长脉冲激光辐照下单层HfO2薄膜的温度场分析

激光系统中的光学薄膜极易受到高能激光的辐照而产生热损伤,因此研究长脉冲激光作用下光学薄膜的温度场非常重要。建立了二维轴对称杂质模型,使用有限元方法计算了单层HfO2薄膜材料的瞬态温度分布,进一步分析了铂金杂质粒子的吸收系数、填满深度对膜层及其基底最大温升的影响。结果表明：相比于纯净HfO2薄膜,当薄膜中杂质粒子深度为100 nm时,其表面最大温度增加1倍左右;当粒子深度大于750 nm时,基底温度高于薄膜表面温度,从而可以使热损伤从薄膜基底开始。研究结果对于长脉冲激光系统中的光学薄膜的制备和预处理,具有一定的指导意义。     

3ω法加热/测温膜中温度波解析及其在微/纳米薄膜导热系数测量中的应用

给出了3ω法测试系统中描述薄膜表面加热/测温膜中温度波动的级数形式解，并将复数温度波动的实部和虚部分开表示.利用该解分析了交流加热频率、加热膜宽度和材料热物性的组合参数对加热膜温度波动幅度的影响.并根据此解对测量原理的数学模型进行了修正，建立了相应的3ω测试系统，首先测定了厚度为500 nm SiO₂薄膜的导热系数，验证了实验系统的合理性.加大了测试频率，利用级数模型在高频段直接得到SiO₂薄膜的导热系数，结合低频段的数据同时确定了Si基体的导热系数.利用级数解分析测试了激光晶体Nd:YAG〈111〉面上多层ZrO₂/SiO₂增透膜的导热系数，测试的ZrO₂薄膜的导热系数比体材料小.进行了不确定度分析.结果表明，提出的分析方法可以有效研究微器件表面薄膜结构的导热性能. 关键词： ω法')" href="#">3ω法 微/纳米薄膜 导热系数 微尺度加热膜     

强激光辐照下窗口材料靶传热及热应力破裂的解析分析

用有限Ｈａｎｋｅｌ积分变换法对轴对称强激光束辐照下平面薄靶（或薄膜）传热及热应力分布进行了解析推导，得到了随时间演变的温度场及相应的热应力场的解析解。对比有关实验，对强激光束辐照窗口材料（例如ＭｇＦ２晶体、Ｋ９玻璃）靶引起其脆性热应力破裂进行了分析，详细讨论了激光强度、激光－靶能量耦合系数、辐照时间及光斑尺寸等因素对靶的破坏的影响。     

脉冲激光辐照TiO2/SiO2薄膜热效应研究

 采用1.06 μm单脉冲激光在不同能量密度下辐照特殊光电系统中典型薄膜光学元件，理论分析了激光辐照薄膜元件产生的温度场和热应力场，在此基础上建立了激光辐照多层薄膜的物理模型，计算软件使用ANSYS软件的热分析模块对激光辐照薄膜元件产生的温度场和热应力场进行了模拟，分别给出不同激光能量密度下薄膜表面光斑中心的温度场、径向温度场和轴向温度场分布；同时给出不同能量密度下薄膜的轴向、径向和环向热应力分布。并对激光辐照薄膜元件产生的温度场、热应力场进行了分析，阐明了原因。     

激光辐照金属/炸药复合介质温度场的数值模拟

 当激光辐照金属/炸药复合介质外表面时,在变物性及界面有接触热阻的条件下,用二维线性瞬态导焓方程,数值计算了介质内部温度场时空分布。作为特例,将常物性及无接触热阻下的数值解与相同条件下的二维线性瞬态导热方程的解析解相比较,结果表明数值法的计算程序及结果是可信的。     

基于改进布谷鸟算法识别瞬态热传导问题的导热系数

基于改进布谷鸟算法反演瞬态热传导问题随温度变化的导热系数.采用Kirchhoff变换将非线性热传导问题转换为线性热传导问题,使用边界元法求解瞬态热传导正问题.将导热系数的反演转化为函数表达式中未知参数的反演,使用改进布谷鸟算法求解未知参数.与共轭梯度法相比,改进布谷鸟算法对迭代初值不敏感;与布谷鸟算法相比,改进布谷鸟算法迭代次数大大减少.数值算例表明对改进布谷鸟算法,增加测点数量迭代次数增加;增加鸟巢数量迭代次数减少;减小测量误差计算结果更精确,同时迭代次数更少.数值算例验证了改进布谷鸟算法反演导热系数的准确性和有效性.     

