薄膜光学

薄膜光学理论与膜系设计 O484．1 2004021244 对超声波作用下的化学浴沉积方法制备CdS薄膜的谱学分析=Spectral analysis of CdS thin films deposited by chemical bath deposition with ultrasonication[刊,中]／储祥蔷(北京大学物理学院重离子物理研究所．北京(100871))．谢大韬…∥光谱学与光谱分析．—2003．23(4)．—625-629 用化学浴沉积法制备了CdS薄膜,并研究了加超声波对CdS薄膜生长过程的影响。利用卢瑟福背散射,X射线粉末衍射和扫描电子显微镜对薄膜的厚度、晶相和表面形貌进行了表征。结果表明施加超声波的作用能有效地改善薄膜的质量,制备出均匀、致密,有较好晶体结构的Cds薄膜。同时,通过时间的控制可以精确地控制薄膜在50nm左右,以满足制备太阳能电池的特殊要求。图9参10(严寒)     

近空间升华法制备CdS多晶薄膜的研究

系统地研究了近空间升华法(CSS)制备CdS薄膜沉积速率的影响因素。发现CdS薄膜的沉积速率随升华源温度的升高而增大,但随衬底温度和沉积气压的上升而下降。对所制备样品的结构、表面形貌和光谱透过率特性进行了测试,结果表明：(1)不同氧分压下沉积的CdS薄膜沿(103)晶向择优生长。CdCl₂氛围下退火后,(103)晶向的优势得到进一步加强;(2)不同氧分压制备的CdS薄膜致密且粒径均匀,晶粒的大小随着衬底温度的升高而增大,但薄膜的粗糙度也随之增大;(3)随着CdS薄膜厚度的减小,可见光中短波段的透过率有所增大,有利于提高太阳电池的短波光谱响应。并将CSS制备的CdS多晶薄膜用于CdTe太阳电池的制作,获得了10.29%的光电转换效率,初步验证了该制作工艺的可行性。     

氧对于在Ar/O氛围下用近空间升华法制备的CdS薄膜的影响

采用近空间升华法（CSS）在氩/氧气氛中制备了硫化镉（CdS）多晶薄膜.利用XRD,XPS,AFM,UV-VIS光谱和四探针技术等测试和分析手段系统研究了氧对薄膜的成分、结构、光学和电学等性质的影响.结果表明,用近空间升华法制备的CdS薄膜具有六方相结构,膜层致密、均匀,平均晶粒大小约为40 nm,富硫.氧掺入后部分与镉生成氧化镉,并随着氧含量的增加,薄膜的成分有趋于化学计量比的趋势,光学带隙加宽,光暗电导比增加.此外,还利用扫描电镜（SEM）观察了CdS/CdTe断面结合光谱响应（QE）的结果讨论了氧对CdS/CdTe界面互扩散的影响.发现,随着CdS薄膜制备气氛中氧分压的升高,CdS/CdTe界面的互扩散程度降低,有利于提高器件在500—600 nm波长范围内的光谱响应.认为,氧含量的增加不但使CdS薄膜在光伏应用方面的质量得到改善,而且CdTe太阳电池器件中的CdS/CdTe界面也得到了优化. 关键词： CdS多晶薄膜 近空间升华法 窗口层 界面     

电子束蒸发沉积CdS掺Cl~-薄膜及其性能研究

以CdS、CdCl2混合物为薄膜材料运用电子束蒸发法,制备了不同比例的CdS掺Cl-薄膜。利用X射线衍射仪(XRD)、四探针测试仪和紫外可见光光谱仪,对所制备薄膜的结构、光学及光电导性能进行了测试。结果表明:采用此方法制备的CdS薄膜为六角纤锌矿结构的多晶薄膜,且具有垂直于基底c轴的(002)晶面优势取向。Cl-掺杂摩尔分数为0.1%时可提高薄膜的结晶性且掺杂浓度变化对光能隙的影响很小,仅变化0.07eV;其中亮方块电阻最小值为100Ω/□,光敏性达到了2.9×105。说明经过Cl-的掺杂处理可以明显改善CdS薄膜结晶质量和光学及光电导性能。     

