射频等离子硫钝化GaAs(100)的表面特性

采用射频等离子方法,对Ga As(100)衬底片表面进行干法硫等离子体钝化,旨在得到性能稳定含硫钝化层。样品经过360℃温度条件下的快速热退火,光致发光(PL)测试表明,钝化后的样品PL强度上升了71%。同时,钝化样品的稳定性测试结果表明,样品放置在实验室空气中30 d,其PL强度未出现明显变化,说明Ga As的等离子体干法硫钝化具有较好的性能稳定性。     

GaAs表面硫化学钝化,CH3CSNH2处理新探

应用同步辐射光电子谱（SRPES）和光致荧光（PL）方法探讨不同钝化条件对GaAs表面键合状态和电子态的影响．发现无论在酸性溶液或碱性溶液条件下，经过CH₃CSNH₂处理的GaAs表面S都与Ga和As成键，形成硫化物钝化层；钝化层形成后，PL谱的强度明显增强，表明GaAs表面复合中心的减少和缺陷态密度的降低 关键词：     

联氨溶液钝化GaAs(100)表面特性及其发光性能

为了有效降低GaAs表面态密度,获得稳定的高性能钝化膜,使用联氨溶液钝化GaAs(100)表面。通过光致发光对联氨溶液浓度、Na_2S浓度和钝化时间进行了优化。联氨溶液钝化后GaAs样品的PL比未处理的增加了1.22倍。采用X射线光电子能谱和原子力显微镜分析了联氨溶液钝化前后GaAs的表面成分和形貌。结果表明,联氨溶液钝化GaAs表面可以有效地去除表面氧化物,形成均匀、平整的GaN钝化层。通过表面稳定性测试发现,钝化后的GaAs表面在空气中放置数天,光致发光强度未见明显的退化(30 d内PL强度降低7%),说明钝化后GaAs表面的稳定性良好。     

Si(111)面上氮原子薄膜的电子态密度第一性原理计算及分析

由于氮原子在Si(1 1 1)表面成键的失配度最小,因此考虑Si(1 1 1)取向上用不同百分比的氮原子钝化硅表面悬挂键.由第一性原理计算结果显示,当Si(1 1 1)表面层中的氮原子含量为75%—100%时,带隙展宽并且有局域陷阱态产生. 我们提出相应的局域电子态模型,从而解释了Si基氮膜光致荧光(PL)发光增强实验的物理机理. 关键词： 第一性原理计算 氮化Si薄膜 PL发光增强 局域陷阱态     

局域表面等离激元对InGaN/GaN多量子阱发光效率的影响

Ag纳米粒子的形貌对InGaN/Ga N多量子阱(MQWs)的光致发光(PL)效率有着显著影响。本文采用离子束沉积(IBD)技术将Ag沉积在InGaN/Ga N MQWs上,然后通过快速热退火处理制备Ag纳米粒子。通过改变Ag的沉积时间获得了具有不同Ag纳米粒子形貌的样品。用原子力显微镜对各样品的Ag纳米粒子形貌和尺寸进行了表征,并且测试了吸收谱、室温和变温PL谱及时间分辨光致发光(TRPL)谱。结果表明:随着Ag沉积时间的延长,所得Ag纳米粒子粒径增大,粒子纵横比先增大后减小且吸收谱峰红移。由于不同形貌的Ag纳米粒子在入射光作用下产生的局域表面等离激元(LSPs)与MQWs中激子耦合强度不同,光发射能力也不同,与没有Ag纳米粒子的样品相比,沉积时间为15 s的样品室温PL积分强度被抑制6.74倍,沉积时间为25 s和35 s的样品室温PL积分强度分别增强1.55和1.72倍且峰位发生红移,沉积时间为45 s的样品室温PL积分强度基本没有变化。TRPL与变温PL的测试结果证明,室温PL积分强度的改变是由于LSPs与MQWs中的激子耦合作用引起的。纵横比大且吸收谱与MQWs的PL谱交叠大的Ag纳米粒子能够更好地增强InGaN/Ga N MQWs的发光。     

