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随着1982年世界上第一台原子分辨的隧道扫描显微镜(STM)问世,掀起了对物质表面微结构研究的热潮,而且蔓延到表面化学以及生物大分子等领域.同时对STM原理及检测技术的推广,促使了原子力显微镜(AFM)、近场光学显微镜(SNOM)的发明.现在,以STM、AFM、SNOM为代表的高分辨显微镜已经形成了一类新的显微成像技术──扫描探针显微术(SPM).SPM最显著的特点就是采用一个极微小的探针(针尖一般在纳米尺度),在样品表面极小的距离内移动,同时获得样品表面信息.当这极小的探针与样品表面的相互作用强烈依赖于极小的距离(大约是指数关系),仪器的稳定性则是获得理想图像的关键. 相似文献
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自旋极化扫描隧道显微术是一种新兴的表面自旋分辨技术,文章主要介绍了自旋极化的扫描隧道显微镜和扫描隧道谱实现表面自旋分辨的原理以及在各种磁性表面研究中的应用,采用自旋极化技术的扫描隧道显微镜可以测量表面磁结构,其空间分辨可以达到原子尺度,分辨率超过其他磁显微技术,而自旋极化扫描隧道谱不但可以分辨空间精细磁畴结构,而且能研究表面态的交换劈裂,文章作者还进一步提出了利用自旋极化扫描隧道显微镜实现自旋注入的设想。 相似文献
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为满足显微成像领域的多样化需求,解决实际应用中成像质量与成像时间之间的矛盾,提出一种基于数字微镜器件的多分辨显微关联成像方法.该方法利用LED光源作为背景照射光源,对科研级荧光正置显微镜原光路改装设计为关联成像光路,采用多分辨Hadamard优化矩阵作为数字微镜器件的预置图样,实现了生物组织样品的连续多分辨成像.实验结果表明,多分辨显微关联成像系统的分辨率可达218 nm,单组测量后可同时输出8组不同分辨率图像,能够根据实际应用中不同图像质量需求选择不同的分辨率,减少成像时间和存储空间,极大地提高了显微成像的灵活性.这种新型多分辨显微关联成像方法可以扩展至细胞筛选、细胞实时成像等领域,对推动关联成像在细胞和生物组织显微成像领域的应用具有重要意义. 相似文献
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利用电子束热蒸发方法在K9玻璃基底上沉积氧化锆薄膜,并对其中一些样品用低能O2+进行了后处理。采用表面热透镜技术测量薄膜样品表面弱吸收,采用显微镜观察样品离子后处理前后的显微缺陷密度。测试结果表明:经离子后处理样品表面的缺陷密度从18.6/mm2降低到6.2/mm2,且其激光损伤阈值从15.9 J/cm2提高到23.1 J/cm2,样品的平均吸收率从处理前的1.147×10-4降低到处理后的9.56×10-5。通过对处理前后样品的表面微缺陷密度、吸收率及损伤形貌等的分析发现:离子后处理可以降低薄膜的显微缺陷和亚显微缺陷,从而降低薄膜的平均吸收率,同时增强了薄膜与基底的结合力,提高了薄膜的激光损伤阈值。 相似文献
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《光学技术》2020,(3)
相移干涉显微镜在微观物体三维形貌的重构横向分辨率上受衍射极限影响,一般在微米级,限制其应用。将高折射率微球嵌入Mirau型相移干涉显微系统中,利用微球超分辨机理提高了其三维重构横向分辨能力,通过和原子力显微镜的测量对比验证了方法的可行性。仿真分析了微球尺寸对光子纳米喷流效应和超分辨能力的影响;同时使用两种不同尺寸的微球对275nm线宽的标准光栅样品进行了三维形貌重构;结果表明,在两种微球的辅助下,相移干涉显微系统均能够精确还原样品的三维结构,光栅深度测量结果与原子力显微镜结果相当。在微球辅助下,系统的横向分辨能力达到了275nm,相较于不使用微球的情况下提高了2.1倍,微球的最高放大率达到了3.4倍。系统在微纳米测量等领域具有较高的应用价值。 相似文献
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提出和发展了基于毛细管-微球组合探针的任选区、 高分辨显微成像新方法. 建立了微球显微成像的物理模型, 利用成像理论,推导出微球成像的放大倍率; 采用3.0, 4.4, 5.6, 7.5, 10.0 μm等不同直径的SiO2微球, 对未经刻录的DVD光盘进行了微球显微成像实验, 可以观察到DVD光盘的微纳米结构被明显放大且对比度显著提高, 与理论计算结果相符合; 采用毛细管微探针操纵微球的方法, 实现了基于微球透镜阵列的样品微纳米结构的高分辨显微成像; 在此基础上, 进一步将毛细管微探针与微球组合, 制备出毛细管-微球组合型探针, 首次实现了基于微球透镜的样品任意区域高分辨显微成像. 相似文献
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DING Zhihua LIU Yu BAO Zhengkang 《Chinese Journal of Lasers》2001,10(3):211-217
1 Introduction Thereisanincreasingrequirementfortheprecisemeasurementofthesurfacemicrostructuresonlarge scaleobjectsofcomplexshapewithsteepsurfaceslopes .Thestylusinstrumentiswidelyusedasthepracticalmethod ,butthemeasurementaccuracyislimitedduetoitscon… 相似文献
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A fiber-optic based scanning confocal microscopic interferometer with digital feedback is developed for the precise measurement of the surface topography on a large-scale object of complex shape with steep surface slopes. Theoretical analysis on interference formation demonstrates the confocal characteristic of the proposed interferometer along its measurement path. Experimental results confirm the spatial resolution of the measuring system to be within 1 μm and the measurement accuracy to be better than 5 nm. 相似文献
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研究了一种全新的纳米尺度位移测量系统。将双折射元件插入He-Ne激光器谐振腔内产生频率分裂效应,使原本单模谐振的激光器输出变成了频差可调的2个正交偏振频率(o光和e光),而形成双频激光器。在激光谐振腔外放置沿激光轴线位移的反射表面,将输出的激光束反射回腔内,以便对激光的光强进行调制,可实现高分辨率非接触式可判向位移测量。提出了一种细分方法,该方法突破了传统干涉系统的衍射极限(1/2波长)。对于633nm波长He-Ne激光,本系统的理想分辨率为1/8波长(约为79nm)。 相似文献