化学水浴法制备大面积CdS薄膜及其光伏应用

采用化学水浴法制备了大面积CdS多晶薄膜,研究了薄膜的形貌、结构和光学性质,结果表明,大面积CdS多晶薄膜具有良好的均匀性,通过优化CdS多晶薄膜,制成了不同CdS窗口层厚度的CdTe小面积太阳电池,减薄CdS薄膜可有效提高器件的短路电流,改善器件性能.随后,在面积30cm×40cm的衬底上制备了全面积为993.6cm²的CdTe太阳电池组件,其27个集成单元的电学性质较为均匀,太阳电池组件的光电转换效率8.13%. 关键词： 化学水浴法(CBD) CdS薄膜 CdTe太阳电池 CdTe太阳电池组件     

CdS薄膜的化学沉积法制备及其特性的研究

用化学沉积方法在沉积温度为90 ℃下制备了CdS薄膜。研究了直接退火处理和涂敷CdCl₂甲醇饱和溶液后退火处理对CdS薄膜的影响。利用X射线衍射、扫描电子显微镜对薄膜的晶体结构、表面形貌进行了研究,发现没有任何处理的CdS薄膜没有明显的晶型;直接退火处理促进了CdS立方相的结晶,晶粒没有增大且生长出许多细小的晶粒;涂敷CdCl₂甲醇饱和溶液后退火处理不仅极大地促进了CdS六角相的结晶,而且晶粒增粗增大,表面更加光滑。用吸收光谱研究了薄膜的光学特性,发现退火使薄膜的禁带宽度变窄,涂敷CdCl₂甲醇溶液后退火处理使吸收边变陡和带尾变小。表明涂敷CdCl₂甲醇溶液退火处理明显改善CdS薄膜的结晶质量和光学性质。     

带隙可调的CdS纳米晶薄膜的化学浴制备和光学性质

CdS是一种直接带隙半导体,室温下其禁带宽度约为2.4eV,是一种良好的太阳能电池窗口层材料和过渡层材料。分别以CdCl2和(NH2)2CS作为镉源和硫源,用化学淀积法在玻璃上生长CdS纳米薄膜,考察了Cd2 浓度、淀积温度、淀积时间以及溶液pH值对CdS成膜的影响。紫外可见光吸收谱和荧光光谱的结果表明,在样品的制备过程中,通过改变反应条件如化学试剂的浓度、加热温度、加热时间等来控制薄膜中颗粒的尺寸大小,随着反应温度的逐渐降低或反应时间的减少等可以使得到的CdS纳米晶薄膜中晶粒尺寸逐渐减小,带隙增加;镉离子浓度越小或氨水浓度越大,所得CdS纳米晶薄膜带隙越大。     

不同衬底和CdCl2退火对磁控溅射CdS薄膜性能的影响

在科宁7059玻璃, FTO, ITO, AZO四种衬底上磁控溅射CdS薄膜, 并在CdCl₂+干燥空气380 ℃退火, 分别研究了不同衬底和退火工艺对CdS薄膜形貌、结构和光学性能的影响. 扫描电子显微镜形貌表明: 不同衬底原位溅射CdS薄膜的形貌不同, 退火后相应CdS薄膜的晶粒度和表面粗糙度明显增大. XRD衍射图谱表明: 不同衬底原位溅射和退火CdS薄膜均为六角相和立方相的混相结构, 退火前后科宁7059玻璃, FTO, AZO衬底上CdS薄膜有 H(002)/C(111) 最强衍射峰, ITO衬底原位溅射CdS薄膜没有明显的最强衍射峰, 退火后出现 H(002)/(111) 最强衍射峰. 紫外-可见分光光度计分析表明: AZO, FTO, ITO, 科宁7059玻璃衬底CdS薄膜的可见光平均透过率依次减小, 退火后相应衬底CdS薄膜的可见光平均透过率增大, 光学吸收系数降低; 退火显著增大了不同衬底CdS薄膜的光学带隙. 分析得出: 上述结果是由于不同衬底类型和退火工艺对CdS多晶薄膜的形貌、结构和带尾态掺杂浓度改变的结果. 关键词： CdS薄膜 磁控溅射 退火再结晶 带尾态     

