溅射沉积自诱导混晶界面与Ge量子点的生长研究

在不同的沉积温度下采用离子束溅射技术,在Si基底上生长得到分布密度高、尺寸单模分布的圆顶形Ge量子点.研究发现:随沉积温度的升高Ge量子点的分布密度增大,尺寸减小,当沉积温度升高到750 ℃时,溅射沉积15个单原子层厚的Ge原子层,生长得到高度和底宽分别为14.5和52.7 nm的Ge量子点,其分布密度高达1.68×10¹⁰ cm^-2;Ge量子点的形貌、尺寸和分布密度随沉积温度的演变规律与热平衡状态下气相凝聚的量子点不同,具有稳定形状特征和尺寸分布的Ge量子点是 关键词： Ge量子点 离子束溅射沉积 表面原子行为 混晶界面     

原子轰击调制离子束溅射沉积Ge量子点的生长演变

采用离子束溅射沉积的方法在Si衬底上生长Ge量子点,观察到量子点的生长随Ge原子层沉积厚度θ的增加经历了两个不同的阶段.当θ在6—10.5个单原子层(ML)范围内时,量子点的平均底宽和平均高度随θ增加同时增大,生长得到高宽比较小的圆顶形Ge量子点,伴随着量子点的生长,二维浸润层的厚度同时增大,量子点的分布密度缓慢增加;当θ在11.5一17 ML范围内时,获得高宽比较大的圆顶形Ge量子点,量子点以纵向生长为主导,二维浸润层的离解促进量子点的成核和长大,量子点的分布密度随θ的增加快速增大;量子点在θ由10.5 ML增加到11.5 ML时由一个生长阶段转变到另一个生长阶段,其分布密度同时发生6.4倍的增加.离子束溅射沉积Ge量子点的生长演变与在热平衡状态下生长的量子点不同,在量子点的不同生长阶段,其表面形貌和分布密度的变化特点是在热力学条件限制下表面原子动态演变的结果,θ的变化是引起系统自由能改变的主要因素.携带一定动能的溅射原子对生长表面的轰击促进表面原子的扩散迁移,同时压制量子点的成核,在浸润层中形成超应变状态,因而,改变体系的能量和表面原子的动力学行为,对量子点的生长起重要作用.     

离子束溅射Ge量子点的应变调制生长

采用离子束溅射技术制备了单层和双层Ge量子点, 通过原子力显微镜对比了不同Si隔离层厚度和不同掩埋量子点密度情况下表层量子点的尺寸和形貌差异, 系统研究了掩埋Ge量子点产生的应变对表层量子点的浸润层及形核的影响, 并用埋置应变模型对其进行解释. 实验结果表明, 覆盖Ge量子点的Si隔离层中分布着的应变场, 导致表层量子点浸润层厚度的降低, 从而增大点的体积; 应变强度随隔离层厚度的减小而增加, 造成表层量子点形状和尺寸的变化; 此外, 应变还调控了表层量子点的空间分布. 关键词： Ge量子点 埋层应变 离子束溅射     

掺杂对多层Ge/Si(001)量子点光致发光的影响

利用超高真空化学气相沉积设备, 在Si (001) 衬底上外延生长了多个四层Ge/Si量子点样品. 通过原位掺杂的方法, 对不同样品中的Ge/Si量子点分别进行了未掺杂、磷掺杂和硼掺杂. 相比未掺杂的样品, 磷掺杂不影响Ge/Si量子点的表面形貌, 但可以有效增强其室温光致发光; 而硼掺杂会增强Ge/Si量子点的合并, 降低小尺寸Ge/Si量子点的密度, 但其光致发光会减弱. 磷掺杂增强Ge/Si量子点光致发光的原因是, 磷掺杂为Ge/Si量子点提供了更多参与辐射复合的电子. 关键词： Ge/Si量子点 磷掺杂 光致发光     

高速率沉积磁控溅射技术制备Ge点的退火生长研究

采用磁控溅射技术在Si衬底上以350?C沉积14 nm的非晶Ge薄膜,通过退火改变系统生长热能,实现了低维Ge/Si点的生长.利用原子力显微镜(AFM)和拉曼(Raman)光谱所获得的形貌和声子振动信息,对Ge点的形成机理和演变规律进行了研究.实验结果表明:在675?C退火30 min后,非晶Ge薄膜转变为密度高达8.5×109cm-2的Ge点.通过Ostwald熟化理论、表面扩散模型和对激活能的计算,很好地解释了退火过程中,Ge原子在Si表面迁移、最终形成纳米点的行为.研究结果表明用高速沉积磁控溅射配合热退火制备Ge/Si纳米点的方法,可为自组织量子点生长实验提供一定的理论支撑.     

