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Fabrication of 4-Inch Nano Patterned Wafer with High Uniformity by Laser Interference Lithography 下载免费PDF全文
We report the fabrication of 4-inch nano patterned wafer by two-beam laser interference lithography and analyze the uniformity in detail. The profile of the dots array with a period of 800 nm divided into five regions is characterized by a scanning electron microscope. The average size in each region ranges from 270 nm to 320 nm,and the deviation is almost 4%, which is approaching the applicable value of 3% in the industrial process. We simulate the two-beam laser interference lithography system with MATLAB software and then calculate the distribution of light intensity around the 4 inch area. The experimental data fit very well with the calculated results. Analysis of the experimental data and calculated data indicates that laser beam quality and space filter play important roles in achieving a periodical nanoscale pattern with high uniformity and large area. There is the potential to obtain more practical applications. 相似文献
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Tuning hybrid liquid/solid electrolytes by lowering Li salt concentration for lithium batteries 下载免费PDF全文
Hybrid liquid/solid electrolytes(HLSEs) consisting of conventional organic liquid electrolyte(LE), polyacrylonitrile(PAN), and ceramic lithium ion conductor Li_(1.5)Al_(0.5)Ge_(1.5)(PO_4)_3(LAGP) are proposed and investigated. The HLSE has a high ionic conductivity of over 2.25 × 10~(-3) S/cm at 25?C, and an extended electrochemical window of up to 4.8 V versus Li/Li+. The Li|HLSE|Li symmetric cells and Li|HLSE|Li FePO_4 cells exhibit small interfacial area specific resistances(ASRs) comparable to that of LE while much smaller than that of ceramic LAGP electrolyte, and excellent performance at room temperature. Bis(trifluoromethane sulfonimide) salt in HLSE significantly affects the properties and electrochemical behaviors. Side reactions can be effectively suppressed by lowering the concentration of Li salt. It is a feasible strategy for pursuing the high energy density batteries with higher safety. 相似文献
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根据密度泛函理论对钴掺硫化锌周围的品格进行了结构优化,计算得到了钴杂质周围的晶体结构、电子态密度分布和吸收光谱.计算结果表明,由于Co原子掺入ZnS晶格常数减小,导致晶格畸变;带隙变窄;吸收峰展宽至更长波长区域. 相似文献
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本文利用数值模拟研究了浮力对湍流预混V形火焰平均速度场的影响,发现浮力效应主要体现在远场区域,而在火焰刷附近非常有限;利用落塔和 OH-PLIF 方法在正常重力和微重力下观测了火焰皱褶,发现浮力压制火焰皱褶的程度与湍流强度密切相关。分析表明斜压机理是浮力影响火焰皱褶的重要原因。 相似文献
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新型纳米复合杂多酸催化剂H3PW12O40/SiO2催化合成水杨酸异丙酯的研究 总被引:3,自引:0,他引:3
水杨酸异丙酯是合成水胺硫磷、甲基异柳磷等农药的重要中间体[1], 还可用作香料和有机合成的中间体. 工业上一般通过水杨酸与异丙醇的酯化反应来合成, 常用的方法有硫酸法、水杨酰氯法和混酸法等, 然而这些方法都不同程度地存在着设备腐蚀严重, 能耗较高, 环境污染大等缺点. 杂多酸是一类具有笼形结构的多核配合物, 具有强酸性、强氧化性、"假液相"等特性, 在催化领域有广泛的应用[2]. 但杂多酸存在比表面小、易失活、难回收和使用寿命短等缺点. 相似文献
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