提高单晶炉真空密闭性能的探讨

晶间腐蚀、应力腐蚀和缝隙腐蚀,是单晶炉炉室发生水渗漏的主要原因,因而是制造过程中材料选择、热加工工艺、机械设计与加工以及设备使用中要特别予以关注的问题.在至少380℃以上温度进行热时效会强化材料的晶间敏化趋向,较合理的措施是进行振动时效处理.结构设计中还应对炉室工作时的热应力及其作用加以考虑,热场设计中应对炉室内壁材料的晶间敏化问题和单晶棒产生的热辐射予以重视.纯净的冷却水是防止或减少腐蚀的重要条件.     

改进型单晶炉提拉系统偏心平衡研究

随着光伏行业的快速发展, 对硅单晶的品质和长晶装备的稳定性的要求也不断提高。直拉法是生产硅单晶的主要方法,通过提高单晶炉副室的高度以扩大单晶硅的生产规模。由于副室高度的大幅增加,且单晶炉提拉头质心相对于旋转轴心有一定距离,对单晶炉整体稳定性有较大影响,从而降低了单晶硅的生产质量。针对此问题,对单晶炉建立可靠的力学分析模型,采用数值仿真方法,对单晶炉整体进行动力学响应分析,计算得到副室高度增加后的单晶炉工作时中钨丝绳下端晶棒的运动规律以及最大摆动幅度,为改进设计提供依据。数值仿真分析表明提高单晶炉副室高度后,提拉头较大的质心偏心是单晶炉提拉系统发生摆动的主要原因。在此基础上提出在提拉头上添加质心调节装置,通过控制系统调节可保证提拉头质心位置在旋转轴线上以降低提拉系统的摆动。     

碘化钾单晶的非真空密闭坩埚下降法生长

本文报道了KI单晶在非真空密闭条件下的坩埚下降法生长.以经充分干燥的高纯KI多晶为原料,将KI多晶料密封于套层铂坩埚中,添加少量活性碳粉末,可避免碘化物熔体的氧化与挥发,从而在非真空条件下实现KI单晶的坩埚下降法生长.在晶体生长过程中,炉体温度调节于750～770 ℃,固液界面温度梯度为30～40 ℃/cm,坩埚下降速率控制为1～2 mm/h,成功生长出尺寸为φ25 mm×50 mm的透明完整KI单晶.采用XRD、DTA-TG、透射光谱、荧光光谱对所获KI单晶进行了测试表征,结果表明该单晶具有良好的光学均匀性,在450～2500 nm波长范围的光学透过率达70;以上,其光学吸收边位于280 nm左右;在266 nm脉冲光激发下,该单晶具有397 nm峰值波长的荧光发射.     

直拉法单晶炉随动式加热器设计

单晶炉是一种在以高纯氩气为主的惰性气体环境中,用石墨热场加热,将多晶硅材料加以熔化,用直拉法生长单晶硅的设备,在太阳能单晶硅拉制的过程中,如何提高拉晶的速度和质量以及降低设备的能耗一直是单晶硅厂家永恒的追求。本文从机械结构的角度分析了坩埚上升在单晶炉拉晶过程中所造成的拉晶速度下降和额外能耗问题,在此问题的基础上提出了一种加热器随坩埚在拉晶过程中上升的单晶炉结构优化方法,并通过有限元仿真对单晶炉优化前后晶体和熔体的热场以及拉晶过程中加热器功率进行分析。结果表明,改进后的单晶炉不仅可以提高拉晶过程的稳定性和拉晶速度,从而进一步提高单晶炉的拉晶质量和产量,而且还能有效降低单晶炉拉晶的能耗。     