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利用激光干涉结晶方法,采用周期为400 nm的一维(1D)移相光栅掩模调制KrF准分子激光器的脉冲激光束斑的能量分布,在不同厚度的超薄氢化非晶硅(a-Si:H)膜内直接制备1D有序纳米硅(nc-Si)阵列.拉曼散射谱表明,样品上呈条状分布的受辐照区域发生晶化.原子力显微镜和透射电子显微镜测试结果表明:1D的nc-Si阵列的周期和移相光栅掩模一样.随着a-Si:H膜厚度从10nm降至4nm,通过控制激光的能量密度,每个周期中nc-Si条状分布区宽度可达到30nm.nc-Si条状分布区的高分辨电子显微镜照片显
关键词:
纳米硅
激光干涉结晶
移相光栅
定域晶化 相似文献
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The measurement of surface roughness using stylus equipment has several disadvantages. A non-contact optical method is needed for measuring the surface roughness of engineering metals with improved accuracy. One candidate for an optical method is the use of a laser source, where the laser light intensity reflected from the surface represents the surface roughness of the illuminated area. A relation can be developed between the reflected laser beam intensity and the surface roughness of the metal. The present study examines the measurement of the surface roughness of the stainless steel samples using a He-Ne laser beam. In the measurement a Gaussian curve parameter of a Gaussian function approximating the peak of the reflected intensity is measured with a fast response photodetector. In order to achieve this, an experimental setup is designed and built. In the experimental apparatus, fiber-optic cables are used to collect the reflected beam from the surface. The output of the fiber-optic system is fed to a back-propagation neural network to classify the resulting surface profile and predict the surface roughness value. The results obtained from the present study are then compared with the stylus measurement results. It is found that the resolution of the surface texture improves considerably in the case of optical method and the neural network developed for this purpose can classify the surface texture according to the control charts developed mathematically. 相似文献
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A sinusoidal phase-modulating (SPM) laser diode (LD) interferometer for real-time surface profile measurement is proposed and its principle is analyzed. The phase signal of the surface profile is detected from the sinusoidal phase-modulating interference signal using a real-time phase detection circuit. For 60 × 60 measurement points of the surface profile, the measuring time is 10 ms. A root mean square (RMS) measurement repeatability of 3.93 nm is realized, and the measurement resolution reaches 0.19 nm. 相似文献
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A quick and efficient technique for a charge-coupled device (CCD)-based profilometric measurement system is proposed and verified by experiment. When a laser stripe is projected onto an object, the deformed laser line image is detected by a CCD camera with subpixel resolution and is automatically transferred to its space position using a least-squares mapping algorithm. Measurements are executed on each separate surface of a three-dimensional object and the multi-surface data are integrated through a process of coordinate transformation. Large arrays of data points are acquired on each surface by means of a scanning mechanism. Because the measuring data from each laser stripe position can provide two-dimensional information concerning the surface contour, the laser stripe and the CCD camera are integrated into a measurement system for obtaining the entire three-dimensional information. Theoretical analysis shows that this technique can determine the three-dimensional profile of an object with an accuracy below 0.2 mm. 相似文献