化学浴沉积法制备CdS多晶薄膜

利用化学浴沉积法制备适合于铜铟镓硒薄膜太阳能电池缓冲层材料的CdS多晶薄膜,研究了在不同温度和不同时间下沉积薄膜的性质．薄膜生长开始由ion-by-ion机制控制,随着时间的进行,cluster-by-cluster机制占据主导．薄膜的生长速度随着沉积温度的升高而快速增加,直到达到饱和厚度．并且饱和厚度随温度升高而相应降低．SEM表明随沉积时间增加以及温度升高,薄膜表面形貌从多孔到粗糙的不均匀转变．XRD结果显示,薄膜由立方和六方两相结构组成,控制沉积时间对薄膜的主要晶相结构很关键．所有温度下沉积的CdS     

不同温度下制备的CdTe薄膜对太阳电池光电性能的影响

在不同温度下用近空间升华法（CSS）制备了CdTe多晶薄膜,结合I-V,C-V特性及深能级瞬态谱研究了不同温度制备的CdTe薄膜对CdS/CdTe太阳电池性能的影响.结果表明,制备温度对电池组件的开路电压影响不大,对短路电流和填充因子有影响,CdTe薄膜的深中心对温度和频率的响应基本一致.580℃制备的样品暗饱和电流密度最小,载流子浓度较高,光电特性较好,而且空穴陷阱浓度较低,深中心复合作用较小.在此研究基础上制备出了面积为300 mm×400 mm 关键词： 制备温度 CdTe薄膜 深能级瞬态谱（DLTS） CdS/CdTe太阳电池     

AFM, XPS and RBS studies of the growth process of CdS thin films on ITO/glass substrates deposited using an ammonia-free chemical process

This paper deals with a detailed study of the growth stages of CdS thin films on ITO/glass substrates by chemical bath deposition (CBD). The chemical and morphological characterization was done through X-ray photoelectron spectroscopy (XPS), Rutherford backscattering spectrometry (RBS), and atomic force microscopy (AFM) techniques. On the other hand, optical transmission and X-ray diffraction (XRD) measurements were performed in order to study the optical and structural properties of the films. The time, the chemistry, and morphology of the different stages that form the growth process by CBD were identified through these results. Furthermore, clear evidence was obtained of the formation of Cd(OH)₂ as the first chemical species adhered to the substrate surface which forms the first nucleation centers for a good CdS formation and growth. On the other hand, the ITO coating caused growth stages to occur earlier than in just glass substrates, with which we can obtain a determined thickness in a shorter deposition time. We were able to prove that CBD is a good technique for the manufacture of thin films of semiconductor materials, since the CdS film does not have any impurities. Completely formed films were transparent, uniform, with good adherence to the substrate, of a polycrystalline nature with a hexagonal structure. These results indicate that films obtained by CBD are good candidates to be applied in different optoelectronic devices.     

Controlled synthesis, characterization and optical properties of CdS nanocrystalline thin films via chemical bath deposition (CBD) route

In this study, the CdS nanocrystalline thin films obtained from an ammonia-free chemical bath deposition process. The crystallites with a size range of 10–20 nm in diameter with zinc blend (cubic) and wurtzite (hexagonal) crystal structure and strong photoluminescence were prepared from the mixture solutions of: cadmium chloride dihydrate as a cadmium source, thiourea as a sulfur source and sodium citrate dihydrate as a complexing agent for cadmium ions. The well-cleaned glass used as a substrate for thin films deposition. The obtained samples were characterized by the techniques such as scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray diffraction (XRD), X-ray photoelectron spectra (XPS), atomic force microscopy (AFM) and fluorescence spectroscopy. Also, the effect of two parameters such as pH and temperature of reaction on the synthesis of CdS nanocrystals was studied. Finally, it was found the CdS nanocrystals showed sharp excitation features and strong “band-edge” emission.     

