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以分布有微孔的印刷线路板(PCB)作为模板,按照PCB孔金属化工艺路线,研究乙醛酸化学镀铜和柠檬酸盐体系铜电沉积工艺在PCB微孔金属化中的应用.结果表明,乙醛酸化学镀铜和柠檬酸盐体系电沉积铜可以成功地应用于PCB微孔金属化加工工艺中.微孔化学镀铜金属化导电处理后,铜附着于微孔内壁,颗粒细小,但排列疏松且局部区域发生漏镀现象.微孔一经电镀铜加厚,镀层电阻显著下降;孔壁内外的铜沉积速率达到0.8:1.0;铜颗粒具有一定的侧向生长能力,能够完全覆盖化学镀铜时产生的微小漏镀区域;微孔内壁铜镀层连续、结构致密并紧密附着于内壁,大大增强了PCB上下层互连的导电性能. 相似文献
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随着半导体集成度的不断提高,铜互连线的电阻率迅速提高。当互连线宽度接近7 nm时,铜互连线的电阻率与钴接近。IBM和美国半导体公司(ASE)已经使用金属钴取代铜作为下一代互连线材料。然而,钴种子层的形成和超级电镀钴填充7 nm微孔的技术工艺仍是一个很大的挑战。化学镀是在绝缘体表面形成金属种子层的一种非常简单的方法, 通过超级化学镀填充方式, 直径为几纳米的盲孔可以无空洞和无缝隙的方式完全填充。本文综述了化学镀钴的研究进展,并分析了还原剂种类对化学镀钴沉积速率和镀膜质量的影响。同时, 在长期从事超级化学填充研究的基础上, 作者提出了通过超级化学镀钴技术填充7 nm以及一下微盲孔的钴互连线工艺。 相似文献
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电镀铜技术是制造印制电路板、封装载板等电子互连器件的核心技术。本文介绍了印制电路中电镀铜技术及其发展概况,主要总结了电子科技大学印制电路与印制电子团队在印制电路电镀铜技术基础研究和产业化应用等方面的工作。首先,以三次电流分布理论为基础,采用多物理场耦合方法构建阴极表面轮廓线随时间变化的镀层生长过程模型。该模型描述了铜沉积与微纳孔结构、添加剂特性、输入电流、对流强度等相关影响因素的函数关系。通过引入添加剂相关函数,该模型能够较好应用到整平剂筛选和性能评价、电镀铜需求和镀液配方匹配、电镀参数优化等技术开发和应用领域。然后,介绍了添加剂竞争吸附过程的电化学研究以及利用传质调控添加剂局域浓度实现快速微盲孔、微沟槽填充的工业技术。之后,介绍了氮杂环低聚物系列整平剂结构-电化学构效关系研究和应用。最后展示了氧化还原型添加剂的开发情况,并对印制电路中电镀铜技术的研究和应用发展进行了预测。 相似文献
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玻璃微流控芯片廉价快速制作方法的研究 总被引:3,自引:0,他引:3
研究了一种玻璃微流控芯片的快速、低成本制作工艺和方法. 该方法采用商品化的显微载玻片(soda-lime玻璃)作为芯片基质材料, 利用AZ 4620光刻胶代替传统工艺中的溅射金属层或多晶硅/氮化硅层作为玻璃刻蚀的掩膜层, 同时利用一种紫外光学胶键合方法代替传统熔融键合方法实现芯片的键合, 整个工艺对玻璃基质材料要求低, 普通微流控芯片(深度小于50 μm)制作流程仅需约3.5 h, 可降低制作成本, 缩短制作周期. 还系统地研究了光刻胶厚度、光刻胶硬烘时间和玻璃腐蚀液配比对玻璃微流控芯片制作的影响, 获得了优化的工艺参数. 相似文献
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采用原子层沉积技术, 在3~5 kPa真空和125~150 ℃ 的反应条件下, 使γ-巯丙基三甲氧基硅烷(MPTMS)、γ-巯丙基三乙氧基硅烷(MPTES)和γ-巯丙基二甲氧基甲基硅烷(MPDMMS)3种巯丙基硅烷试剂气化, 并在三乙胺的催化作用下, 分别将其键合于多孔硅胶表面, 制得贵金属钯(Ⅱ)的高效吸附剂. 分别采用FTIR、13C和29Si固体核磁、元素分析、热重分析和氮气吸附-脱附等技术研究了巯基硅胶的键合模式和功能基团键合量. 用分光光度法研究了在pH=3.0条件下水溶液中Pd(Ⅱ)离子在巯基硅胶上的吸附行为. 结果表明, 在MPTMS, MPTES和MPDMMS所修饰的硅胶中, 硅烷试剂的功能基团均以双齿键合结构为主, 表面键合量分别达到2.76, 2.53和2.70 μmol/m2. 对Pd(Ⅱ)离子的吸附遵从Langmuir等温吸附方程, 饱和吸附量分别达到5.45, 4.21和4.81 μmol/m2, Pd/S的摩尔比分别为1.44, 1.35和1.39. 原子层沉积法制备的巯丙基硅胶基质钯吸附剂的巯基键合密度和对钯(Ⅱ)离子的吸附容量均比传统的有机溶剂介质法高. 相似文献
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柠檬果茶中游离态和键合态挥发性成分分析 总被引:1,自引:0,他引:1
以柠檬果茶为研究对象,建立了顶空固相微萃取前处理结合气相色谱质谱联用技术测定其中挥发性化合物的分析方法。采用开水冲泡对样品进行提取,通过Amberlite XAD-2大孔吸附树脂对柠檬果茶中的糖苷类挥发性组分键合,分离游离态和键合态化合物,甲醇溶剂作为洗脱剂对键合态化合物进行洗脱,Almondsβ-D-葡萄糖苷酶对其酶解。使用气质联用对样品中游离态和键合态挥发性成分进行检测,其结果根据数据库匹配和对比文献保留时间定性,内标法进行定量。结果表明,柠檬果茶中含有游离态物质24种,键合态物质16种,主要为(+)-柠檬烯、1-辛醇、橙花醇、(-)-4-萜品醇、alpha-松油醇等。方法为花果茶干燥工艺提供参考。 相似文献
