基于p偏振光双面反射的薄膜传感器光学参数的优化

ｐ偏振光在镀膜平板玻璃上、下表面反射光强比γ的角度调制曲线的性状与膜层光学参数密切相关。分析了γ与膜层折射率、消光系数及膜厚的相对梯度随光参数变化的着急为基于ｐ偏振光双面反射的薄膜传感器选择最佳参数提供了理论依据,计算表明该类型传感器对膜层折射率的测量分辨率高达１０＾－７。对不同工艺条件下得到的溶胶－凝胶ＳｎＯ２膜进行光学参数测定及初步气敏实验,结果表明ｐ偏振光双面反射可作为高灵敏度光化学传感器的     

玻璃表面层光学参数分布的研究

利用并改进平板玻璃两面Ｐ偏振光反射光强比的测量来确定玻璃表面光学参数的方法，测量了平板玻璃两面Ｐ偏振光反射光强比γ与入射角θｉ的关系曲线，运用新的表面层模型进行数据模拟，获得了表面层的光学参数分布。     

玻璃表面层对薄膜光学参数测量的影响

利用p偏振光在镀膜平板玻璃前后表面反射光强比γ与膜层光学参数之间的密切关系,给出了玻璃表面层的光学参数分布。对典型的薄膜系统-单面镀膜与双面镀膜两种情况,理论分析了玻璃表面层对薄膜光学参数测量的影响。实验上对PMTES和SnO₂薄膜参数进行了测量,仅当计及玻璃表面层作用时,反射光强比γ的角度调制曲线才与理论拟合结果相吻合.     

不同热处理的GeTe薄膜的光学参数测量

运用一种新的测量单面镀膜膜层光学参数的方法，对不同热处理的ＧｅＴｅ半导体薄膜样品的光学参数进行了测量，准确地获得了被测薄膜材料的光学参数，并采用椭圆偏振光谱测量作比较研究。经此为基础，对用椭偏仪测得的数据进行拟合计算，得出了样品材料在２５０～８３０ｎｍ波段范围的复折射曲线。     

金刚石薄膜的红外椭圆偏振光谱研究

采用红外椭圆偏振光谱对微波等离子体化学气相沉积法（MPCVD）和热丝化学气相沉积法（H-FCVD）制备的金刚石薄膜在红外波长范围（2.5—12.5μm）的光学参数进行了测量.建立了不同的光学模型，且在模型中采用Bruggeman有效介质近似方法综合考虑了薄膜表面和界面的椭偏效应.结果表明，MPCVD金刚石膜的椭偏数据在模型引入了厚度为77.5nm的硅表面氧化层、HFCVD金刚石膜引入879nm粗糙层之后能得到很好的拟合.最后对两种模型下金刚石薄膜的折射率和消光系数进行了计算，表明MPCVD金刚石薄膜的红外 关键词： 金刚石薄膜 红外椭圆偏振光谱 光学参数 有效介质近似     

双折射消偏振膜的设计和制备

基于倾斜沉积薄膜材料的双折射特性,采用单一TiO2设计和制备了中心波长为632 nm的双折射消偏振膜。首先以60°和70°的沉积角度镀制了TiO2单层膜,通过单层膜的透射光谱分别拟合出两种沉积角度下薄膜对s和p偏振光的等效折射率nPH,nSH和nPL,nSL。通过对折射率的组合,实现正入射时s偏振光透射率大于p偏振光,而入射角度增大会使两者透射率差值减小,基于这一思想设计并制备了消偏振膜。分别测量了消偏振薄膜在400~800 nm波段范围内正入射及倾斜入射条件下s和p偏振光的透射光谱。入射角为60°时,s偏振光反射带宽基本与p偏振光反射带宽重合,在波长632 nm左右基本实现消偏振。结果表明,利用材料的双折射特性,可以设计和制备出倾斜入射条件下消偏振薄膜。     

