表面热透镜技术应用于薄膜微弱吸收测量的理论和实验

由薄膜表面光热形变简化理论和表面热透镜衍射理论导出表面热透镜信号表达式，从理论上证明了表面热透镜信号和薄膜吸收率的线性关系. 应用表面热透镜技术研制了薄膜吸收测量仪，测量结果表明其吸收率测量灵敏度和精度均达10^-6量级. 关键词： 吸收测量 表面热透镜 光热形变 薄膜     

表面热透镜薄膜吸收测量灵敏度提高方法

为提高表面热透镜薄膜吸收测量仪的灵敏度，在表面热透镜衍射理论基础上，通过数值模拟给出了探测激光腰斑半径、探测激光腰斑到样品表面距离、样品到探测光纤端面距离等仪器参数的优化方法. 经优化调整后该仪器能达到优于0.1ppm量级的薄膜吸收率测量灵敏度. 关键词： 吸收测量 表面热透镜 光热形变 薄膜     

用衰减全反射(ATR)及拟合法对固体表面物理性质的研究

提出了一种利用光学中全反射衰减特性及拟合法对介质上蒸镀的金属薄膜物理性质进行研究的方法,并运用该方法对金属薄膜的厚度和复介电常量进行了精确测定,该方法是研究固体表面物理的一种有效的方法和技术.     

Ge-Sb-Se硫系薄膜制备及光学特性研究

介绍了几种常见的硫系薄膜制备方法, 根据现有实验条件采用热蒸发法和磁控溅射法制备出Ge-Sb-Se三元体系硫系薄膜, 通过台阶仪测试薄膜的厚度和表面粗糙度, 计算出两种制备方法的成膜速率, 并通过X射线光电子能谱测试了两种制备方法所得薄膜与块体靶材组分的差别. 利用Z扫描技术和分光光度计测试了热蒸发法制备所得薄膜的三阶非线性性能和透过光谱, 计算出非线性折射率、非线性吸收系数和薄膜厚度等参数. 结果表明热蒸发法制备Ge-Sb-Se薄膜具有良好的物理结构和光学特性, 在集成光学器件方面很高的应用潜力.     

沉积在液相基底表面磁性薄膜的形成机理和特性研究

采用气相沉积方法在硅油基底表面成功制备了一种具有近似自由支撑的新型铁薄膜系统，并研究了其生长机制、内应力分布以及低温磁特性．实验发现，此类铁薄膜的生长机制与沉积在液相基底表面非磁性薄膜的情况类似，即服从二阶段生长模型．在固定基底温度的条件下，当沉积速率较小时，可制得近似透明的连续铁薄膜，薄膜中呈现明显的特征尺寸达10^2μm数量级的带状准周期有序结构，它是由铁薄膜样品中内应力释放时所引起的薄膜板块间相互挤压而逐渐形成的．当沉积速率较大时，制得的连续铁薄膜呈金属色．实验发现，在临界温度Tc=10—15K附近，具有金属色的铁薄膜样品的矫顽力Hc有一明显的极大值峰．研究表明，这一奇异的矫顽力特性与液相基底表面铁薄膜中的原子团簇尺寸分布、无序的薄膜表面磁各向异性以及团簇间的磁性相互作用等因素有关．     

电子束、离子辅助和离子束溅射三种工艺对光学薄膜性能的影响

 运用电子束、离子辅助和离子束溅射三种镀膜工艺分别制备光学薄膜，包括单层氧化物薄膜和增透膜，然后采取一系列测试手段，如Zygo轮廓仪、原子力显微镜、表面热透镜技术和X射线衍射等技术，来分析和研究不同的工艺对这些薄膜性能的不同影响，以判断合理的沉积工艺。     

光学薄膜测量时平顶光束激励的表面热透镜理论模型

推导了调制的平顶光束激励下基于Fresnel衍射积分的表面热透镜理论，通过数值模拟，比较了平顶光束和高斯光束激励下样品内部温度场、表面形变场和探测光衍射信号的径向分布，分析了影响表面热透镜信号的实验参数.结果表明，在最佳探测位置，平顶光束激励下的表面热透镜系统比相同情况下高斯光束激励下的灵敏度高，最高时约2倍，更有利于薄膜吸收测量. 关键词： 表面热透镜 光学薄膜 平顶光束     

