微腔等离子体放电过程的数值研究

采用2维自洽完全流体模型,数值研究了阳极为通孔的高气压微腔放电结构中等离子体参数的变化过程。模拟结果获得了当氩气压强为13.3 kPa时,放电中的电势分布、等离子体密度分布、径向电场分布和电子温度分布等重要参数的演化过程。模拟结果表明在放电过程中,阴极附近的电场由轴向电场逐步转变为径向电场,等离子体密度最大值位于放电腔中间处,并随时间推移由阳极附近向阴极附近移动,电子温度的最大值出现在阴极环形鞘层区域。     

大气压氩气介质阻挡辉光放电的一维仿真研究

为了研究氩气(Ar)中介质阻挡大气压辉光放电(APGD)的放电机理, 通过建立一个一维的多粒子自洽耦合流体模型, 采用有限元方法进行数值计算, 得到了气体间隙压降、介质表面电荷密度、放电电流密度随时间的周期变化波形, 以及电子、离子、亚稳态粒子密度和空间电场强度的时空分布. 仿真计算结果表明：介质表面积聚的电荷对于放电的过程的起始及熄灭具有重要作用;当增大外施电压时, 放电击穿时刻提前, 放电电流密度和介质表面电荷密度峰值增大, 表明放电过程更加剧烈;随着阻挡介质相对介电常数的增大, 放电电流密度也随之增大. 各粒子密度及电场的时空分布表明放电过程在外施电压半个周期中只有一次放电, 且存在明显的阴极位降区、负辉区、等离子体正柱区等辉光放电的典型区域, 为大气压辉光放电(APGD).     

共面介质阻挡放电特性研究

对共面介质阻挡放电(DBD)的放电过程进行了实验和理论研究. 在实验中设计了分段电极方法来获取放电过程中不同位置上的局域电流和光辐射特性，得到了阴极上等离子体的扩展速度，并与二维流体数值模拟结果进行了比较. 结果表明，在共面DBD的暂态放电过程中，电极上空等离子体区域始终存在有不均匀电场，导致了不同位置上放电电流和光辐射分布的不一致. 同时研究还表明，在DBD放电过程中应当考虑表面光致二次电子发射. 关键词： 介质阻挡放电 分段电极 放电特性     

气体火花开关初始放电等离子体演化过程北大核心CSCD

气体火花开关的初始放电过程对研究其工作状态有着非常重要的影响,通过基于网格粒子法-直接蒙特卡罗法(PIC-DSMC)耦合算法模拟了气体火花开关从放电开始到等离子体通道初步形成的完整过程,得到了电子和离子的数密度时空分布变化,分析了间隙中电场分布随时间变化规律,完整清晰地揭示了气体火花开关从放电初始到等离子体通道初步形成的物理过程,并初步开展了气体火花开关击穿过程的光学诊断实验,为进一步深入研究气体火花开关的物理机理打下了基础。     

He-O2高气压下电容耦合辉光放电数值分析

采用一维的等离子体流体力学模型研究了氦气-氧气高气压下电容耦合放电过程。分别给出了间隙为1.6,2.4和3.2 mm时外加电压的有效值与放电电流有效值特征曲线,并与已有的实验数据作对比,结果表明计算得到的电压-电流特征曲线与实验数据符合得很好。研究发现:氦气-氧气高气压下电容耦合放电过程中荷质比较大的离子在鞘层中的分布随着外电场的变化而变化,而荷质比较小的粒子在整个放电区域基本不随外电场变化而变化;同时杂质形成正负离子在主等离子体区域两端出现了峰值。     

O2中α型射频放电的理论研究

根据射频放电中电流连续性方程、稳态时电子数密度的连续性方程以及电子的能量平衡方程,建立了气体放电氧碘激光器中α型射频放电等离子体的理论模型,通过数值求解得到了射频放电等离子体中电场、电子数密度的空间分布,分析了放电参数对放电特性的影响.结果表明采用频率高的射频放电会使放电空间电场降低,电子数密度增加,从而有利于单重氧的生成,为提高气体放电中单重氧的产率提供了理论依据.     