热屏结构对泡生法蓝宝石单晶炉功率影响研究

蓝宝石晶体因优异的综合性能被广泛用于航空航天等高性能要求领域.泡生法是目前生产大直径蓝宝石单晶的主要方法,热场对生产工艺、产品质量和单晶炉功率具有重要影响;并将影响生产成本.本文对氧化锆及钼金属组合式热屏中氧化锆材料内置、外置及材料不同组合方式对泡生法蓝宝石单晶炉功率的影响进行研究,得到合理的热场结构;并与实际生产结果进行验证.结果表明:相比于传统的15层钼保温结构,加入氧化锆保温层会明显降低单晶炉能耗,其中氧化锆内置的热场结构对单晶炉能耗降低影响更为明显;随着氧化锆层由0增加至15层,单晶炉能耗显著降低,相比传统15层钼保温结构,15层氧化锆保温结构炉体功率降低了38;.     

江苏东方四通科技股份有限公司

<正>新能源产业成就卓越发展.绿色电源点亮未来之路超越自我追求卓越主要产品太阳能硅单晶炉直流开关电源蓝宝石(Al_2O_3)单晶炉直流开关电源单晶炉磁场电源单晶生长炉感应加热电源多晶铸锭炉PWM交流调压电源江苏东方四通科技股份有限公司是一家致力子绿色、高效电源研发和生产的高新技术企业,曾承担国家和江苏省火炬计划项目,并获得科技创新基金,主要产品有大功率软开关电源。PWM交流调压器。     

论直拉单晶炉技术平台的逻辑演进

要求不断增大晶棒直径、不断提高晶体质量的晶圆市场,推动我国直拉单晶炉产品系列出现过三代更替,与此对应,产品赖以存在的技术平台也经历了三个阶段的演进.第四代产品研发需要在以往技术积累基础上,在炉室材料、炉体结构、焊接工艺、机械传动和电气控制、计算机智能控制、磁场发生装置和热场材料等方面进行新一轮技术创新.     

泡生法生长蓝宝石单晶的热场改进与模拟优化

在泡生法蓝宝石单晶生长中,单晶炉内的热场对晶体质量至关重要.本文首先对单晶炉的顶部热屏、环形加热器和炉底保温进行了改进,然后结合计算机数值模拟,对热场改进前、后晶体的轴向和径向温度梯度、晶体表面温度分布、加热器功率等进行分析对比.结果表明:改进后的倾斜热屏增强了单晶炉内的辐射传热,对已生长出的晶体起到了后热作用,降低了晶体内的热应力;对加热器和底部钼保温层的改进,减小了加热器与坩埚间的热阻,增强了炉内的保温作用,使加热功率降低了约8%.     

人工晶体生长设备真空系统的优化设计

真空系统的应用在现代科研生产领域中起着越来越重要的作用,越来越被人们所重视.真空系统设计的好坏,直接影响着晶体生长设备的成功与否,而提高真空系统的密封性,降低真空系统的漏气率是提高真空性能的主要措施.本文简要阐述了提高真空系统的密封性和降低漏气率的一些措施,包括真空系统设计中的结构设计、密封形式的选择、密封材质的选用等,提出了一种新型的静密封结构,从而提高了真空系统的密封性能.     

热屏间距对泡生法蓝宝石单晶生长影响研究

太空、军事和科研等高科技领域的持续发展极大促进了对蓝宝石晶体的需求,泡生法是蓝宝石晶体的主要制造方法之一;热场结构对所得蓝宝石晶体的质量具有重要影响.本文对采用泡生法工艺制造蓝宝石单晶过程中,具有内置7层氧化锆外置8层钼金属的新型热屏结构间距进行研究.通过数值模拟考察热屏间距对单晶炉功率、固-液界面形状和晶体热应力的影响确定了合理的热场结构;并与试验生产结果进行对比验证.结果表明:热屏间距增大使得单晶炉功率明显提升,并引起固-液界面凸度增大;而蓝宝石晶体热应力出现减小.综合考察三个影响因素的影响,最后确定热屏间距为5 mm时单晶炉能耗较低,可用于制造高质量的蓝宝石晶体.     

