双光子聚合多次快速扫描机制与小线宽研究

采用自由基浓度起伏理论并考虑光镊集聚效应,理论研究了飞秒激光双光子聚合多次快速扫描的线宽问题。根据双光子光聚合过程中自由基浓度随时间变化的关系,考虑光镊力及自由扩散效应对自由基分布的影响,得到了多次快速扫描加工线宽的表达式。研究了多次扫描过程中产生自由基浓度随扫描次数的变化、双光子聚合加工不同扫描次数下加工线宽随激光功率的变化、多次扫描过程中间隔时间对于加工线宽的影响。多次扫描的线宽表达式可以直接回归至单次扫描的一般公式,且理论结果与文献中实验加工线宽相吻合,两者误差在2%。控制扫描间隔时间,减少自由基的向外扩散运动以及被树脂材料内大分子猝灭,使得活性自由基的分布更为集中,可以获得更小的加工线宽。研究结果为飞秒激光双光子更小线宽加工的研究提供了新的思路,为飞秒激光多次快速扫描加工提供了理论依据。     

6H-SiC的飞秒激光超衍射加工

利用飞秒激光直写微纳加工平台, 对6H-SiC材料进行了突破衍射极限的微纳结构加工研究. 使用中心波长和脉宽分别为800 nm和130 fs的钛蓝宝石激光器和荧光倒置显微镜搭建了飞秒激光直写微纳加工平台, 研究了在不同的实验条件下对6H-SiC的光学加工情况, 采用扫描电子显微镜对加工结构进行表征. 通过分析不同的激光功率和不同的曝光时间等实验条件下加工的分辨率, 发现分辨率随着激光功率的减小而提高, 随扫描速度的增大而提高, 且能突破光学衍射极限. 最终获得125 nm的加工线宽, 并加工了加工线宽240 nm, 周期1.0 μm的线阵列. 研究结果为微机电系统(MEMS)的微器件设计开创了新的思路, 对发展MEMS器件具有重要意义. 关键词： 飞秒激光直写 超衍射加工 6H-SiC 微机电系统     

考虑光镊效应的飞秒激光双光子加工线宽

采用自由基浓度起伏理论结合光镊集聚效应,理论研究了飞秒激光双光子加工的线宽问题。根据双光子光聚合过程中自由基浓度随时间变化的关系,考虑光镊效应对自由基分布范围的影响,得到了飞秒激光双光子加工线宽的表达式。研究了线宽随扫描速度与激光功率的变化关系,并讨论了不同光引发剂对线宽的影响。得到了以自由基浓度起伏为基础,并考虑光镊效应的双光子加工线宽表达式,该结果与实验结果相符。研究结果为飞秒激光双光子加工的研究提供了新的思路,为光镊集聚效应对线宽影响的实验研究提供了理论依据。     

超快激光对涂有量子点玻璃表面的微构造

基于金属量子点的局域等离激元效应,提出一种新的固体介质表面微结构的制备方法。利用飞秒激光辐照涂有Cu2S量子点的K9玻璃,在其表面制备出了类似光栅结构的亚波长周期性条纹。当飞秒激光的中心波长为1300 nm、脉宽为50 fs、激光功率为230 mW时,玻璃表面的亚波长周期性条纹结构尺寸为34 nm。通过模拟得到了附有Cu2S量子点玻璃表面的近场分布,模拟结果表明,出现这种周期性条纹结构是入射飞秒激光与量子点产生的等离激元场之间产生干涉引起的。该制备方法可以降低透明介质微构造的激光功率阈值,改善了透明基质表面的微纳结构加工工艺。     

飞秒激光直写偏振转换器件和几何相位器件(特邀)

光学器件的微型化和集成化是当前研究的热点,其中利用微纳结构实现局域电磁改性的超构光学更是引人关注。本文从微纳结构的制备出发,总结了利用超衍射精密加工的飞秒激光直写技术,制备偏振转换器件和几何相位器件的工作。介绍了微纳结构改性的物理机制,飞秒激光直写光刻胶、飞秒激光烧蚀金属薄膜、飞秒激光诱导纳米光栅等手段在偏振转换器件和几何相位器件制备方面的进展,展望了飞秒激光微纳加工技术在超构光学器件制备方面的挑战。     

飞秒激光制备耐高温蓝宝石内部几何相位波带片（特邀）

针对晶体材料几何相位元件加工难、精度低、效果差等问题,提出了利用飞秒激光诱导纳米条纹技术来实现材料内部几何相位衍射元件的制备。飞秒激光近阈值加工方式有效的提升了加工精度,其精度为340 nm。通过实时调控扫描激光的偏振可以精准控制诱导纳米条纹的方向,进而改变晶体双折射效应的慢轴方向。基于该方法实现了蓝宝石内部几何相位波带片的有效制备,器件形貌良好、无裂纹,可用于高温环境下聚焦。     

离子束刻蚀辅助飞秒激光加工制备碳化硅微光学元件

为了解决飞秒激光加工硬质材料所带来的表面质量差的问题,提出了离子束刻蚀与飞秒激光复合加工技术.利用飞秒激光加工技术在碳化硅表面制备微纳结构图形,然后通过离子束刻蚀技术对碳化硅微纳结构进行刻蚀,以调控结构的线宽和深度,使结构表面粗糙度由约106nm降低到11.8nm.研究表明,利用该技术制备的碳化硅菲涅尔波带片展现出良好的聚焦和成像效果.     

