Light Intensity Distribution in Laser Interference Crystallization by Using a Phase-shift Grating and Talbot Effect

Light intensity distribution in laser interference crystallization with an imperfect phase-shift grating is calculated and compared with that by a perfect one. The effect of zero-order defracted light on laser interference crystallization is analyzed in detail. The AFM images of a-Si∶H film irradiated by a KrF excimer pulsed laser have confirmed our calculated results. Longitudinal periodicity of light intensity distribution is discussed and compared with the Talbot Effect.     

二维移相光栅光强分布的计算及在制备有序纳米硅阵列中的应用

从菲涅耳衍射积分的一般形式出发,结合二维（2D）移相光栅掩模(PSGM)的具体参数,通过数值计算得到了作用于样品表面的光强分布.实验上,采用激光干涉晶化的方法,利用周期为400 nm的2D-PSGM调制KrF准分子激光器的脉冲激光束斑的能量分布,在氢化非晶硅（a-Si:H）薄膜上直接制备了2D的有序纳米硅（nc-Si）阵列.测试结果表明：2D的nc-Si阵列的周期和PSGM的相一致,晶化区域与理论模拟的结果符合得很好. 关键词： 纳米硅 激光干涉晶化 移相光栅 菲涅耳衍射     

激光二极管自混合干涉的计算分析和实验观察

实验上观察到自混合干涉信号的幅度仅仅为静态光强的百分之几.反馈光会引起激光二极管阈值电流减小,静态输出光强变化几倍,使激光二极管工作在实际的阈值电流之上.按三镜法布里-珀罗腔结构模型计算激光二极管的出射光强,由干涉函数主极大条件得出光频与反馈光的关系.计算出的自混合干涉信号的波形,以及自混合干涉信号的幅度与静态光强的比值均同实验测量结果一致.在τrC/τ1=22.8的情况下,复合谐振腔可同时有15个谐振模式,这些模随外腔长度的变化小于2.6×10-2cm-1,远小于法布里-珀罗谐振腔谐振模的线宽3.1cm-1,光频在内腔谐振模的线宽以内变化.     

飞秒激光相干场诱导材料功能微结构

飞秒激光在整个脉冲宽度内具有极好的相干性，因而当从同一光束分出的两束或两束以上的光束时间与空间上实现相互叠加时将会形成强度周期性调制的电磁场．这种周期调制的电磁场与材料产生相互作用，能诱导出相应的周期微结构．最近通过两束或两束以上飞秒激光干涉诱导功能微结构得到了广泛研究．文章综合了国内外飞秒激光研究小组在干涉诱导微结构方面的一些最新成果以及作者在这方面开展的工作，对飞秒激光干涉技术的原理及其在诱导微结构方面的应用进行了介绍．     

Fabrication of 4-Inch Nano Patterned Wafer with High Uniformity by Laser Interference Lithography

We report the fabrication of 4-inch nano patterned wafer by two-beam laser interference lithography and analyze the uniformity in detail. The profile of the dots array with a period of 800 nm divided into five regions is characterized by a scanning electron microscope. The average size in each region ranges from 270 nm to 320 nm,and the deviation is almost 4%, which is approaching the applicable value of 3% in the industrial process. We simulate the two-beam laser interference lithography system with MATLAB software and then calculate the distribution of light intensity around the 4 inch area. The experimental data fit very well with the calculated results. Analysis of the experimental data and calculated data indicates that laser beam quality and space filter play important roles in achieving a periodical nanoscale pattern with high uniformity and large area. There is the potential to obtain more practical applications.     

The measurement of ultraweak liquid surface wave by laser interferometry

We describe a simple experiment on the interference of refraction light by ultraweak liquid surface wave at low frequency. The surface wave profile is generated by electrically driven vertical oscillations exciters. The high visibility and stable laser interference fringes were gathered experimentally. The theoretical light intensity distribution agrees well with the observations. In particular, we show the relation between the light intensity distribution and the characteristic features of the surface wave. In addition, we can measure the amplitude and wavelength of the ultraweak liquid surface wave at low frequency by this means.     

低频声表面波对细激光束的衍射效应

对于频率为几十赫兹的液体表面声波,实验上观察到反射光所形成的稳定、清晰的激光干涉图样.改变表面声波振幅,进一步发现了干涉图样的调制效应.调制效应明显地表现为干涉条纹的缺级,并且随表面声波振幅变化.依据波动光学原理,分析了调制作用下光束干涉所产生的光强解析分布及条纹特征,得到了干涉条纹角宽度与表面声波之间的解析关系,并据此对表面声波的特性参量波长和振幅及各级条纹相对光强分布规律进行了测定.     

