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阴影叠栅相移非线性误差补偿算法研究 总被引:2,自引:2,他引:0
相移阴影叠栅干涉场的相位(高度)存在非线性关系,而传统的相移阴影叠栅技术往往忽略了相位与高度的非线性关系,从而在测量系统中引入测量误差。对此提出了一种基于迭代相位解调自调算法相移阴影叠栅技术,该方法利用最小二乘技术获得相移量估算值,利用该估算值通过迭代算法消除相移阴影叠栅的全场相位误差,从而得到正确的相位分布。模拟计算表明该方法可以有效解决相移不均产生的相位测量误差问题,且可实现光栅移动量的精确估算,其误差不超过3.4%。对比实验进一步说明了所提出方法的正确性和优越性。 相似文献
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相移阴影莫尔条纹正交化解调技术 总被引:1,自引:0,他引:1
提出一种基于克莱姆正则化分析法的三帧自标定相移阴影莫尔三维轮廓技术.该技术首先采用移动光栅的方法获得相移条纹图,然后通过不同帧相移条纹图相减去除条纹图背景,进而结合克莱姆正交化法和最小二乘法,发展了一种相位解调方法,提取了测量相位.以五步Harlharan算法为参考,用不同算法对同一物体表面进行测量.结果表明,相对于典型的三步相移法和主量分析方法,提出的方法测量得到的相位误差最小(0.5rad),且简化了测量过程. 相似文献
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相移阴影莫尔是一项成熟的物体表面三维轮廓测量技术,但是该技术的性能还有优化的空间。为了提高阴影莫尔技术的精度且不增加装置的复杂性,提出了一种随机相移阴影莫尔三维轮廓测量技术。所提方法采用立体视觉方法对阴影莫尔装置结构参数进行标定,运用3帧随机相移算法提取测量相位,从而极大地简化了现有阴影莫尔技术的测量过程。由于是基于随机相移思想,假定相邻帧条纹图间引入的相移不等且未知,因此所提方法可有效地降低相移器的应用要求。另外,所提方法在相位解调过程中不受背景光影响,且对条纹图非正弦光强分布不敏感,具有精度高、应用容易的特点。实验表明,所提方法精度高,速度快,优于现有的典型算法。 相似文献
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提出了一种基于PMP原理的对圆形流水线上工件面形进行在线检测的方法。利用DLP将一环形正弦光栅图投射在圆型流水线上某一区域,使用相移器在物体运动方向的垂直方向上进行相移,实现了圆周运动物体各物点相移一致性,同时由于相移方向与物体移动方向垂直,工件移动不会影响相移量,相移量可以较精确地控制。通过采用参考标记和图像旋转恢复可实现N帧变形条纹图像的像素匹配,从而提取三维物体的截断相位,经过相位展开,得到连续相位,并由相位最后解调出物体的高度信息。通过计算机仿真验证了方法的可行性。该方法具有在线、快速,非接触性等特点。 相似文献
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提出一种基于结构光条纹成像的光线追迹和波前重建方法.以结构光条纹相位为信息载体,采用相移技术精确地测量结构光条纹成像过程中相位的变化,实现高分辨的光线追迹,得到点列图.由于光线传播方向与波前垂直,凶此可以实现波前重建.将一个液晶显示器(LCD)置于点光源后,显示正弦灰度调制光栅图样以产生标准条纹光束.条纹光束通过被测光学元件后,发生变形.CCD记录下变形条纹图样,根据相移技术进行处理,计算后完成测量.由于调制光栅图样是由计算机产生的,所以光栅的周期和方向可以灵活设置,并可以实现精确的相移.实验验证了该方法的可行性. 相似文献
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在光纤光栅的刻蚀平台中引入精密移动电机,控制相位掩模板的移动,从而在光纤光栅的刻蚀过程中,在光栅的固定位置引入相移量,采用此简单易行的方法制作出了多种相移光纤光栅,分析所刻光纤光栅的光谱曲线,符合理论分析和设计的要求。 相似文献
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Minvydas Ragulskis 《Optics Communications》2007,273(2):370-378
A technique based on optical operations on moiré patterns for image encryption and decryption is developed. In this method, an image is encrypted by a stochastic geometric moiré pattern deformed according to the image reflectance map. The decryption is performed using pixel correlation algorithm in the encrypted image and the stochastic geometrical moiré pattern. The proposed technique has a number of advantages over existing encryption techniques based on moiré gratings. No original moiré grating can be reconstructed only from the encrypted image. Stochastic moiré grating can be deformed in any direction what is an important factor of encryption security. Finally, the quality of the decrypted image is much better compared to decryption methods based on the superposition of the regular and deformed moiré gratings. The proposed technique has a great potential, because the process is performed using computational algorithms based on optical operations and optical components are avoided. 相似文献
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Haixia Shang Huimin Xie Zhanwei Liu Haiming Guo Hongjun Gao Fulong Dai 《Optics and Lasers in Engineering》2004,41(5):498
In this paper, a new nano-moiré method using scanning tunneling microscope (STM) is proposed. This method is capable of measuring nanoscopic deformation of matter. The formation mechanism of the STM moiré fringe and the phase shifting technique used in STM moiré fringes are explained in details. Typical experiments are conducted with the crystal lattices of freshly cleaved highly oriented pyrolytic graphite, are used as specimen grating, to generate STM moiré fringe patterns. Phase shifting is realized in four steps from 0 to 2π by controlling the PZT in the STM system to shift the specimen in the vertical direction. This method provides a new way for disposal of moiré fringes pattern in the nano-moiré measurement. 相似文献
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Huimin Xie Haixia Shang Fulong Dai Biao Li Yongming Xing 《Optics & Laser Technology》2004,36(4):1223-297
A new phase shifting scanning electron microscope (SEM) moiré method is proposed in this paper. The phase shifting technique is realized in four steps from 0 to 2π by shifting electron beam in the y-axis direction controlled by the SEM system. It is successfully applied to determine the residual strain of a deformed holographic grating with a frequency of 1200 lines/mm in an electronic package. As a further application, it is used to measure the virtual strain of a MEMS structure with a 5000-line/mm grating and to determine the phase distribution of a SEM moiré formed with a 6000-line/mm grating fabricated by electron beam lithography. The experiments show the feasibility of this method. It provides a new way for disposal of fringes pattern in sub-micro moiré method. 相似文献
