掺杂丙烯酸酯合成及泡沫原位成型技术

辐射输运研究是惯性约束聚变实验研究的重要内容。在这类实验中需要研究辐射输运沿柱腔内填充的聚合物泡沫材料的传输问题。多元丙烯酸酯聚合物泡沫适用于ICF柱腔靶填充泡沫，并且可以直接在柱腔或各种形状的靶中成型，无须后续的精密加工过程，消除了泡沫柱与柱腔之间的装配误差。     

Z箍缩驱动动态黑腔中的基本能量转移特征

动态黑腔是Z箍缩应用的重要途径,它可以为惯性约束聚变靶丸烧蚀内爆提供均匀对称的辐射场,也可以为辐射不透明度测量的样品提供加热源和背光源.动态黑腔中的辐射场特征与驱动电流、黑腔结构和材料组成等密切相关,在宏观上它由黑腔中能量转移决定.为了快速地获得动态黑腔中基本能量的转移特征,以及它们随黑腔结构、线质量、驱动电流参数等的变化趋势,本文采用简单的物理模型来描述动态黑腔的内爆行为.就泡沫柱内爆动能与一维辐射磁流体力学程序的模拟结果进行了比较,两者比较接近.在惯性约束聚变应用的动态黑腔中,丝阵等离子体与泡沫柱碰撞时的动能损失对辐射场的形成很重要;而在辐射源应用的动态黑腔中,动能损失和泡沫柱最后内爆达到的动能都重要.泡沫柱最后获得的最大内爆动能与驱动电流的幅值平方成正比,碰撞动能损失随泡沫柱质量的增加而增大.电流上升时间变小,则泡沫柱中的质量能量密度要增大,从而辐射功率也要增大.     

Z箍缩动态黑腔中泡沫柱的装配精度和误差源分析北大核心CSCD

为了提高Z箍缩动态黑腔中低密度泡沫柱的装配精度,基于辅助移动平台和视觉识别工艺的基础上,对低密度泡沫柱装配的误差源进行了分析与建模。建立设计、加工和装配误差源传递模型和低密度泡沫柱装配同轴度及轴向夹角精度预测模型,获得各误差源对低密度泡沫柱装配精度的影响大小和规律。最后采用某负载进行了模型的有效性验证,当泡沫柱粘接随机位置误差较小时,同轴误差预测值与实测值偏差为0.01-0.03mm,轴向夹角预测值与实测值偏差为0.05°-0.34°。实践表明,该方法可为低密度泡沫柱装配精度的预测和误差源控制提供一定的理论支撑。     

基于过焦扫描光学显微镜的光学元件亚表面缺陷检测方法

微/纳米尺度亚表面缺陷会降低光学元件等透明样品的物理特性,严重影响光学及半导体领域加工制造技术的发展。为了快速、无损检测透明样品亚表面缺陷,本文针对光学元件亚表面内微米量级缺陷的检测需求,提出了一种基于过焦扫描光学显微镜（TSOM）的检测方法。利用可见光光源显微镜和精密位移台,沿光轴对亚表面缺陷进行扫描,得到亚表面缺陷的一系列光学图像。将采集到的图像按照空间位置进行堆叠,生成TSOM图像。通过获得所测特征的最大灰度值来获得亚表面缺陷的定位信息。提出方法对2000μm深亚表面缺陷的定位相对标准差达到0.12%。该研究为透明样品亚表面缺陷检测及其深度定位提供了一种新方法。     

用于材料高温光学参数测量的半椭球反射镜光机特性分析

为提升材料高温光学参数测量设备的光能利用率以及在待测样品表面获得更高的辐照度,将半椭球反射镜应用于该设备中。首先介绍材料高温光学参数测量设备以及半椭球反射镜在该设备中的作用,然后利用光线追迹和有限元分析的方法对半椭球反射镜的光学特性和面形变化分别进行分析,接着对半椭球反射镜在30℃下的面形变化对其光学特性的影响进行研究,最后通过三坐标测量仪对半椭球反射镜内表面的面形进行测量,并对仿真结果进行验证。实验结果表明:30℃下,半椭球反射镜去除椭球形变之后的形变量均方根(RMS)为2.15μm,使用Φ15 mm黑体辐射源所获得的辐照均匀度为61%,能量利用率为7.6%,利用三坐标测量仪检测得到的RMS为5.75μm。本研究为测量材料高温光学参数提供了一种新的思路。     

