激光尘埃粒子计数器微型光学传感器的研究

研制成功便携式激光尘埃粒子计数器的核心部件———微型光学传感器。该传感器采用直角散射光收集形式,以高功率半导体激光器作为光源,同时采用高性能的PIN型光电二极管作为光电探测器。散射光收集系统为单一大数值孔径的球面反射镜,其对粒子散射光的收集角范围从20°到160°。粒子散射光信号是脉冲信号,其频谱成份主要在高频段,所以在PIN型光电二极管后用一个带通式前置放大器来消除外界的低频噪声,根据米氏散射理论计算了该光学传感器的光散射响应特性,并用聚苯乙烯标准粒子实测了该光学传感器的性能。结果表明,该系统具有高的信噪比、计数效率和尺寸分辨本领。     

Non-piece-wise error compensation for grating displacement measurement system with absolute zero mark

A method for compensating the measuring error of the grating displacement measurement system with absolute zero mark is presented. It divides the full scale range into piece-wise subsections and compares the maximum variation of the measuring errors of two adjacent subsections with the threshold. Whether the specified subsection is divided into smaller subsections is determined by the comparison result. After different compensation parameters and weighted average values of the random errors are obtained, the error compensation algorithm is implemented in the left and right subsections, and the whole measuring error of the grating displacement measurement system is reduced by about 73%. Experimental results show that the method may not only effectively compensate the spike error but also greatly improve the precision of the measuring system.     

基于上转换发光技术的生物传感器及其应用

为实现对特定生物分子的高灵敏度快速检测与分析。采用上转换发光材料作为标记物,研制成功一台基于上转换发光技术的新型光学免疫生物传感器。该传感器利用上转换发光材料在红外光激发下发射可见磷光的特性,通过对免疫层析试纸条上经生物反应而结合上去的上转换发光材料颗粒的含量进行检测,计算出被测样品中特定生物分子的浓度。实验结果表明,该传感器具有较好的生物特异性,对兔抗鼠疫免疫球蛋白(IgG)标准样品的检测灵敏度达到ng／ml量级,并在200～6000ng／ml浓度范围内具有良好的线性响应特性,相关系数R^2≥0．95;对鼠疫耶尔森氏菌抗体的敏感性明显高于间接血凝实验,且与免疫印迹检测实验结果具有较好的一致性。该传感器具有稳定、可靠、灵敏的工作性能,符合实际检测与分析的要求。     

Scanning Hartmann test method and its application to lens aberration measurement

A scanning Hartmann test method is proposed and its measurement principle is described. The scanning Hartmann test setup is formed by modifying the Hartmann screen of the conventional Hartmann test setup. With the rotation of the scanning Hartmann screen and the improved hole arrangement, the whole information of the lens to be tested in the full aperture can be obtained. The measurement accuracy of the aberration is improved and the local error of the lens can be got. In the method, no change of the Hartmann screen is needed for measuring the lenses of different aperture sizes. Experimental results of aberration measurements of two lenses are given to verify the usefulness of the setup.     

无规位相板靶面均匀辐照光学系统研究

 为了探讨用无规位相板实现靶面均匀辐照光学系统的特点,首次进行了靶面在离焦情况下辐照均匀性的实验研究。实验结果表明:靶面在聚焦透镜焦面前后较大范围内均可得到均匀辐照,靶面上光强起伏的平均峰间距小于8μm。     

靶镜光学质量检测技术的研究

提出了一种利用扫描型哈特曼检测装置检验靶镜光学质量的技术.该装置对传统哈特曼检验装置的光阑进行了改进,通过扫描型哈特曼光阑的旋转扫描,可对被检靶镜全口径范围内连续采样.利用该扫描型哈特曼检测装置对一块口径为270 mm的非球面靶镜的能量集中度和波像差进行了检验,其结果与激光数字波面干涉仪的测量结果相吻合,其中能量集中度的相对测量误差为7.7%,波像差的相对测量误差为10.2%,验证了该检测技术的有效性.     

光学元件损伤在线检测装置及实验研究

 利用暗场成像原理，研制成功一套应用于大型激光装置的光学元件损伤在线检测装置，并在多程放大系统上进行了实验研究。与传统的检测手段相比，该检测装置可以实现对光学系统的在线检测，并可对损伤点的图像进行分析处理，最后提出通过减小像差和扩大检测范围的方法来改进该装置的检测效果。     

分束量可调的等光程平行分束技术

基于厚波片平行分束特性,提出了一种分束量可调的等光程平行分束技术,给出透射式和反射式两种平行分束光路.透射式平行分束光路由厚波片和1/2波片组成,反射式平行分束光路由分束镜、厚波片、1/4波片和反射镜组成.通过旋转厚波片可实现分束量的调节.实验结果和理论值相吻合,验证了该技术的有效性.     

Polarization Fizeau interferometer based on birefringent thin film

A polarization Fizeau interferometer based on birefringent thin film is presented. The interferometer adopts a birefringent thin film to obtain orthogonally polarized and strictly common-path reference and test beams. Advantages include ease of implementation on large-aperture interferometer, measuring test optics from long distance, and achieving high fringe visibility. The phase shift is obtained by combining a quarterwave plate and an analyzer. The concepts illustrated are verified experimentally.     

铜激光倍频光亚微米投影光刻系统的设计和实验研究

为了研究波长在２５５．３ｎｍ的铜蒸气激光倍频在亚微米光刻中的可行性，设计了带宽为１ｎｍ的１：１折反射式投影光刻物镜和一个带散射板的光管式均匀照相系统，获得了０．６μｍ的光刻分辨率。此结果表明，铜激光倍频光可作为亚微米光刻的照明光源。