Superconducting membrane mechanical oscillator based on vacuum-gap capacitor

Using the diluted S1813 UV photoresist as a sacrificial layer, we successfully fabricate a superconducting suspended parallel-plate capacitor, in which the top layer of aluminum film acts as a membrane mechanical resonator. Together with a superconducting octagonal spiral inductor, this parallel-plate capacitor constitutes a superconducting microwave resonator. At m K temperature, the transmission characteristic and spectrum of the microwave resonator are measured.Sideband frequencies caused by the vibration of the membrane mechanical resonator are clearly demonstrated. By downconverting with a mixer, the dependence of fundamental frequency and its harmonics on the input microwave power are clearly demonstrated, which is consistent with the numerical simulation.     

基于悬空电容的机械振子的制备和表征

微机械振子在信息处理的研究领域有着重要的应用,我们采用超导材料铝制备了悬空电容,该悬空电容的上极板构成了微机械振子.悬空电容和螺旋电感一起构成LC振荡电路.微波通过平面波导传输线耦合进来,在LC电路中形成电磁振荡,同时,激励出薄膜机械振子的机械振动.本文详细介绍了采用稀释的光刻胶作牺牲层来制备悬空结构的方法,并通过测试,研究了悬空电容中的薄膜振动特性,为今后机械振子与微波场、光场甚至量子比特的相互耦合等研究工作提供了重要参考.     

3D-Transmon与压电振子的量子耦合系统北大核心

微机械振子在量子信息领域有着重要的应用,可用作量子存储器、量子换能器等.鉴于三维传输子量子比特(3D-Transmon)优良的退相干特性以及AlN压电振子较高的谐振频率,我们利用微纳加工技术,在蓝宝石基片上成功制备了3D-Transmon与AlN压电振子的量子耦合系统.实际测量结果显示,在外加磁场偏置下,量子比特的跃迁频率可调范围为4.1~9.8 GHz,能量弛豫时间T1约为4.7μs,并且测量到了能级免交叉现象.这些结果为今后超导量子比特与微机械振子耦合系统的深入研究提供了重要参考.     

三维传输子量子比特制备研究

研究了三维传输子(3D-transmon)量子比特的制备技术。采用电子束光刻技术制备亚微米双层胶悬空掩模,电子束斜蒸发技术制备Al/AlO_x/Al超导隧道结。将隧道结与三维谐振腔耦合,成功实现3D-transmon。在20 mK下测试了量子比特的能级跃迁频率、拉比振荡、能量弛豫时间t_1等性能,t_1约566 ns。t_1较短的原因是量子比特跃迁频率与三维谐振腔频率接近,耦合过紧。