漫反射金膜在1.064μm波长处的反射特性

本文研究了强激光辐照下漫反射金膜在近红外波段的反射特性,建立了漫反射金膜表面反射率在线测试系统,得到了不同激光参数辐照下膜层表面反射率变化曲线。检测了金膜表面氧化产物的主要成分,给出了氧化产物的生成机理。根据氧化理论和单层膜反射理论建立了金膜表面反射率变化计算模型,并基于该模型分析了膜层氧化对激光辐照温升的影响。结果表明:强激光辐照下漫反射金膜表面生成了一层光学薄膜,组分为Ni O,生成速率满足对数定律; Ni O薄膜对入射激光的吸收是金膜表面反射率下降的主要原因,而且辐照光强越强膜层氧化越快。     

基底上覆分层薄膜超声Scholte波特性与薄膜定征

分层薄膜-基底结构广泛应用于微电子器件等诸多领域,但薄膜材料参数超声测量尤其是横波速度的定征是一个困难的问题。本文对液固界面Scholte界面波的频散特性和脉冲激励的声压响应进行了理论分析。结果表明,液固界面Scholte波频散与分层膜-基底结构的速度分布密切相关。薄膜材料各层的厚度和横波速度对界面波频散特性有显著影响。基于Scholte界面波的频散特性,提出了一种多层膜的多参数反演定征方法。首先针对理论信号进行薄膜参数反演,验证了该方法的可行性。后续对不同类型的多层膜材料样品进行了液固界面波激发与采集实验,实验信号的薄膜参数反演结果进一步验证了该方法的可行性和有效性。     

薄膜-基片中的激光超声研究

薄膜－基片中的激光超声研究对于薄膜的无损评价和检测以及薄膜的激光损伤等实际应用有很重要的作用。薄膜－基片系统中的激光热弹激发超声的过程不仅与薄膜性质有关,同时也与基片性质有关,因此,对于这样一个两层系统的激光超声研究要比单层材料的研究复杂得多。本文分别用光穿透模型和热扩散模型对薄膜－基片这一两层系统的激光热弹激发超声的过程进行研究,得到了薄膜和基片中的温度场和位移场分布的解析解。同时详细讨论了薄膜材料的光穿透参数、热扩散参数及基片和薄膜的特性阻抗比对激光超声波的影响。     

多层纳米薄膜结构热物性重构

基于谐波探测技术测量材料导热系数和热扩散系数的基本原理,给出3ω法用于多层纳米薄膜结构热物性实验表征的方法.考虑了层间接触热阻的作用,在频域内定义了热阻抗的概念.理论分析了各层纳米薄膜的导热系数、热扩散系数等热参数对加热膜温度波动影响的敏感性.将敏感系数与实验数据处理相结合,利用三次谐波的实部和虚部分量测量了ZrO2/SiO2增透膜多层膜结构中各层的导热系数和热扩散系数.该方法可用来有效表征其他微纳米结构的热性能.     

退火处理对磁控溅射制备LaCoO_3薄膜性能的影响

采用磁控溅射法在硅衬底上制备了LaCoO_3(LCO)薄膜,研究了退火温度对LCO薄膜组织结构、表面形貌及热电特性的影响,并利用X射线衍射仪、原子力显微镜(AFM)、激光导热仪等对LCO薄膜的晶体结构、表面形貌、热扩散系数等进行测量与表征.结果表明:退火温度对LCO薄膜的结晶度、晶粒尺寸和薄膜表面形貌都有较大影响;退火前后LCO薄膜的热扩散系数都随温度的升高而减小,且变化速率逐渐减缓; LCO薄膜的热扩散系数随退化温度的升高先增大后减小.LCO薄膜经过700℃退火后得到最佳的综合性能,其薄膜表面致密、平整,结晶质量最好,热扩散系数最小,热电性能最好.     

The role of surface absorption coefficient in the thermal field of the laser–thin film interaction

In the present paper we developed a model of laser–thin film interaction, in order to find the thermal fields during laser irradiation. The approximation consists in the fact that k (the thermal conductivity) and γ (the thermal diffusivity) are of the same order of magnitude for the substrate and thin film. In consequence we can consider that we have one solid sample with k and γ of the Si substrate. On the other hand we cannot say the same thing about . One can easily see that, _SiCu,Al,Ag,_Au. In consequence we propose an absorption coefficient, as close as possible to reality. In the present paper, we then calculate the thermal fields produced by the surface absorption.     