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A technique for measuring in real-time continuous out-of-plane displacements of delicate objects is proposed, and demonstrated on the tympanic membrane of Mongolian Gerbil. The technique is based on the combination of two methods: the spatial phase shifting (SPS) and the modified temporal phase unwrapping (TPU). The combination allows to obtain, in several steps, the phase values of the points that undergo out-of-plane displacement as the object is deformed. The technique reduces the frame acquisition time of the standard TPU used in moiré interferometry by a factor of 4, which is important to diminish post-mortem artifacts during in-vitro experiments and to reduce motion artifacts in in-vivo tests. The proposed technique is robust against problems associated with the temporal phase-shifting method, such as nonlinear phase shift and noise. The advantages and disadvantages are discussed. 相似文献
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In this study, phase shifting method is used to modify moiré system into micro moiré interferometer which can measure displacement field with highly improved sensitivity. Apart from existing micro moiré technique, a low cost and less precise translation stage with rough resolution (10 μm resolution) is adapted for the phase shifter. Least square algorithm is applied to estimate the arbitrary phase shifted amount and to minimize the errors induced by lowering the cost. Moreover, specimen grating is phase shifted instead of reference grating which enables simple construction from given moiré system. To compensate for rigid body in-plane translation of specimen that may occur during phase shifting, pattern matching algorithm is put into practice to ensure pixel correspondence for each phase shifted images. To verify the newly constructed micro moiré technique, local displacement fields of Fine pitch Ball Grid Array package and Wafer Level Chip Size Package with elevated sensitivity up to 26 nm per fringe was acquired. 相似文献
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Moiré topography method is a well-known non-contacting 3-D measurement method. Recently, the automatic 3-D measurement technique by moiré topography has been developed in order to apply to the engineering and medical fields. The projection moiré topography is very attractive because of its high measuring speed and high sensitivity. In this paper, using the two-wavelength methods of projection moiré topography was investigated to measure the 3-D shape of an object with 2π-ambiguity problems. Rapid measurement can be accomplished by the synchronization between CCD camera and projector. The experimental results prove that the proposed scheme is capable of finding absolute fringe orders, so that the 2π-ambiguity problems can be effectively overcome so as to treat large step discontinuities in measured objects. 相似文献
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We propose a new method for the accurate estimation of nonlinear response of the PZT to the applied voltage. The method uses discrete chirp Fourier transform for the coarse estimation followed by a fine search method for the accurate estimation of the phase step and nonlinearity. The method can be extended to the cases of extraction of multiple phases in the configurations involving multiple PZTs such as holographic moiré in the presence of nonlinearity. The robustness of the proposed method is verified by comparing with Cramér-Rao lower bound. Experimental results prove the method’s feasibility. 相似文献
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Here, we treat the fractality condition for the moiré fringe profiles obtained from the superposition of two Cantor gratings. These Cantor structures are built through the product of periodic components. We restrict the study to the case in which both gratings have the same fractal parameters (dimension and lacunarity). However, the period of each component can be different. The contribution of each periodic component is also shown, and the total moiré is expressed as a product of the moiré from pairs of such components (Optik 113 (2002) 13-24). Considering the normalized fringe profiles as sets and based on the theory of dynamical systems, the fixed points are obtained. Finally, the calculation of the perimeter-yardstick relation (Richardson method) permits to obtain a power law and the fractality condition is accomplished for such normalized fringe profiles. 相似文献
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This paper investigates both theoretically and experimentally the effect of lattice bending on the output signals of a two-crystal x-ray interferometer of the Laue LLL type. The cross section intensity of the outgoing beams is modulated by the moiré effect produced by the overlapping of the analysing lattice on the x-ray standing field in front of it. Since the intensities of the transmitted and diffracted beams are integrated, the moiré pattern causes loss of visibility in the x-ray fringes and a non-linear phase shift, which depends on the pitch alignment of the analysing crystal with respect to the fixed crystal. The analysis of this phase shift allows the lattice curvature to be estimated. 相似文献