5 nm)/Cu(30nm)/Ta(5 nm)/Ni79Fe21 (5 nm)/Ir22Mn78 (12 nm)/Co62Fe20B18 (4 nm)/MgO(d)/Al(0.8 nm)-oxide/Co62Fe20B18 (6 nm)/Cu(30 nm)/Ta(5 nm) on a thermally oxidized Si wafer substrate were fabricated by magnetron sputtering and photolithographic patterning method. The tunnel magnetoresistance (TMR) and the bias dependence of TMR at room temperature for the MTJs with different thickness d of MgO are investigated. TMR values of over 50% as high as those of the MTJs with pure Al-O barrier and the TMR-voltage curve asymmetries, which vary with the increase of d, are observed in the MTJs with hybrid barriers after annealing at 265℃ for an hour. The dependences of TMR, resistance and coercivity of the MTJs with composite barriers on temperature are also investigated. 相似文献
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利用金属掩模法优化了制备磁性隧道结的实验和工艺条件,金属掩模的狭缝宽度为100 μm. 采用4 nm厚的Co75Fe25为铁磁电极和10或08 nm厚的铝氧化物 为势垒膜, 直接制备出了室温隧穿磁电阻(TMR)为30%—48%的磁性隧道结,其结构为Ta(5 nm)/Cu(25 nm)/Ni79Fe21(5 nm)/Ir22Mn78(10 nm)/ Co75Fe25 (4 nm)/Al(08 nm)-O/Co75Fe25(4 nm)/Ni79Fe 21(20 nm)/Ta(5 nm).同时,利用刻槽打孔法和去胶掀离法两种光刻技术并结合Ar离子束刻蚀及化学反应刻 蚀,制备出面积在4 μm×8 μm—20 μm×40 μm、具有室温高TMR和低电阻的高质量磁性 隧道结.300 ℃ 退火前后其室温TMR可分别达到22% 和50%.研究结果表明,采用光刻中的刻 槽打孔或去胶掀离工艺方法制备的小尺寸磁性隧道结,可用于研制磁动态随机存储器和磁读 出头及其他传感器件的磁敏单元.
关键词:
磁性隧道结
隧穿磁电阻
金属掩模法
光刻法 相似文献
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High microwave absorption performances for single-walled carbon nanotube–epoxy composites with ultra-low loadings 总被引:1,自引:0,他引:1 下载免费PDF全文
Microwave-absorbing polymeric composites based on single-walled carbon nanotubes(SWNTs) are fabricated via a simple yet versatile method, and these SWNT–epoxy composites exhibit very impressive microwave absorption performances in a range of 2 GHz–18 GHz. For instance, a maximum absorbing value as high as 28 dB can be achieved for each of these SWNT–epoxy composites(1.3-mm thickness) with only 1 wt% loading of SWNTs, and about 4.8 GHz bandwidth,corresponding to a microwave absorption performance higher than 10 dB, is obtained. Furthermore, such low and appropriate loadings of SWNTs also enhance the mechanical strength of the composite. It is suggested that these remarkable results are mainly attributable to the excellent intrinsic properties of SWNTs and their homogeneous dispersion state in the polymer matrix. 相似文献
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