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《中国科学:化学》2020,(6)
原子层沉积是一种新兴的气相薄膜沉积方法,已广泛应用于微电子、能源、光学以及催化等领域.研究和理解原子层沉积过程中的物理化学机理对于沉积高质量薄膜及其应用至关重要.光电子能谱作为一种表面分析技术,可用于原位检测原子层沉积反应过程中的表面化学变化,为原子层沉积机理研究及新型原子层沉积方法的研发提供重要的基础.本文首先介绍了原位光电子能谱的工作原理及设备构造,之后分类阐述了应用原位光电子能谱在薄膜生长过程的表面化学反应机理、初始生长过程的基底效应、薄膜生长行为模式研究、前驱体表面热解过程及影响以及界面能带结构等原子层沉积机理方面的研究进展,最后展望了光电子能谱在未来原子层沉积机理研究中的发展方向. 相似文献
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Ion redistribution in an electric double layer 总被引:1,自引:0,他引:1
The structure of a single flat electric double layer (EDL) is studied by grounding a symmetric electrolyte (NaCl), which is in contact with a planar positively corona-treated polypropylene film. Because the profiles of the electrostatic potential distribution and ion distribution in the solution are altered when the solution is grounded, some mobile counterions in the diffuse layer of the electrolyte solution will go into the Helmholtz layer and thus decrease the electric potential psi(a/2) at the Stern plane in order to obtain a new equilibrium. After the system is grounded for a long time, the representation of the electric double layer changes from a Stern model to a Helmholtz model. Theoretical and experimental analyses are given in this study. 相似文献
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Summary: Single polyelectrolyte component microcapsules and multilayers, exemplified by poly(allylamine hydrochloride) (PAH), have been prepared using a method of glutaraldehyde (GA)‐mediated covalent layer‐by‐layer (LbL) assembly. The GA cross‐linking of the adsorbed PAH results in surfaces covered by reactive aldehyde groups, which can then react with PAH to result in another layer of covalently linked PAH. The repeated assembly of single polyelectrolyte in an LbL manner can be thus achieved. The PAH multilayers can grow linearly along with the layer number, and their thickness can be controlled at the nanometer scale, as verified by UV‐vis absorption spectrometry and ellipsometry. Single polyelectrolyte microcapsules are obtained after removal of the template cores at low pH. The morphology and integrity are confirmed by scanning force microscopy and confocal laser scanning microscopy.
