铝互连线的电迁移问题及超深亚微米技术下的挑战

铝互连线的电迁移问题历来是微电子产业的研究热点，其面临的电迁移可靠性挑战也是芯片制造业最持久和最重要的挑战之一.从20世纪90年代开始，超深亚微米(特征尺寸≤0.18 μm)铝互连技术面临了更加复杂的电迁移可靠性问题.从电迁移理论出发，分析概括了铝互连电迁移问题的研究方法，总结了上世纪至今关于铝互连电迁移问题的主要经验；最后结合已知的结论和目前芯片制造业现状，分析了当前超深亚微米铝互连线电迁移可靠性挑战的原因和表现形式，提出了解决这些问题的总方向. 关键词： 电迁移 铝互连 微结构     

锥形透镜光纤聚焦特性研究

锥形透镜光纤(TLF)是实现光纤与平面光波光路(PLC)芯片高效耦合的核心元件。了解和掌握其聚焦特性是指导平面光波光路尾纤封装技术的关键。给出了表征锥形透镜光纤聚焦特性的两个参量出射光斑直径和远场发散角的理论分析模型,其误差小于1.14%;采用光束传播法数值模拟了锥形透镜光纤中的光波传输和模斑的演化,确定了锥形透镜光纤端面出射光斑的大小;优化锥形透镜光纤结构参量为:拉锥长度300μm,锥角0.733°,透镜曲率半径13.485μm;建立了基于数字摄像机的锥形透镜光纤出射光场测试系统,提出了物理光学反向推演法,计算出锥形透镜光纤聚焦光斑尺寸和远场发散角。理论与实验结果有着良好的一致:对于相同结构参量的锥形透镜光纤,实验反推法得到的出射光斑尺寸与理论值相比误差为3.15%,远场发散角误差为3.67%。     

下料问题的优化模型及其快速算法

结合生产实际中具体的下料问题,本文建立了该类问题的优化模型,并提出下料方式的遴选三准则,即高利用率优先准则,长度优先准则和时间优先准则.运用本文的算法对一维下料的利用率高达99.6%,机器时间4秒.对二维的利用率为98.9%,机器时间约7秒.     

The operational performance of the Yale ESTU

The ESTU began operation in 1988 and achieved the design voltage of 20 MV in 1990. Since that time, improvements to the gas handling system, negative ion injector, accelerator terminal and control system have greatly increased its capability and reliability. Today, the ESTU can efficiently produce an extensive assortment of stable ions at wide-ranging energies in support of low-energy nuclear physics.     

直流磁控溅射一步法原位制备MgB2超导薄膜

用MgB2靶,控制直流磁控溅射工作在异常辉光放电或弧光放电状态,在SrTiO3衬底上原位一次性得到了MgB2超导薄膜,其起始转变温度为32K,零电阻温度为15K. 关键词： 高温超导体 超导薄膜 磁控溅射 二硼化镁     

Application of pressure sensitive paint measurement to a low-solidity cascade diffuser of a transonic centrifugal compressor

A pressure sensitive paint (PSP) measurement has been known as a pressure field measurement technique based on the oxygen quenching phenomenon of luminescence of specific luminophores. A PSP measurement was applied for pressure field measurement in a low-solidity circular cascade diffuser of a single-stage transonic centrifugal compressor with 5 in pressure ratio for HFC134a gas. The oxygen concentration was about 500 ppm. Ru (bath-phen) was adsorbed on a silica-gel thinlayer chromatography sheet, and the sheet was pasted onto the side-wall between the cascade vanes. A drastic change in luminescent intensity was recognized during a surge condition. Also the pressure variations based on luminescent intensity agreed well with the pressure fluctuations measured using a semiconductor pressure sensor with high-frequency-response. It was shown that a PSP measurement worked well to investigate the unsteady pressure fields in a circular cascade diffuser of a transonic centrifugal compressor. Moreover, the time response of PSP becomes clear as a problem to be overcome for the present.     

Bounds on the maximum numbers of clear two-factor interactions for 2^{(n_1 + n_2 ) - (k_1 + k_2 )} fractional factorial split-plot designs

Fractional factorial split-plot (FFSP) designs have an important value of investigation for their special structures. There are two types of factors in an FFSP design: the whole-plot (WP) factors and sub-plot (SP) factors, which can form three types of two-factor interactions: WP2fi, WS2fi and SP2fi. This paper considers FFSP designs with resolution III or IV under the clear effects criterion. It derives the upper and lower bounds on the maximum numbers of clear WP2fis and WS2fis for FFSP designs, and gives some methods for constructing the desired FFSP designs. It further examines the performance of the construction methods.     

工作气压对电子束沉积ZrO2薄膜折射率和聚集密度的影响

采用电子束蒸发的方法，用石英晶体振荡法监控薄膜的蒸发速率，在不同工作气压下制备了ZrO2薄膜样品.在相调制型椭圆偏振光谱仪和分光光度计上对样品的光谱特性进行了测试.根据波长漂移的理论，计算出薄膜的聚集密度.结果表明，随着工作气压的降低，薄膜的聚集密度和折射率都随之增大.     

基于神经网络的三维宽场显微图像复原研究

提出一种利用BP神经网络进行三维宽场显微图像复原的非线性映射方法，将三维图像转化为二维图像进行处理，利用神经网络的学习能力，通过训练，建立含有散焦信息的二维模糊图像与二维清晰图像之间的映射关系，然后对切片堆叠进行逐幅复原，从而实现显微图像的三维复原.得到的复原图像在视觉上和定量分析上都获得了很好的效果.由于采用小规模神经网络，训练时间短，计算量小，使实时复原成为可能.     

高电荷态离子207Pbq+(24≤q≤36)与Si(110)固体表面作用的电子发射研究

报道了利用兰州重离子加速器国家实验室ECR源引出的高电荷态离子207Pbq+(24≤q≤36)入射到Si(110)表面产生的电子发射的实验测量结果.结果表明,高电荷态离子与固体表面相互作用产生的电子发射产额Y与入射离子的电荷态q、入射角度ψ和入射能量E都有很强的关联.首次发现,电子发射产额Y与入射角度ψ间有接近1/tanψ的关系.理论分析认为,这些过程与基于经典过垒模型的势能电子发射过程密切相关.