微焦点源X射线相衬成像技术

 相衬成像方法利用硬X射线对低密度弱吸收物质成像，可获得高衬度图像。用菲涅尔衍射理论分析了X射线图像的形成机理。在频域中根据光学传递函数，对物像距离、样品空间频率等对图像相位衬度的影响进行了分析。分辨率和衬度是决定图像可见度的两个依据，分辨率主要依赖于光源的空间相干性，空间相干性又决定于源点尺寸，而时间相干性（单色性）是一个不重要的影响因子。利用多色微焦点源实现了X射线相衬成像技术，获得了有价值的相衬图像，如低原子序数低密度泡沫材料的硬X射线相衬图像，与吸收衬度成像相比，其图像质量得到了很大提高，能观察到泡沫材料的细微结构，分辨率可达μm量级。     

4MA以下电流驱动垂直动态黑腔的自适应性

在4 MA以下电流驱动Z箍缩黑腔辐射特性和耦合效率研究牵引下,研制出了柱型动态黑腔。利用CHO低密度泡沫的自持能力,结合辅助夹具解决了泡沫柱的装配及定位问题。基于负载丝受小应变作用,丝阵和泡沫柱通过μm量级的自由滑动和转动,具备自动适应靶室环境变化能力。实验结果表明:研制出的动态黑腔在Angara-5-1装置环境中具有自动适应能力,各项参数满足物理实验的需求,获得的最高动力学黑腔X光辐射温度为62.7 eV,实验结果重复性优于91.5%。     

生长温度对MOCVD外延ZnO纳米结构的影响

为了探究生长温度对外延ZnO纳米结构的影响,得到ZnO纳米结构可控生长的生长温度条件。利用金属有机化学气相沉积（MOCVD）方法,设计并获得了不同生长温度的ZnO外延样品,并对所有样品进行了表面形貌、光学特性、电学特性表征和结晶质量表征。实验结果表明:600℃生长的ZnO纳米柱横向尺寸最小,为65 nm左右,其光学特性也相对较好,晶体衍射峰的半峰宽最小,为0.165°,晶粒尺寸最大,为47.6 nm;电学性质相对最优的为640℃生长的ZnO样品,霍尔迁移率高达23.5 cm²/（V·s）。通过结果分析发现,生长温度能影响外延ZnO的生长模式,从而影响ZnO的形貌、光学、电学和晶体质量等特性。     

GaN及AlGaN薄膜透射光谱的研究

利用透射光谱矩阵光学原理,对三种GaN或AlGaN外延薄膜的透射光谱进行了分析.在传统的透射光谱拟合方法的基础上,添加了表征材料表面粗糙度、膜内散射情况的拟合参量,拟合曲线与实验曲线达到了准确的吻合.结果表明:外延薄膜透射光谱的拟合可以准确提取出材料的消光系数、表面状况、散射情况、折射率及厚度,从而对样品质量作出详细的分析.     

