圆筒电极对离子磁电加热的影响

高效的磁电加热不仅能够提高电子回旋共振(ECR)等离子体的离子温度,还能改善离子的径向和轴向分布,促进ECR等离子体在化学气相沉积金刚石膜刻蚀中的应用.将磁电加热系统中的圆环电极改进为圆筒电极,研究了圆筒电极对离子磁电加热的影响,对比了圆筒和圆环电极加热离子的区别.结果表明:在同一阳极偏压下,圆筒比圆环电极更有利于提高离子温度,圆筒电极加热时各径向位置的离子温度升高的幅度较大,其中圆筒电极内部的离子温度径向分布差异较大,而圆筒下游的离子温度径向分布比较均匀;磁电加热对离子密度的影响很小;采用圆筒电极加热时,有利于离子向轴向下游的输运,改善了离子的轴向均匀性.     

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在非对称磁镜场微波ECR等离子体中引入了磁电加热系统,研究了电极环大小、轴向位置以及双环加热对离子温度的影响.结果表明,大小合适的电极环能有效提高离子的加热温度,且最优电极环尺寸主要取决于离子回旋半径.电极环轴向位置的选择主要与磁镜场位形有关,将电极环置于磁镜场中部的弱磁场位置时最有利于离子温度的提高.采用双电极环加热能进一步提高离子温度,并且其加热效果是单环加热的两倍.     

ICP等离子体鞘层附近区域发光光谱特性分析

为了独立控制鞘层附近区域离子密度和离子能最分布,采用光发射谱(OES)测量技术,对不同射频功率、放电气压和基底偏压下感应耦合等离子体鞘层附近区域辉光特性进行了研究.原子谱线和离子谱线特性分析表明,在鞘层附近区域感应耦合等离子体具有较高的离子密度和较低的电子温度.改变放电气压和射频功率,对得到的光谱特性分析表明,鞘层附近区域离子密度随射频功率的增大而线性增大,在低压下随气压的升高而增大.低激发电位原子谱线强度增加迅速,高激发电位原子谱线强度增加缓慢,而离子谱线强度增加很不明显.改变基底直流偏压,对得到的发射光谱强度变化分析表明,谱线强度随基底正偏压的增加而增大.随着基底负偏压的加入,谱线强度先减小而后增大;直流偏压为-30 V时,光谱强度最弱.快速离子和电子是引起Ar激发和电离过程的主要能量来源.     

带有射频偏压源的感性耦合Ar/O2/Cl2等离子体放电的混合模拟研究

在刻蚀工艺中,通常会在感性耦合等离子体源的下极板上施加偏压源,以实现对离子能量和离子通量的独立调控.本文采用整体模型双向耦合一维流体鞘层模型,在Ar/O₂/Cl₂放电中,研究了偏压幅值和频率对等离子体特性及离子能量角度分布的影响.研究结果表明:当偏压频率为2.26 MHz时,随着偏压的增加,除了Cl^-离子和ClO⁺离子的密度先增加后降低最后再增加外,其余带电粒子、O原子和Cl原子的密度都是先增加后基本保持不变最后再增加.当偏压频率为13.56和27.12 MHz时,除了Cl^-离子和Cl₂⁺离子外,其余粒子密度随偏压的演化趋势与低频结果相似.随着偏压频率的提高,在低偏压范围内(<200 V),由于偏压源对等离子体加热显著增加,导致了带电粒子、O原子和Cl原子的密度增加;而在高偏压范围内(>300 V),由于偏压源对等离子体加热先减弱后增强,导致除了Cl₂⁺离子和Cl^-     

锐钛矿金红石的高温原位X射线衍射研究

对TiO₂粉末进行了空气和真空条件下从室温到1200℃的加热原位X射线衍射实验, 得到了空气和真空条件下微米级锐钛矿颗粒转变为金红石的起始温度分别为850℃ 和855℃; 分别修正了空气条件下锐钛矿在(27–850℃)范围和金红石在(900–1200℃) 范围内的晶胞参数和真空条件下锐钛矿在(27–850℃)范围和金红石在(950–1200℃) 范围的晶胞参数, 从而得到了晶胞参数随温度变化的关系, 得到了锐钛矿和金红石在空气中和真空中的热膨胀系数, 并总结了热膨胀系数随温度变化的规律. 室温下锐钛矿在空气条件下的热膨胀系数为 α_a=4.55063×10^-6/℃, α_c=7.7543×10^-6/℃, β=16.85836×10^-6/℃; 真空下为 α_a=4.69429×10^-6/℃, α_c=9.02850×10^-6/℃, β=18.69688×10^-6/℃. 室温下, 金红石在空气条件下的热膨胀系数为 α_a=6.81243×10^-6/℃, α_c=8.71644×10^-6/℃, β=22.22178×10^-6/℃; 真空条件下为 α_a=6.05834×10^-6/℃, α_c= 8.39280×10^-6/℃, β=20.52362×10^-6/℃. 关键词： 2')" href="#">TiO₂ 原位X射线衍射 相转变 热膨胀     

