两步氧化法制备β-Ga2O3薄膜

为获得高质量的β-Ga_2O_3薄膜,对传统的GaN薄膜高温氧化方法进行了优化。我们通过对GaN薄膜分别进行一步或两步高温氧化的方法制备了β-Ga_2O_3薄膜,并通过X射线衍射、场发射扫描电子显微镜、拉曼光谱等对制备的样品进行了测试、对比与分析。结果表明,950℃下GaN薄膜无法完全氧化,而直接1 150℃氧化得到的样品并没有明显的晶向。相比之下,通过两步氧化法,GaN薄膜被完全氧化,且得到的β-Ga_2O_3薄膜具有明显的沿■方向的晶向,样品表面显示出明显的纳米线结构。最佳的氧化时间为在950℃下氧化3 h之后在1 150℃下氧化1 h,此时得到样品的纳米线结构最明显,其纳米线的直径约为30～40 nm。拉曼光谱测试证实了该条件下获得的样品具有较高的晶体质量。通过分析不同样品结构以及形貌特性,我们发现不同温度下的不同氧化模式是导致该结果的主要原因。     

Self-screening of the polarized electric field in wurtzite gallium nitride along [0001] direction

The strong polarization effect of GaN-based materials is widely used in high-performance devices such as white-light-emitting diodes (white LEDs), high electron mobility transistors (HEMTs), and GaN polarization superjunctions. However, the current researches on the polarization mechanism of GaN-based materials are not sufficient. In this paper, we studied the influence of polarization on electric field and energy band characteristics of Ga-face GaN bulk materials by using a combination of theoretical analysis and semiconductor technology computer-aided design (TCAD) simulation. The self-screening effect in Ga-face bulk GaN under ideal and non-ideal conditions is studied respectively. We believe that the formation of high-density two-dimensional electron gas (2DEG) in GaN is the accumulation of screening charges. We also clarify the source and accumulation of the screening charges caused by the GaN self-screening effect in this paper and aim to guide the design and optimization of high-performance GaN-based devices.     

声表面波器件用〈110〉取向ZnO薄膜的MOCVD生长

Zn O是具有纤锌矿晶体结构的多功能半导体材料 ,它具有 3 .3 7e V的禁带宽度和高达 60 me V的激子束缚能 ,是很有希望的紫外发光材料 .由于具有 c轴的择优取向性 ,因此目前人们的注意力主要集中在对 c轴取向 Zn O薄膜的特性研究上 [1～ 3] .但其它取向的 Zn O薄膜也可在某些衬底的特定面上 ,通过特定的条件进行生长 ,如〈1 1 0〉取向的 Zn O薄膜可在特定的条件下生长在蓝宝石 R面衬底上[4～ 7] .由于 (1 1 0 )面的 Zn O薄膜具有一些 c轴取向薄膜所不具备或无法比拟的特性 ,如 :机电耦合系数高达6% (C面薄膜的机电耦合系数却不足 1 % )…     

蓝宝石R面上ZnO薄膜的NH3掺杂研究

以NH₃为掺杂源,利用金属有机化学气相沉积(MOCVD)系统在蓝宝石R面上生长出掺氮ZnO薄膜。通过XRD,SEM测量优化了其生长参数,在610℃和在80sccm的NH₃流量下生长出了〈1120〉单一取向的ZnO薄膜。经Hall电阻率测量,得知该薄膜呈现弱p型或高电阻率,并对其光电子能谱进行了研究。     

GaSb/InSb/InP异质结构的漏电流机制

为提高InSb红外探测器室温下的工作性能,设计了GaSb/InSb/InP异质结构,并对结构中俄歇复合与肖克莱-瑞德复合两种复合机制对漏电流的影响进行研究。利用TCAD仿真工具对InSb探测器件进行建模,分析得到能带结构与载流子分布。以能带参数为基础,根据连续性方程,结合漂移扩散模型,分析了俄歇复合在反偏压下的衰减效应,并综合肖克莱-瑞德复合的影响,计算出不同缺陷浓度下器件的漏电流。利用低压金属有机化学气相沉积(LP-MOCVD)技术制备GaSb/InSb/InP异质外延样品,对其漏电流进行测试,并与仿真结果进行对比分析。实验结果表明,计算结果与实验结果一致,器件工作性能的主要限制为肖克莱-瑞德复合机制,器件的漏电流为0.26 A·cm~(-2),品质因子R_0A为0.1Ω·cm~2。相比于同质InSb结构,器件的R_0A提高了一个数量级,已接近实用化水平。     

