聚合物/二氧化硅混合型无热化阵列波导光栅参量的优化

研究一种新型无热化聚合物/二氧化硅混合波导组成的硅基二氧化硅阵列波导光栅.阵列波导光栅对温度的依赖性受波导物质的折射率和波导芯的尺寸影响.通过调节这些参量就可以减小温度对阵列波导光栅的影响.优化得到混合型阵列波导光栅在温度20~70℃范围内波谱漂移小于常规型 AWG结构的5%.     

基于质子交换和刻蚀工艺的体铌酸锂阵列波导光栅

提出一种将质子交换技术和刻蚀技术结合的体铌酸锂波导和器件加工方案,基于质子交换的铌酸锂晶体相变特性改变,降低了质子交换区直接刻蚀难度,结合质子交换的纵向折射率改变和刻蚀波导的横向结构改变,波导尺寸显著降低,采用粒子群算法优化波导尺寸,最小可达2.5μm。基于该工艺方案设计了中心波长为1550 nm、四通道且通道间隔为400 GHz的阵列波导光栅,该阵列波导光栅的传输损耗约为6 dB,相邻通道间串扰均低于22 dB,整体尺寸仅为850μm×620μm,在高密度铌酸锂光子集成互连等场景具有较大的应用潜力。     

一种温度不敏感型阵列波导光栅的研究

研究了的一种新型温度不敏感型阵列波导光栅(AWG)。该新型温度不敏感型阵列波导光栅的波导采用混合材料的波导结构，该混合材料波导通过在石英波导芯层上旋涂聚合物材料的上包层，达到改变波导温度特性的目的，使得阵列波导光栅的温度敏感性降低。通过理论分析和有限差分方法研究了其中两种结构：三层混合材料波导构成的阵列波导光栅和四层混合材料波导构成的阵列波导光栅，计算了该新型温度不敏感型阵列波导光栅的温度特性。结果表明，在一定的设计下，温度变化0～50℃时，这两种温度不敏感型阵列波导光栅的最大波长漂移量小于0．03nm，不到无温度控制时常规阵列波导光栅最大波长漂移量的4％。     

基于阵列波导光纤温度特性的分布式光纤布喇格光栅解调法

设计了一种使用阵列波导光栅对分布式光纤布喇格光栅中心波长较大范围变化的解调方法.根据阵列波导光栅各通道的中心波长可随温度变化而改变的特性,通过控制软件循环地在几分钟内使加在阵列波导光栅的芯片温度从30℃线性增加到90℃,同时用微机高速采集各通道的数据并分别找出各通道数据的最大值时刻所对应的阵列波导光栅芯片温度,从而根据其波长-温度关系在微机上报告此时各光纤布喇格光栅的中心波长.实验结果表明,系统有效地解决了分布式解调的问题,微机以小于10min的周期报告出每通道0.6nm范围变化的光纤布喇格光栅中心波长(共40个通道),测量相对误差小于2%.     

基于阵列波导光纤温度特性的分布式光纤布喇格光栅解调法

设计了一种使用阵列波导光栅对分布式光纤布喇格光栅中心波长较大范围变化的解调方法.根据阵列波导光栅各通道的中心波长可随温度变化而改变的特性,通过控制软件循环地在几分钟内使加在阵列波导光栅的芯片温度从30℃线性增加到90℃,同时用微机高速采集各通道的数据并分别找出各通道数据的最大值时刻所对应的阵列波导光栅芯片温度,从而根据其波长-温度关系在微机上报告此时各光纤布喇格光栅的中心波长.实验结果表明,系统有效地解决了分布式解调的问题, 微机以小于10 min的周期报告出每通道0.6 nm范围变化的光纤布喇格光栅中心波长(共40个通道),测量相对误差小于2%.     