介质阻挡放电等离子体中OH自由基的光腔衰荡光谱原位诊断

研制了一套等效噪声吸收可达3×10^-9cm^-1的连续波光腔衰荡光谱装置。用该装置对介质阻挡放电等离子体中的OH自由基和水进行了原位定量测量,考察了OH自由基数密度随气压和放电电压以及放电频率的变化情况。实验结果表明,在(2.13~22.0)Χ10³Pa范围内,随着气压增加,OH自由基数密度在气压较低时增加;而在较高气压时由于H₂O的解离吸附作用使得体系中电子密度减小,OH自由基数密度随之减小。随放电电压和放电频率增加介质阻挡放电等离子体中电子密度和电子能量增加而导致OH数密度增加。     

CHF3双频电容耦合放电等离子体特性研究

研究了用于SiCOH 低介电常数薄膜刻蚀的CHF₃气体在1356 MHz/2 MHz,2712 MHz/2 MHz和60 MHz/2 MHz双频电容耦合放电时的等离子体性质.发现2 MHz低频源功率的增大主要导致F基团密度的增大;而高频频率从1356,2712增大到60 MHz,导致CF₂基团的密度增大和电极之间F基团密度的轴向空间不均匀性增加.根据电子温度的分布规律及离子能量随高频源频率的变化关系,提出CF₂基团的产生主要通过电子-中性气体碰撞,而F基团的产生是离子-中性气体碰撞的结果. 关键词： 双频电容耦合放电 3等离子体')" href="#">CHF₃等离子体     

受控核聚变——现代物理学的一个重要前沿领域(之五)

 五、如何达到点火温度核聚变研究的重要目标之一是设法把等离子体的温度提高到10keV以上.这是实现聚变点火必不可少的基本条件之一.主要的加热手段包括欧姆加热,高能中性粒子束注入加热,大功率射频波加热,绝热压缩加热和α粒子加热等.1.欧姆加热的原理及其局限性众所周知,等离子体是良导体,但具有一定的电阻,一旦有电流通过,因电阻效应而得到了加热.按照欧姆定律,其加热功率密度表示为:P=ηj²,式中η是等离子体电阻率,可表示为η=2.8×10^-8/T（?）（欧姆米）,其中电子温度T_?以keV为单位.这个简单表达式是假定采用氢等离子体、其密度为10²⁰m^-3情况下代入著名的斯必泽公式得到的.从上式中可知,随着等离子体电子温度的不断升高,其电阻率急剧下降,由此引起欧姆加热的功率密度急剧下降.这说明欧姆加热这种方式有局限性.我们知道,所有托卡马克的等离子体最初都由环向的等离子体电流提供欧姆加热.但经过计算表明,仅依靠欧姆加热,其电子温度至多加热到1.5keV左右.为使等离子体达到10keV以上的聚变点火温度,必须在欧姆加热的基础上采用等离子体辅助加热.目前获得成功并受到广泛重视的辅助加热手段有高能中性粒子束注入法和射频波共振吸收法.     

氧等离子体刻蚀CVD金刚石膜的影响机理

采用电子回旋共振(ECR)等离子体在不同的磁场位形和工作气压下刻蚀化学气相沉积(CVD)金刚石膜,运用双探针和离子灵敏探针法对等离子体进行了诊断,研究了等离子体参数对刻蚀效果的影响。结果表明:磁场由发散场向收敛场转变时,离子温度、电子温度和等离子体密度都随之增大,刻蚀效果逐渐增强;当工作气压由低气压向高气压变化时,等离子体参数先增大后减小,CVD金刚石膜表面粗糙度降低程度也出现了相同的趋势。     

微波电子回旋共振等离子体阴极电子束的实验研究

介绍了实验室研制的微波电子回旋共振(ECR)等离子体阴极电子束系统及初步研究结果，该系统包括微波ECR 等离子体源、电子束引出极、聚焦线圈等。通过测量水冷靶电流和靶上的束斑尺寸，实验研究了微波ECR 等离子体阴极电子束的流强、聚束性能等随电子束系统工作条件的变化。结果表明：微波输入功率越高、引出电压越高，引出电子束流强越大；工作气压对电子束流强的影响较复杂，随气压增加呈现出先降低后升高的特点；在7×10⁻⁴Pa 的极低气压下电子束流强可达75mA，引出电压9kV；能量利用率可达0.6；调整聚焦线圈的驱动电流，电子束的束斑直径从20mm 减小到13mm，电子束流强未有明显变化。     

Hot Ion Production in a Modified Penning Discharge

Ions with Maxwellian energy distributions and kinetic temperatures up to seven keV have been observed in a modified Penning discharge. Investigation of the plasma revealed two distinct spoke-like concentrations of charge, consisting respectively of ions and electrons, rotating with different velocities in the sheath between the plasma and the anode ring. Theoretical expressions are derived for the frequency of the ion and electron spoke rotation, for the ion kinetic temperature resulting from the ion spoke velocity, and for the ion heating efficiency. An extensive series of experimental measurements were made to check these theoretical expressions, and approximate agreement was obtained. It is shown that the ion kinetic temperature in the modified Penning discharge scales according to the relation Vi ~ Vani1/4/B1/2 where Va is the applied anode voltage, ni is the ion density in the sheath, and B is the magnetic field strength. The observed data demonstrate that the ion heating efficiency can be as high as several tens of percent.     