Si组分对SiGe量子点形状演化的影响

研究了自组织生长SiGe岛（量子点）中Si组分对形状演化的影响.采用UHV/CVD方法生长了 不同Si组分的SiGe岛，用AFM对其形状和尺寸分布进行了分析，实验结果表明SiGe岛从金字 塔形向圆顶形转变的临界体积随Si组分的增大而增大.通过对量子点能量的应变能项进行修正，解释了量子点中Si组分对形状演化的影响.在特定的工艺条件下得到了单模尺寸分布的 金字塔和圆顶形量子点.结果表明，通过调节SiGe岛中的Si组分，可以实现对SiGe岛形状和 尺寸的控制. 关键词： 自组织生长SiGe岛 Si组分 临界体积     

硅锗薄膜上量子点的受激发光

脉冲激光在SiGe合金样品表面可以形成量子点结构。样品退火处理后,在720～800 nm光谱区域内存在一些受激发射峰,并且这些受激发射峰有明显的阈值行为。实验发现从Si量子点到SiGe量子点结构的变化将导致受激发光峰有明显的红移现象。由傅里叶变换红外光谱仪(FTIR)分析得到:SiGe合金上氧化层中的量子点同时含有Si=O和Ge=O双键结构,这种结构可以形成电子的局域陷阱态(或陷阱态的激子)。计算显示:在SiGe量子点中Ge=O双键可以减小半导体样品中价带和局域陷阱态之间的距离。这就解释了SiGe量子点受激发射的红移现象。     

掠入射X射线衍射研究Si覆盖层对Ge/Si量子点微结构的影响

利用掠入射X射线衍射和常规X射线衍射研究了Si(001)上的Ge量子点在不同厚度的Si覆盖层下微结构的变化,同时用AFM研究了其形貌变化.实验结果表明在小的覆盖度下,量子点中组分的变化已十分明显,同时量子点的形状也发生了明显的变化.     

离子束溅射致Si(110)表面形貌随样品温度变化的演化

本文研究了离子能量为1.5keV、束流密度为20?A/cm2正入射Ar+离子束溅射致Si(110)表面形貌随样品温度变化的演化过程。在温度自室温上升至 800?C的过程中, Si(110) 的表面形貌由不规则的纳米点和纳米孔图案变为密集的量子点阵列，同时表面粗糙度也随温度上升不断增加。被通常采用的 Bradley-Harper 模型无法解释上述实验数据。 在考虑溅射过程中存在Ehrlich-Schwoebel 效应后, 进行了已连续动态模型为基础的理论模拟，模拟工作很好的重复了实验结果。     

Si(111)-(7×7)表面上Ge量子点的自组织生长

用扫描隧道显微镜研究了Si(111)(7×7)表面上Ge量子点的自组织生长.室温下用固相外延法在硅基底上沉积亚单层的Ge,然后在适当的温度下退火可以聚集形成有序的Ge量子点.由于Ge在Si(111)(7×7)表面选择性的吸附而形成有序的Ge量子点. 关键词： 锗 硅 扫描隧道显微镜 自组织生长     

Evolution of Si0.8Ge0.2 quantum dots during Si encapsulation

Surface structure, determined by scanning tunneling microscopy (STM), surface morphology, determined by atomic force microscopy (AFM), and surface composition, determined by X-ray photoelectron spectroscopy (XPS) of 20.0 nm Si_0.8Ge_0.2 quantum dots formed at 800 °C and encapsulated with 0-10 nm of Si at 500 °C and 800 °C are presented. It is observed that the quantum dot surface morphology changes during the Si encapsulation at 800 °C by the smoothing of the quantum dots. The height of the quantum dots decreases faster than can be accounted for from the amount of Si deposited, indicating that there is movement of material out of the quantum dots during the encapsulation process. Encapsulation at 500 °C results in a retention of the quantum dot surface morphology with increased Ge segregation compared to Si encapsulation at 800 °C. We conclude that the changing surface morphology at 800 °C is not the result of Ge segregation but due to intermixing resulting from the tensile strain of Si depositing on SiGe.     

Mechanism for coarsening of P-mediated Ge quantum dots during in-situ annealing

The coarsening of phosphorus-mediated Ge quantum dots (QDs) on Si(0 0 1) during in-situ annealing at 550 °C is studied. In-situ annealing makes the as-grown sample morphology be remarkably changed: the larger dots are formed and the dot density is greatly reduced. The results of chemical etching and Raman spectra reveal that the incorporation of Ge atoms which originate from the diminishing dots, rather than substrate Si atom incorporation is responsible for the dot coarsening at the incipient stage of in-situ annealing. Besides, Raman spectra suggest that the larger dots formed during in-situ annealing are dislocated, which was confirmed by cross-sectional high-resolution electron microscopy observation. Through the generation of dislocations, the strain in the dots is relaxed by about 50%.     

