双激光脉冲打靶形成Gd等离子体的极紫外光谱辐射

高端芯片制造所需要的极紫外光刻技术位于我国当前面临35项"卡脖子"关键核心技术之首.高转换效率的极紫外光源是极紫外光刻系统的重要组成部分.本文通过采用双激光脉冲打靶技术实现较强的6.7 nm极紫外光输出.首先,理论计算Gd¹⁸⁺—Gd²⁷⁺离子最外层4d壳层的4p-4d和4d-4f能级之间跃迁、以及Gd¹⁴⁺—Gd¹⁷⁺离子最外层4f壳层的4d-4f能级之间跃迁对波长为6.7 nm附近极紫外光的贡献.其后开展实验研究,结果表明,随着双脉冲之间延时的逐渐增加,波长为6.7 nm附近的极紫外光辐射强度呈现先减弱、后增加、之后再减弱的变化趋势,在双脉冲延时为100 ns处产生的极紫外光辐射最强.并且,在延时为100 ns处产生的光谱效率最高,相比于单脉冲激光产生的光谱效率提升了33%.此外,发现双激光脉冲打靶技术可以有效地减弱等离子体的自吸收效应,获得的6.7 nm附近极紫外光谱宽度均小于单激光脉冲打靶的情形,且在脉冲延时为30 ns时刻所产生的光谱宽度最窄,约为单独主脉冲产生极紫外光谱宽度的1/3.同时...     

Synthesis,Molecular Docking,and Hemorheological Activity of New 4-(Thien-2-yl)-3-aminopyridine-2(1H)-one Derivatives

Russian Journal of General Chemistry - On the basis of 4-(thien-2-yl)-3-aminopyridine-2(1H)-one, the corresponding chloroacetamide and condensed 1H-pyrido[2,3-b][1,4]oxazine-2(3H)-one were...     

Determination of Polycyclic Aromatic Hydrocarbons in Soils and Bottom Sediments by Gas Chromatography–Mass Spectrometry with QuEChERS Sample Preparation

Journal of Analytical Chemistry - The work is dedicated to the determination of polyaromatic hydrocarbons (PAHs) in soils and bottom sediments by gas chromatography–mass spectrometry using...     

Microextraction of 17-β-Estradiol from Medicinal Preparations for the Subsequent Determination by HPLC-UV

Journal of Analytical Chemistry - A method is proposed for the chromatographic determination of 17-β-estradiol in medicinal preparations with the microextraction of the analyte from a sample...     

A multigrid method for the ground state solution of Bose–Einstein condensates based on Newton iteration

BIT Numerical Mathematics - In this paper, a new kind of multigrid method is proposed for the ground state solution of Bose–Einstein condensates based on Newton iteration scheme. Instead of...     

Delannoy数与Schröder数的一些和式公式

研究了Delannoy数与Schr?der数.利用分析方法和组合技巧,建立了任意多个Delannoy数乘积的一些和式公式,并对Schroder数的和式公式进行了类似的研究.     

The X-ray Structures of (R)-2,2′-Dimethyl-1,1′-binaphthyl and (±)-2-Bromomethyl-2′-dibromomethyl-1,1′-binaphthyl

Journal of Chemical Crystallography - Molecular structures of (R)-2,2′-dimethyl-1,1′-binaphthyl [monoclinic, a?=?11.24420 (11), b?=?10.56190 (9),...     

On Almost Interval Preserving Linear Operators

Siberian Mathematical Journal - A lattice homomorphism between quasi-Banach lattices is known to be compact if and only if it is a sum of a series of rank one lattice...     

The dual form of Beck type identities

The Ramanujan Journal - Inspired by Andrews and Merca’s recent work on the number of even parts over all partitions into distinct parts, we introduce a new kind of Beck type identities, which...     

Characterizations of $$\sigma$$ -Solvable Finite Groups

Mathematical Notes - All the groups considered in this paper are finite, and $$G$$ always denotes a finite group; $$\sigma$$ is a partition of the set $$\mathbb{P}$$ of all primes, i.e.,...