应力导致InAs/In0.15Ga0.85As量子点结构中 In0.15Ga0.85As阱层的合金分解效应研究

利用固源分子束外延技术,在In0.15Ga0.85As/GaAs量子阱生长了两个InAs/In0.15Ga0.85As量子点(DWELL)样品.通过改变其中一个InAs DWELL样品中的In0.15Ga0.85As阱层的厚度和生长温度,获得了量子点尺寸增大而且尺寸分布更均匀的结果.结合光致发光光谱(PL)和压电调制光谱(PzR)实验结果,发现该样品量子点的光学性质也同时得到了极大的优化.基于有效质量近似的数值计算结果表明:量子点后生长过程中应力导致In0.15Ga0.85As阱层合金分解机理是导致量子点尺寸和光学性质得到优化的主要原因.     

多种含硫溶液钝化(100)GaAs表面的实验研究

为实现GaAs表面的钝化,以Na2S、(NH4)2S、CH3CSNH2为主要研究对象,通过对比实验研究得出较为理想的湿法钝化液。通过光致发光(PL)谱研究了(NH4)2S 叔丁醇、CH3CSNH2 NH4OH、CH3CSNH2 叔丁醇三种不同含硫溶液钝化(100)GaAs表面后的发光特性。PL谱测试发现,(NH4)2S 叔丁醇饱和溶液处理过的(100)GaAs表面光致发光强度最强,PL谱的相对发光强度是未做钝化处理的10倍左右。因此得出(NH4)2S 叔丁醇饱和溶液是较为理想的(100)GaAs表面钝化液。     

高In组分InGaNAs/GaAs量子阱的生长及发光特性

采用分子束外延技术(MBE)在Ga As衬底上外延生长高In组分(40%)In Ga NAs/Ga As量子阱材料,工作波长覆盖1.3~1.55μm光纤通信波段。利用室温光致发光(PL)光谱研究了N原子并入的生长机制和In Ga NAs/Ga As量子阱的生长特性。结果表明:N组分增加会引入大量非辐射复合中心;随着生长温度从480℃升高到580℃,N摩尔分数从2%迅速下降到0.2%;N并入组分几乎不受In组分和As压的影响,黏附系数接近1;生长温度在410℃、Ⅴ/Ⅲ束流比在25左右时,In_(0.4)Ga_(0.6)N_(0.01)As_(0.99)/Ga As量子阱PL发光强度最大,缺陷和位错最少;高生长速率可以获得较短的表面迁移长度和较好的晶体质量。     

GaAs(100)表面硫钝化的新方法:CH3CSNH2/NH4OH处理

建立了一种硫钝化GaAs(100)表面的新方法,即CH₃CSNH₂/NH₄OH溶液处理,应用同步辐射光电子能谱(SRPES)和X射线光电子能谱(XPS)表征了该钝化液处理的n-GaAs(100)表面的成键,特性和电子态.结果表明,经过处理的n-GaAs(100)表面,S既与As成键也与Ga成键,形成S与GaAs的新界面,并且Ga和As的氧化物被移走,这标志着CH₃CSNH₂/NH_{4关键词：}     

钝化低温法生长多层InGaN量子点的结构和光学特性

采用一种新方法生长多层InGaN/GaN量子点,研究所生长样品的结构和光学特性。该方法采用了低温生长和钝化工艺,所以称之为钝化低温法。第一层InGaN量子点的尺寸平均宽度40nm,高度15nm,量子点密度为6.3×10¹⁰/cm²。随着层数的增加,量子点的尺寸也逐渐增大。在样品的PL谱测试中,观察到在In(Ga)As材料系中普遍观察到的量子点发光的温度特性---超长红移现象。它们的光学特性表明:采用钝化低温法生长的纳米结构中存在零维量子限制效应。     

Optimization of inductively coupled plasma deep etching of GaN and etching damage analysis