飞秒激光诱导ZnO :Al薄膜周期结构及其光致发光特性

利用单束800 run飞秒激光在掺杂了Al的ZnO薄膜中制备了纳米周期条纹结构.研究了不同能流密度的飞秒激光在照射不同的时间后,表面纳米周期结构的变化规律及其形成机制.利用He-Ge激光器作为激发光源,研究了ZnO:Al薄膜的光致发光特性及其与纳米周期结构的关系.结果表明,近带隙发光增强的主要原因是800 nm飞秒激光...     

飞秒激光辐射诱导金属表面微纳结构研究

通过1 kHz的飞秒脉冲(脉宽130 fs,中心波长800 nm)对厚度为60 μm的不锈钢65Mn表面进行飞秒微加工,通过拟合得到65Mn的消融阈值为0.5 J·cm-2。研究了飞秒激光作用下表面形成的多种微结构,其中包括纳米孔及纳米柱状物。同时讨论了激光能量和作用脉冲个数对微结构形成的影响。随着周期波纹结构的形成,发现在各种能量和脉冲个数条件下,周期结构的周期约为入射脉冲的波长。相同的激光功率下,在不同加工速度和加工次数下对不锈钢进行表面微加工,得到了规则的圆孔阵列结构。     

基于空间光调制器的飞秒并行加工方法研究

针对飞秒激光微加工中能量利用率和加工效率低的问题,提出一种基于空间光调制器的飞秒并行加工方法。在讨论衍射光栅入射角与衍射角关系的基础上,分析了叠加多个衍射光栅产生多光束的原理,运用GS算法对目标多光束进行优化并计算出相应的相位全息图,将该全息图加载到空间光调制器中获得了多光束。采用脉宽100 fs、波长800 nm的飞秒激光,进行聚焦PMMA样品内部的并行加工实验,观察到PMMA上多点组合的一和工字型,得到了光束能量均匀的图形。实验结果论证了该方法对于多光束并行加工控制的有效性。     

用于飞秒激光纳米加工的TiO_2粒子阵列诱导多种基底表面近场增强

利用纳米粒子辅助对飞秒激光能量进行空间局域化,使其在基底表面诱导产生纳米尺度的近场增强,这对超衍射极限微结构加工具有重要意义.目前对于粒子阵列诱导飞秒激光纳米孔加工的研究仅限于金属Au粒子及低折射率聚苯乙烯介电粒子等,本文提出并开展了应用高折射率TiO_2介电粒子阵列作为辅助诱导激光近场增强从而进行飞秒激光超衍射纳米孔加工的研究.对TiO_2介电粒子阵列在Si,Pt及SiO_2表面的近场强度分布进行了数值模拟,研究其基底表面近场增强的规律及物理过程.研究结果发现,使用硅基底时,阵列与单一TiO_2球形粒子相比其近场增强仅下降约30%;相对于入射激光强度而言,在直径约为100nm的空间范围内获得140倍的近场增强,这一现象可用于百纳米孔的激光加工.同时在其他典型基底的理论计算结果中也表明,几乎在所有金属及介电材料表面均可以实现良好的百纳米空间范围内的近场增强,并且具有近场随着基底折射率变大而增强的规律.这些现象的产生归因于TiO_2粒子中磁四极振荡产生的激光前向场增强及粒子与基底的耦合作用.进一步引入镜像电荷模型对基底光学参数对其表面近场增强的影响规律进行了分析和解释.本文的模拟结果对飞秒激光近场超衍射极限纳米加工的应用有着重要的意义.     

Optically produced arrays of planar nanostructures inside fused silica

Linearly polarized femtosecond light pulses, focused inside fused silica to an intensity that leads to multiphoton ionization, produce arrayed planes of modified material having their normal parallel to the laser polarization. The planes are < or = 10 nm thick and are spaced at approximately lambda/2 in the medium for free space wavelengths of both 800 and 400 nm. By slowly scanning the sample under a fixed laser focus, order is maintained over macroscopic distances for all angles between the polarization and scan direction. With the laser polarization parallel to the scan direction we produce long-range Bragg-like gratings. We discuss how local field enhancement influences dielectric ionization, describe how this leads to nanoplane growth, why the planes are arrayed, and how long-range order is maintained.     

