离子束溅射沉积不同厚度铜膜的光学常数研究

利用Lambda-900分光光度计对离子束溅射沉积不同厚度Cu膜测定的反射率和透射率,运用哈德雷方程,并考虑基片后表面的影响,对离子束溅射沉积的Cu膜光学常数进行了计算。结果表明,在同一波长情况下,膜厚小于100 nm的纳米Cu膜光学常数随膜厚变化明显;膜厚大于100 nm后,Cu膜的光学常数趋于一定值。Cu膜不连续时的光学常数与连续膜时的光学常数随波长变化规律不同;不同厚度的连续膜的光学常数随波长变化规律相同,但大小随膜厚变化而变化。     

椭圆偏振法测定在线Low-E玻璃的可见-近红外光学常数与膜厚

从在线Low-E玻璃光学机理出发,用椭圆偏振光谱仪对在线Low-E玻璃功能层和过渡层的可见-近红外波段的光学常数进行研究.测量了样品在三个不同入射角的椭偏参数,分别用Lorentz双振子模型和Cauchy模型来描述Low-E玻璃功能层和过渡层的光学色散特性.通过拟合椭偏参数获得在线Low-E玻璃的光学常数及每层膜厚度,并用扫描电镜对样品的膜厚进行表征.结果表明,Lorentz双振子模型和Cauchy模型能很好地解释在线Low-E玻璃的光学特性;同时,椭圆偏振法也为多层膜系统提供了一种测定光学常数和膜厚的可靠方法.     

近红外波段锑基铋掺杂薄膜厚度对光学常数与光学带隙的影响

采用磁控溅射法制备了不同厚度的锑基铋掺杂薄膜,用X射线衍射(XRD)和透射电子显微镜(TEM)研究了薄膜结构随厚度的变化。利用椭圆偏振法测定了样品薄膜在近红外波段的光学常数与光学带隙,研究了膜厚对样品薄膜光学常数和光学带隙的影响。结果表明,膜厚从7 nm增加至100 nm时,其结构由非晶态转变为晶态。在950～2200 nm波段,不同厚度薄膜样品的折射率在4.6～8.9范围,消光系数在0.6～5.8范围,光学带隙在0.32～0.16 eV范围。随着膜厚的增加,薄膜的折射率和光学带隙减小,而消光系数升高;光学常数在膜厚50 nm时存在临界值,其原因是临界值前后薄膜微观结构变化不同。     

多层高反膜光学常数和厚度的反演

基于精英保留策略的遗传算法具有良好的全局寻优能力和很强的鲁棒性,基于Levenberg-Marquardt 算法的非线性最小二乘法具有快速、高效的局部收敛能力.研究了将这两种算法结合起来求解多层膜光学常数和厚度的可行性和有效性.结果表明:基于两种算法的组合反演算法综合了这两种算法的优点,能以较大的概率、较高的精度找到在实际约束条件下多层膜的光学常数和厚度,特别是在寻找全局最优解方面表现出色.根据全光谱透射拟合法基本原理,应用组合反演算法分别在考虑测量误差与不考虑测量误差两种情况下反演 15 层规整高反膜的光学常数和厚度,得到了较为精确的薄膜参数.模拟实验表明:此组合反演算法可有效地求解多层膜反演问题,在反演多层膜光学常数和厚度方面具有实际的应用价值.     

椭偏光谱对复数折射率薄膜的研究 ITO膜光学常数的色散和生长规律

本文提出一个利用椭偏光谱测量复数折射率薄膜的方法。由于引入一个新的目标函数,把搜索的参量空间的维数减至四维,因此不但可以测得薄膜的光学常数和厚度,并且可同时确定衬底的光学常数。我们应用这个方法对射频溅射在硅衬底上生长的ITO膜光学常数的色散和生长规律进行了初步研究,发现硅衬底的表观光学常数也发生了变化     

自适应模拟退火遗传算法在薄膜厚度及光学常数反演中的应用

准确的测量薄膜的厚度和光学常数,在薄膜的制备、研究和应用中都是十分重要的。借助Cauchy色散模型,通过薄膜透过率测量曲线,用改进的自适应模拟退火遗传算法对透过率曲线进行全光谱拟合,从而反演得到薄膜的厚度和光学常数。对由电子束蒸发制备的TiO2单层膜和SiO2/TiO2双层膜的厚度和光学常数进行了测量计算。实验结果表明,计算得到的光学参数与实测结果相一致,厚度误差小于2nm,在560nm波长处折射率误差小于0.03。     

