界面和择优取向对TiN/ZrN纳米多层膜硬度变化的影响

利用射频反应磁控溅射方法，制备了调制比约为4，调制周期不同的一系列TiN/ZrN纳米多层膜. 利用X射线衍射仪(XRD)、高分辨电子显微镜(HRTEM)和纳米压痕仪(Nanoindentation)对多层膜的调制结构、界面状态和力学性能进行了表征. 研究结果表明TiN/ZrN多层膜具有很好的调制结构，但是在TiN层和ZrN层之间存在一定厚度的界面混合层. 力学性能分析表明：当调制周期小于15 nm时，TiN/ZrN多层膜的硬度介于单一TiN和ZrN薄膜的硬度之间；当调制周期为15.24 nm时，硬度达到最大，但随着调制周期增加，多层膜的硬度基本上保持为常数. 分析了TiN/ZrN多层膜硬度变化的机制，认为界面厚度和择优取向是导致硬度变化的主要原因. 关键词： TiN/ZrN多层膜 界面宽度 择优取向 硬度变化     

软X射线Mo/Si多层膜反射率拟合分析

由于多层膜的表界面粗糙度和材料之间的相互扩散等因素，导致多层膜的实际反射率小于理论计算的反射率，因此，多层膜结构参量的确定对镀膜工艺参量的标定具有重要意义。由于描述单个非理想粗糙界面散射的Stearns法适用于软X射线短波段区域，采用它的数学模型来描述软X射线多层膜的粗糙度，利用最小二乘法曲线拟合法对同步辐射测得的Mo／Si多层膜的反射率曲线进行拟合，得到了非常好的拟合结果，从而确定了多层膜结构参量，同时分析了多层膜周期厚度，厚度比率，界面宽度以及仪器光谱分辨率对多层膜反射特性的影响，这些工作都为镀膜工艺改进提供了一定的理论依据。     

Mo/Si多层膜表面保护层设计

为提高Mo/Si多层膜的稳定性与使用寿命,通过分析多层膜驻波电场的分布,对表面保护层及多层膜最上层材料的厚度进行优化设计,使优化后的反射率最高.计算表明,一定厚度的表面保护层总对应一个最优的最上层材料厚度.在13.36 nm波长,膜对数为50的Mo/Si多层膜10度入射的理论反射率为74.47%;当添加厚度为2.3 nm的Ru作为表面保护层,对应多层膜最上层Si的优化厚度为3.93 nm,其理论反射率为75.20％.设计结果表明,通过优化设计表面保护层,可以提高多层膜稳定性,改善多层膜性能.     

50~110 nm波段高反射率多层膜的设计与制备

阐述了50~110 nm强吸收波段亚四分之一波长多层膜的设计方法.这种膜系是由强吸收材料叠加而成，每层膜光学厚度小于四分之一个波长.与常规周期多层膜相比，这种膜系更适用于提高强吸收波段的反射率.利用该方法设计了50 nm处高反射多层膜，并以此为初始条件通过Levenberg-Marquart优化方法完成了50~110 nm强吸收波段宽带高反射率Si/W/Co多层膜的设计，其平均反射率达到45%.采用直流磁控溅射方法制备了Si/W/Co多层膜,用X射线衍射仪(XRD)对膜层结构进行了测试，测试结果表明制作出的多层膜结构与设计结构基本相符.     

纳米厚度贫铀/Au多层膜的制备及特性研究

理论和实验研究表明,纳米厚度周期调制的贫铀(DU)/Au多层膜材料具有高效的激光X射线转换效率. 采用交替磁控溅射制备纳米厚度的DU/Au平面多层周期结构,通过白光干涉仪、扫描电子显微镜、 X射线光电子能谱对DU/Au多层膜的几何参数、表面形貌、成分以及界面形貌进行表征.实验结果表明: 8 nm为Au连续成膜的厚度阈值,结合理论计算最优化原子配比,选取DU层厚度为30 nm、 Au层厚度为8 nm的调制周期结构;实测周期厚度为37 nm;扫描电子显微镜照片显示DU/Au分层明显; X射线光电子能谱深度刻蚀分析表明DU/Au界面处存在扩散, DU, Au, O三者原子比为73:26:1; 由于团簇效应, Au原子4f电子结合能向高能端移动,没有观察到DU相应的电子结合能移动现象.     

中心波长为13．9nm的正入射Mo／Si多层膜

用由铜靶激光等离子体光源等组成的反射率计对自行设计的周期厚度为7.14nm的120层Mo/Si多层膜进行极紫外(EUV)波段反射率测量。由于多层膜层数增加所引起的吸收、膜层界面之间的扩散以及镀膜过程中的膜厚控制误差或表面被氧化(污染)等原因,正入射Mo/Si多层膜在13.9nm处的反射率低于理论计算值73.2%,最后用原子力显微镜(AFM)测量其表面粗糙度为σ=0.401nm。     

50～11O nm波段高反射率多层膜的设计与制备

阐述了50～110 nm强吸收波段亚四分之一波长多层膜的设计方法.这种膜系是由强吸收材料叠加而成,每层膜光学厚度小于四分之一个波长.与常规周期多层膜相比,这种膜系更适用于提高强吸收波段的反射率.利用该方法设计了50 nm处高反射多层膜,并以此为初始条件通过Levenberg-Marquart优化方法完成了50～110 nm强吸收波段宽带高反射率Si/W/Co多层膜的设计,其平均反射率达到45%.采用直流磁控溅射方法制备了Si/W/Co多层膜,用X射线衍射仪(XRD)对膜层结构进行了测试,测试结果表明制作出的多层膜结构与设计结构基本相符.     

