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激光辐射致热单层薄膜温度响应
引用本文:汤雪飞,范正修.激光辐射致热单层薄膜温度响应[J].光学学报,1992,12(11):032-1037.
作者姓名:汤雪飞  范正修
作者单位:中国科学院上海光学精密机械研究所 上海201800 (汤雪飞,范正修),中国科学院上海光学精密机械研究所 上海201800(王之江)
摘    要:用热传导方程计算了在脉宽10ns、波长1.06μm的激光辐射下,TiO_2单层膜的温度场分布.结果表明:膜层的热参数增大,其峰值温度明显降低,而基板热参数变化对膜层温度响应影响很小,温度场分布由电场分布决定,1/4波长薄膜的峰值温度低于半波长薄膜的峰值温度.

关 键 词:温度分布  薄膜  热导率  激光技术
收稿时间:1992/1/13

Temperature response of laser induced thin film heating
TANG XIUFEI FAN ZHENGXIU WANG ZKIJIANG.Temperature response of laser induced thin film heating[J].Acta Optica Sinica,1992,12(11):032-1037.
Authors:TANG XIUFEI FAN ZHENGXIU WANG ZKIJIANG
Abstract:Temperature distribution of TiO2 single layer irradiated by 10ns, 1.06μm wavelength laser pulse was calculated with thermal transfer equation. Following conclusions were obtained; to improve thermal parameters of coating can reduce the peak temperature obviously, the thermal parameters of substrate have little effect on temperature response of coating, temperature distribution of thin film depends on the electrical field distribution. The peak temperature of coating with a quarter-wavelength optical thickness is lower than that of coating with a half-wavelength optical thickness.
Keywords:Temperature distribution  thin film  thermal parameters  
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