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在硅(Si)上外延生长高质量的砷化镓(GaAs)薄膜是实现硅基光源单片集成的关键因素。但是,Si材料与GaAs材料之间较大的晶格失配、热失配等问题对获得高质量的GaAs薄膜造成了严重影响。本文利用金属有机化学气相沉积(MOCVD)技术开展Si基GaAs生长研究。通过采用三步生长法,运用低温成核层、高温GaAs层与循环热退火等结合的方式,进一步降低Si基GaAs材料的表面粗糙度和穿透位错密度。并利用X射线衍射(XRD)ω-2θ扫描追踪采用不同方法生长的样品中残余应力的变化。最终,在GaAs低温成核层生长时间62 min(生长厚度约25 nm)时,采用三步生长、循环热退火等结合的方式获得GaAs(004)XRD摇摆曲线峰值半高宽(FWHM)为401″、缺陷密度为6.8×10^(7) cm^(-2)、5μm×5μm区域表面粗糙度为6.71 nm的GaAs外延材料,在材料中表现出张应力。 相似文献
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Spatial and spectral filtering of tapered lasers by using tapered distributed Bragg reflector grating 下载免费PDF全文
Jing-Jing Yang 《中国物理 B》2022,31(8):84203-084203
A 1040 nm tapered laser with tapered distributed Bragg reflector (DBR) grating is designed and fabricated. By designing the grating with tapered layout, the tapered DBR grating exhibits the scattering effect on side backward-traveling waves, thus achieving additional suppression of parasitic oscillation. Under the suppression of parasitic oscillation, the spatial and spectral characteristics of the tapered laser are improved. The experimental results show that a near-Gaussian far-field distribution and a kink-free P-I characteristics are achieved, and a single peak emission with a wavelength of 1046.84 nm and a linewidth of 56 pm is obtained. 相似文献
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Low Specific On-Resistance SOI LDMOS with Non-Depleted Embedded P-Island and Dual Trench Gate 下载免费PDF全文
A new silicon-on-insulator(SOI) trench lateral double-diffused metal oxide semiconductor(LDMOS) with a reduced specific on-resistance R_(on),sp is presented. The structure features a non-depleted embedded p-type island(EP) and dual vertical trench gate(DG)(EP-DG SOI). First, the optimized doping concentration of drift region is increased due to the assisted depletion effect of EP. Secondly, the dual conduction channel is provided by the DG when the EP-DG SOI is in the on-state. The increased optimized doping concentration of the drift region and the dual conduction channel result in a dramatic reduction in R_(on),sp. The mechanism of the EP is analyzed,and the characteristics of R_(on),sp and breakdown voltage(BV) are discussed. Compared with conventional trench gate SOI LDMOS, the EP-DG SOI decreases R_(on),sp by 47.1% and increases BV from 196 V to 212 V at the same cell pitch by simulation. 相似文献
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Qi-Qi Wang 《中国物理 B》2022,31(9):94204-094204
Broad area semiconductor laser (BAL) has poor lateral beam quality due to lateral mode competition, which limits its application as a high-power optical source. In this work, the distributed Bragg reflector laser diode with tapered grating (TDBR-LD) is studied. By changing the lateral width, the tapered grating increases the loss of high-order lateral modes, thus improving the lateral characteristics of the laser diode. The measuring results show that the TDBR-LD can achieve a single-lobe output under 0.9 A. In contrast to the straight distributed Bragg reflector laser diode (SDBR-LD), the lateral far field divergence of TDBR-LD is measured to be 5.23° at 1 A, representing a 17% decline. The linewidth of TDBR-LD is 0.4 nm at 0.2 A, which is reduced by nearly 43% in comparison with that of SDBR-LD. Meanwhile, both of the devices have a maximum output power value of approximate 470 mW. 相似文献
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近年来,水平腔面发射半导体激光器具有高功率、高光束质量及易封装集成等优良性能,已成为激光器领域的研究热点。本文详细阐述了几种水平腔面发射半导体激光器的结构设计、工作原理以及激光输出特性,并对该激光器国内外最新研究进展与发展现状进行了总结和论述。在此基础上,对该激光器的研究方向和发展趋势进行了分析与展望。目前,水平腔面发射半导体激光器的激光输出功率可达瓦级,美国Alfalight公司引入曲线形光栅的单一发射器输出功率可达73 W。随着应用领域的不断拓展,中远红外波段水平腔面发射激光器将成为未来的研究焦点。 相似文献
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