基于原子运动模型的类金刚石薄膜生长机理研究

利用分子动力学模拟方法，从原子尺度上研究了类金刚石(DLC)薄膜生长过程. 按照运动特点把入射原子在表面的行为分为表面冷冻、迁移、注入和反弹等四种，并由此提出原子运动模型. 入射原子的表面行为对DLC薄膜的微观结构以及生长方式有重要影响. 其中原子水平迁移是薄膜热弛豫的主要途径，入射原子的注入和迁移行为相互竞争，决定了薄膜生长的模式和最终结构. 利用统计分析手段给出了入射能量对原子表面行为进而对薄膜结构的影响，加深了对DLC薄膜生长机理的认识.     

铀表面铝镀层热应力分布

铀是非常活泼的金属，在大气环境中很容易发生腐蚀，通过磁控溅射方法，在铀表面镀铝可以对铀起到很好的防腐蚀效果，但经过磁控溅射以后，薄膜内会产：生应力，从而影响了铀表面铝镀层的结合强度及使用性能。一般认为，薄膜内的应力来源于两个方面：一是热应力，二是生长应力。热应力是由于薄膜与基体热膨胀系数不同经温度变化引起的，而生长应力则来自于薄膜与基体物理性质的不同，以及薄膜中的结构缺陷。对于一种确定结构的膜基体系，生长应力比较固定，而热应力却可以通过磁控溅射工艺进行一定的调整。文中采用热弹塑性有限元分析方法，对铀表面磁控溅射沉积铝镀层的热应力分布进行了研究。     

反射式热透镜时变信号测量固体热扩散率的研究

介绍了采用反射式热透镜时变信号测量固体热扩散率的一种简便方法,该方法结合表面热透镜技术原理,采用表面透镜的动态变化和反射的探测光发散的幅度来确定固体的热扩散率,相对于传统的热扩散率测量方法要快捷简单。对较大范围的一系列物质的热学特性进行了实验研究,证明了其实用性。     

Deposition of MgF2 thin films for antireflection coating by using thermionic vacuum arc (TVA)

In this study, optical and surface properties of MgF₂ thin films produced by thermionic vacuum arc (TVA) technique have been investigated. By means of this technique the MgF₂ thin film produced by condensing the plasma of anode material generated by using TVA under high vacuum conditions on the glass. The optical properties have been investigated by using Filmetrics F20 and UV/VIS spectrometer. For surface properties of produced thin films EDS, SEM and AFM have been used. Our analysis shows that MgF₂ thin films produced by using TVA are proper single and multi layer anti-reflective (AR) coating and TVA technique brings very important advantages for ophthalmic glass coating and industrial applications' optical purposes.     

Optical and electrical properties of aluminum zinc oxide (AZO) nanostructured thin film deposited on polycarbonate substrate

Transparent polymer materials, due to their unique properties, such as light weight, optical transparency, and electrical and mechanical properties, have become very attractive as a replacement for inorganic glass substrates in a wide range of optoelectronic applications. In this research, aluminum zinc oxide nanostructured thin film was deposited on polycarbonate polymer substrates using a magnetron sputtering technique. The structure, morphology, and surface composition of the thin film were investigated by X-ray diffraction and field emission scanning electron microscopy. The optical and electrical properties of the thin film were investigated by UV–VIS-NIR spectrophotometer, ellipsometer, and four point probe method. The X-ray diffraction pattern showed that the aluminum zinc oxide thin film had a polycrystalline structure. The optical and electrical results indicated that the refractive index, band gap, and sheet resistance of the aluminum zinc oxide thin film were 1.8, 3.2 eV, and 265 Ω/sq, respectively.     