Z箍缩动态黑腔阴影像诊断研究

为了获得填充泡沫的钨丝阵动态黑腔动力学演化图像, 研究钨等离子体与泡沫柱的相互作用形式, 在1 MA脉冲功率装置上设计了四分幅紫外探针光(266 nm)阴影成像系统, 该系统时间分辨为2.5 ns, 静态空间分辨优于70 μm, 径向阴影图像展示了从固体丝膨胀消融到先驱等离子体与泡沫相互作用, 从泡沫的箍缩到反弹膨胀的全过程. 图像显示了在长约50 ns时间内丝等离子体以雨的形式持续与泡沫相互作用, 在整个箍缩阶段并未观察到等离子体壳层结构. 定量分析表明泡沫柱的最小箍缩速度为1.0×10⁶ cm/s, 最大箍缩速度为6.0×10⁶ cm/s, 在轴上滞止的直径约为1 mm. 通过对数值模拟计算结果的讨论, 明确了在Z箍缩等离子体状态下阴 影成像结果主要反映了逆轫致吸收效应, 与径向功率波形的时间关联给出了钨等离子体主体与泡沫柱相互作用时刻的图像. 关键词： 动态黑腔 阴影像 箍缩速度     

Mode-shape measurement of piezoelectric plate using temporal speckle pattern interferometry and temporal standard deviation

This study proposes an image processing method to improve the quality of interference fringes in mode-shape measurement using temporal speckle pattern interferometry. A vibrating piezoelectric plate at resonance was investigated, and the full-field optical information was saved as a sequence of images. According to derived statistical properties, an algorithm was developed to remove noise from both the background and disturbance, resulting in high-resolution images of excellent quality. In addition, the resonant frequency and mode shape obtained using the proposed algorithm demonstrate excellent agreement with theoretical results obtained by the finite element method.     

Measurement of Wave-Front Aberrations in Lithography Lenses with an Overlay Inspection Tool

Measurement methods using overlay inspection tools have been established for wave-front aberrations in optical lithography lenses used for integrated circuit manufacturing. Three-beam interferometry and asymmetric two-beam interferometry can transform the wave-front aberrations at selected points on the lens pupil to lateral image shifts for fine grating objects. A technique of overlapped exposures makes the image shifts of inner lines of the grating images optically measurable, even if the images are too fine to be resolved optically. These methods are available in the fields of integrated circuit manufacturing and lithography tool assembling. This paper sums up measurement methods for wave-front aberrations. It is experimentally estimated that the methods are equally matched with the phase measuring interferometry widely used in the tool assemblies respecting accuracy and precision.This paper was originally presented at the 2nd International Conference on Optical Design and Fabrication, ODF2000 which was held on November 15–17, 2000 at the International Conference Center, Tokyo, Waseda University, Japan.     

Development of an integrated optical system for warpage and hermeticity test of microdisplay

We have developed an integrated optical system to measure the warpage of a microdisplay product at post-packaging die-attach temperature and to test its hermeticity after manufacturing. This system is constructed based on the principle of Twyman/Green (T/G) interferometry and Newton interferometry. T/G interferometry is used to characterize warpage of the microdisplay's base-plate, while Newton interferometry is used to characterize the gap variance between face-plate and base-plate of the microdisplay. With these measurements, deformation and shape of the microdisplay can be comprehensively determined during its manufacturing process, which is critical for its quality test and reliability evaluation. Delicate mechanical system was designed to facilitate the optics integration and alignment. To evaluate the performance of the optical system itself, warpage of a sample was re-measured with Tailor–Hobson profilometer whose resolution is 10 nm, the results from these two testing systems agree well with each other. Some application examples of the integrated testing system were presented to verify its work efficiency.     

Comparison of phase recovery methods in spiral speckle pattern interferometry correlation fringes

Spiral interferometry can be used as a solution to the problem of sign ambiguity presented in the conventional speckle pattern interferometric technique when the optical phase needs to be reconstructed from a single closed fringe system. Depressions and elevations of the topography corresponding to the object deformation are distinguished by the direction of rotation of the local spiral fringe pattern. In this work, we implement and compare several methods for optical phase reconstruction by analyzing a single image composed of spiral speckle pattern interferometry correlation fringes. The implemented methods are based on contour line demodulation, center line demodulation, Spiral Phase Quadrature Transform and the 2D Riesz transform with multivector structure. Contour line and center line demodulation approaches are exclusively dedicated to images containing a fringe system with spiral structure. The others are based on the 2D Riesz transform, these being well known approaches in conventional interferometry. We examine simulated experiments and analyze some of the emerging drawbacks for solving the phase reconstruction problem by using different mean values of speckle size and background noise levels. We also discuss several numerical procedures that may well improve the efficiency and robustness of the presented numerical implementations. The performance of the implemented demodulation methods is evaluated by using a universal image quality index and therefore a quantitative comparison is also presented.     