Multiple scattering effect in the Young-like interference pattern of an optical wave scattered by a double cylinder

The plane-polarized laser wave with a wavelength of 441.6 nm collides with two close parallel cylinders, called a double cylinder, each of a diameter about 100 or 200 nm at normal incidence. The measured angular distribution of the scattered light intensity, called a Young-like interference pattern, is compared with the rigorous theoretical calculation over a wide range of scattering angles. We have experimentally confirmed the multiple scattering effect of the wave between cylinders in an exact way.     

利用部分相干光和同心角偏差透镜列阵实现二维靶面均匀辐照

提出利用部分相干光通过透镜列阵系统实现靶而的均匀辐照, 透镜列阵能获得边缘陡峭且顶部较平坦的准近场焦斑, 透镜列阵的适当同心度偏差又使各子束的斑纹相互稍微错开, 使干涉斑纹变密, 而入射的激光是空间相干性减少了的部分相干光, 可进一步抑制了透镜列阵系统焦斑的小尺度不均匀性. 使用广义衍射积分理论, 对高斯-谢尔光束通过透镜列阵光学系统的焦斑光强分布进行了详细的二维模拟研究, 比较了完全相干光与部分相干光经过透镜列阵的匀滑效果. 数值模拟表明, 应用同心度偏差和适当离焦时, 可实现焦斑均匀性和能量利用率同时达到最佳的效果.     

The research of phase-locking of more discharge tubes for two-dimensional axisymmetric-fold combination resonator CO2 laser

A method of reflection-injection phase-locking used on two-dimensional axisymmetric-fold combination resonator (ASFC) CO₂ laser has been proposed. The structure characteristics and the method of phase-locking have been introduced. The expression of output light intensity distribution has been deduced by matrix theory and Collins Formula and the output light intensity distribution has been numerically calculated and simulated. Comparing the output light intensity distribution in the case of phase-locking with that of non-phase-locking. The result shows that this method of phase-locking greatly improve the characteristics of output beam.     

三维高斯拟合激光光强快速衰减算法

为缩短衰减倍率调整的时间,提高激光参数测试的效率,提出激光光强快速衰减算法。衰减倍率精确调整量由当前衰减倍率和采集到的光斑光强真实的最大灰度值共同决定。当因光电接收器件(CCD)饱和造成采集光斑图像失真时,即衰减倍率过小时,由于激光光斑的光强通常满足高斯分布,通过对光斑图像进行处理,去除饱和部分光强信息,对剩余部分光强信息利用最小二乘法进行三维高斯拟合,还原出激光光斑光强的真实分布并获得最大灰度值;当衰减倍率过大时,根据采集光斑图像可以直接获得当前最大灰度值,最后通过计算获得最佳的衰减倍率调整值,实现了激光光强快速准确的调整。算法的有效性通过步进电机带动的双轮可变衰减器及CCD配合得到验证。     

激光诱导荧光毛细管电泳DNA检测系统信噪比分析

建立了用于DNA分析的激光诱导荧光检测毛细管电泳系统,分析了垂直入射激发光在毛细管中的行进和高分子溶液电泳筛分介质的瑞利散射及毛细管壁折反射引起的激发光背景噪音.利用光线追迹法计算了折反射引起的背景噪音随激发光和收集方向角度不同时的分布曲线以及荧光在各个方向的分布曲线.两种噪音比较表明,散射噪音比激发光背景噪音低4个数量级,可以忽略.模拟表明,光轴方向荧光最强,90°方向最弱,变化在6.5％内.激发和收集方向成105°时,背景噪音最小,可以获得最大的信噪比,最后对模拟结果进行了实验验证.     

细菌视紫红质的自衍射效率与最佳入射角研究

研究了弱光强下细菌视紫红质膜(bR膜)的自衍射特性.给出了弱光强下相干光在bR膜中产生的振幅光栅光强分布模型,并用ysinαx近似表示透射光强分布,结果与实验吻合.给出了不同透射光强y与指数α的对应关系.结果表明,在bR膜及入射光波波长给定的情况下,入射光强越小,对应的α值越大,当入射光强为0.072/T(mW/cm2)时,α等于1.计算出不同入射光强和入射角下的自衍射效率.结果发现,对应于最大衍射效率的最佳入射角为2°.     

Steady-State Analysis of a Two-Mode Laser System with Cross-Correlation Between Real and Imaginary Parts of Quantum Noise

An inhomogeneously broadened two-mode laser system with cross-correlations between the real and imag- inary parts of quantum noise is considered. The Fokker-Planek equation of the system is derived by the phase-locking method. The steady-state probability distribution, the mean light intensity, the normalization autocorrelation function, and cross correlation function are calculated. The results indicate that： （i） The cross-correlation between the real and imaginary parts of quantum noise can cause the stationary probability distribution from one peak structure to two extrema structure when the laser system is operated above threshold; （ii） The cross-correlation between the real and imaginary parts of quantum noise enhance the light intensity fluctuation and decrease the laser output when the laser system is operated below or near threshold; （iii） The effect of the cross-correlation between the real and imaginary parts of quantum noise is very weak on the stationary properties when the laser system is operated far above threshold.     