双辉光放电静电场数值模拟及场分布边角效应分析

根据双辉光放电3个电极极板上的电势,利用边界元积分方程建立以面电荷密度为未知量的离散方程,通过求解线性方程组计算3个电极极板上面电荷的不均匀分布.由极板上的不均匀面电荷分布计算在真空状态下空间任意一点的电势和电场的空间分布,利用数值解对真空状态下双辉光离子渗金属实验装置场分布边角效应进行了分析.     

大气压Ar／NH3介质阻挡辉光放电的仿真研究

为了研究火气压下氩气（Ar）中掺杂氨气（NH3）的Ar／NH3介质阻挡辉光放电的放电机理,通过建立一‘个多粒子的自洽耦合流体模型,采用有限元方法进行数值计算,得到了气体间隙压降、介质表面电荷密度、放电电流密度随时间的周期变化波形,以及带电粒子、中性粒子与空间电场强度的时空分布．仿真计算结果表明：气体间隙的周期击穿过程主要由气隙电压控制,并受气隙两侧介质极板上积聚的表面电荷的影响．气隙间带电粒子密度和电场强度的时空分布表明本文的放电过程存在阴极位降区、负辉区、法拉第暗区、等离子体正柱区等辉光放电的典型区域,放电模式为大气压辉光放电．在Ar/NH3等离子体中,主要的正离子为NH＋,其次为Ar2＋,主要的负离子为NHi：NH3分解产生的主要的激发态分子为NH,NH2和N2H3,而最终的稳态产物主要是N2和H2．     

均匀电场SF6短气隙放电过程动态模拟

根据基本物理定律和流体力学,构建均匀电场下SF₆短气隙放电流体模型,运用通量校正传输法(flux-corrected transport)数值分析大气压下4 mm间隙SF₆的放电过程,展现放电空间带电粒子产生、复合、附着、扩散以及光致电离动态过程,获得了放电间隙电场畸变、带电粒子动力学行为和放电通道形成发展历程和时空分布,根据R-M判据求出模型放电过程中电子崩转向流注的时空临界点,印证了光致电离在流注发展阶段的重要作用.     

非链式化学HF(DF)激光器工作气体中电子分离的非稳定性和气体放电等离子体的自组织现象(英文)

报道了放电引发的非链式HF(DF)激光器中的激活介质由电子碰撞负离子分离引起的电离非稳定性。这种非稳性出现在电极空间分离、脉冲CO2激光加热的基于SF6的混合气体的大体积放电中。实验研究了自引发体放电过程中由激光加热引起的放电等离子体的自组织现象以及由此在放电间隙的大部分区域形成的准周期等离子体结构。重点分析了等离子体结构随气体温度和注入能量的变化,讨论了等离子体自组织对电子碰撞分离不稳定性所产生的影响,解释了混合气体中由于电子碰撞使负离子消失导致的单等离子体通道移动的产生机理。     

等离子体对低气压超音速氦气流场作用的实验研究

采用直流驱动等离子体激励器并通过气流场的碘线表征法研究了边界表面放电等离子体对低气压超音速氦气流场的作用。实验结果表明,边界表面放电等离子体的阴极区对以超音速流动的氦气的控制作用在符合实际工程条件的低气压下是有效果的;等离子体激励器的驱动电压越高,气流场的流动控制效果越好;定性观察表明激励器的阴极板的面积越大,实际作用区域越大,相应的实际控制效果越好。     

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采用直流驱动等离子体激励器并通过气流场的碘线表征法研究了边界表面放电等离子体对低气压超音速氦气流场的作用。实验结果表明,边界表面放电等离子体的阴极区对以超音速流动的氦气的控制作用在符合实际工程条件的低气压下是有效果的;等离子体激励器的驱动电压越高,气流场的流动控制效果越好;定性观察表明激励器的阴极板的面积越大,实际作用区域越大,相应的实际控制效果越好。     