650 nm聚合物阵列波导光栅波分复用器设计

选择在可见光波段具有较低吸收损耗的聚甲基丙烯酸甲酯-甲基丙烯酸环氧丙酯 共聚物作为波导包层材料,使用双酚A型环氧树脂作为折射率调节剂,根据材料的折射率设计了单模波导截面尺寸;然后,采用束传播法优化设计出16信道阵列波导光栅(AWG)器件的版图结构。利用Optiwave软件模拟了AWG器件的光传输特性,结果显示,器件的信道间隔为0.845 01 nm,插入损耗小于14 dB,串扰小于-25 dB。     

聚合物阵列波导光栅复用器关键技术的研究

介绍了阵列波导光栅(AWG)复用器的工作原理;运用光栅衍射理论和马卡提里近似法,对中心波长为1.55 μm,波长间隔为1.6 nm的聚合物AWG进行参量设计,通过数值模拟验证了设计的正确性.用甲基丙烯酸甲酯类聚合物对AWG的制备工艺进行了研究,用铝作掩模制作了聚合物光波导,测试结果表明在1.55 μm处波导实现单模传输.     

紫外固化型聚合物高阶布拉格波导光栅滤波器

利用紫外固化材料SU-82005与热交联聚合物甲基丙烯酸甲酯一甲基丙烯酸缩水甘油酯[P（MMA—GMA）]分别作为波导芯层和包层材料,通过直接光刻技术,成功实现了厚度为5μm,宽度为9μm,光栅高度为4μm的起伏型高阶布拉格波导光栅滤波器。对光栅器件的谐振波长,光透射率等重要参数进行了模拟设计。测得制备的聚合物高阶布拉格波导光栅滤波器的谐振波长为1550．4nm,消光比为23dB,3-dB带宽为2nm。     

低插入损耗阵列波导光栅的设计

研究了阵列波导光栅的插入损耗.针对损耗来源,讨论了各项损耗的研究方法.分析了结构参量对损耗的影响,讨论了降低损耗的设计思路.对结构参量进行优化,设计了8通道200 GHz间隔的阵列波导光栅,中心通道插入损耗为1.37 dB,低于目前商用器件的1/2.对阵列波导光栅的设计具有一定的指导意义.     

基于阵列波导光栅的光纤布拉格光栅解调技术综述

基于阵列波导光栅的光子集成解调技术是硅光领域的研究热点和难点.相比传统解调方法,基于阵列波导光栅的光子集成解调技术因其解调精度高、解调速度快、封装体积小等优势,在光纤布拉格光栅的高速、高精度解调上具有明显优势.近年来,随着光子集成技术的发展,各科研院所和相关机构对阵列波导光栅的光子集成解调法进行了广泛深入的研究与优化.本文通过介绍阵列波导光栅工作原理及基于阵列波导光栅的光纤布拉格光栅波长解调原理,结合基于阵列波导光栅的光纤布拉格光栅解调仪在材料体系和系统性能两个方面的重要进展,归纳了基于阵列波导光栅的解调仪的典型应用场景,从新材料、系统集成和规模化三方面对光纤布拉格光栅解调系统的未来发展提出针对性建议,为基于阵列波导光栅的光子集成解调技术的研究发展提供参考.     

Design of flat-field arrayed waveguide grating with three stigmatic points

A new-type flat-field arrayed waveguide grating (AWG), with the focal signals of all wavelengths of operation focusing along a straight line, has been designed. The work bases on the aberration theory of AWG, in which the restraints imposed on the conventional Rowland-type AWG have been released. In the design of flat-field AWG, three stigmatic points restrain three dominant geometry parameters: geometry of star couplers, ports distribution of phased-array, and length increment between adjacent paths. An eight-channel 200-GHz spacing flat-field AWG has been designed and simulated. As stigmatic points introduced, the aberration of this device is much lower than that of the Rowland-type AWG.     

Spectral domain optical coherence tomography imaging with an integrated optics spectrometer

We designed and fabricated an arrayed-waveguide grating (AWG) in silicon oxynitride as a spectrometer for spectral domain optical coherence tomography (SD-OCT). The AWG has a footprint of only 3.0 cm × 2.5 cm, operates at a center wavelength of 1300 nm, and has 78 nm free spectral range. OCT measurements are performed that demonstrate imaging up to a maximum depth of 1 mm with an axial resolution of 19 μm, both in agreement with the AWG design parameters. Using the AWG spectrometer combined with a fiber-based SD-OCT system, we demonstrate cross-sectional OCT imaging of a multilayered scattering phantom.     