光学薄膜损伤表面三维微观形貌的仿真与重构

通过对激光作用薄膜元件后的损伤过程和图像损伤特征进行分析与研究,借助光学薄膜损伤表面三维微观形貌的重构,揭示薄膜元件损伤机理。基于白光干涉显微原理,采集薄膜损伤表面的干涉显微三维云数据,运用Delaunay三角剖分法构建损伤表面的三角网格模型,通过可视化仿真,实现了损伤表面三维微观形貌的再现。结果表明:实验测试的HfO_2薄膜表面损伤区域呈坑状凹陷,损伤形貌不规则,内部有鼓包、裂纹存在,边缘处陡度变化大、毛刺较多;对重构图像、VEECO Vision软件处理结果、Taylor-Hobson非接触式轮廓仪测试结果进行对比后发现,重构图像能更直观、全方位地再现损伤表面细微形貌。研究结果给分析损伤表面形貌特征、调控高损伤阈值薄膜制备工艺提供了技术支持。     

Determination of thickness and optical dispersion property of gold film using spectroscopy of surface plasmon in frequency domain

We propose to use wavelength modulation approach, i.e., the spectroscopy of surface plasmon in frequency domain to characterize the optical dispersion property of gold film. Using this method, we determine the dispersion relationship of gold film in a wavelength range from 537.12 nm to 905.52 nm, and our results accord well with the reported results by other authors. This method is particularly suited for studying the optical dispersion properties of thin metal films, because a series of dielectric constants over a wide spectral range can be determined simultaneously via only a single scan of the incident angle, thereby avoiding the repeated measurements required when using angular modulation approach.     

The determination of the thickness and the optical dispersion property of gold film using spectroscopy of a surface plasmon in the frequency domain

We propose to use wavelength modulation approach,i.e.,the spectroscopy of a surface plasmon in the frequency domain,to characterize the optical dispersion property of gold film.Using this method,we determine the dispersion relationship of gold film in a wavelength range from 537.12 nm to 905.52 nm,and our results accord well with the reported results by other authors.This method is particularly suited for studying the optical dispersion properties of thin metal films,because a series of dielectric constants over a wide spectral range can be determined simultaneously via only a single scan of the incident angle,thereby avoiding the repeated measurements required when using the angular modulation approach.     

Repeatability and reproducibility study of thin film optical measurement system

Investigation on surface roughness of thin films is an important issue in manufacturing engineering because the performance of a coated film is significantly affected by the surface roughness of thin films. A fast and flexible optical measurement system to measure surface roughness of hard coatings deposited by cathodic arc evaporation is developed in this work. The objective of this work is to examine the repeatability and reproducibility (R&R) of an optical measurement system. Percentage of equipment variation, appraiser variation and R&R is 7.25%, 1.42% and 7.39%. Thin film optical measurement system developed is acceptable according to the measurement systems analysis and the R&R technique.     

10.6μm激光辐照下光学薄膜的微弱吸收测量

 建立了表面热透镜技术测量光学薄膜微弱吸收的实验装置，对10.6μm CO₂激光辐照下镀制在Ge基底上的不同厚度的单层ZnS，YbF₃薄膜，以及镀制在Ge基底上不同膜系的（YbF₃/ZnSe）多层分光膜的弱吸收进行了测量，并对实验结果作了分析和讨论。实验结果表明，利用本实验系统已测得的待测样品的最低吸收为2.87×10^-4，测量系统的灵敏度为10^-5。     

Laser transfer of thin mesotetraphenylporphyrin layers

The technique of forming mesotetraphenylporphyrin microstructures on the quartz substrate surface by laser-induced forward transfer from a target was developed. The target was a transparent substrate with a thin titanium coating onto which five mesotetraphenylporphyrin layers were deposited by the Langmuir-Schaefer method. The target was irradiated with single 500-ps pulses through a transparent substrate, which causes nondestructive thermal deformation of a metal film, resulting in efficient porphyrin emission from the target. The effect of the titanium film thickness and the laser emission wavelength on the transfer process was studied. An analysis of the optical absorption and fluorescence spectra of obtained surface microstructures suggests that the material structure is retained during laser transfer.