氩气压力对螺旋波放电影响的发射光谱诊断及仿真研究

螺旋波等离子体源以其高电离效率与高密度优势受到多个领域的青睐。螺旋波放电高电离效率的机理或者功率耦合模式,一直是困扰该领域学者的难点之一,对于放电过程与特性的诊断则是揭示其物理机制的重要途径。光谱诊断能够克服介入式诊断手段对等离子体的干扰同时受等离子体烧蚀等弊端,且响应速度快、操作灵活。为研究螺旋波等离子体的放电特性以及气体压力的影响,开展了以氩气为工质气体的光谱实验研究,并针对实验开展了Helic程序数值模拟。通过改变光纤探头焦距调整径向诊断位置,得到谱线强度的径向分布。由氩原子4p-4s能级跃迁产生的谱线主要集中在740～920 nm区间,谱线相对强度较离子激发谱线较强。实验研究发现,在较低氩气压力范围（0.2 Pa<P_Ar<1.0 Pa）,随着压力增加,放电光强迅速增加,但是当压力增加到大于1.0 Pa之后,光强增长的趋势变缓,甚至部分谱线的相对强度不再增长,达到类饱和状态,朗缪尔探针测量得到离子密度变化趋势与其相似。光强分布在靠近径向边界处（r≈4 cm）存在凸起,且随压力增加,该凸起分布更为明显。通过对电子温度的计算发现,压力增加到一定程度将影响放电均匀性。仿真结果显示,增大压力,功率沉积密度的径向分布逐渐向径向边界处积累,与实验观察到的谱线强度径向凸起相一致,螺旋波与TG波的耦合效率增加。随着气体压力的增加,E_r的径向边界峰值降低,原因是波所受阻尼增强,TG波被有效地局限于径向较窄的边界处。电流密度轴向分量J_z在等离子体内部和边界处的峰值呈显著的减小趋势,可见,虽然压力增加一定程度上提高了等离子体密度,但却相应的减小了电离率,导致轴向电流密度受限。但是径向电流密度J_r却呈现先减小后增大的趋势,且增长幅度明显,综合来看,放电效率有所提高。可见适当增加气体压力,有助于提高放电的功率耦合效率和强度,增加等离子体密度。光强比值法是针对线性谱线参数计算的典型方法,Helic程序亦是专业领域内认可度很高的计算工具,结果可靠,分析方法具有可借鉴性。实验及仿真结果对于提高氩气工质下的螺旋波放电强度提供了一定的参考价值。     

Electromagnetic field distributions in waveguide-based axial-type microwave plasma source

We present results from simulations of 2D distributions of the electromagnetic field inside a waveguide-based axial-type microwave plasma source (MPS) used for hydrogen production via methane reforming. The studies are aimed at optimization of discharge processes and hydrogen production. We derive equations for determining electromagnetic field distributions and next determine the electromagnetic field distributions for two cases – without and with plasma inside the MPS. For the first case, we examine the influence of the length of the inner conductor of the coaxial line on electromagnetic field distributions. We have obtained standing wave patterns along the coaxial line and found resonances for certain positions of the coaxial line inner conductor. For the case with plasma inside the MPS, we perform calculations assuming that distributions of plasma parameters are known. Simulations are done for several values of maximum electron density. We have found that for values of electron density greater than strong skin effect in the plasma is observed. Consequently, plasma may be treated as an extension of the inner conductor of the coaxial line. We have used FlexPDE software for the calculations.     

Operational characteristics of a plasma cathode with a grid stabilization in a two-stage ion source

The discharge characteristics and the parameters of the cathode plasma in a two-stage ion source with a grid plasma cathode and a magnetic trap in the anode region are investigated. It is shown that an increase in the gas pressure and the accompanying increase in the reverse ion current in the bipolar diode between the cathode and anode plasmas lead to an increase in the cathode plasma potential and a transition of the cathode into the regime of electron emission from the open plasma boundary. The dependence of the ion current extracted from the anode plasma on the area of the exit aperture of the hollow cathode and the mesh size of the grid plasma cathode is explained. The conditions at which the ion emission current from the anode plasma is maximum are determined. The potential difference at the bipolar diode is measured by using the probe method. It is shown that, when the gas pressures reaches a critical value determined by the mesh size of the grid plasma cathode, the discharge passes into a contracted operating mode, in which the ion current extracted from the anode plasma decreases severalfold.     