Inductively coupled plasma (ICP) etching of GaN with an etching depth up to 4 μm is systemically studied by varying ICP power, RF power and chamber pressure, respectively, which results in etch rates ranging from ∼370 nm/min to 900 nm/min. The surface morphology and damages of the etched surface are characterized by optical microscope, scanning electron microscope, atomic force microscopy, cathodoluminescence mapping and photoluminescence (PL) spectroscopy. Sub-micrometer-scale hexagonal pits and pillars originating from part of the structural defects within the original GaN layer are observed on the etched surface. The density of these surface features varies with etching conditions. Considerable reduction of PL band-edge emission from the etched GaN surface indicates that high-density non-radiative recombination centers are created by ICP etching. The density of these non-radiative recombination centers is found largely dependent on the degree of physical bombardments, which is a strong function of the RF power applied. Finally, a low-surface-damage etch recipe with high ICP power, low RF power, high chamber pressure is suggested.     

射频磁控溅射法制备的Eu掺杂ZnO薄膜的结构及其发光性质

用射频磁控溅射法在石英衬底上制备了ZnO:Eu3+薄膜,通过X射线衍射仪、扫描电子显微镜和荧光光谱仪测试了薄膜结构、形貌以及发光性能,重点考察了溅射功率和退火工艺对其组织结构和发光性能的影响.结果表明:样品均呈现ZnO的六角纤锌矿结构,增大溅射功率有利于形成ZnO的c轴择优取向;增大溅射功率以及高温退火会使晶粒尺寸增大...     

Surface improvement and biocompatibility of TiAl24Nb10 intermetallic alloy using rf plasma nitriding

The present work describes the surface improvement and biocompatibility of TiAl₂₄Nb₁₀ intermetallic alloy using rf plasma nitriding. The nitriding process was carried out at different plasma power from 400 W to 650 W where the other plasma conditions were fixed. Grazing incidence X-ray diffractometry (GIXRD), Auger electron spectroscopy (AES), tribometer and a nanohardness tester were employed to characterize the nitrided layer. Further potentiodynamic polarization method was used to describe the corrosion behavior of the un-nitrided and nitrided alloy. It has been found that the Vickers hardness (HV) and corrosion resistance values of the nitrided layers increase with increasing plasma power while the wear rates of the nitrided layers reduce by two orders of magnitude as compared to those of the un-nitrided layer. This improvement in surface properties of the intermetallic alloy is due to formation of a thin modified layer which is composed of titanium nitride in the alloy surface. Moreover, all modified layers were tested for their sustainability as a biocompatible material. Concerning the application area of biocompatibility, the present treated alloy show good surface properties especially for the nitrided alloy at low plasma power of 400 W.     

氢对GaAs薄膜的钝化作用

报导了射频磁控溅射与沉积气氛掺氢相结合制备单层(13~20 nm厚)高质量GaAs多晶态纳米薄膜的方法,研究了氢钝化对薄膜微观结构及光学性质的影响.对GaAs薄膜进行了X射线衍射、原子力显微镜、吸收光谱、光致荧光谱的研究分析.结果表明,衬底温度500℃的掺氢薄膜和520℃的薄膜呈面心立方闪锌矿结构，薄膜的晶团尺寸较大，微观表面较为粗糙，其吸收光谱出现了吸收边蓝移和明显的激子峰，带隙光致荧光峰强明显增加，说明氢在衬底温度500℃~520℃下对薄膜有重要的钝化作用.     

Hydrogen plasma modification of metal/GaAs interface

GaAs surface modification caused by room-temperature atomic hydrogen treatment in an RF plasma system operated in the reactive ion etching (RIE) mode has been studied by electrical characterization of subsequently fabricated Au/GaAs Schottky barriers. Unlike with reported results for plasma hydrogenation at higher temperatures, the Schottky barrier height on n-GaAs is found to decrease slightly. More interestingly, a pronounced increase in the effective barrier height is seen for p-GaAs. Dopant deactivation close to the surface is also observed for both conductivity types.     