Laser heating of optically thin samples

Summary A mathematical model able to describe the temperature profiles generated in a thin film by the steady-state illumination by a Gaussian laser beam is presented. The film is supposed to be made by a weakly absorbing liquid sample bounded by two parallel transparent plates, the cell walls, whose thermal exchange to the surrounding ambient may be assumed to be linear with the temperature difference. An analytical solution of the problem is presented in form of Hankel transform and a matrix numerical approach to the computation of the temperature profiles is reported. It is particularly well suited to a computer implementation and allows one to get very accurate results in very short computing times. The influence of the heat exchange coefficient to the ambient is shown in an example. A check of the method accuracy is performed by comparison with literature results in the particular case of infinite heat exchange coefficient. To speed up publication, the authors of this paper have agreed to not receive the proofs for correction.     

激光辐射致热单层薄膜温度响应

用热传导方程计算了在脉宽10ns、波长1.06μm的激光辐射下,TiO_2单层膜的温度场分布.结果表明:膜层的热参数增大,其峰值温度明显降低,而基板热参数变化对膜层温度响应影响很小,温度场分布由电场分布决定,1/4波长薄膜的峰值温度低于半波长薄膜的峰值温度.     

Thermal conductivity of e-beam coatings

We present the results of the study on the thermal conductivity of different thin film materials produced by conventional thermal evaporation. The main features of the thermal pulse method employed for the measurement of the thermal conductivity are described. Thermal conductivity can be measured by determining the traveling time of a thermal wave propagating trough the film. A pump laser beam is directed onto a sample consisting of a thin transparent test layer and a totally absorbing substrate for the laser wavelength. As a consequence of the laser pulse, a temperature profile builds up at the substrate-film interface. A thermal pulse starts to diffuse from the substrate-film interface to the surface of the layer. Therefore, the temperature rise at the surface of the test layer starts with a time delay with respect to the laser pulse. The time delay depends on the propagation time of the thermal wave through the layer and is related to the thermal conductivity and the thickness of the layer. Measurements are evaluated by calculations based on the finite difference method. The results show that the analyzed thin films have lower thermal conductivity than the corresponding materials in bulk form.     

Evaporation of a thin film coated on a substrate induced by a pulsed laser

The two-dimensional Laplace integral transform technique has been applied to get the spatial and temporal temperature distributions in both the molten layer thickness of a thin film coated on a substrate, the still solid part of the thin film of the target and the temperature distribution in the substrate. Also a formula for the time dependence of the evaporated part of the thin film of the target as well as the molten layer thickness of the thin film were obtained. Calculations of the obtained relations were carried out during the irradiation with a pulsed laser. The derivation has taken into account the temperature-dependent absorption coefficient of the irradiated surface and the chemical reaction in the vapor of the thin film. As an illustrative example, computations were carried out on an aluminum thin film coated on a glass substrate.     

Optical parameters of epitaxial GaN thin film on Si substrate from the reflection spectrum

A method has been proposed for determining the optical properties of a thin film layer on absorbing substrates. The film optical parameters such as thickness, refractive index, absorption coefficient, extinction coefficient and the optical energy gap of an absorbing film are retrieved from the interference fringes of the reflection spectrum at normal incidence. The envelopes of the maxima of the spectrum E_M and of the minima E_m are introduced in analytical forms to find the reflectance amplitudes at the interfaces and approximate values of the thin film refractive index. Then, the interference orders and film thickness are calculated to get accurate values of the needed optical parameters. There are no complex fitting procedures or assumed theoretical refractive index dispersion relations. The method is applied to calculate the optical properties of an epitaxial gallium nitride thin film on a silicon (1 1 1) substrate. Good agreement between our results and the published data are obtained.     

MHD Flow and Heat Transfer Characteristics in a Casson Liquid Film Towards an Unsteady Stretching Sheet with Temperature-Dependent Thermal Conductivity

Theoretical and numerical outcomes of the non-Newtonian Casson liquid thin film fluid flow owing to an unsteady stretching sheet which exposed to a magnetic field, Ohmic heating and slip velocity phenomena is reported here. The non-Newtonian thermal conductivity is imposed and treated as it vary with temperature. The nonlinear partial differential equations governing the non-Newtonian Casson thin film fluid are simplified into a group of highly nonlinear ordinary differential equations by using an adequate dimensionless transformations. With this in mind, the numerical solutions for the ordinary conservation equations are found using an accurate shooting iteration technique together with the Runge-Kutta algorithm. The lineaments of the thin film flow and the heat transfer characteristics for the pertinent parameters are discussed through graphs. The results obtained here detect many concern for the local Nusselt number and the local skin-friction coefficient in which they may be beneficial for the material processing industries. Furthermore, in some special conditions, the present problem has an excellent agreement with previously published work.