金属-电介质约束的半导体微盘激光器

设计了一种以半导体材料InGaAsP作为核心结构的器件表面蒸镀二氧化硅膜层,在其上蒸镀金膜层,构成金属电介质半导体微盘激光器结构,盘面的厚度为2μm,盘面半径为6 μm ,盘壁侧表面与底面的夹角为45°.使用有限元法对该结构器件的回音壁模式进行数值研究.利用所谓“偏微分方程的弱项形式”有效地抑制了许多局域不变性相关的“伪解”.通过数值求解弱项型矢量亥姆霍兹方程,得到微盘激光器回音壁模式的横磁场分布,在此基础上讨论了其品质因数(Q值)、模体积、不同金属和电介质膜厚度对器件品质因数的影响、盘的半径和其品质因素的关系等相关量,理论计算表明,这种结构的器件较直接在介质表面蒸镀金属膜层结构的器件的品质因数高2～3倍,实验还获得了基阶和高阶的表面等离子体波模式,以及品质因数最大达到约5100的光学-电介质基模.     

980nm半导体激光器腔面膜钝化新技术

研究了不同腔面钝化方法对980 nm渐变折射率波导结构InGaAs/AlGaAs半导体激光器输出激光功率的影响.将980 nm半导体激光器管芯前后腔面不蒸镀钝化膜与蒸镀Si钝化膜和蒸镀ZnSe钝化膜的方法进行了对比.结果表明,蒸镀ZnSe钝化膜比蒸镀Si钝化膜的半导体激光器输出光功率提高了11％,比不蒸镀钝化膜的半导体...     

石英毛细管椭球微气泡模式特性及传感技术

利用有限元数值分析方法研究了椭球状石英毛细管微气泡回音壁模式特性及其折射率传感性能.计算分析了不同半径与内壁厚度情况下空芯和液芯椭球形微气泡模式特征,包括品质因数、有效折射率和能量比等,并探讨了微气泡在高灵敏度和高分辨率折射率传感方面的应用潜能.研究结果表明微气泡膨胀至350μm,且内壁厚度为1μm时分辨率和灵敏度最佳;在该厚度范围附近,微气泡分辨率不会因为半径尺寸的改变而发生太大变化;二阶径向模具有较高品质因数,其灵敏度略高于一阶基模,且使用二阶径向模可降低在制造时对结构壁厚控制精度的要求,可用于实际传感应用中.研究结果对微气泡的进一步实验研制具有理论参考价值.     

表面等离子体激元微盘的优化设计及应用

表面等离子体激元(SPP)微腔具有很高的品质因子和极小的模式体积,在光电子器件研究方面具有重要的应用价值。采用有限元法对表面等离子体激元的金属覆盖介质微盘谐振腔进行理论模拟,研究考虑微盘底半径、介质层厚度及金属膜厚度等参数对微盘表面等离子体模的品质因子及模体积的影响。研究表明,在光通信波段1550nm附近获得高品质因子(1000以上),极低模式体积的表面等离子体微盘。最后研究了利用优化设计的微盘进行折射率传感的应用,获得了高达300nm/RIU的折射率传感灵敏度。     

热压法制备的碲酸盐玻璃微盘

提出一种热压法制备微盘激光器的工艺,仅使用实验室常用电阻加热炉具即可制备出不同直径/厚度的微盘激光器.选用TeO_2-ZnO-Na_2O碲酸盐玻璃为基质材料,制备出直径分布在100—400μm范围内、最小厚度可达8μm、典型品质因数(Q值)约为10~5的微盘激光器.对碲酸盐玻璃基质材料掺入稀土离子Nd~(3+)和Tm~(3+),通过光纤锥耦合法开展微盘的抽运耦合实验,即可在耦合系统的输出光谱中获得明显的荧光回廊模式和激光模式.以一颗直径为105.74μm、厚度为10.4μm的Nd~(3+)掺杂微盘为例,当抽运光功率提升至1.364 mW以上时,即可在1.06μm附近获得激光峰.同样实验表明,对Tm~(3+)掺杂的微盘进行抽运耦合实验可获得1.9μm附近的激光峰.     

