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表面热透镜技术应用于薄膜微弱吸收测量的理论和实验
引用本文:范树海,贺洪波,范正修,邵建达,赵元安.表面热透镜技术应用于薄膜微弱吸收测量的理论和实验[J].物理学报,2005,54(12):5774-5777.
作者姓名:范树海  贺洪波  范正修  邵建达  赵元安
作者单位:(1)中国科学院上海光学精密机械研究所,上海 201800; (2)中国科学院上海光学精密机械研究所,上海 201800;中国科学院研究生院,北京 100039
基金项目:上海市科学技术委员会光科技专项行动计划(批准号:011661076)资助的课题.
摘    要:由薄膜表面光热形变简化理论和表面热透镜衍射理论导出表面热透镜信号表达式,从理论上证明了表面热透镜信号和薄膜吸收率的线性关系. 应用表面热透镜技术研制了薄膜吸收测量仪,测量结果表明其吸收率测量灵敏度和精度均达10-6量级. 关键词: 吸收测量 表面热透镜 光热形变 薄膜

关 键 词:吸收测量  表面热透镜  光热形变  薄膜
文章编号:1000-3290/2005/54(12)/5774-04
收稿时间:03 24 2005 12:00AM
修稿时间:2005-03-242005-07-05

Theory and experiment of surface thermal lens technique used in absorption measurement of thin films
Fan Shu-Hai,He Hong-Bo,Fan Zheng-Xiu,Shao Jian-Da,Zhao Yuan-An.Theory and experiment of surface thermal lens technique used in absorption measurement of thin films[J].Acta Physica Sinica,2005,54(12):5774-5777.
Authors:Fan Shu-Hai  He Hong-Bo  Fan Zheng-Xiu  Shao Jian-Da  Zhao Yuan-An
Institution:1. Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China; 2. Graduate School of the Chinese Academy of Sciences, Beijing 100039, China
Abstract:The expression of surface thermal lens(STL) signal is deduced from photothermal deformation theory of thin film surface and STL diffraction theory. The linearity of STL signal to absorption of thin film can be seen from the expression. A measurement apparatus for thin film absorption based on STL technique is constructed. The measuring results prove that the sensitivity and accuracy of this instrument reach 10 -6 magnitude.
Keywords:absorption measurement  surface thermal lens  photothermal deformation  thin film
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