Photoluminescence studies on nanostructured cadmium sulfide thin films prepared by chemical bath deposition method and annealed at different temperatures

Nanostructured cadmium sulfide (CdS) thin films have been prepared by chemical bath deposition (CBD) method and after post deposition annealing of the thin films at different temperatures, photoluminescence (PL) property has been studied. The effects of various photoexcitation wavelengths on the PL behaviour of different annealed films of CdS were studied by recording the PL spectra. The intensity of PL, the profile of the PL spectra and the effects of photoexcitation wavelength depend drastically on the temperature of the post deposition annealing of the thin films. The XRD patterns of the films show the presence of both the hexagonal and cubic phases (mixed phases). The emission peak arises from the surface defects of the CdS nanocrystalline thin films. Significant modification in the surface morphology of the CdS films upon annealing has been observed from the FESEM images. The morphology of the thin films is expected to influence the PL behaviour of the CdS thin films. The quantum size effect and size dependant PL have been observed.     

The comparison between CdS thin films grown on Si(111) substrate and quartz substrate by femtosecond pulsed laser deposition

Two kinds of cadmium sulfate (CdS) thin films have been grown at 600 °C onto Si(111) and quartz substrates using femtosecond pulsed laser deposition (PLD). The influence of substrates on the structural and optical properties of the CdS thin films grown by femtosecond pulsed laser deposition have been studied. The CdS thin films were characterized by X-ray diffraction (XRD), atomic force microscopy (AFM), scanning electron microscopy (SEM), photoluminescence (PL) and Raman spectroscopy. Although CdS thin films deposited both on Si(111) and quartz substrates were polycrystalline and hexagonal as shown by the XRD , SEM and AFM results, the crystalline quality and optical properties were found to be different. The size of the grains for the CdS thin film grown on Si(111) substrate were observed to be larger than that of the CdS thin film grown on quartz substrate, and there is more microcrystalline perpendicularity of c-axis for the film deposited on the quartz substrate than that for the films deposited on the Si substrate. In addition, in the PL spectra, the excitonic peak is more intense and resolved for CdS film deposited on quartz than that for the CdS film deposited on Si(111) substrate. The LO and TO Raman peaks in the CdS films grown on Si(111) substrate and quartz substrate are different, which is due to higher stress and bigger grain size in the CdS film grown on Si(111) substrate, than that of the CdS film grown on the amorphous quartz substrate. All this suggests that the substrates have a significant effect on the structural and optical properties of thin CdS films. PACS 81.15.Fg; 81.05.Ea; 78.20.-e; 78.67.-n; 42.62.-b     

Investigation of CdS and CdTe thin films and influence of CdCl2 on CdTe/CdS structure

CdTe/CdS heterojunction solar cell structure has been fabricated using simple, easy and low-cost methods. To fabricate this structure, CdS and CdTe thin films are deposited onto FTO-coated conducting glass substrates by chemical bath deposition (CBD) and electrodeposition method, respectively. The optimized growth conditions are chosen for both CdS and CdTe films by investigating the optical, structural and morphological properties of both the as-deposited and annealed films. Optical measurement showed that CdS films have higher transmittance and lower absorbance, and CdTe films have lower transmittance and higher absorbance in the near infrared region. The band gap of CdS films is estimated to lie in the range 2.29–2.41 eV and that of CdTe films is in the range 1.53–1.55 eV. X-ray diffraction (XRD) study reveals that CdS and CdTe films are polycrystalline with preferential orientation of (1 1 1) plane. Scanning electron microscopy (SEM) study reveals that both films are smooth, void-free and uniformly distributed over the surface of the substrate. Fabricated CdTe/CdS structure showed the anticipated rectifying behaviour, and the rectifying behaviour is observed to improve due to CdCl₂ treatment.     

