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Growth and Characterization of a Kind of Nitrogen-Rich Niobium Nitride for Bolometer Applications at Terahertz Frequencies 下载免费PDF全文
Niobium is sputtered onto a single crystalline silicon substrate in N2:Ar=4:1 gas mixture at the total pressure of 2 Pa. The temperature coefficient of resistance of the sample is about 0.5% at 30OK, and up to 7% at 77K, indicating the possibility of using it to make room-temperature bolometers with performances better than those based on Pt, Bi, or Nb. For a 60-nm-thick sample, the rms surface roughness is 0.45nm over an area of 2 μm × 2 μm. Analyses based on x-ray diffraction and x-ray photoelectronic spectroscopy indicate that the samples are Nb5N6 thin films in which there is a combination of Nb^3+ and Nb^5+, or Nb^4+. 相似文献
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Ya-Peng Lu 《中国物理 B》2021,30(6):68504-068504
An impedance matched parametric amplifier (IMPA) with Josephson junctions is fabricated and characterized. A hybrid structure containing coplanar and strip structures is implemented to realize an impedance taper line and a plate capacitor in an LC nonlinear resonator based on Josephson junctions. The upper plate of the capacitor is isolated with SiNx without grounding as well as the strips. Such easily-prepared designs greatly reduce the requirements for lithography alignment and precision, which makes the fabrication process more reliable. The experimental results show that in such IMPA a gain higher than 25 dB with a bandwidth of about 100 MHz can be obtained. This broadband amplifier operates close to the quantum limit. By adjusting the working point, a higher bandwidth of about 400 MHz can be obtained with a gain of about 17 dB. 相似文献
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