Study of ion bombardment effect for Alq3 films

This paper investigated the blue shift of photoluminescence and the changes of surface morphology of Alq₃ films by ionic argon plasma bombardment. Plasma with different conditions was applied to bombard thin Alq₃ films, modifying both the physical and chemical properties of the films. After characterizing Alq₃ films treated with different RF power by XPS, PL and AFM, we proposed the mechanisms to explain the absence of PL blue shift and chemical shift after the films were exposed in the air for more than 3 h. Experimental results showed that molecular structure damages would affect the bandgap of Alq₃, leading to the blue shift effect. XPS results also showed that binding energy shifts are caused by enriched oxygen covalent bonds formed inside the films after plasma treatment. Also, surface roughness improves as RF power is increased.     

Structural, optical and electrical properties of Al-N codoped ZnO films by RF-assisted MOCVD method

N-doped ZnO films were produced using N₂ as N source by metal-organic chemical vapor deposition (MOCVD) system which has been improved with radio-frequency (RF)-assisted equipments. The data of secondary ion mass spectroscopy (SIMS) indicate that the concentration of N in N-doped ZnO films is around 5 × 10²⁰ cm⁻³, implying that sufficient incorporation of N into ZnO can be obtained by RF-assisted equipment. On this basis, the structural, optical and electrical properties of Al-N codoped ZnO films were studied. Then, the effect of RF power on crystal quality, surface morphologies, optical properties was analyzed using X-ray diffraction, atomic force microscopy and photo-luminescence methods. The results illustrate that the RF plasma is the key factor for the improvement of crystal quality. Then the observation of A⁰X recombination associated with N_O acceptor in low-temperature PL spectrum proved that some N atoms have occupied the positions of O atoms in ZnO films. Hall measurements shown that p-type ZnO film deposited on quartz glasses was obtained when RF power was 150 W for the Al-N codoped ZnO films, while the resistivity of N-doped ZnO films was rather high. Compared with the Al-doped ZnO film, the obviously increased resistivity of codoped films indicates that the formation of N_O acceptors compensate some donors in ZnO films effectively.     

Photosensitivity of GaAs: NGaP: N/GaAs (GaP) heterojunctions in linearly polarized radiation

Results are presented of investigations of the photoelectric properties of nitrided layer/GaAs (GaP) heterojunctions prepared by plasma treatment of GaAs and GaP crystals in the presence of nitrogen ions. The heterojunctions exhibited broad-band photosensitivity relative to the intensity of the natural radiation. It was established that when linearly polarized radiation is obliquely incident on the surface of nitrided layers, polarization photosensitivity occurs which is controlled by the angle of incidence Θ and increases proportionately as Θ². The spectral dependences of the induced photopleochroism are attributed to the antireflecting properties of the wide-gap layers. Nitrided-layer heterojunctions can be used as broad-band photoanalyzers for linearly polarized radiation. Zh. Tekh. Fiz. 69, 138–142 (June 1999)     

氧等离子体处理对GaAs表面单层自组装SiO2纳米球薄膜的影响

二维纳米阵列结构因其重要的光学性能被广泛应用于各类光电子器件。本文对自组装单层SiO2纳米球掩模刻蚀法制备GaAs纳米柱二维阵列结构的关键工艺技术进行了研究。采用旋涂法在GaAs表面制备自组装单层SiO2纳米球,重点研究了GaAs表面氧等离子体亲水处理工艺对纳米球排列特性的影响,获得最佳工艺条件为功率配比100 W+80 W、腔室压力4 Pa、氧气流量20 mL/min、处理时间1200 s,并最终得到排列紧密的大面积单层纳米球薄膜。以单层纳米球为掩模,采用感应耦合等离子体刻蚀技术在GaAs表面制备了纳米柱阵列并测试了其表面光反射谱。测试结果表明,GaAs纳米柱阵列在特定波段的反射率降低至5%,远低于表面无纳米结构的薄膜材料表面高达40%的光反射。分析表明纳米柱可以激发米氏散射共振效应,从而有效降低反射率并提升光吸收。