纳米有机薄膜有效导电层的反射光谱法研究

为研究纳米厚度有机薄膜生长过程中有效导电层的判定方法,揭示反射光谱蕴含的薄膜生长机理,基于多相膜层等效结构和光学菲涅耳方程建立了材料光学系数和膜层厚度为参数的差分反射光谱数学模型,提出了依据相对拟合误差的拟合度评价方法.通过分析室温真空环境纳米厚度并五苯薄膜在Si/SiO_2基底上生长过程的差分反射光谱,发现采用四相膜层结构和并五苯薄膜晶体结构光学系数拟合的差分反射光谱与实验数据符合良好,确认并五苯分子主要以薄膜结构的形态进行生长,膜厚生长速率约为0.2 nm/min.该方法避免了反射光谱中多膜层结构产生的干涉信号对生长机理分析的影响.更为重要的是,相对拟合误差随生长时间的变化趋势与由薄膜构建的场效应管结构的电学特性呈现出明显的相关性,不仅反映了生长过程中薄膜成膜模式的演变趋势,还清晰地揭示了有效导电层的形成过程,为光谱法研究薄膜生长机理和无法进行电学测试的条件下监测薄膜电学特性提供了新手段.     

纳米尺度HfO_2薄膜不同厚度对光学性质的影响

Hf O_2薄膜厚度达到纳米级别时,其光学性质会发生变化。光谱椭偏仪能够同时得到纳米尺度薄膜的厚度和光学常数,但是由于测量参数的关联性,光学常数的结果不准确可靠。本文采用溯源至SI单位的掠入射X射线反射技术对纳米尺度Hf O_2薄膜厚度进行准确测量,再以该量值为准确薄膜厚度参考值。利用光谱椭偏仪测量Hf O_2膜厚和光学常数时,参考膜厚量值,从而得到对应相关膜厚的薄膜准确光学参数。研究了以Al2O_3作为薄膜缓冲层的名义值厚度分别为2,5,10 nm的超薄Hf O_2薄膜厚度对光学性质的影响。实验结果表明,随着Hf O_2薄膜厚度的增加,折射率也逐渐增大,在激光波长632.8 nm下其折射率分别为1.901,2.042,2.121,并且接近于体材料,而消光系数始终为0,表明纳米尺度Hf O_2薄膜在较宽的光谱范围内具有较好的增透作用,对光没有吸收。     

CdS薄膜的染料敏化

用ＬＢ方法在电沉积ＣｄＳ薄膜上修饰了ＰｃＣｕ单分子膜，并利用表面光电压谱对ＣｄＳ薄膜与ＰｃＣｕ修饰的ＣｄＳ薄膜进行了测试。结果表明，修饰后的ＣｄＳ薄膜其表面光电压值提高约５０倍，并且光电压响应由３００－５００ｎｍ扩展为３００－７００ｎｍ。紫外－可见偏振光谱测试表明，ＬＢ膜中酞菁环的取向角为４５度。     

GeSg2Te4相变光存储薄膜材料的短波长静态记录特性的研究

研究了单层ＧｅＳｂ２Ｔｅ４真空射频溅射薄膜在４００ｎｍ－８３０ｎｍ区域的吸收，反射光谱和光学常数，发现ＧｅＳｂ２Ｔｅ４薄膜在４００ｎｍ－６００ｎｍ波长范围内具有较强的吸收。在短波长静态测试仪上测试了ＧｅＳｂ２Ｔｅ４薄膜的光存储记录特性，发现在５１４．５ｎｍ波长用较低功率的激光辐照样品时薄膜在写入前后的反射率变化较大，擦除前后的发射率对比度较低，可通过膜层设计来提高。     

