13.9 nm马赫贞德干涉仪用软X射线分束镜研究

 介绍了13.9 nm马赫贞德干涉仪用软X射线分束镜的设计、制备与性能检测。基于分束镜反射率和透过率乘积最大的评价标准，设计了13.9 nm软X射线激光干涉实验用多层膜分束镜。采用磁控溅射方法在有效面积为10 mm×10 mm、厚度为100 nm的Si3N4基底上镀制了Mo/Si多层膜，制成了多层膜分束镜。利用X射线掠入射衍射的方法测量了Mo/Si多层膜的周期。用扩束He-Ne激光束进行的投影成像方法定性分析了分束镜的面形精度，利用光学轮廓仪完成了分束镜面形精确测量。利用北京同步辐射装置测量了分束镜反射率和透射率，在13.9 nm处，分束镜反射率和透过率乘积达4%。使用多层膜分束镜构建了软X射线马赫贞德干涉仪，并应用于13.9 nm软X射线激光干涉实验中，获得了清晰的含有C8H8等离子体电子密度信息的动态干涉条纹。     

13.9nm软X射线激光用大面积多层膜分束镜研制

 基于分束镜反射率和透射率的乘积为衡量标准的原则,设计了13.9nm软X射线激光干涉测量所需的多层膜分束镜，用磁控溅射法在有效面积达10mm×10mm，厚100nm的氮化硅窗口上镀制Mo/Si多层膜,实现了分束镜制作。用表面轮廓仪实测分束镜面形精度达到nm量级，同步辐射反射率计测试表明,分束镜的反射率和透射率乘积约4%。     

1064nm分振幅光偏振测量仪的多层介质分束镜的设计和制备

设计和制备了一种用于1064nm分振幅光偏振测量仪(DOAP)的具有多层介质薄膜结构的差分相移分束镜。通过理论分析该DOAP系统的仪器矩阵参数,得到分束镜的最优参数,并用离子束溅射沉积方法制备了分束镜样品及其背面的减反射膜,其实测结果与设计值吻合较好。与单层薄膜分束镜相比,多层介质薄膜分束镜不受基板、膜层材料,以及入射角和工作波长的限制,具有更广泛的应用。     

基于等效膜层理论的1/4规整膜系薄膜偏光分束镜

为了设计制作1/4规整膜系的高性能薄膜偏光分束镜,根据三层对称膜系结构的等效膜层理论和截止带理论,设计了两种对称膜系结构的偏光分束镜。利用TFCalc薄膜软件对两种膜系结构偏光分束镜的分光光谱特性进行了模拟。利用电子枪蒸镀法分别制备了两种膜系结构的偏光分束镜(580~780 nm),并利用分光光度计和搭建的消光比测试系统,对两种膜系结构偏光分束镜的透射率和消光比进行了测试。结果表明,两种膜系结构的偏光分束镜在设计分光光谱范围内透射率可以达到90%以上,消光比优于3×10-3,与理论设计吻合得很好。     

软X射线多层膜与衰减膜研究

 本文采用随机数的方法，发展了一种普适的多层膜设计方法，这种方法除可设计一般的周期多层膜，更重要的是它可以根据选定的评价因子，设计不同要求的非周期多层膜。用磁控溅射方法完成软X射线多层膜制备，X射线衍射、卢瑟福背散射、俄歇电子谱和反射率的相对测试用来表征多层膜结构和特性，所得结果说明多层膜的结构完整，周期参数正确。用离子束溅射方法成功地制备了有一定反射率和透过率的软X射线半反半透分束镜；分析了Ag和Zr衰减膜中的杂质含量与分布及其对衰减膜特性的影响，并对衰减系数进行了修正，为实验提供优质的衰减膜。     

基于等效层法分析对称性倍频分束镜的半波孔

半波孔问题严重影响了倍频分束镜在高功率激光系统中的应用。为研究半波孔的产生机理,分别模拟了由高、低折射率膜层厚度失配和膜料色散失配引起的1/4波长对称规整膜系的半波孔。基于等效层理论,在Matlab平台上计算膜系的等效折射率E,绘出其对应的反射率极值包络曲线。通过研究对称膜系的等效折射率、反射率光谱和反射率包络之间的关系,从原理上分析了半波孔的大小、位置和变化趋势等特点。结果表明,膜层的厚度失配使对称膜系的等效折射率在光谱半波处产生截止带。膜层数越多,膜层厚度和膜料色散的失配越严重,则倍频分束镜的半波孔越深。     

基于TFCALC软件的薄膜偏光分束镜的设计

根据Macnielle薄膜偏光分束镜的设计原理,利用膜系设计软件对偏光分束镜进行优化设计.总结了偏光镜设计时参考波长、入射角以及膜层数随波长的变化规律,给出了LaK₂基底,ZrO₂和SiO₂为高低膜料的薄膜偏光分束镜优化设计方案,为薄膜偏光分束镜的设计和镀膜工艺提供了参考依据.     