提高硫化锌膜层牢固性的点滴体会

光学零件表面上用真空蒸发法获得析光膜和多层膜时,膜层材料中硫化锌(ZnS)是一种比较常用的高折射率的电介质物质。如何提高硫化锌膜层的牢固性是蒸镀硫化锌工艺中的一个关键。几年来,我们对硫化锌的蒸镀工艺进行了一些试验,收到了一定的效果,牢固性有了很大的提高。按现在的蒸镀工艺所获得的硫化锌析光膜,可在食盐水中煮沸五分钟,或在蒸馏水中煮沸十分钟也不会出现脱膜现象。现将几点体会总结如下: 1.加热烘烤,提高被镀光学零件衬底的     

半导体激光器解理面镀膜控制老化

第五次半导体激光国际会议讨论了半导体激光器谐振器解理面的状态及老化问题。日立中研Y.Shima在半导体激光器解理面上镀上电介质膜,成功地解决了老化的一个原因。但镀膜时需要精确控制膜的厚度,如     

ZnSe-CdZnse多量子阱光双稳器件的研制

本文采用电化学选择性腐蚀工艺对GaAs衬底蚀孔,在其上获得了大面积具有光滑表面的Ⅱ-Ⅵ族半导体多量子阱外延膜.通过在其表面蒸镀反射膜,制成了高质量的F-P腔,制备出ZnSe-CdZnSe多量子阱F-P腔光双稳器件.     

混合表面等离子体微盘腔模式特征及传感特性

为了实现高Q值极小模体积的表面等离子体微腔,提出一种混合表面等离子体微盘腔,介质微盘上放置横截面为矩形的金属纳米环形条,微盘腔中间由低折射率材料隔离.用有限元法对混合微腔的模式特性进行数值模拟,研究了其品质因子、有效模式体积和腔外能量比随器件几何尺寸的变化规律.结果表明,所设计微盘腔具有较低的传播损耗、较强的光场约束能力和较高的腔外能量比,品质因子高达7 000,最小模体积仅为0.315μm3,可实现高灵敏度折射率传感.     

侧向微结构宽脊波导分布反馈1.06μm半导体激光器

为了改善宽脊波导半导体激光器侧模特性和光谱特性,提出了一种具有侧向微结构脊波导和高阶脊表面光栅的分布反馈半导体激光器.该激光器在宽脊波导的两侧刻蚀微结构区,基于各阶侧模光场分布不同的特性,增大了谐振腔内基侧模与高阶侧模的损耗差,消除了远场光斑"多瓣"现象并且输出功率有所提升;同时,借助高阶脊表面光栅,器件的线宽得到了进...     

Silica-based microcavity fabricated by wet etching

Silica whispering gallery mode(WGM) microcavities were fabricated by the buffered oxide etcher and potassium hydroxide wet etching technique without any subsequent chemical or laser treatments. The silicon pedestal underneath was an octagonal pyramid, thus providing a pointed connection area with the top silica microdisk while weakly influencing the resonance modes. The sidewalls of our microdisks were wedge shaped, which was believed to be an advantage for the mode confinement. Efficient coupling from and to the 60 μm diameter microdisk structure was achieved using tapered optical fibres, exhibiting a quality factor of 1.5×10~4 near a wavelength of 1550 nm. Many resonance modes were observed, and double transverse electric modes were identified by theoretical calculations. The quality factor of the microdisks was also analysed to deduce the cavity roughness. The wet etching technique provides a more convenient avenue to fabricate WGM microdisks than conventional fabrication methods.     

Fiber taper coupled high-quality-factor planar microdisk

A fiber taper can evanescently couple to whispering gallery modes (WGMs) in a planar silica microdisk for observing the optical properties of the microdisk cavity. It is revealed that WGMs have very high quality (Q) factors by controlling the air gap between the taper and the microdisk. The best coupling efficiency from the taper to the microdisk is as high as 98%, and can be continuously adjusted from the under-coupling, critical-coupling to over-coupling regimes. The influence of the laboratory circumstance such as surface contamination on the microdisk is also discussed. It is experimentally shown that the high-Q-factor (105) modes can be kept for a long period in a general laboratory circumstance.     