Nonresonant and stochastic heating of ions by low-frequency wave

The present paper addresses the nonresonant and stochastic heating of minor ions by a low-frequency Alfvén wave in the solar wind. A new and whole physical mechanism that enables the heating of ions by a low-frequency parallel propagating wave with finite amplitude in a low beta plasma. The heating process has two stages: First, ions are picked up via low-frequency wave–ion nonresonant interaction and the ion energy gain depends on the ratio of the wave electric-field energy to background magnetic-field energy. Second, when the velocity approaches the threshold value, the stochastic heating is prominent. The stochastic heating of ions sustains until the average parallel speed is close to the wave velocity.     

热离子、超热离子和离子加热

通过区分热离子和超热离子,讨论了ＨＬ－１Ｍ等离子体中性粒子束加热的」初步实验结果,分析表明,虽然电子对离子的磁撞加热机制仍然占主导地位,但中性粒子束也加热了离子。     

Theory of turbulent heating of current DT plasma

The theory of turbulent heating in the mode of hot deuterium ions and cold tritium ions is developed for plasma with equal deuterium and tritium ion concentrations. The possibility of heating electrons and deuterium ions by thousands of times is shown.     

磁暴主相期间环电流分布特性模拟研究

磁暴主相期间对流电场驱动等离子体片中的能量粒子经历E×B漂移，被地磁场俘获形成环电流，在此理论基础上充分考虑电荷交换造成的环电流损失与离子沉降的影响，改善并验证了磁暴主相期间环电流离子分布模式.模拟了不同强度磁暴主相期间磁层环电流离子的分布特征，研究了部分环电流离子对对流电场的响应.结果表明：不对称的环电流是磁暴主相期间环电流的重要组成部分，其分布特性表现为晨昏不对称和日夜不对称以及离子投掷角分布的各向异性等.对流电场与能量离子通量强度和分布范围之间正相关.模拟结果与观测有很好的一致性，证明了模型的可行性 关键词： 部分(不对称)环电流 磁暴主相 离子通量分布 对流电场     

Experiments on plasma heating in the lower hybrid frequency range

Experimental results of lower hybrid heating in a small tokamak are described. When rf power is applied, a high energy tail of ions is produced, whether or not there is a lower hybrid resonance layer (LHR layer) in the plasma column, though bulk ion heating is not observed. The electron temperature in the plasma surface increases, while the electrons in the center lose their energy, which is related to an impurity ion flux diffusing from the outside of the plasma.     

Effect of the ion distribution over longitudinal velocities on the efficiency and separating parameters of the ICR method of isotope separation

In the context of the ICR method of isotope separation, resonance RF heating of the ions in an electric field propagating along a constant magnetic field while simultaneously rotating in the direction perpendicular to it is calculated in a linear approximation. The analysis is carried out for two types of the initial ion distribution function over longitudinal velocities: a function proportional to the first power of the velocity in the range of low velocities and a shifted semi-Maxwellian distribution function. The distribution function of the ions over transverse velocities is calculated under the assumption that their initial distribution over transverse velocities is Maxwellian. The ion fluxes onto the collector plates are estimated by integrating the corresponding ion distribution functions over the allowed range of the longitudinal and transverse velocities and the transverse coordinates of the guiding centers of the ion trajectories in front of the extractor. In the first part of the paper, calculations are carried out for a model binary mixture of isotopes with mass numbers of 6 and 7. The effect of the shape of the ion distribution function over longitudinal velocities on the heating efficiency and on the concentration of the target isotope ions at the collector, as well as the effect of the longitudinal ion temperature on the width of resonance curves for the ion heating efficiency, is investigated. In the second part, a study is made of the selectivity of heating of isotope ions in a gadolinium plasma, in particular, the effect of the longitudinal magnetic field on the selectivity of heating of neighboring isotopes with atomic masses of 156, 157, and 158 is examined.     

Ion pickup by intrinsic low-frequency Alfven waves with a spectrum

<正>Ion pickup by a monochromatic low-frequency Alfven wave,which propagates along the background magnetic field,has recently been investigated in a low beta plasma(Lu and Li 2007 Phys.Plasmas 14 042303).In this paper, the monochromatic Alfven wave is generalized to a spectrum of Alfven waves with random phase.It finds that the process of ion pickup can be divided into two stages.First,ions are picked up in the transverse direction,and then phase difference(randomization) between ions due to their different parallel thermal motions leads to heating of the ions.The heating is dominant in the direction perpendicular to the background magnetic field.The temperatures of the ions at the asymptotic stage do not depend on individual waves in the spectrum,but are determined by the total amplitude of the waves.The effect of the initial ion bulk flow in the parallel direction on the heating is also considered in this paper.