Optical study of dye-containing fluorinated polyimide thin films

Thin films of dye-containing fluorinated polyimide have been obtained by adding the dye powder to the polyamic acid resin and by spin coating the resulting solution on silica and silicon substrates. 6FDA (4,4’-hexafluoroisopropylidene diphthalic anhydride) and DAB (diaminobenzophenone) have been used as precursor monomers and rhodamine B as dye. The influence of the rhodamine-B molecule on the completeness of the imidization process has been studied by coupled thermogravimetric and mass-spectrometric analyses (TG-MS) of pure and doped polyamic acid resin and by FT-IR analysis of samples before and after curing. Optical emission, excitation and absorption spectra have been collected in order to study spectroscopic and aggregation characteristics of rhodamine as a function of the deposition parameters. Received: 2 March 2000 / Accepted: 24 July 2000 / Published online: 9 November 2000     

硅薄膜太阳电池表面纳米线阵列光学设计

陷光结构的优化是增加硅薄膜太阳电池光吸收进而提高其效率的关键技术之一. 以硅纳米线阵列为代表的光子晶体微纳陷光结构具有突破传统陷光结构Yablonovith极限的巨大潜力. 通常硅纳米线阵列可以用作太阳电池的增透减反层、轴向p-n结、径向p-n结. 针对以上三种应用, 本文运用有限时域差分(FDTD)法系统研究了硅纳米线阵列在 300-1100 nm 波段的光学特性. 结果表明, 当硅纳米线作为太阳电池的减反层时, 周期P=300 nm, 高度H=1.5 μm, 填充率(FR)为0.282条件下时, 反射率最低为7.9%. 当硅纳米线作为轴向p-n结电池时, P=500 nm, H=1.5 μm, FR=0.55条件下纳米线阵列的吸收效率高达22.3%. 硅纳米线作为径向p-n结电池时, 其光吸收主要依靠纳米线, 硅纳米线P=300 nm, H=6 μm, FR= 0.349 条件下其吸收效率高达32.4%, 进一步提高其高度吸收效率变化不再明显. 此外, 本文还分析了非周期性硅纳米线阵列的光学性质, 与周期性硅纳米线阵列相比, 直径随机分布和位置随机分布的硅纳米线阵列都可以使吸收效率进一步提高, 相比于周期性硅纳米线阵列, 优化后直径随机分布的硅纳米线阵列吸收效率提高了39%, 吸收效率为27.8%. 本文运用FDTD法对硅纳米线阵列的光学特性进行设计与优化, 为硅纳米线阵列在太阳电池中的应用提供了理论支持.     

Influence of binder viscosity on the control of infrared emissivity in low emissivity coating

Low emissivity is the complex system and polymer binder is one of the most important factors that affect optical and mechanical properties of the coating. Low infrared emissivity coatings were prepared by using flake aluminum particles and three types of polymer resins as fillers and binders, respectively. The influence of polymer binder viscosity on pigment particles distribution, surface morphology and infrared emissivity of the coating was systematically investigated. The results indicate that infrared emissivity of the coating can be strongly affected by the resin viscosity at the same preparation condition, which induces different aluminum particles distribution and surface morphology of the coating. Low resin viscosity is helpful for aggregating pigments and reducing the top polymer layer thickness near the surface, thus the infrared emissivity is reduced. If the resin viscosity value is decreased by two orders of magnitude, the infrared emissivity values would be reduced as much as 0.2. Additionally, a theoretical model is proposed to account for this mechanism, which indicates that sedimentation, evaporation and diffusion play important roles in forming different aluminum particles distribution during the drying process of the coating.     

Light trapping by chemically micro-textured glass for crystalline silicon solar cells

Results of the studies of optical properties of anti-reflective glasses with various texturization patterns, which were used as a coating for crystalline silicon solar cells, are presented. It was found that glass samples sorted by their optical transmittance demonstrated the same order as when sorted by their solar-cell short-circuit current enhancement parameter. The value of the latter depended on the parameters of texturization, such as the surface density of inclusions and their profile, and the depth of etching pits. A 2% relative increase of the solar cell efficiency was obtained for the best glass sample for null degree angle of incidence, proving enhanced light trapping properties of the studied glass.     