极紫外多层膜制备工艺研究

介绍了用平面磁控溅射方法制备极紫外多层膜的研究工作。围绕极紫外多层膜技术 ,重点探讨了多层膜膜厚定标和工艺过程对多层膜结构和内部成分的影响。为深入研究多层膜制备工艺指明了方向。     

极紫外多层膜技术研究进展

在极紫外波段,任何材料都表现出极强的吸收特性,因此,采用多层膜实现高反射率是构建正入射式光学系统的唯一途径。本文总结了极紫外多层膜的发展进程,叙述了制备极紫外多层膜的关键技术(磁控溅射、电子束蒸发、离子束溅射)以及它们涉及的相关设备。由于多层膜反射式光学元件主要应用于极紫外光刻与极紫外天文观测,文中重点讨论了极紫外光刻系统对多层膜性能的要求,镀膜过程中的面形精度和热稳定性等问题;同时介绍了极紫外天文观测中使用的多层膜的特点,特别讨论了多层膜光栅的制备技术和亟待解决的问题。     

PdMn/Co多层膜的磁性和磁光特性研究

用磁控溅射法制备了不同Mn含量的PdMn/Co磁性多层膜，通过x射线衍射对该多层膜系列进行结构分析；测定了不同Mn含量系列样品的磁滞回线、垂直各向异性及磁力显微镜图，分析了饱和磁化强度、磁畴和垂直各向异性变化的原因；通过测定该多层膜体系的克尔谱，简要分析了一定波长下克尔角随Mn含量增加而变化的物理机制. 关键词： 多层膜 磁性 磁光     

Design of form-birefringent multilayer nonpolarizing beam splitter

Nonpolarizing beam splitters, which are based on the form birefringence of subwavelength multilayer binary gratings, have been proposed. The design is based on effective-medium theory and thin-film theory. Rigorous coupled-wave analysis is used to optimize the design of this nonpolarizing beam splitter. The simulation shows that the structure can eliminate polarization effect and provide high reflectivity.     

Design and fabrication of high-efficiency photonic crystal power beam splitters

Efficient beam splitters in a planar photonic crystal waveguide with corrugated terminators were designed, fabricated, and characterized. Experimental results showed that these beam splitters have high splitting efficiency and power intensity in the propagation direction, an achievement made possible through a design method employing a genetic algorithm-based optimization method. High-efficiency power beam splitters are useful components in integrated optics, and the design implemented here is particularly suited for integration with other optical components.     

红外探测装置中光谱分光镜的设计与制备

在红外探测装置中,光谱分光镜是用来把3 μm～5 μm和8 μm～12 μm 2个波段的光谱分开的零件.介绍了一种在通用镀膜机上制备光谱分光镜的新工艺.在该膜系的设计过程中,把Willey公式引入到对其平均透过率最高值进行估算的过程中,同时针对国产镀膜机控制精度不高的特点,尽量使用规整膜层进行设计.为了进一步提高8 μm～12 μm波段的透过率,在膜系的最外侧引进了一层自行配制的低折射率氟化物材料,制备出了符合技术指标的红外光谱分光镜.     

双层矩形位相光栅的分束特性

对由两矩形位相光栅构成的双层体积全息光栅的分束特性进行了优化设计，获得了扇出光束数分别为２，３和５，总衍射效率高于８９％，光强分布不均匀性小于５％的分束器。     

Polarization-independent self-collimating bends and beam splitters in photonic crystals

Polarization independent bends and beam splitters for transverse electric (TE) and transverse magnetic (TM) polarizations have been demonstrated in two-dimensional (2D) photonic crystals (PhCs). In virtuel of equi-frequency contour analysis and finite-difference time-domain calculations, self-collimation behaviors for TE- and TM-polarizations are achieved at the same frequency. Simulation results show a 90-degree bend with 90% efficiency and beam splitters with about 96% total efficiency for both TE- and TMpolarizations, where the light is self-guided by the self-collimation effect. Such bends and beam splitters are expected to play important roles in optical devices where polarization insensitivity is needed.     

硅光子晶体TE模式光下路分束器设计

设计了基于自准直效应的硅光子晶体TE模式13和12光下路分束器。13光下路分束器由4个分束镜组成,而12下路分束器由3个分束镜和1个反射镜组成。利用多光束干涉原理推导出光下路分束器各个出口的透射谱理论公式。通过选择合适的分束镜,可以得到不同分束比例的光下路分束器。对于13光下路分束器,设计了1∶1∶1和1∶2∶3两种分束比例;对于12光下路分束器,设计了1∶1和1∶2两种分束比例。再利用时域有限差分软件数值模拟了透射谱,其结果与理论设计一致。当下路波长为1550 nm时,13和12两种光下路分束器的大小均约为10 m 10 m,自由光谱区为36 nm,覆盖了整个光通信C波段。     

Design of photonic crystal power beam splitters via corrugated and gratinglike surfaces

In this work, we use the finite-difference time-domain method in conjunction with a genetic algorithm to design photonic crystal power beam splitters based upon a typical planar photonic crystal waveguide with corrugated surfaces or gratinglike surfaces covered behind the termination. Considering a power detector placed at different locations in the output field, we have obtained several beam splitters designs with different splitting angles. These beam splitters have high splitting efficiency and power intensity in the propagation direction.     

Fabrication of pellicle beam splitters for optical bus application

The optical bus architecture for on-board applications requires a number of optical splitters with precise split ratios to route part of the input signal. Since hollow metal waveguide provides well collimated beams with very small gap loss, it opens the possibility of inserting discrete optical beam splitters (taps). The optical tap requires low excess loss, polarization insensitivity, temperature stability, minimized walk-off of the propagating beam, and cost effective manufacturing. By benefiting from the mature interference coating technology for polarization insensitivity and temperature stability, we design a pellicle beam splitter based on a static microelec tro-mechanical system (MEMS) and develop processes to fabricate pellicle splitters using wafer level bonding of silicon and glass substrates, with subsequent thinning to 20 μm. With the approaches described in this paper, we have demonstrated optical beam splitters with excess loss of less than 0.17 dB that operate at a data rate of 10 Gb/s showing a clean eye diagram while providing controlled split ratio and polarization insensitivity. We have demonstrated a high yielding MEMS based silicon processing platform which has the potential to provide a cost effective manufacturing solution for optical beam splitters.