近红外激光薄膜滤光片的研制

以双抛Si片为基底,采用离子束辅助热蒸发沉积技术研制了1.2～3μm波段激光薄膜滤光片.采用长波通滤光片与减反射膜相结合的薄膜样品设计方法,高、低折射率材料分别选用ZnS和MgF2,综合考虑光谱特性和电场强度分布,使用TFCale膜系软件设计出1.064μm高反、1.2～3μm波段增透的长波通滤光片.长波通膜系膜系结构为G|4H2L1.5H2L2H1.5L2H4L|A,减反射膜膜系结构为G|3.5H3.5L|A.最终实现1.2～3μm波段峰值透过率达98.48%,平均透过率为92.35%,1.064μm处透过率为5.09%的光谱特性.对薄膜样品分别采用离子束处理和退火处理,发现适当的工艺参数,有助于提高薄膜激光损伤阈值,当退火温度为250℃时,其激光损伤阈值可达6.3J/cm~2.本文研究可为近红外薄膜滤光片设计和制备提供参考.     

中波红外3 μm～5 μm宽带通滤光片的研制

 中波红外宽带通滤光膜通常膜系层数多,膜层总厚度非常大（厚度达到10 μm左右）,膜层的镀制工艺难度较大。通过分析红外带通滤光片几种设计方法的特点,并结合实际镀制工艺技术,采用了长波通与短波通及非规整薄膜设计技术相结合的方法,设计了以锗材料为基底的中波3 μm～５ μm宽带通滤光膜。该设计大幅度降低了膜层的总厚度（约为8.65 μm）,缩短了膜层的镀制周期,提高了膜层的牢固度;在膜层的镀制工艺过程中,通过改变薄膜材料的蒸发速率、修正蒸发硫化锌材料时电子枪的扫描方式、调整蒸发材料在坩埚中的装载方法,使膜层获得了优异的光谱性能,其通带平均透过率大于96%,截止区域的平均透过率小于1%。     

探测用宽截止红外双通道帯通滤光片的设计及误差分析

为满足探测1,2丙二醇二硝酸脂有毒气体浓度的红外探测元件抑制带截止深度深、通带内平均透射比高、波纹系数小等要求,采用等效折射率理论与局部优化相结合的设计方法,选用PbTe/ZnSe作为高低折射材料,采用长波通膜系、短波通膜系以及双半波膜系设计了截止深度深、双通道、通带宽度合适的红外滤光片,通带分别为5.9～6.2μm及11.9～12.2μm,通带内平均透射比分别在90%及65%以上;对所设计的膜系进行了薄膜物理厚度和膜层折射率的误差分析。分析表明,薄膜制备时沉积速率精度应控制在3.5%以内,材料折射率的变化应控制在3%以内,与膜层折射率相比,薄膜物理厚度对平均透射比的影响小,并且双半波膜系对厚度以及折射率变化更敏感。     

硫化锌基底硬质红外保护薄膜技术研究

硫化锌在3~5μm和7.7~9.3μm两个波段具有较高透过率,但其脆性大、耐摩擦性能较差,在其表面镀制类金刚石膜保护膜可显著提高其使用性能。直接在硫化锌基底沉积类金刚石膜难以实现,采用匹配层与过渡层的设计思想,制备出类金刚石膜与硫化锌基底之间相互牢固结合的过渡层。通过等离子体化学气相增强法在过渡层上成功制备类金刚石膜。研究了射频功率、气压等对保护膜系力学性能的影响。结果表明,镀制了硬质保护薄膜的硫化锌窗口在3~5μm和7.7~9.3μm双波段的平均透过率均高于90%,膜层硬度为硫化锌窗口近5倍。经环境试验之后,膜层光学性能与机械性能均无变化。     

可见-短波红外成像系统色彩恢复滤光片研制

针对当前0.40～2.50 μm宽光谱响应成像系统可见光波段颜色信息丢失,全波段只能灰度成像的问题,设计并制备了用于全天时、可见光色彩恢复、短波红外(Short-Wave Infrared,SWIR)多波段成像的滤光片。使用Essential Macleod膜系设计软件,通过三种设计方案进行参数和性能对比,最终采用短波通基础膜系的两级截止带构造蓝光(B)+SWIR、绿光(G)+SWIR、红光(R)+SWIR负滤光片膜系设计,采用长波通基础膜系实现0.42～2.50 μm通带膜系设计。以上四个滤光片的组合选用Ta₂O₅和SiO₂为高低折射率材料在石英玻璃JGS-1基底上制备,经过测量通带的平均透过率均大于93.6%,通带平均透过率之差小于1.6%。最后用制备的滤光片进行拍照和计算,对色彩恢复功能进行验证。测试结果对宽光谱彩色成像技术的进一步研究具有参考价值。     