反应前驱物中n(S)∶n(Cd)对CdS薄膜结构及发光特性的影响

采用化学水浴以CdCl2·H2O、CS( NH2)2、NH4Cl、NH3·H2O和去离子水作为反应前驱物制备CdS纳米晶薄膜.采用扫描电镜( SEM)、X射线衍射(XRD)、透射光谱和稳态荧光光谱,研究了反应前驱物中不同的n(S)∶n(Cd)对所制备的CdS薄膜的形貌、结构和光学性能的影响.结果表明:反应前驱物中n(S...     

Optical and structural properties of CdS thin films grown by chemical bath deposition doped with Ag by ion exchange

In this work thin CdS films using glycine as a complexing agent were fabricated by chemical bath deposition and then doped with silver (Ag), by an ion exchange process with different concentrations of AgNO₃ solutions. The CdS films were immersed in silver solutions using different concentrations during 1 min for doping and after that the films were annealed at 200 °C during 20 min for dopant diffusion after the immersion on the AgNO₃ solutions. The aim of this research was to know the effects of different concentrations of Ag on the optical and structural properties of CdS thin films. The optical band gap of the doped films was determined by transmittance measurements, with the results of transmittance varying between 35% and 70% up to 450 nm in the electromagnetic spectra and the band gap varying between 2.31 and 2.51 eV depending of the silver content. X-ray photoelectron spectroscopy was used to study the influence of silver on the CdS:Ag films, as a function of the AgNO₃ solution concentration. The crystal structure of the thin CdS:Ag films was studied by the X-ray diffraction method and the film surface morphology was studied by atomic force microscopy. Using the ion exchange process, the CdS films’ structural, optical and electric characteristics were modified according to silver nitrate concentration used.     

CdSyTe1-y多晶薄膜的制备及光谱表征

采用真空共蒸发法制备了CdSyTe1-y(0≤y≤1)多晶薄膜,并用X射线衍射谱(XRD)、能量色散谱(EDS)研究了CdSyTe1-y多晶薄膜的结构、组分。实验结果表明:石英振荡法监控的组分与EDS谱结果较为一致;当y<0·3时,CdSyTe1-y多晶薄膜为立方结构,当y≥0·3时,CdSyTe1-y多晶薄膜为六方结构。采用XRD线形分析法可计算出CdSyTe1-y多晶薄膜晶粒大小约20～50nm。最后,用紫外-可见-近红外谱(UV-Vis-NIR),测得300～2500nmCdSyTe1-y多晶薄膜的透过率曲线,并结合一阶Sellmeier模型的折射率色散关系,表征了CdSyTe1-y多晶薄膜的光学性质,获得了CdS0·22Te0·78多晶薄膜的光学厚度d～535nm,光能隙Eg～1·41eV,以及吸收系数α(λ)、折射率n(λ)等光学量。结果也表明,采用真空共蒸发法可以制备需要组分的CdSyTe1-y多晶薄膜,对CdSyTe1-y多晶薄膜光学性质的表征方法可推广到其他的半导体薄膜材料。     

Morphological and chemical study of the initial growth of CdS thin films deposited using an ammonia-free chemical process

We study the initial growth stages of CdS thin films deposited by an ammonia-free chemical bath deposition process. This ammonia-free process is more environmentally benign because it reduces potential ammonia release to the environment due to its high volatility. Instead of ammonia, sodium citrate was used as the complexing agent. We used atomic force microscopy (AFM), Rutherford backscattering (RBS) and X-ray photoelectron spectroscopy (XPS) to investigate the morphological and chemical modifications at the substrate surface during the first initial stages of the CdS deposition process. Additionally, X-ray diffraction (XRD) and optical transmission spectroscopy measurements were carried out to compliment the study. XPS results show that the first nucleation centers are composed by Cd(OH)₂ which agglomerate in patterns of bands, as demonstrated by AFM results. It is also observed that the conversion to CdS (by anionic exchange) of the first nucleus begins before the substrate surface is completely covered by a homogenous film.