Superconducting membrane mechanical oscillator based on vacuum-gap capacitor

Using the diluted S1813 UV photoresist as a sacrificial layer, we successfully fabricate a superconducting suspended parallel-plate capacitor, in which the top layer of aluminum film acts as a membrane mechanical resonator. Together with a superconducting octagonal spiral inductor, this parallel-plate capacitor constitutes a superconducting microwave resonator. At m K temperature, the transmission characteristic and spectrum of the microwave resonator are measured.Sideband frequencies caused by the vibration of the membrane mechanical resonator are clearly demonstrated. By downconverting with a mixer, the dependence of fundamental frequency and its harmonics on the input microwave power are clearly demonstrated, which is consistent with the numerical simulation.     

基于悬空电容的机械振子的制备和表征

微机械振子在信息处理的研究领域有着重要的应用,我们采用超导材料铝制备了悬空电容,该悬空电容的上极板构成了微机械振子.悬空电容和螺旋电感一起构成LC振荡电路.微波通过平面波导传输线耦合进来,在LC电路中形成电磁振荡,同时,激励出薄膜机械振子的机械振动.本文详细介绍了采用稀释的光刻胶作牺牲层来制备悬空结构的方法,并通过测试,研究了悬空电容中的薄膜振动特性,为今后机械振子与微波场、光场甚至量子比特的相互耦合等研究工作提供了重要参考.     

3D-Transmon与压电振子的量子耦合系统北大核心

微机械振子在量子信息领域有着重要的应用,可用作量子存储器、量子换能器等.鉴于三维传输子量子比特(3D-Transmon)优良的退相干特性以及AlN压电振子较高的谐振频率,我们利用微纳加工技术,在蓝宝石基片上成功制备了3D-Transmon与AlN压电振子的量子耦合系统.实际测量结果显示,在外加磁场偏置下,量子比特的跃迁频率可调范围为4.1~9.8 GHz,能量弛豫时间T1约为4.7μs,并且测量到了能级免交叉现象.这些结果为今后超导量子比特与微机械振子耦合系统的深入研究提供了重要参考.     

Nb/AlOx-Al/Nb超导隧道结制备氧化工艺与特性研究

提出一种氧的等离子氧化的方法改善结区边缘绝缘性能,降低超导隧道结的漏电流。对Al膜进行等离子氧化能够有效的改善氧化膜的绝缘性能,AES分析表明:氧化绝缘层均匀,界面清晰;应用此方法成功制备出较好性能的Nb隧道结。     

三维传输子量子比特中的Autler-Townes效应北大核心CSCD

我们在三维传输子量子比特系统中,通过施加与跃迁能级对应的强耦合场,同时,利用一弱探测场对系统的吸收谱进行了测量.发现在强耦合场的作用下,吸收谱会分裂成双峰,即探测到了Autler-Townes效应(ATE)现象.首先,我们利用单光子跃迁过程,测量了ATE分裂的大小和耦合场功率的关系.进一步,我们首次利用双光子跃迁过程进行了ATE的探测,分析了探测到的ATE分裂大小和耦合场的关系.我们通过QUTIP解得系统的密度矩阵,得到的理论的计算结果和实验结果十分符合.     

An easily-prepared impedance matched Josephson parametric amplifier

An impedance matched parametric amplifier (IMPA) with Josephson junctions is fabricated and characterized. A hybrid structure containing coplanar and strip structures is implemented to realize an impedance taper line and a plate capacitor in an LC nonlinear resonator based on Josephson junctions. The upper plate of the capacitor is isolated with SiN_x without grounding as well as the strips. Such easily-prepared designs greatly reduce the requirements for lithography alignment and precision, which makes the fabrication process more reliable. The experimental results show that in such IMPA a gain higher than 25 dB with a bandwidth of about 100 MHz can be obtained. This broadband amplifier operates close to the quantum limit. By adjusting the working point, a higher bandwidth of about 400 MHz can be obtained with a gain of about 17 dB.     

Nb/A1-AlO_X/Nb隧道结的制备研究

通过改进RIE的刻蚀工艺和绝缘层的生长工艺,在SiO2/Si衬底上制备出了性能良好的超导Nb/A1-AlOX/Nb隧道结。采用CF4作为刻蚀气体,降低了RIE对结势垒层和衬底SiO2层的刻蚀。使用PECVD生长绝缘层SiO2,改善了绝缘性能,从而降低了隧道结的漏电流。