磁控溅射制备的W,WSi2,Si单层膜和W/Si,WSi2/Si多层膜应力

采用直流磁控溅射技术制备了厚度约100 nm的W,WSi2,Si单层膜和周期约为20 nm,Si膜层厚度与周期的比值为0.5的W/Si,WSi2/Si周期多层膜.利用台阶仪对镀膜前后基底表面的面形进行了测试,计算并比较了不同膜系的应力值.结果表明:W单层膜表现出较大的压应力,而W/Si周期膜则表现为张应力.WSi2单层...     

帽层对极紫外多层膜反射特性影响分析

介绍了在极紫外波段，利用帽层材料来减少多层膜反射镜因外部环境干扰而造成的反射率降低，使多层膜光学元件能够长时间稳定工作.计算了在139nm波长处Mo/Si极紫外多层膜反射镜在表面镀制不同帽层材料时的理论最大反射率，利用单纯形调优法，对帽层和多层膜的周期厚度进行优化，同时把分层理论用于多层膜帽层优化,可使多层膜的反射率得到进一步提高.分析了在加入帽层前后多层膜外层电场强度的分布变化情况. 关键词： 多层膜 反射率 帽层 极紫外     

Mo/Si多层膜小角X射线衍射结构表征

为了实现对Mo/Si多层膜的结构表征,测量了多层膜样品的小角X射线衍射谱。介绍了小角X射线衍射谱的分析方法,包括Bragg峰值拟合法,傅里叶变换法,反射谱拟合法。Bragg峰值拟合法和反射谱拟合法得到多层膜的周期厚度为7.09nm,两种模型的反射谱拟合法得到界面的粗糙度(扩散长度)为0.40～0.41nm(Si在Mo上),0.52～0.70nm(Mo在Si上),前者要比后者小,这与透射电镜法(TEM)得到的结果0.40nm(Si在Mo上),0.6～0.65nm(Mo在Si上)是一致的。通过基于扩散模型的反射谱拟合法得到的折射率剖面也与由高倍率透射电镜(HRTEM)积分得到的灰度值剖面在趋势上是一致的。通过X射线衍射谱和TEM图像对Mo/Si多层膜进行综合表征,得到了多层膜的精细结构信息,这对多层膜制备工艺的优化具有十分重要的意义。     

关于"太阳在银河系中所受引力与到银心距离r的关系"的讨论

讨论了银道面内的引力场强分布和太阳在银河系中所受引力与到银心距离r的关系，指出引力场强g并不是与r的平方成反比，这是由于银河系的大小和形状不能忽略造成的．强调了万有引力定律的适用条件．     

On the predictability of the positions of the convergence zones in the ocean

The disagreement between the experimental and calculated positions of the first convergence zone are known from many publications. The most probable cause for such a disagreement, namely, the incorrect specification of the input data for the calculations, is considered. The lack of simultaneity between the hydrological surveys of the region and the acoustic experiments is emphasized. The experimental data obtained by the author in five ocean regions are presented. These data characterize the diurnal variability of the distance from the source to the nearest boundary of the convergence zone. The relations proposed by different researchers for calculating the sound speed from the temperature, salinity, and hydrostatic pressure are analyzed. It is shown that these relations lead to a substantial difference in the estimated depth dependence of the hydrostatic gradient of the sound speed. The position of the first convergence zone is calculated for the propagation conditions determined by vertical temperature and salinity profiles with the subsequent recalculation of these profiles into sound speed profiles by using eight different formulas known from the literature. It is shown that different formulas lead to different values of the distance to the first zone; this difference is substantially greater than that between the calculations and experiment. The necessity of improving the recalculation relations in view of the experimental data on sound propagation in natural oceanic waveguides, including the data on the actual positions of the convergence zones, is emphasized.     

On the calculation of the bremsstrahlung in the region of the plasma frequency

On the basis of the classical theory of radiation produced in incomplete Coulomb interaction, a formula is derived for the coefficient of the bremsstrahlung of fully ionized plasma. In the region of rectilinear approximation a comparison is made with the results of the quantum formula derived from the Born approximation. Furthermore, the influence of dispersion upon the emission coefficient is taken into account; some relations for the region of dispersion are given.     

Dependence of the Intensity of the Spectral Lines and the Composition of the Sample and the Plasma Parameters of the Unipolar Arc

The investigation was made of the dependence of the intensity of Tl, Ga, Mo, Mg, Mn, Sn, Bi, Ni, Zn, Pt and Au spectral lines and the plasma parameters (temperature T, electron concentration n_e, degree of 6 ionnization α) from concentration of lithium additive.     

Set the controls for the heart of the Sun

In this paper we describe experiments conducted with high-power lasers that are attempting to replicate, for a very short time and in miniature, conditions found in the Sun. Experiments to date have reached conditions in the outer part of the Sun. To reach the Sun's centre requires compression of material to very much greater than solid density and heating to over ten million degrees. To achieve this, a new class of experiments and a new generation of high-power lasers are required.     

On the Question of the Source of the Apokamp

Technical Physics - The object of this work is the apokamp—a new type of plasma jet, which is formed from a bright offshoot emerging at the bending point of a channel of a high-voltage...     

Extracting the wavefunction of the LSP at the LHC

We consider associated production of squarks and gluinos with the lightest supersymmetric particle (LSP), or states nearly degenerate in mass with it. Though sub-dominant to pair production of color SU(3)-charged superpartners, these processes are directly sensitive to the wavefunction composition of the lightest neutralinos. Exploiting event-shape variables - including some introduced here for the first time - we are able to identify the composition of the LSP by selecting events involving a single high-pT jet recoiling against missing transverse energy. We illustrate the proposed technique on a set of benchmark cases and propose methods for applying these results in more realistic experimental environments.