Polymeric 32-channel arrayed waveguide grating multiplexer using fluorinated poly (ether ether ketone)

In wavelength division multiplexing (WDM) systems, an arrayed waveguide grating (AWG) multiplexer is a key component. A polymeric AWG multiplexer has recently attracted much attention due to its low cost processing and a potential of integration with other devices. Fluorinated poly (ether ether ketone)(FPEEK) is excellent material for fabrication of optical waveguides due to its low absorption loss at 1.55-μm wavelength and high thermal stability. A 32-channel AWG multiplexer has been designed based on the grating diffraction theory and fabricated using newly synthesized FPEEK. During the fabrication process of the Polymer/Si AWG device, spin coating, vaporizing, photolithographic patterning and reactive ion etching (RIE) are used. The AWG multiplexer measurement system is based on a tunable semiconductor laser, infrared camera and a Peltier-type heater. The device exhibits a wavelength channel spacing of 0.8nm and a center wavelength of 1548 nm in the room temperature.     

Wavelength-dispersive device based on a Fourier-transform Michelson-type arrayed waveguide grating

We propose a new type of arrayed waveguide grating (AWG) device that operates as a Fourier-transform (FT) spectrometer without the need of scanning elements. The large input aperture size typical of a FT spectrometer eliminates the requirement for a narrow single-mode input waveguide while still achieving high spectral resolution with a markedly increased light-gathering capability (etendue). An example of the device with a resolution of 0.07 nm (approximately 10 GHz) and designed for a silicon-on-insulator platform is presented. The calculated spectra show no noticeable deterioration for aperture widths as large as 40 microm, yielding more than a 50-fold increase in aperture size compared with conventional AWG or echelle grating based devices at the equivalent resolution.     

基于绝缘体上的硅材料的全内反射型阵列波导光栅器件的设计

设计了一种基于绝缘体上的硅材料的全内反射型阵列波导光栅解复用器年。将一全内反射波导镜引入原弯曲的波导列阵中，该波导镜具有偏振补偿的功能和缩小器件尺寸的特点。在器年数值模拟的基础上，制作了原理性器件，并获得了初步的实验结果。     

AWG中波导间耦合造成的相位畸变的分析

用(1,1)阶Pad啨近似的广角BPM计算了阵列波导光栅(AWG)中由于阵列波导间耦合造成的相位畸变以及由于相位畸变引起的相位误差分别考虑了光从中心/非中心输入波导入射两种情况结果表明,波导间的耦合会造成显著的相位畸变,但由此引起的相位误差却很小,光从中心输入波导入射时对应的相位误差10-3rad,从非中心输入波导入射时的相位误差约为10-2rad针对波导阵列边缘效应引起的相位畸变,设计AWG结构时,在阵列部分两侧增加了边缘辅助波导结构,从而消除了边缘效应,使得边缘阵列波导对应的相位误差从10-1rad量级减小为10-3(10-2)rad量级.     

Design and fabrication of wavelength tunable AWGs based on the thermo-optic effect

In this Letter, a 16 channel 200 GHz wavelength tunable arrayed waveguide grating(AWG) is designed and fabricated based on the silicon on insulator platform. Considering that the performance of the AWG, such as central wavelength and crosstalk, is sensitive to the dimension variation of waveguides, the error analysis of the AWG with width fluctuations is worked out using the transfer function method. A heater is designed to realize the wavelength tunability of the AWG based on the thermo-optic effect of silicon. The measured results show that the insertion loss of the AWG is about 6 d B, and the crosstalk is 7.5 d B. The wavelength tunability of 1.1 nm is achieved at 276 m W power consumption, and more wavelength shifts will gain at larger power consumption.