应用相位移法的二维光栅测量

本文介绍了二种二维位移测量的光栅方法。测试系统采用CCD摄象系统记录正交光栅图象,通过调整摄象机变焦镜头的放大倍数来控制采样的空间频率。采样后用数字信号处理的方法,通过软件手段实现水平向和垂直向光栅信号的分离,然后运用了相位移技术及载波—相位移技术得到二维位移。所开发的测试系统除具有高精度、高灵敏度的特点外,还具有较高的空间分辨率。     

光弹等差线与等倾线参数的全场检测法

本文研究了一种自动获得全场等差线级数与等倾线参数角的方法.该方法是根据“相移”思想,利用数字图像处理技术,对光弹等差线图与等倾线图进行位相检测,经过去包裹处理,确定出全场各点的等差条纹级次与主应力方向角.最后通过典型实验,考核了这种方法的正确性与处理精度。     

用矩形栅自动相移法测量三维物体形状

本文介绍了一种自动测量物体三维形状的新方法。该方法将矩形栅投影于三维物体表面，利用图像处理系统自动产生云纹和自动实现云纹相移，实现了三维物体形成恢复。本文通过实验验证了该方法的正确性下处理精度。方法容易实现，能较好消除多种系统误差，抗干扰能力强，精度和自动化程度高。     

Polarization phase-shifting interferometer by rotating azo-polymer film with photo-induced optical anisotropy

A new type of phase-shifting interferometer was presented by rotating an azo-polymer film with photo-induced optical anisotropy in the light path of orthogonal polarization interferometry. By changing the angle of the optical axis of the azo-polymer film, four phase-shifted fringe patterns were obtained, from which phase difference between orthogonal polarized light could be calculated. The polarization states and the formation of the interferograms were analyzed theoretically using Jones matrix calculations and the experimental verification of the proposed method was also given. This method has a simple optical configuration which utilizes commercially available polarization devices and anisotropic azo-polymer film of low cost. The phase-shifting interferometer also demonstrates a new application of azo-polymer film.     

The fluctuating phase error analysis in the digital grating phase-shifting profilometry

The nonlinear response of the experimental system and the saturation of fringe patterns can induce the fluctuating phase error in the projection grating phase-shifting profilometry. Two major factors of the fluctuating phase error are discussed by simulation. The fluctuating phase error caused by the nonlinear response of the system is four times the frequency of the fringe pattern when the conventional four-frame phase extracting algorithm is used. However, such error can be decreased by five-frame algorithm. On the other hand, the fluctuating phase error caused by the fringe saturation is five times the frequency of the fringe pattern by using conventional five-frame phase extracting algorithm. A novel phase recovering algorithm is used to decrease the phase error caused by the saturation. Furthermore, the applicability range of the proposed phase recovering algorithm is analyzed by simulation and experiments with different saturation degree of the fringe pattern and nonlinearity of the measurement system.     

Quantitative strain analysis of flip-chip electronic packages using phase-shifting moiré interferometry

In order to gauge the reliability of electronic packages, it is valuable to analyze thermally induced displacements and strains around bimaterial corners and within interconnections. The increased demand for computing performance has created increasingly complex electronic packages with miniaturized features, making it increasingly difficult to extract these quantities. Often, material properties at these length scales are not fully known, making modeling and simulation problematic. Thus, determining displacements and strains experimentally is attractive. In this study, an advanced flip-chip package with fine interconnection features was analyzed using phase-shifting moiré interferometry (PSMI) in conjunction with image analysis software developed for this purpose. Before the analysis, PSMI was qualified using an isotropic solid undergoing uniform thermal contraction, which yielded a displacement precision of ±4 nm. Then a high-magnification, high-resolution displacement and strain analysis was performed for a small cross-sectional region of the flip-chip package containing 20–100 μm sized features. The analysis quantifies these results and gives displacements and strains obtained by differentiating the displacement data using a strain-energy-based finite element formulation.     

相移阴影莫尔基于迭代LSM拟合

相移阴影莫尔技术相位高度存在着非线性关系,无法在全场获得均匀相移,因而致使经典的相移算法不能得到精确解.对此,提出了一种基于最小方差迭代的相移阴影莫尔技术,该技术通过垂直光栅面等间距移动光栅来产生相移,但光栅移动距离可不采用固定值,所以相移过程灵活|使用在高度解调过程中确定的逐点相移增量来抽取精确的测量相位,实现了相移阴影莫尔技术中固有的相位高度非线性误差补偿.结果表明,该方法可通过干涉图计算光栅的移动量,具有相移器的自标定特性.     

光刻物镜波像差检测平台移相装置的研制

针对基于剪切干涉原理的光刻投影物镜波像差检测设备中相移测量的需求,设计了一种移相装置.该装置采用了桥式放大机构,获得了较大放大比和相对紧凑的结构.从原理上对桥式放大机构进行了分析和讨论,得到了输入位移与其放大比之间的函数关系,并得到了其关系曲线.经过非线性有限元分析,对该装置的变形、受力和模态特性进行了验证.验证结果满足检测平台移相要求.     

利用电子散斑相移技术测量物体三维面形的方法

为了获得准确的面形测量,提出了一种相移电子散斑干涉技术测量物体面形的测量方法.利用电子散斑干涉产生载波条纹,该载波条纹受到物体表面高度的调制变得弯曲,引起载波条纹相位的变化,可运用相移技术提取物体的相位信息,最后根据高度和相位之间的关系得到物体的面形.介绍了该方法的原理,利用该方法对球冠物体进行了面形测量,证明该方法测量物体面形是可行性的.由于是采用散斑干涉的方法产生干涉条纹,因此该方法测量物体面形具有灵敏度高的优点.     

同轴相移数字全息中相移角的选取及相移误差的消除

基于两步同轴相移数字全息,首先从理论上分析了记录时不同相移角的选取及相移误差对再现像的影响,并给出了一种利用再现像所有抽样点的强度偏差之和作为评价标准,通过逐步改变理论设定相移角值来寻找实际相移角的相移误差消除新方法;其次对二步相移数字全息中记录时参考光波最佳相移角的选取作了计算机模拟,发现只有将参考光波的相移角选择在一定范围内,再现像的噪声较小;最后利用计算机模拟了相移误差消除,验证了所提方法的可行性.