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Three-dimensional vertical ZnO transistors with suspended top electrodes fabricated by focused ion beam technology 下载免费PDF全文
Three-dimensional(3D)vertical architecture transistors represent an important technological pursuit,which have distinct advantages in device integration density,operation speed,and power consumption.However,the fabrication processes of such 3D devices are complex,especially in the interconnection of electrodes.In this paper,we present a novel method which combines suspended electrodes and focused ion beam(FIB)technology to greatly simplify the electrodes interconnection in 3D devices.Based on this method,we fabricate 3D vertical core-double shell structure transistors with ZnO channel and Al2O3 gate-oxide both grown by atomic layer deposition.Suspended top electrodes of vertical architecture could be directly connected to planar electrodes by FIB deposited Pt nanowires,which avoid cumbersome steps in the traditional 3D structure fabrication technology.Both single pillar and arrays devices show well behaved transfer characteristics with an Ion/Ioff current ratio greater than 106 and a low threshold voltage around 0 V.The ON-current of the 2×2 pillars vertical channel transistor was 1.2μA at the gate voltage of 3 V and drain voltage of 2 V,which can be also improved by increasing the number of pillars.Our method for fabricating vertical architecture transistors can be promising for device applications with high integration density and low power consumption. 相似文献
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目前,碱金属(锂、钠、钾等)离子电池中的锂离子电池已经广泛应用于社会生产生活的各个方面,有力地支撑了社会的自动化、信息化和智能化。然而,由于锂在地壳中的丰度较低,以较高丰度的钠为基础的钠离子电池引起了研究者和社会的广泛关注。其中,正极材料是制约钠离子电池实用化的重要因素之一,人们需要开发出面向实际应用的正极材料。P2结构层状复合金属氧化物钠离子电池正极材料具有资源丰富、制备简单、结构稳定、放电容量高、倍率性能好和循环稳定性较好等优点,获得了研究者的广泛关注,具有实用化前景。这一系列材料由于涉及到多种过渡金属元素的组合,较为复杂。本文针对含单一过渡金属、二元组分过渡金属、三元及以上组分过渡金属的P2结构材料及其优化改性进行了系统性梳理,力求厘清研究脉络,梳理研究思路,并给出了今后发展的方向与预测。P2结构材料的主要问题是提高其初始放电容量,氧还原的应用是解决这一问题的重要方向。此外,优化材料组分及采用具有丰富储量、低成本、高安全性和环境友好性的原材料是进一步降低成本并保护环境的重要研究方向。 相似文献
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以桦木为模板制备了一系列La2O3/Zr O2固体碱催化剂。采用BET、XRD、XPS和SEM等技术手段对其进行了表征。结果表明,与浸渍法和共沉淀法制备的样品相比,所制得的复合氧化物具备桦木的生物形态,具有更高的比表面积、更小的晶粒尺寸、更大的孔径和孔容等特点。当La/Zr质量比为10%时,样品的碱性最高,催化性能最好。以所制复合氧化物为催化剂,考察小桐子油和甲醇的催化酯交换反应。结果表明,在醇油摩尔比72∶1,固体碱催化剂质量分数8%,反应温度200℃,反应时间6 h的条件下,酯交换反应的甲酯转化率达93.6%。该样品具有一定的抗酸和抗水性。相同反应条件下,样品循环使用3次生物柴油收率仍为83%左右。 相似文献
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