Ge/Si半导体量子点的应变分布与平衡形态

基于各向异性弹性理论的有限元方法，研究了金字塔形自组织Ge/Si半导体量子点应变能随高宽比变化的规律：系统的应变能随着高宽比的增大而逐渐减小.并通过自由能(应变能与表面能之和)讨论了量子点的平衡形态.结果表明，对于固定体积的量子点，存在一个高宽比值，称之为平衡高宽比，使得系统的自由能最低.同时，还给出了量子点的应力、应变、流体静应变及双轴应变分布.这些可以作为阐明应变自组织量子点实验的理论基础. 关键词： 量子点 应变分布 自由能 平衡形态     

Infrared spectroscopy of intraband transitions in Ge/Si quantum dot superlattices

We report the study of infrared spectroscopy of intraband transitions in Ge/Si quantum dot superlattices. The superlattices, which were grown on (001) oriented Si substrates by a solid source molecular beam epitaxy system, are composed mainly of 20 or 30 periods of Ge dot layers and Si spacer films. The structural properties of them and of the uncapped Ge dots grown on the surfaces of some of them were tested by cross-sectional transmission electron and atomic force microscopes, respectively. It is found that the Ge quantum dots have flat lens-like shapes. Infrared absorption signals peaking in the mid-infrared range were observed using Fourier transform infrared and Raman scattering spectroscopy techniques. Experimental and theoretical analysis suggests that the mid-infrared response be attributed to intraband transitions within the valence band of the Ge quantum dots in the superlattices. The fact that the intraband absorption is strongly polarized along the growth axis of the superlattices signifies that the Ge quantum dots with flat lens-like shapes perform as Ge/Si-based quantum wells. This study demonstrates the application potential of these kinds of Ge/Si quantum dot superlattices for developing mid-infrared photodetectors.     

基于机器视觉的量子点STM形貌图像识别研究

为减轻量子点表面形貌分析过程中的人工工作,使量子点的STM图像分析更加自动化,基于机器视觉对衬底的斜切角及量子点的形貌特性展开研究.利用腐蚀和边缘检测提取台阶形状,并通过反三角变换计算斜切角.利用二值化和阈值下降对量子点的数量与空间坐标进行提取,在此基础上,通过邻域密度计算分析其均匀性,并在解决图像中的粘连问题后找出量子点的尺寸.实验结果显示,与人工统计相比,斜切角、量子点计数及尺寸的平均误差分别为5.02%, 0.7788%及1.12%;并实现量子点均匀性的自动化统计与分析.基于机器视觉算法的自动识别过程,对协助研究者分析量子点表面形貌有实际意义.     

Growth of InGaAs-capped InAs quantum dots characterized by Atomic Force Microscope and Scanning Electron Microscope

Atomic force microscopy (AFM) is typically used to measure the quantum dot shape and density formed by lattice mismatched epitaxial growth such as InAs on GaAs. However, AFM images are distorted when two dots are situated in juxtaposition with a distance less than the AFM tip width. Scanning electron Microscope (SEM) is much better in distinguishing the dot density but not the dot height. Through these measurements of the growth of In_xGa_1-xAs cap layer on InAs quantum dots, it was observed that the InGaAs layer neither covered the InAs quantum dots and wetting layer uniformly nor 100% phase separates into InAs and GaAs grown on InAs quantum dots and wetting layer, respectively.     

Luminescence study of Si/Ge quantum dots

We present a photoluminescence (PL) study of Ge quantum dots embedded in Si. Two different types of recombination processes related to the Ge quantum dots are observed in temperature-dependent PL measurements. The Ge dot-related luminescence peak near 0.80 eV is ascribed to the spatially indirect recombination in the type-II band lineup, while a high-energy peak near 0.85 eV has its origin in the spatially direct recombination. A transition from the spatially indirect to the spatially direct recombination is observed as the temperature is increased. The PL dependence of the excitation power shows an upshift of the Ge quantum dot emission energy with increasing excitation power density. The blueshift is ascribed to band bending at the type-II Si/Ge interface at high carrier densities. Comparison is made with results derived from measurements on uncapped samples. For these uncapped samples, no energy shifts due to excitation power or temperatures are observed in contrast to the capped samples.     

Hydrogenic impurity in double quantum dots

The ground state binding energy and the average interparticle distances for a hydrogenic impurity in double quantum dots with Gaussian confinement potential are studied by the variational method. The probability density of the electron is calculated, too. The dependence of the binding energy on the impurity position is investigated for GaAs quantum dots. The result shows that the binding energy has a minimum as a function of the distance between the two quantum dots when the impurity is located at the center of one quantum dot or at the center of the edge of one quantum dot. When the impurity is located at the center of the two dots, the binding energy decreases monotonically.