椭偏光谱对复数折射率薄膜的研究——ITO膜光学常数的色散和生长规律

本文提出一个利用椭偏光谱测量复数折射率薄膜的方法。由于引入一个新的目标函数,把搜索的参量空间的维数减至四维,因此不但可以测得薄膜的光学常数和厚度,并且可同时确定衬底的光学常数。我们应用这个方法对射频溅射在硅衬底上生长的ITO膜光学常数的色散和生长规律进行了初步研究,发现硅衬底的表观光学常数也发生了变化 关键词：     

膜层厚度对金属薄膜光学常数的影响

从麦克斯韦方程出发,可以得到超薄金属膜层光学常数n、k与其厚度有关系的理论依据。采用电阻热蒸发和电子束热蒸发的方法在K9玻璃基底上分别沉积了不同厚度的Cu膜、Cr膜、Ag膜,由椭偏法检测、Drude模型拟合,获得了不同厚度Cu膜、Cr膜、Ag膜光学常数n、k随波长λ的变化规律。超薄金属薄膜与块状金属的光学常数相差较大,随着薄膜厚度的增加,n、k值趋近于块状金属。通过对样品膜层吸收、色散特性的分析,发现连续金属薄膜在可见光波段对长波的吸收较大,而且相比于介质薄膜平均色散率高10mn～102nm量级。     

基于双路偏振影像分光的立体视觉

提出使用金属薄膜对双路偏振影像进行分光以实现三维立体视觉.由两台相同的液晶显示器出射的线偏振光分别被超薄铝膜反射和透射.由于超薄金属膜的光学常数与膜的厚度相关,采用分段线性函数建立铝膜的厚度与体积分数的关系,进而用Sheng模型估计铝膜的光学常数.证明了反射光和透射光都是椭圆偏振光且主轴接近垂直,从而可以通过偏振方向互相垂直的偏振片将两者加以区分,并使观察者对液晶显示器的图像产生深度感.考虑到双目入射光强度的均衡,计算了最优的铝膜厚度.实验结果与理论分析完全符合,验证了方法的正确性. 关键词： 立体视觉 液晶显示 光学常数 超薄金属膜     

软X射线（60—900eV）超薄膜的光学常数

用反射率方法测定了软X射线波段(60～900eV)超薄膜的光学常数.反射率测量在同步辐射光束线上完成.对测量数据做非线性最小二乘曲线拟合得出光学常数,同时还精密确定了超薄膜的膜厚与薄膜与基板表面粗度的均方根值.文中介绍了样品制备、反射率测量、数据解析及误差分析的方法,并给出了C、Au、Pt超薄膜的相应结果.     

Infrared optical constants of aqueous sulfate-nitrate-ammonium multi-component tropospheric aerosols from attenuated total reflectance measurements: Part II. An examination of mixing rules

We examine the performance of several mixing rules that are commonly used in modeling optical constants of aerosol mixtures either in remote sensing or radiation transfer/climate studies employing the new refractive index data reported in Part I. We demonstrate that the optical constants of the considered mixtures are not accurately modeled using pure solute optical constants (e.g., ammonium sulfate optical constants and the optical constants of pure water) due to the complex ion-ion and ion-water interactions. On the other hand, we do find that ternary and quaternary mixtures can be well modeled by applying the mixing rules to lower order multi-component optical constants data, e.g., binary data to determine ternary optical constants, or binary and ternary data to determine quaternary optical constants. By using lower order optical constants data sets, much of the ion-ion and ion-water effects are captured. Both mass-fraction and volume-fraction weighting of the “component” optical constants yield satisfactory results, performing as well or better than the more complicated mixing rules. These findings will be of practical use in remote sensing and radiation transfer/climate studies as well as help guide the decision on what optical constants measurements will be required.     

柴油的透射光谱测量和热辐射物性参数反演

提出了一种基于填充柴油类半透明液体光学腔的透射光谱反演其介质光学常数的新方法(IDTM),通过测量填充水光学腔的透射光谱并反演水的光学常数进行了方法验证。采用Bruke V70傅里叶红外光谱仪实验测量了填充柴油光学腔在波长2~15 μm的透射光谱,基于新方法反演得到柴油在部分波长区域的光学常数,进而计算得到了其热辐射物性参数。研究结果表明：(1)在波段为2.0~2.5 μm,新方法(IDTM)反演水的光学常数同文献结果基本一致。(2)IDTM反演液体光学常数精度同MCDTM基本一致,且明显高于SODTM和SDTM。(3)柴油在波长2~15 μm范围透光性能较差,其中存在2.4,3.4,6.9,7.3和13.8 μm等5个强吸收区域。(4)柴油的光学常数和热辐射物性参数光谱选择性很强,在不同波段其值差距较大。     

First-principles study of the elastic constants and optical properties of uranium metal

We perform first-principles calculations of the lattice constants,elastic constants,and optical properties for alphaand gamma-uranium based on the ultra-soft pseudopotential method.Lattice constants and equilibrium atomic volume are consistent pretty well with the experimental results.Some difference exists between our calculated elastic constants and the experimental data.Based on the satisfactory ground state electronic structure calculations,the optical conductivity,dielectric function,refractive index,and extinction coefficients are also obtained.These calculated optical properties are compared with our results and other published experimental data.     