Parylene anti-reflection coating of a quasi-optical hot-electron-bolometric mixer at terahertz frequencies

Parylene C was investigated as anti-reflection coating for silicon at terahertz frequencies. Measurements with a Fourier-transform spectrometer show that the transmittance of pure silicon can be improved by about 30% when applying a layer of Parylene C with a quarter wavelength optical thickness. The 10% bandwidth of this coating extends from 1.5 to 3 THz for a center frequency of 2.3–2.5 THz, where the transmittance is constant. Heterodyne measurements demonstrate that the noise temperature of a hot-electron-bolometric mixer can be reduced significantly by coating the silicon lens of the hybrid antenna with a quarter wavelength Parylene C layer. Compared to the same mixer with an uncoated lens the improvement is about 30% at a frequency of 2.5 THz.     

Whispering gallery modes in silicon-nanocrystal-coated silica microspheres

Silica microspheres were deposited into two-dimensional periodic arrays and coated with a thin layer of silicon nanocrystals. The luminescence from the silicon nanocrystals coupled into the whispering gallery modes of the spheres, with Q factors that depended on a range of parameters including sphere size, position on the sphere, viewing direction, and thickness of the nanocrystal coating. Scattering from the film-sphere and/or the sphere-substrate contacts resulted in a lower Q for modes that intersect these regions. The highest Q factors obtained in this work were ∼1500. The results suggest that silica microspheres may be promising candidates for high-Q cavities that incorporate silicon nanocrystals for cavity QED or nonlinear optical effects.     

Preparation and atomic oxygen erosion resistance of silica film formed on silicon rubber by sol-gel method

Based on the characteristic that silicon coupling agents have the capability to develop ‘molecular bridge’ in the interface of organic materials and inorganic materials, silica films were prepared on the surface of flexible silicon rubber by sol-gel method and the optical transmittance of the sample before and after atomic oxygen irradiation was tested. The surface morphology and structure of silica films were investigated by scanning electronic microscope (SEM) and Fourier transformed infrared spectroscopy (FTIR). The results indicated that the silica sol could easily form a uniform thin film on the surface of silicon rubber pretreated by high concentration silicon coupling agents, and the inorganic silica films could combine with organic silicon rubber without obvious delamination on the interface.     

All-fibre optical system for exciting and detecting the vibration of silicon microresonator sensors

An all-fibre optical system for optical interrogation and detection of the vibrations of a silicon microresonator is reported. Metal-coated silicon microresonators are excited by intensity modulated laser light delivered through an optical fibre, while the vibration of the resonators is detected by an optical fibre interferometer. Measurements have shown that an average optical power of 10 μW is sufficient to maintain the flexural vibration of the resonator. When the resonator is used as a pressure sensor, its resonant frequency changes from 62 kHz to 130 kHz as the pressure varies from -0°6 bar to 1 bar (gauge). A silicon resonator with 700 nm aluminium coating functions as a temperature sensor, showing a frequency shift from 262 kHz to 251 kHz when the temperature changes from 25 °C to 80 °C.     

激光辐射致热单层薄膜温度响应

用热传导方程计算了在脉宽10ns、波长1.06μm的激光辐射下,TiO_2单层膜的温度场分布.结果表明:膜层的热参数增大,其峰值温度明显降低,而基板热参数变化对膜层温度响应影响很小,温度场分布由电场分布决定,1/4波长薄膜的峰值温度低于半波长薄膜的峰值温度.     

等离子体浸没离子注入制备黑硅抗反射层及其光学特性研究

表面织构是一种有效降低表面反射率、提高硅基太阳能电池效率的方法. 采用等离子体浸没离子注入的方法制备了黑硅抗反射层.分别通过原子力显微镜和紫外-可见-近红外分光光度计对黑硅样品表面形貌和反射率进行分析, 结果发现黑硅样品表面布满了高度为0—550 nm的山峰状结构, 结构层中硅体积分数和折射率随抗反射层厚度增加而连续降低. 在300—1000 nm波段范围内,黑硅样品的加权平均反射率低至6.0%. 通过传递矩阵方法对黑硅样品反射谱进行模拟,得到的反射谱与实测反射谱非常符合.