Mode characteristics of silver-coated inverted-wedge silica microdisks

The characteristics of whispering gallery modes(WGM) in silver-coated inverted-wedge silica microdisks are theoretically investigated by using finite element method. Dielectric TE mode always exists in silver-coated inverted-wedge resonators; dielectric TM mode tends to couple with SPP modes; only pure interior surface plasmonic polariton(SPP) mode but not pure exterior SPP mode is observed in contrast to the metal-coated cylindrical and toroidal resonators. The dependence of quality factor of different kinds of WGMs on the radius of the resonator and the thickness of the coated silver layer are systematically analyzed. We find that the quality factors of the hybrid WGMs associated with SPP mode can reach 104. The maximum light intensity enhancement in ambient for a hybrid mode consisting of a dielectric TM mode and an exterior SPP mode can be obtained when a silver film of thickness ~40 nm is deposited. The silver-coated inverted-wedge silica resonators may be widely applied in sensing and surface enhanced Raman scattering.     

Theoretical prediction of a dramatic Q-factor enhancement and degeneracy removal of whispering gallery modes in symmetrical photonic molecules

Coupled-microdisk photonic molecules with high-symmetry geometries that support nondegenerate whispering gallery modes with high quality factors are numerically designed, based on a two-dimensional model. Dramatic enhancement of calculated Q factors of nondegenerate modes as compared with single-microdisk whispering gallery modes of the same radial order is achieved by tuning the intercavity coupling distances. Potential applications of this work to the design of single-mode coupled-microdisk structures with large spontaneous emission factors and low threshold lasing operation and to random laser simulations are discussed.     

半导体微碟激光器设计原理与工艺制作

用经典量子电动力学理论初步研究了半导体碟型微腔激光器的设计原理，采用光刻、反应离子刻蚀和选择化学腐蚀等现代微加工技术制备出抽运阈值功率很低用品质因数很高的低温光抽运InGaAs/InGaAsP多量子阱微碟激光器。这种激光器制作工艺简单，对有效光子状态密度调制较大，是比较理想的半导体微腔激光器。     

Design of a single-mode directly modulated orbital angular momentum laser

We propose a design of single-mode orbital angular momentum(OAM) beam laser with high direct-modulation bandwidth. It is a microcylinder/microring cavity interacted with two types of second-order gratings: the complex top grating containing the real part and the imaginary part modulations and the side grating. The side grating etched on the periphery of the microcylinder/microring cavity can select a whispering gallery mode with a specific azimuthal mode number, while the complex top grating can scatter the lasing mode with travelling-wave pattern vertically. With the cooperation of the gratings, the laser works with a single mode and emits radially polarized OAM beams. With an asymmetrical pad metal on the top of the cavity, the OAM on-chip laser can firstly be directly modulated with electrical pumping. Due to the small active volume, the laser with low threshold current is predicted to have a high direct modulation bandwidth about 29 GHz with the bias current of ten times the threshold from the simulation. The semiconductor OAM laser can be rather easily realized at different wavelengths such as the O band, C band, and L band.     

单模光纤中弯曲损耗的测试与分析

对单模光纤中弯曲损耗随弯曲半径(1～8 mm)和波长(1530～1565 nm)变化的实验进行了测试,结果显示弯曲损耗随弯曲半径和波长呈现振荡.理论分析表明由于光纤纤芯中的基模和在包层以及涂覆层中传播的Whispering-gallery模式之间的耦合,引起了弯曲损耗的振荡,理论分析结果和实验结果基本一致.     

Millimeter-wave whispering gallery modes in an ellipsoidal dielectric resonator with a small ellipticity

It is found that, when the shape of a dielectric sphere (hemisphere) operating under the whispering gallery mode conditions is perturbed by a surface curvature gradient (ellipticity), the unloaded Q factor of the sphere degrades and its resonance frequencies change. It is shown theoretically and experimentally that an elliptic irregularity removes frequency degeneracy of whispering gallery modes at millimeter waves.     

回音壁模式光学谐振腔研究进展

近些年来,回音壁模式光学谐振腔因其超高的品质因数、极小的模式体积,引起了各国学者的广泛关注,在民用以及军用器件方面都发挥了重要的作用.目前,对回音壁模式光学谐振腔的研究主要包括微波光子学,非线性光学以及惯性导航器件等.本文对当前各国学者在回音壁模式谐振腔方面的研究情况进行了汇总和总结,将从6个方面对其进行论述:特性参数、材料选择、光耦合、形状、应用以及展望.旨在给出回音壁模式光学谐振腔发展到今天取得的成果、遇到的挑战及今后的发展方向.