The effects of residual gases on optical constants of Al films

Using the attenuated total reflection technique, the effects of residual gases on optical constants of Al films have been investigated in situ during and after growth of films. It has been found that the optical constants of Al films are strongly affected by residual gases even under ultrahigh vacua (UHV) in the order of 10⁻⁶ Pa. In order to explore the origin of a variation in optical constants produced by the residual gases, the optical constants of Al films exposed to oxygen, nitrogen or hydrogen gases have been measured.     

Influence of the core‐hole effect on optical properties of magnesium oxide (MgO) near the Mg L‐edge region

The influence of the core‐hole effect on optical properties of magnesium oxide (MgO) is established through experimental determination of optical constants and first‐principles density functional theory studies. Optical constants (δ and β) of MgO thin film are measured in the spectral region 40–300 eV using reflectance spectroscopy techniques at the Indus‐1 synchrotron radiation source. The obtained optical constants show strong core exciton features near the Mg L‐edge region, causing significant mismatch with Henke's tabulated values. On comparing the experimentally obtained optical constants with Henke's tabulated values, an edge shift of ～3.0 eV is also observed. Distinct evidence of effects of core exciton on optical constants (δ and β) in the near Mg L‐edge absorption spectra are confirmed through first‐principles simulations.     

椭偏精确测定透明衬底上吸收薄膜的厚度及光学常数

椭偏仪难以精确测量透明衬底上吸收薄膜光学常数的原因:1)衬底的背面反射光为非相干光, 它的存在会极大的增加拟合难度; 2)衬底光学常数(折射率和消光系数)的差异会影响测量的准确性, 而且会在吸收薄膜的光学常数中表现出来, 需要单独测量其光学常数; 3)厚度与光学常数之间呈现强烈的关联性. 针对以上三个问题, 选择石英玻璃、载玻片、盖玻片和普通浮法玻璃作为研究对象. 采用折射率匹配法消除上述衬底背面反射光的影响. 结果显示, 折射率匹配法能够有效消除折射率在1.43-1.64、波长范围为190-1700 nm波段的石英、浮法玻璃等透明衬底的背面反射光. 之后, 通过拟合椭偏参数ψ和垂直入射时的透过率T₀ 分别得到以上衬底的折射率和消光系数. 拟合得到的结果与文献报道的趋势一致. 最后, 采用椭偏参数和透过率同时拟合的方法(SE+T法)得到类金刚石薄膜(沉积在石英玻璃上)和非晶硅薄膜(沉积在载玻片、盖玻片上)光学常数和厚度的准确解.     

Effect of the structure of smooth copper surfaces on the accuracy of determination of the optical constants of copper

The accuracy of determination of the optical constants of smooth copper surfaces produced by different technologies is analyzed, with particular attention paid to the consideration of the influence of scattered radiation (which is ignored by many authors) on the retrieval of the optical constants of copper surfaces from reflected radiation. The neglect of scattered radiation can lead to errors as high as 50% in determining the optical constants for bulk copper. For thin films, the errors are much lower. The influence of surface oxidation during measurements in air and surface features of studied objects on the parameters to be determined is analyzed as well. It is shown that errors in determination of the constants are maximal in the plasma resonance region of copper.

     

有效介质近似在Cu-MgF2复合纳米颗粒薄膜光学性质中的适用性研究

采用射频磁控共溅射技术制备了Cu体积分数分别为15%和30%的Cu-MgF2复合纳米颗粒薄膜。透射电镜形貌图像表明,薄膜由不同形状的Cu晶态纳米微粒镶嵌于主要为非晶态的MgF2陶瓷基体中构成。用椭偏光谱技术计算得到Cu-MgF2复合薄膜在270~830 nm波段的光学常数谱。用考虑颗粒形状效应的有效介质近似计算得到Cu-MgF2复合薄膜在相同波段的光学常数谱。把两样品的透射电镜形貌图像与光学常数理论谱、实验谱相结合,分析讨论了Cu-MgF2复合薄膜的光学特性。结果表明:去极化因子取值0.33的麦克斯韦噶尼特(Maxwell-Garnett)模型可以较好地解释Cu体积分数为15%的Cu-MgF2复合薄膜的光学性质,而去极化因子取值0.6的布鲁格曼(Bruggeman)模型可以较好地解释Cu体积分数为30%的Cu-MgF2复合薄膜的光学性质。