高透过率红外窗口保护薄膜的研制

在Si、Ge红外窗口上利用离子辅助电子束蒸发技术和RF-PECVD技术制备了具有高透过率的AR／DLC保护薄膜,并与单层DLC保护薄膜的光学性能进行了对比。所制备的高透过率保护薄膜达到如下性能：在3～5μm波段,Si基底上一面镀高效红外增透膜一面镀AR／DLC增强型保护薄膜的平均透过率达到约96％,较之镀DLC膜平均透过率提高了约4％。在8～12μm波段,Ge基底上一面镀高效红外增透膜一面镀AR／DLC增强型保护薄膜的平均透过率达到约95％,较之镀DLC膜平均透过率提高了约5％。有关薄膜样品都通过了相应的环境试验。     

刑侦检测光学系统中干涉滤光片的设计与制备

在刑侦现场勘查不同物证痕迹时,采用多波段光源对痕迹进行获取,而多波段光源是利用不同性能的干涉截止滤光片以获得不同波段的输出光.为了寻找衣物上体液和其它痕迹,利用干涉滤光片的组合方法,采取电子束蒸发并加以离子辅助沉积系统,根据薄膜干涉滤光片理论并借助膜系设计软件,制备了低成本高质量的450~520 nm波段高透射矩形波.通带透过率大于99%,其它波段透过率小于0.2%,陡度S<3%,并通过了酸碱度环境的检测.重点讨论了膜系设计中波纹产生的原因及波纹的的压缩.     

矩形波宽带通滤光膜研究

对矩形波宽带通滤光片进行了深入研究,提出了一种设计、制备矩形波宽带通滤光片的方法。使用该方法设计并制备了400 nm～1 100 nm波段,中心波长λ₀=515 nm,透射带λ=λ₀±25 nm,透射带平均透射率■≥92%,截止带λ=400 nm～475 nm、λ=555 nm～1 100 nm,截止带透射率小于0.1%的矩形波宽带通OD3-A滤光片。对样片光谱进行了测试,结果满足需求。该方法设计、制备矩形波宽带通滤光片克服了F-P型窄带滤光膜监控精度要求高、通带宽带窄、成本高以及传统长、短波截止膜组合方式膜层总厚度过大、通带透过率低、波形矩形度差的缺点。     

透0.45 μm～1.6 μm反8 μm～12 μm宽光谱分色滤光片的制备

光谱分色滤光片对成像光谱技术至关重要,是实现光电仪器体积小、质量轻的一个重要器件.根据金属膜具有高反射率的特点和可以进行诱增透的原理,介绍了透0.45 μm～1.6 μm反8 μm～12 μm光谱分色滤光片的膜料选择和膜系设计,并应用JGP560A2型磁控溅射镀膜机制备出了光谱性能和理化性能较好的宽光谱分色滤光片,其光谱性能达到0.45 μm～1.6 μm波段范围内,平均透过率大于80%;8 μm～12 μm波段范围内,平均反射率大于91%.     

基于太阳模拟器阶梯式补偿滤光片的研究

太阳模拟器是利用人工光源模拟太阳光辐照的设备,滤光片作为太阳模拟器中的重要元件,对其光谱精度要求也越来越高.本文通过建立数学模型,引入新的评价函数,设计了0.4~1.1μm波段五个不同分光要求的阶梯式补偿滤光膜.并在薄膜制备过程中,应用最小二乘法原理对实验数据进行拟合,找到了残余蒸镀量与膜层厚度之间的关系,解决了残余蒸镀对薄膜的光谱影响,最终制备出的薄膜符合使用要求.     

基于氧化物的0.8~1.7μm和3.7~4.8μm硬质宽带红外增透膜研制

从实际应用出发,在0°入射的条件下,在ZnS基底上针对0.8~1.7 μm和3.7~4.8 μm两个红外波段,设计并制备了双波段红外增透膜。论述了材料选择、膜系设计和制备方法,最终使用等离子辅助沉积技术在ZnS窗口上制备出双波段红外增透膜,透过率及环境测试结果表明：在0.8~1.7 μm波段双面平均透过率大于95%,在3.7~4.8 μm波段双面平均透过率大于96%。膜层结合牢固并有良好的耐摩擦性能。     

1024 × 1024 Format pixel co-located simultaneously readable dual-band QWIP focal plane

This paper reports the first demonstration of the megapixel-simultaneously-readable and pixel-co-registered dual-band quantum well infrared photodetector (QWIP) focal plane array (FPA). The dual-band QWIP device was developed by stacking two multi-quantum-well stacks tuned to absorb two different infrared wavelengths. The full width at half maximum (FWHM) of the mid-wave infrared (MWIR) band extends from 4.4 to 5.1 μm and the FWHM of a long-wave infrared (LWIR) band extends from 7.8 to 8.8 μm. Dual-band QWIP detector arrays were hybridized with custom fabricated direct injection read out integrated circuits (ROICs) using the indium bump hybridization technique. The initial dual-band megapixel QWIP FPAs were cooled to 70 K operating temperature. The preliminary data taken from the first megapixel QWIP FPA has shown system NEΔT of 27 and 40 mK for MWIR and LWIR bands, respectively.     