Surface roughness assisted 100 kHz femtosecond laser induced nanostructure formation on silicon surface

Spontaneous nanostructure formations on roughened and smooth silicon surface by the femtosecond laser irradiation with the repetition rate of 100 kHz were systematically studied. In addition to the widely accepted so-called coarse ripple, which has the period analogous to the wavelength of the laser beam and aligns perpendicularly to the electric field of the incident laser beam, the ripple which has the period similar to the wavelength of the incident laser beam but aligns parallel to the electric field of the laser beam was observed on the roughened surface for the lower fluence and the higher number of pulse irradiation. Furthermore, the ensemble of dots formed by the enhancement of the local electric field was found on the roughened surface. This structure is preferentially formed around the scratches aligned perpendicularly to the electric field of the laser beam. These novel nanostructures are considered to be peculiar to the femtosecond laser irradiation and open the possibilities for precise control of the spontaneous nanostructure formation by femtosecond laser irradiation.     

利用三色组合脉冲激光获得孤立阿秒脉冲发射

孤立阿秒脉冲因可以跟踪和控制原子及分子内电子的运动过程而备受关注.本文从理论上开展了氦原子在3束飞秒脉冲激光组合场辐照下产生的高次谐波和阿秒脉冲辐射的研究.组合激光场由16 fs/1600 nm,15 fs/1100 nm和5.3 fs/800 nm的钛宝石脉冲构成.与前两束脉冲合成的双色场产生谐波谱相比,附加钛宝石脉冲的三色场产生的高次谐波发射谱呈现出高转换效率及宽带超连续特性,超连续谱范围覆盖从230—690次谐波,傅里叶变换后实现了128 as高强度孤立短脉冲的产生.该结果归因于合成的三色场呈现出高功率及少周期的中红外飞秒脉冲激光特性,可以有效控制原子电离以及复合发生在中红外飞秒脉冲的一个有效光学周期内.     

Resonant interaction of femtosecond radiation with a cloud of cold <Superscript>87</Superscript>Rb atoms

The resonant interaction of ⁸⁷Rb atoms in a magneto-optical trap with femtosecond laser radiation in the spectral range 760–820 nm has been investigated experimentally. It has been demonstrated that femtosecond laser radiation with a spectral width of 10 nm interacts with an atomic ensemble as a set of spectrally narrow modes and as an ionizing laser field simultaneously. The dynamics of trap loading in the presence of ionization by femtosecond radiation has been studied, and the 5D _5/2 level population produced by an additional weak laser field has been measured.     

Nanolithography using high transmission nanoscale ridge aperture probe

Nanoscale ridge apertures provide a highly confined radiation spot with a high transmission efficiency when used in the near field approach. The radiation confinement and enhancement is due to the electric–magnetic field concentrated in the gap between the ridges. This paper reports the experimental demonstration of radiation enhancement using such antenna apertures and lithography of nanometer size structures. The process utilizes a NSOM (near field scanning optical microscopy) probe with a ridge aperture at the tip, and it combines the nonlinear two photon effect from femtosecond laser irradiation to achieve sub-diffraction limit lithography resolution.     

Polarization control of multi-photon absorption under intermediate femtosecond laser field

It has been shown that the femtosecond laser polarization modulation is a very simple and well-established method to control the multi-photon absorption process by the light–matter interaction. Previous studies mainly focused on the multiphoton absorption control in the weak field. In this paper, we further explore the polarization control behavior of multiphoton absorption process in the intermediate femtosecond laser field. In the weak femtosecond laser field, the secondorder perturbation theory can well describe the non-resonant two-photon absorption process. However, the higher order nonlinear effect(e.g., four-photon absorption) can occur in the intermediate femtosecond laser field, and thus it is necessary to establish new theoretical model to describe the multi-photon absorption process, which includes the two-photon and four-photon transitions. Here, we construct a fourth-order perturbation theory to study the polarization control behavior of this multi-photon absorption under the intermediate femtosecond laser field excitation, and our theoretical results show that the two-photon and four-photon excitation pathways can induce a coherent interference, while the coherent interference is constructive or destructive that depends on the femtosecond laser center frequency. Moreover, the two-photon and fourphoton transitions have the different polarization control efficiency, and the four-photon absorption can obtain the higher polarization control efficiency. Thus, the polarization control efficiency of the whole excitation process can be increased or decreased by properly designing the femtosecond laser field intensity and laser center frequency. These studies can provide a clear physical picture for understanding and controlling the multi-photon absorption process in the intermediate femtosecond laser field, and also can provide a theoretical guidance for the future experimental realization.     

Field-free molecular orientation induced by combined femtosecond single- and dual-color laser pulses：The role of delay time and quantum interference

The coherent control of field-free molecular orientation of CO with combined femtosecond single- and dual-color laser pulses has been theoretically studied. The effect of the delay time between the femtosecond single- and dual-color laser pulses is discussed, and the physical mechanism of the enhancement of molecular orientation with pre-alignment of the molecule is investigated. It is found that the basic mechanism is based on the creation of a rotational wave packet by the femtosecond single-color laser pulse. Furthermore, we investigate the interference between multiple rotational excitation pathways following pre-alignment with femtosecond single-color laser pulse. It is shown that such interference can lead to an enhancement of the orientation of CO molecule by a factor of 1.6.