Effect of electrode configuration on plasma spatial distribution and gas temperature in multi-arc plasma generator with three pairs of electrodes

In this paper, a novel nonthermal multi-arc plasma generator with three pairs of electrodes is presented to obtain large-volume plasma. The discharge behaviour of multi-arc is investigated through high-speed photography. Statistical process of the photographic images of arc discharge is used for analysis of the effect of electrode configuration on arc spatial distribution and fluctuation of plasma flow. Besides, the gas temperature is diagnosed by diatomic molecular OH fitting method. Results show that the electrode configuration has vital effect on the spatial distribution of plasma in discharge area. A relatively stable region with high luminance is obtained in the centre of the discharge area by adjusting the electrode arrangements, in which the plasma gas temperature in swirl flow field is higher than that in straight flow field in multi-arc generator. Furthermore, the fluctuation of plasma flow weakens in multi-arc generator with electrode configurations capable of producing swirl flow field.     

介质阻挡放电点燃大气压直流均匀放电的光谱研究

由于大气压均匀放电等离子体在工业领域具有广泛的应用前景,为了获得大尺寸的大气压均匀等离子体,采用氩气作为工作气体,在大气压空气环境中利用同轴介质阻挡放电点燃了针-板电极间的大气隙(气隙宽度达到5 cm)直流均匀放电。研究发现,同轴介质阻挡放电能够有效降低针-板电极间的击穿电压。该均匀放电由等离子体柱、等离子体羽、阴极暗区和阴极辉区组成。其中等离子体柱和阴极辉区都是连续放电。而等离子体羽不同位置的放电是不同时的。事实上,等离子体羽放电是由从阴极向着等离子体柱移动的发光光层(即等离子体子弹)叠加而成。利用电学方法测量了放电的伏安特性曲线,发现其与低气压正常辉光放电类似,均具有负斜率。采集了放电的发射光谱,发现存在N₂第二正带系、氩原子和氧原子谱线。通过Boltzmann plot方法对放电等离子体电子激发温度进行了空间分辨测量,发现等离子体柱的电子激发温度比等离子体羽的电子激发温度低。通过分析放电机制,对以上现象进行了定性解释。这些研究结果对大气压均匀放电等离子体源的研制和工业应用具有重要意义。     

Influence of a centered dielectric tube on inductively coupled plasma source: Chamber structures and plasma characteristics

A high-density RF ion source is an essential part of a neutral beam injector. In this study, the authors attempt to retrofit an original regular RF ion source reactor by inserting a thin dielectric tube through the symmetric axis of the discharge chamber. With the aid of this inner tube, the reactor is capable of generating a radial magnetic field instead of the original transverse magnetic field, which solves the E × B drift problem in the current RF ion source structure. To study the disturbance of the dielectric tube, a fluid model is introduced to study the plasma parameters with or without the internal dielectric tube, based on the inductively coupled plasma(ICP) reactor. The simulation results show that while introducing the internal dielectric tube into the ICP reactor, both the plasma density and plasma potential have minor influence during the discharge process, and there is good uniformity at the extraction region. The influence of the control parameters reveals that the plasma densities at the extraction region decrease first and subsequently slow down while enhancing the diffusion region.     

Numerical Study on Characteristics of Argon Radio-Frequency Glow Discharge with Varying gas Pressure

A one-dimensional fluid simulation on argon rf glow discharge with varying linearly gas pressure from 1 Torr to 100 Tort is performed. The model based on mass conservation equations for electron and ion under diffusion and mobility approximation, and the electron energy conservation equation is solved numerically by finite volume method. The numerical results show that a uniform plasma with high density can be obtained from rf glow discharge with varying gas pressure, and the density of plasma becomes higher as the gas pressure varies from 1 Tort to 100 Tort. It is also shown that in the range of the gas pressure from 1 Tort to 100 Tort with the slower rate of varying gas pressure, higher density of plasma can be obtained.     

Cold-hollow-cathode arc discharge in crossed electric and magnetic fields

A crossed-field cold-hollow-cathode arc is stable at low working gas pressures of 10⁻²–10⁻¹ Pa, magnetic-field-and gas-dependent arcing voltages of 20–50 V, and discharge currents of 20–200 A. This is because electrons come from a cathode spot produced on the inner cathode surface by a discharge over the dielectric surface. The magnetic field influences the arcing voltage and discharge current most significantly. When the plasma conductivity in the cathode region decreases in the electric field direction, the magnetic field increases, causing the discharge current to decline and the discharge voltage to rise. The discharge is quenched when a critical magnetic field depending on the type of gas is reached. Because of the absence of heated elements, the hollow cathode remains efficient for long when an arc is initiated in both inert and chemically active gases.