Localization of nonequilibrium current carriers close to Cr ions in ZnSe:Cr single crystals

The photoluminescence (PL) of Cr-doped ZnSe single crystals is investigated in a temperature interval from 83 up to 297 K and in a wavelengths region from 440 up to 2700 nm. The doping was carried out during a high-temperature annealing of ZnSe crystals in CrSe vapors and in chrome chlorides medium. It is revealed that the doping results in an appearance of both luminescence bands located at 0.54, 0.97, and 2.15 μm and edge luminescence bands located at 454, 457, and 460 nm at 83 K. It is shown that the PL bands located at 457 and 460 nm are caused by the radiative recombination with the participation of holes located on hydrogen-like orbits close to Cr⁺ centers, having a binding energy of 99 meV. The excitons bound with centers responsible for the radiation located at 0.54 μm and having a binding energy of 65-68 meV are considered. The energy of a lattice relaxation at recharge of centers responsible for green radiation is estimated and equals 40-170 meV.     

基于ZF6基底的可见光宽谱带高性能增透膜

以ZF6为基底,采用电子束蒸发物理气相沉积方法设计并制备了一种增透波长为0.4～0.8μm的宽谱带可见光区增透膜。薄膜材料仅含有TiO2和SiO2两种材料,分别作为高低折射率材料。利用Edinburgh光谱仪对双面镀制该膜系样品的透过率进行测量,测试结果表明：薄膜平均透过率达98.15%,实际样品的光学特性与设计结果基本相符,具有宽带的增透特性,减少了表面剩余反射。机械强度与环境测试表明：制备的薄膜具有良好的稳定性和牢固度,可以应用于可靠性要求较高的光学系统中。     

Non-destructive quantification of pharmaceutical tablet coatings using terahertz pulsed imaging and optical coherence tomography

Optical coherence tomography (OCT) and terahertz pulsed imaging (TPI) are two powerful techniques allowing high quality cross-sectional images from within scattering media to be obtained non-destructively. In this paper, we report experimental results of using OCT and TPI for quantitatively characterizing pharmaceutical tablet coatings in the thickness range of 10-140 μm. We found that the spectral OCT system developed in-house has an axial resolution of 0.9 μm, and is capable of quantifying very thin coatings in the range of 10-60 μm. The upper limit of 60 μm within the tablet coating and core is owed to the strong scattering of OCT light, which has relatively short wavelengths in the range of 0.5-1.0 μm. On the other hand, TPI utilizes terahertz radiation that has substantially long wavelengths in the range of hundreds of microns, and thus is less prone to the scattering problem. Consequently TPI has been demonstrated to be able to quantify thicker coatings in the range of 40-140 μm and beyond. We concluded that OCT and TPI are two complementary analytical techniques for non-destructive and quantitative characterization of pharmaceutical tablet coatings.     

A tunable fiber parametric oscillator for the 2 μm wavelength range employing an intra-cavity thulium doped fiber active filter

We report an efficient fiber parametric oscillator operating in the wavelengths range of 1.97 μm to 2.14 μm. The oscillator is based on narrow band parametric amplification and employs a thulium doped fiber placed at the loops end as an intra-cavity active filter. The filter eliminates any signal generated by stimulated Raman scattering which inherently accompanies the parametric process. Short wavelength parametric oscillations and the pump signal are also absorbed. Only the long wavelength parametric oscillations can build up in the resonantly pumped system which emits 4 ns pulses at ~ 1 MHz with a maximum peak pulse power of 20 W.     

A wide band-pass filter of broad angle incidence based on one-dimensional metallo-dielectric ternary photonic crystal

A wide band-pass filter has been presented based on one-dimensional metallo-dielectric ternary photonic crystal. ZnS, Ag and MgF₂ are used as the materials of the photonic crystal. The forbidden and allowed bands of the photonic crystal are determined by using the band-edge analysis. The result indicates that the filter has a wide pass band in the visible region and it can block ultraviolet and infrared light. Simulation of the transmission spectra shows that the filter has decent transmittance in the pass band at broad angle incidence ranging from 0° to 70°, which can meet the need of practical use.     

近中红外与1.06μm和1.54μm激光兼容隐身光子晶体研究

为实现飞行器高温部分的红外与激光兼容伪装,设计了一种基于一维光子晶体的近中红外与1.06μm和1.54μm激光兼容隐身材料。基于薄膜的传输矩阵法和异质结构理论,拓展了光子晶体的禁带宽度,使之覆盖近中红外波段;随后,利用掺杂原理,在光子晶体周期结构中引入了两种缺陷。结果显示,在1~5μm的带隙中出现了波长分别为1.06μm和1.54μm的缺陷模,反射率分别为1.21%和1.79%,这种具有"光谱挖空"特性的光子晶体可以实现近中红外与1.06μm和1.54μm激光兼容隐身。