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介绍了一种基于THGEM的X射线光斑寻迹探测器,用于X射线单光子计量技术研究和测量,探测器有效面积200 mm×200 mm,采用128路基于ASIC和FPGA的高速读出电子学,探测器分为中间高分辨区和外围低分辨区两部分,两部分共用一套读出电子学。实验在中国计量科学研究院利用X光机产生的束线,测试光斑位置、光斑精细分布以及探测器的位置分辨。实验结果表明,探测器实现了同时对光斑寻迹和光斑的精细测量,探测器中间高分辨区x方向的位置分辨率为0.63 mm(FWHM),y方向位置分辨率为0.62mm(FWHM),探测器各项性能指标均达到了预期目标。This paper introduces the detector of X-ray spot tracing based on the THGEM. It is used for X ray single photon measurement technology research and measurement with an effective area of 200 mm×200 mm. The circuit board has 128 array of high speed readout electronics based on ASIC and FPGA. And it is divided into two parts:the middle area of high sensitive and the peripheral area of low sensitive. The two parts share a set of readout electronics. The experiment tests the position and the fine structure of the beam line produced by X ray machine in National Institute of Metrology. The results of the experimental show that the detector realizes both the spot tracing and the fine structure of the spot. The position resolution is 0.63 mm in x direction and 0.62 mm in y direction in high sensitive of the detector, which achieve the desired goal of preliminary design.  相似文献   
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