Polarization Fizeau interferometer based on birefringent thin film

A polarization Fizeau interferometer based on birefringent thin film is presented. The interferometer adopts a birefringent thin film to obtain orthogonally polarized and strictly common-path reference and test beams. Advantages include ease of implementation on large-aperture interferometer, measuring test optics from long distance, and achieving high fringe visibility. The phase shift is obtained by combining a quarterwave plate and an analyzer. The concepts illustrated are verified experimentally.     

铜激光倍频光亚微米投影光刻系统的设计和实验研究

为了研究波长在２５５．３ｎｍ的铜蒸气激光倍频在亚微米光刻中的可行性，设计了带宽为１ｎｍ的１：１折反射式投影光刻物镜和一个带散射板的光管式均匀照相系统，获得了０．６μｍ的光刻分辨率。此结果表明，铜激光倍频光可作为亚微米光刻的照明光源。     

多组元全动型变焦距物镜高斯光学

设定多个变倍组元和多个补偿组元并应用最优化计算方法,给出了最新型变焦距物镜多组元全动型高斯光学参数的计算方法,它概括了几种所有机械补偿法的变焦方式。     

分束量可调的等光程平行分束技术

基于厚波片平行分束特性,提出了一种分束量可调的等光程平行分束技术,给出透射式和反射式两种平行分束光路.透射式平行分束光路由厚波片和1/2波片组成,反射式平行分束光路由分束镜、厚波片、1/4波片和反射镜组成.通过旋转厚波片可实现分束量的调节.实验结果和理论值相吻合,验证了该技术的有效性.