Verification of 2-D MEMS model using optical profiling techniques

This paper describes the application of scanning white light interferometry to profile single layer and multilayer, surface micromachined, micromechanical elements. The measured profile data is used to verify a 2-D finite difference model of device deflection under pressure and electrostatic forces. Devices modelled include pressure sensors, switches and process characterisation structures. The model is designed to include effects such as non-rigid structure supports and stress gradients through the structure. The optical profiling is used to quantify the significance and deflection shape resulting from these effects. The optical profiling has been compared with the AFM profiling and some comparisons are made between these methods.     

Determination of the surface parameters for aspheric aphakic lenses

Two methods are proposed for aspherical surface evaluation — scanning and interferometry. Each of these methods enables the determination of the radius of curvature at the lens vertex, the asphericity, astigmatism, rotation asymmetry, surface topography and the deviation of the surface from following the theoretically stated shape. While the scanning technique is low cost and simple, the interferometric technique (which needs optical arrangements) gives more information about the surface quality. These methods, combined with a computer, establish powerful instruments for controlling lens production.     

Measurement of the off-plane displacement of carbon steel corrosion with twin-object-beam electronic speckle interferometry

In this paper, twin-object-beam electronic speckle interferometry is used to study the longitudinal corrosion of carbon steel. The displacement expression of this technique is deduced and optical fibers are used to reduce the influence of the optical system and improve the quality of speckle pattern. Twin-object-beam electronic speckle interferometry cannot only quantitatively cipher out off-plane displacement as a result of corrosion, but also estimate the change of corrosion speed.     

Generalized optical interferometry for modal analysis in arbitrary degrees of freedom

We generalize the traditional concept of temporal optical interferometry to any degree of freedom of a coherent optical field. By identifying the structure of a unitary optical transformation that we designate the generalized phase operator, we enable optical interferometry to be carried out in any modal basis describing a degree of freedom. The structure of the generalized phase operator is that of a fractional optical transform, thus establishing the connection between fractional transforms, optical interferometry, and modal analysis.     

基于液晶体的大错位量散斑相移技术研究

系统地分析了大错位量散斑干涉术测量离面位移的原理,并结合晶体光学理论详细分析液晶体的相移过程．同时从理论上剖析了沃拉斯顿棱镜的错位机理,从而构造出一种新的基于液晶体实现大错位量散斑相移技术的测试系统。采用该检测系统对结构实体混凝土在不同养护时间情况下的力学行为进行测试研究。实验结果揭示：随着养护时间的增加,混凝土结构的力学性能指标也相应增加,但在养护21天后,混凝土结构材料的弹性模量和结构强度都达到某一稳定值(即标准试样在同等养护条件下的实验室测量值)。并且也发现该技术使用方便,检测时受环境的影响小,可以实现现场在线原位实时无损检测,并能够得到非常真实的检测结果,从而可以实现更精确的定量计算。     

一种轻质薄型反射镜的挠性支撑结构设计

宽厚比较大的小型轻质薄型反射镜在宽温度范围及恶劣的环境(尤其是低温-40℃)下易发生变形,严重影响系统成像质量。针对这种情况,以挠性支撑原理为基础,借助于热力学理论设计了一种适用于小型轻质薄型分光反射镜的新型挠性支撑结构,采用有限元技术,对该挠性支撑结构的温度适应性进行了分析,并对装配后的反射镜组件进行了低温试验。试验结果表明:在-40℃温度下,反射镜面形精度峰谷值(PV值)保持在0.25λ(λ＝632.8 nm),这种新型挠性支撑结构能够满足应用环境的使用要求。