| 多层高反膜光学常数和厚度的反演 |
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| 引用本文： | 周天宇,杨开勇,吴素勇.多层高反膜光学常数和厚度的反演[J].应用光学,2011,32(1). |
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| 作者姓名： | 周天宇 杨开勇 吴素勇 |
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| 作者单位： | 国防科学技术大学,光电科学与工程学院光电工程系,湖南,长沙,410073 |
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| 摘 要： | 基于精英保留策略的遗传算法具有良好的全局寻优能力和很强的鲁棒性,基于Levenberg-Marquardt 算法的非线性最小二乘法具有快速、高效的局部收敛能力.研究了将这两种算法结合起来求解多层膜光学常数和厚度的可行性和有效性.结果表明:基于两种算法的组合反演算法综合了这两种算法的优点,能以较大的概率、较高的精度找到在实际约束条件下多层膜的光学常数和厚度,特别是在寻找全局最优解方面表现出色.根据全光谱透射拟合法基本原理,应用组合反演算法分别在考虑测量误差与不考虑测量误差两种情况下反演 15 层规整高反膜的光学常数和厚度,得到了较为精确的薄膜参数.模拟实验表明:此组合反演算法可有效地求解多层膜反演问题,在反演多层膜光学常数和厚度方面具有实际的应用价值.
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| 关 键 词： | 薄膜光学 光学常数 全光谱拟合法 遗传算法 |
Determination of optical constants and thicknesses of high-reflection multilayer system |
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| ZHOU Tian-yu,YANG Kai-yong,WU Su-yong.Determination of optical constants and thicknesses of high-reflection multilayer system[J].Journal of Applied Optics,2011,32(1). |
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| Authors: | ZHOU Tian-yu YANG Kai-yong WU Su-yong |
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| Institution: | ZHOU Tian-yu,YANG Kai-yong,WU Su-yong(Department of Optoelectronic Engineering,College of Optoelectronic Science andEngineering,National University of Defense Technology,Changsha 410073,China) |
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| Abstract: | Genetic algorithm based on elite selection strategy has good ability of global optimization and robustness.The non-linear least square method with Levenberg-Marquardt algorithm has fast and efficient local convergence features.The feasibility and effectiveness of reverse engineering of optical constants and thicknesses by the combination of both algorithms were studied.The results indicate that the combined fitting method can be used to calculate the optical constants and thicknesses of multilayer with grea... |
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| Keywords: | thin films optics optical constants whole optical spectrum fitting genetic algorithm |
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