High sensitivity micro-displacement homodyne interferometry北大核心CSCD

Interferometry is widely used in nano-scale micro-topography measurement. In order to improve its accuracy and sensitivity, a high-sensitivity homodyne interferometry based on white light interference and laser secondary interference was proposed. A high-sensitivity homodyne interferometry system was designed, and the zero point of the laser secondary interference was used to locate the dark striation of white light interference, so that it could reach the maximum slope when optical path difference was zero. The signals of white light and laser were analyzed by using the wave principle and intensity formula of interference fringes, and a sensitivity calculation method based on the combination of white light and laser interference signal was proposed. The system and its sensitivity were simulated. Finally, the optical path was built, and the white light interference fringes were adjusted to the dark striations position, so as to locate the zero position of laser secondary interference and carry out the data acquisition. It is showed that the sensitivity of the measurement method is at least 1 832 times higher than that of the laser secondary interference, and the corresponding measurement uncertainty is only ±0.288 7 mV. The measurement system can effectively solve the problem of large amount of calculation in traditional interferometry, and has high sensitivity, stability and reliability. Copyright ©2022 Journal of Applied Optics. All rights reserved.     

脉冲激光晶化非晶硅薄膜的有限差分模拟

 根据热传导原理,建立了脉冲激光晶化非晶硅薄膜的理论模型。运用有限差分方法研究了不同激光波长、能量密度等因素对薄膜温度变化及相变过程的影响。计算了不同波长激光器对厚度500 nm非晶硅晶化的阈值能量密度。结果发现,准分子晶化的阈值能量密度最低,但是在同样的能量密度下,熔融深度却不及使用更长波长的激光器。计算并分析了升高衬底温度对结晶速度和晶粒尺寸的影响,模拟结果较好地验证了实验结论和规律。     

A time-dependent,ray-geometrical treatment of the interference fringes within a thermally self-defocused laser beam

A time-dependent theoretical treatment of the intensity distribution within a thermally self-defocused laser beam is presented, based on a ray-geometrical approach. Well-modulated interference fringes are predicted extending over most of the beam. This treatment is applicable to beam propagation in media for which the heat transfer by convection can be neglected when compared with that due to conduction. Numerically determined intensity distributions are given and compared with ones obtained experimentally using a laser beam of 488 nm wavelength and an absorbing medium of glycerol doped with iodine. Good agreement is obtained.     

用于光束匀滑的连续相位板近场均匀性

 为降低高功率激光系统中连续相位板(CPP)后续元件的强激光损伤风险,综合考虑入射光强调制、干涉及衍射作用等多种影响因素,建立了CPP近场计算分析模型,模拟和分析了这些因素对CPP后的近场均匀性的影响。理论分析结果表明：CPP后的光束近场均匀性主要受入射光调制、CPP表面剩余反射率和衍射传输距离的影响;当入射光束质量较差时,CPP后的近场均匀性主要由入射光束质量决定,CPP剩余反射率和衍射传输距离对近场均匀性影响相对较小;但当光束质量比较理想时,干涉和衍射作用会破坏CPP的近场均匀性,衍射传输距离影响尤为突出。     

拼接光栅缝隙对激光脉冲光强分布的影响

以拼接光栅作为色散元件的激光脉冲压缩器中,要求脉冲压缩光栅表面光强分布均匀、能量输出效率高。利用菲涅耳-基尔霍夫衍射原理对脉冲压缩光栅表面光强和远场光强分布进行了研究。计算了拼接光栅缝隙宽度对光栅表面光强变化量和远场光强极大值的影响。在利特罗角附近入射时发现激光脉冲光强分布与拼接光栅缝隙宽度相关,得出了光栅拼接缝隙宽度应控制在0.5 mm以内。适当提高缝隙衍射效率能够改善光强分布均匀性和提高光能量输出,提出了对拼接缝隙采用两次重复曝光以提高其衍射效率的方法。     

双光子过程中的跃迁截面

重新检验了双光子过程中跃迁截面的概念：当密度矩阵中对角元随时间的变化缓慢时，速率方程和相关的跃迁截面是很好的近似。导出速率系数的表达式：在强光场中描述单光子过程中的系数要作很大的修改，而描述双光子过程的系数可从单光子过程的系数导出。激光场的功率分配的最佳化随总功率的强度而激烈变化。当有多个能级或多个激光模式的干涉效应时，利用跃迁截面的计算比直接利用布洛赫方程的计算还要复杂。