6H-SiC衬底上AlGaN基垂直结构紫外LED的制备

利用金属有机物化学气相沉积方法,在n型6H-SiC衬底上制备了15对Si掺杂Al_(0.19)Ga_(0.81)N/Al_(0.37)Ga_(0.63)N DBR,并采用低温AlN缓冲层有效抑制了DBR结构中裂纹的产生,得到了表面均方根粗糙度仅为0.4 nm且导电性能良好的n型DBR,其在369 nm处峰值反射率为68%,阻带宽度为10 nm。在获得导电DBR的基础上,进一步在n型6H-SiC衬底上构建了有、无DBR的垂直结构紫外LED。对比两者电致发光光谱,发现DBR结构的引入有效增强了LED紫外发光强度。     

退火对ZnO薄膜质量的影响

用金属有机化学气相沉积法（MOCVD）在蓝宝石（0001）衬底上制备了c轴取向的高质量的ZnO薄膜,通过在生长温度下氧气和氮气中退火处理的比较,研究了退火对ZnO薄膜结构和发光特性的影响。通过X射线衍射测量得知,经过氮气和氧气退火都可以使其002峰增强,且在氧退火中表现得尤为明显。光致发光测量发现氮气中退火的ZnO薄膜的紫外发光峰明显增强,而深能级发光峰明显减弱;而氧气中退火的ZnO薄膜的紫外发光峰略有减弱,而深能级峰显著增强。     

Analysis of localization effect in blue-violet light emitting InGaN/GaN multiple quantum wells with different well widths

Four blue-violet light emitting InGaN/GaN multiple quantum well(MQW) structures with different well widths are grown by metal–organic chemical vapor deposition. The carrier localization effect in these samples is investigated mainly by temperature-dependent photoluminescence measurements. It is found that the localization effect is enhanced as the well width increases from 1.8 nm to 3.6 nm in our experiments. The temperature induced PL peak blueshift and linewidth variation increase with increasing well width, implying that a greater amplitude of potential fluctuation as well as more localization states exist in wider wells. In addition, it is noted that the broadening of the PL spectra always occurs mainly on the low-energy side of the PL spectra due to the temperature-induced band-gap shrinkage, while in the case of the widest well, a large extension of the spectral curve also occurs in the high energy sides due to the existence of more shallow localized centers.     

MOCVD法生长ZnO薄膜的结构及光学特性

采用MOCVD方法在c Al2 O3衬底上生长出了具有单一c轴取向的ZnO薄膜 ,采用X射线衍射 (XRD)、Raman散射、X射线光电子能谱 (XPS)及光致发光 (PL)谱等方法对ZnO薄膜的结构及光学特性进行分析测试。XRD分析只观察到ZnO薄膜 (0 0 0 2 )衍射峰 ,其FWHM数值为 0 1 84°。Raman散射谱中 ,4 35 32cm- 1 处喇曼峰为ZnO的E2 (high)振动模 ,A1 (LO)振动模位于 5 75 32cm- 1 处。XPS分析表明 :ZnO薄膜表面易吸附游离态氧 ,刻蚀后ZnO薄膜O1s光电子能谱峰位于 5 30 2eV ,更接近Zn—O键中O1s电子结合能 (5 30 4eV)。PL谱中 ,在3 2 8eV处观察到了自由激子发射峰 ,而深能级跃迁峰位于 2 5 5eV ,二者峰强比值为 4 0∶1 ,表明生长的ZnO薄膜具有较高的光学质量