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超薄层在白色有机电致发光器件中的应用 总被引:1,自引:0,他引:1
以DCJTB为掺杂剂, 以BCP为空穴阻挡层, 研究了两种结构的有机电致发光器件ITO/NPB/BCP/Alq3:DCJTB/Alq3/Al(结构A)和ITO/NPB/BCP/Alq3/Alq3:DCJTB/Alq3/Al(结构B)的电致发光光谱. 实验结果显示, 在结构A器件的电致发光光谱中, 绿光的相对发光强度较弱,增加Alq3层的厚度对绿光的相对发光强度的影响也很小; 而在结构B器件的电致发光光谱中, BCP层与掺杂层(Alq3:DCJTB)之间的Alq3薄层对绿光的相对发光强度影响显著, 用很薄的Alq3层就可以得到强的绿光发射. 进一步改变器件结构, 利用有机超薄层就可以得到稳定的白光器件ITO/NPB(50 nm)/BCP(3 nm)/Alq3(3 nm)/Alq3:DCJTB(1%(w))(5 nm)/Alq3(7 nm)/Al. 随着电压的增加(14-18 V), 该器件的色坐标基本保持在(0.33, 0.37)处不动; 在432 mA·cm-2的电流密度下, 该器件的发光亮度可达11521 cd·m-2. 相似文献
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The effect of the number and arrangement of TiO2‐based photoanode layers on the efficiency of dye‐sensitized solar cells (DSSCs) was investigated. Compact, mesoporous, and blocking layers of TiO2 were prepared to form monolayer, bilayer, and trilayer photoanodes. Compact and blocking TiO2 layers were prepared using dip‐coating technique, whereas the doctor‐blade method was employed to prepare TiO2 paste layers using nanoparticles prepared by the sol–gel method. The crystalline structure of photoanodes was characterized by X‐ray diffraction (XRD) measurements and their morphology and thickness were characterized by the scanning electron microscopy (SEM) technique. The photovoltaic performance of constructed DSSC devices was investigated and the optimum arrangement was identified and explained in terms of dye loading enhancement and recombination reduction at the fluorine‐doped tin oxide (FTO)/electrolyte interface. 相似文献
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Bhaskarchand Gautam Hailemichael Ayalew Udesh Dhawan Jayakrishnan Aerathupalathu Janardhanan Hsiao-hua Yu 《中国化学会会志》2020,67(9):1602-1610
Poly(3,4-ethylenedioxythiophene (PEDOT) derivatives display a multitude of attractive properties such as high conductivity, biocompatibility, ease of functionalization, and high thermal stability. As a result, they show promise for applications in materials and biomedical engineering. In order to increase their applications in the practical domain, trivial fabrication techniques are required. Here, we present a simple layer-by-layer dip methodology to assemble water-soluble PEDOT derivatives that can then be disassembled via electrical stimulation. As a result, a dynamic PEDOT layered system is fabricated and could be applied as responsive materials for bioengineering. PEDOT-SO3 and PEDOT-NMe3 are synthesized via direct C-H arylation polymerization and chemical polymerization, respectively. The electrostatic interactions between oppositely charged SO3− and NMe3+ enabled the stacking of PEDOT derivatives. The layer-by-layer assemblies are confirmed by ultraviolet–visible spectroscopy and profilometer. Morphological analyses are performed using scanning electron microscopy and atomic force microscopy, which revealed that the polymer coatings are uniform without any cracks. In situ material assembly is studied using quartz crystal microbalance, and we also demonstrate that these PEDOT-derivative assemblies can be disintegrated by electrical stimulation. Cyclic voltammetry shows a proportional increase in stored charge density with the increase in bilayer thickness, confirming stable electroactivity of these assemblies. Using this approach, we can assemble conductive bio interface on both conductive and nonconductive surfaces, expanding the capability to fabricate bioelectronic electrodes. 相似文献
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Wang Wan Monte S. Bedford Catherine A. Conrad Xiaoyan Yang Rhett C. Smith 《Journal of polymer science. Part A, Polymer chemistry》2019,57(11):1173-1179
A series of 10 polythiophene derivatives is reported, in which each polymer has a different percentage of carboxylic acid‐bearing repeat units. The properties of these polymers are explored under acidic conditions, where the carboxylic acid moieties remain neutral, and under basic conditions, where the carboxylic acid units become anionic carboxylates. The properties that are examined for both solutions and films include UV–vis absorption spectroscopy, photoluminescence spectroscopy, and red‐edge optical band gaps. All the properties studied are strongly dependent both on protonation state and percentage of carboxylic acid/carboxylate side chains along the polymer backbone. The anionic form of each polythiophene derivative was also used in layer‐by‐layer film deposition with a cationic phosphonium polyelectrolyte. The film growth process was studied by spectroscopic techniques to assess the influence of side‐chain composition on the film growth and optical properties. © 2019 Wiley Periodicals, Inc. J. Polym. Sci., Part A: Polym. Chem. 2019 相似文献
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蔗糖酯的薄层分析 总被引:12,自引:0,他引:12
以硅胶G板为固定相、甲苯 乙酸乙酯 甲醇 水 (体积比为 1 0∶5∶4 5∶0 2 )为流动相 ,研究建立了蔗糖酯薄层分析方法。在蔗糖酯上行展开后 ,用脲 磷酸 水饱和正丁醇溶液显色 ,斑点呈蓝色 ,蔗糖单酯的Rf 值为 0 1 6 ,多酯的Rf 值为 0 38~ 0 93。在 70℃显色 2 0min的最佳条件下 ,蔗糖单酯的检测量为 2 5 μg~ 2 50 μg时 ,其斑点面积与其检测量有良好的线性关系。用归一法和外标法对该分析方法的准确度进行考察和认证 ,两种方法对已知单酯含量的S 1 570样品测定结果的t 检验结果分别为 |t| =0 62 7(<2 571 )和 |t|=1 1 2 3(<2 571 ) 。 相似文献