双激光脉冲打靶形成Gd等离子体的极紫外光谱辐射

高端芯片制造所需要的极紫外光刻技术位于我国当前面临35项"卡脖子"关键核心技术之首.高转换效率的极紫外光源是极紫外光刻系统的重要组成部分.本文通过采用双激光脉冲打靶技术实现较强的6.7 nm极紫外光输出.首先,理论计算Gd¹⁸⁺—Gd²⁷⁺离子最外层4d壳层的4p-4d和4d-4f能级之间跃迁、以及Gd¹⁴⁺—Gd¹⁷⁺离子最外层4f壳层的4d-4f能级之间跃迁对波长为6.7 nm附近极紫外光的贡献.其后开展实验研究,结果表明,随着双脉冲之间延时的逐渐增加,波长为6.7 nm附近的极紫外光辐射强度呈现先减弱、后增加、之后再减弱的变化趋势,在双脉冲延时为100 ns处产生的极紫外光辐射最强.并且,在延时为100 ns处产生的光谱效率最高,相比于单脉冲激光产生的光谱效率提升了33%.此外,发现双激光脉冲打靶技术可以有效地减弱等离子体的自吸收效应,获得的6.7 nm附近极紫外光谱宽度均小于单激光脉冲打靶的情形,且在脉冲延时为30 ns时刻所产生的光谱宽度最窄,约为单独主脉冲产生极紫外光谱宽度的1/3.同时...     

静止轨道星载差分吸收光谱仪CCD成像系统设计

静止轨道卫星差分吸收光谱仪采用摆扫成像方式对大气进行探测,针对其工作时CCD成像系统信噪比大于1 000、高速探测模式下探测周期小于10min、高分辨率模式下探测周期小于1h的要求,进行CCD成像系统设计.选取CCD47-20作为探测器,设计成像电路实现光谱图像信号的采集和上传.分析了帧叠加和像元合并对时间、空间分辨率的影响.结合帧转移CCD的特点设计了每个位置最后一帧读出时摆镜转动的成像方式,并合理设置了帧叠加数和像元合并数,达到优化成像周期的目的.1s曝光时间条件下,该CCD成像系统的高速、高分辨率模式探测周期分别为515s和3 315s,图像信噪比均大于1 000,污染物观测实验中未出现失帧或重复的现象.该CCD成像系统方案满足静止轨道星载差分吸收光谱仪的探测需求,为静止轨道环境监测仪器设计提供参考.     

Temperature-Dependent Dielectric Characterization of Magneto-Optical Tb_3Sc_2Al_3O_(12) Crystal Investigated by Terahertz Time-Domain Spectroscopy

Terbium scandium aluminum garnet(TSAG) crystals have been widely used in magneto-optical systems. We investigate the complex refractive index of the TSAG crystal in the terahertz frequency range using terahertz(THz) time-domain spectroscopy in the temperature range 100–300 K. It is observed that the refractive index and the absorption coefficient increase with the THz frequency. The refractive index increases with the temperature.We measure the temperature coefficient of the refractive index of the TSAG crystal in the frequency range 0.4–1.4 THz. Furthermore, the loss tangent, i.e., the ratio of experimental values of the imaginary and real part of the dielectric permittivity, is found to be almost independent of frequency. TSAG is very promising for applications in THz optoelectronics because it has a high dielectric constant, low loss, and low thermal coefficient of the dielectric constant.     

Modeling and character analyzing of multiple fractional-order memcapacitors in parallel connection

Recently,the memory elements-based circuits have been addressed frequently in the nonlinear circuit theory due to their unique behaviors.Thus,the modeling and characterizing of the mem-elements become essential.In this paper,the analysis of the multiple fractional-order voltage-controlled memcapacitors model in parallel connection is studied.Firstly,two fractional-order memcapacitors are connected in parallel,the equivalent model is derived,and the characteristic of the equivalent memcapacitor is analyzed in positive or negative connection.Then a new understanding manner according to different rate factor K and fractional orderαis derived to explain the equivalent modeling structure conveniently.Additionally,the negative order appears,which is a consequence of the combination of memcapacitors in different directions.Meanwhile,the equivalent parallel memcapacitance has been drawn to determine that multiple fractional-order memcapacitors could be calculated as one composite memcapacitor.Thus,an arbitrary fractional-order equivalent memcapacitor could be constructed by multiple fractional-order memcapacitors.     

过程中孕育思想 活动中促进理解——“指数函数及其性质”教学设计

一、教材分析普通高中课程标准实验教科书(人教A版)数学1中§2.1.2“指数函数及其性质”使学生系统地学习了函数概念及其表示、函数的基本性质,掌握了指数与指数幂的运算性质,以及研究函数的一般思路之后,学习的第一个重要的基本初等函数,是“基本初等函数(Ⅰ)”这一章的重要内容.学习了“指数函数及其性质”,学生可以进一步深化对函数概念的理解与认识,从而得到较系统的     

电感耦合等离子体质谱(ICP-MS)法测定地质样品中的金

建立了王水溶解-聚氨酯泡沫塑料吸附-电感耦合等离子体质谱(ICP-MS)法测定地质样品中的金。探讨了振荡时间对回收率的影响,最终确定振荡时间为1h。在优化条件下,方法的相对标准偏差(RSD,n=12)在4.2%~9.0%,加标回收率在92.00%~114.6%,方法检出限为0.11ng/g。方法操作简单,测定精密度高,检出限低,满足大批量地质样品的分析需要。