New hardware and software platform for experiments on a HUBER-5042 X-ray diffractometer with a DISPLEX DE-202 helium cryostat in the temperature range of 20–300 K

Huber-5042 diffractometer with a closed-cycle Displex DE-202 helium cryostat is a unique scientific instrument for carrying out X-ray diffraction experiments when studying the single crystal structure in the temperature range of 20–300 K. To make the service life longer and develop new experimental techniques, the diffractometer control is transferred to a new hardware and software platform. To this end, a modern computer; a new detector reader unit; and new control interfaces for stepper motors, temperature controller, and cryostat vacuum pumping system are used. The system for cooling the X-ray tube, the high-voltage generator, and the helium compressor and pump for maintaining the desired vacuum in the cryostat are replaced. The system for controlling the primary beam shutter is upgraded. A biological shielding is installed. The new program tools, which use the Linux Ubuntu operating system and SPEC constructor, include a set of drivers for control units through the aforementioned interfaces. A program for searching reflections from a sample using fast continuous scanning and a priori information about crystal is written. Thus, the software package for carrying out the complete cycle of precise diffraction experiment (from determining the crystal unit cell to calculating the integral reflection intensities) is upgraded. High quality of the experimental data obtained on this equipment is confirmed in a number of studies in the temperature range from 20 to 300 K.     

Identifying nucleation temperatures for lysozyme via differential scanning calorimetry

Production of diffraction-quality protein crystals mandates nucleation of a moderate number of crystals. Excessive nucleation can lead to many small crystals of poor morphology, making them useless for structural determination via X-ray crystallography. In this work, differential scanning calorimetry (DSC) and light scattering are utilized to delineate the liquid–liquid binodal in lysozyme solutions at concentrations typically used for crystal growth (10–50 mg/ml). Such cloud point temperatures are determined over a range of protein concentrations and compared to visually observed nucleation temperatures. In all cases, nucleation occurs at temperatures above the cloud point temperature. Thus, measurement of the cloud point temperature gives the crystal grower a bound on the protein crystal growth problem. Nucleation is reproducibly induced within 2°C of the cloud point temperature; while prior work indicates that growth, when carried out near the saturation temperature, yields high quality crystals. The ease of measuring the cloud point via turbidity measurements allows for the rational selection of an initial temperature to induce protein nucleation.     

Vapour growth and morphology of PbBr2 crystals

In this paper, the vapour transport of PbBr₂ under vacuum during vacuum distillation refining and its condensation on the wall of the vessel were described. The macro‐ and micro morphologies of PbBr₂ crystals grown in the vessel (glass tube) were studied. The crystal shape changed dramatically depending on the positions of condensation in the vessel, i.e., the crystal shape varied from an isometric polyhedron to columnar crystals with facets, and to a massive crystal without facets with a rise in the wall temperature. These results were interpreted in terms of the concentration gradient of the molecules in the vessel, surface roughening and/or surface melting of the crystals. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Degenerate Reflections in Acoustics of Solids. II: Orthorhombic Crystals

Crystallography Reports - The conditions under which a bulk acoustic wave, incident on a crystal at a certain angle and reflected from the crystal boundary with vacuum, generates two or one...     

Optics of Twisted Nematic Liquid Crystal Layers

Calculations have been made of the optical properties of various liquid crystal displays (LCDs) based on twisted nematic liquid crystal layers. It is shown that the steepness of the electro-optical characteristics of TN LCDs can be reduced and consequently the gray-scale capability can be improved by decreasing the twist angle. The twist reduction permits the realization of displays which, due to their outstanding gray-scale capability and low inherent coloration, are particularly suited for active matrix TV-applications. In addition to calculations made on displays based on weakly twisted layers, a comparison is made of the optical properties of displays with a high multiplex capability, which utilize highly twisted nematic liquid crystal layers. It is shown that the brightness of the OMI LCD can be improved without deterioration of the weak inherent coloration. This renders OMI LCDs particularly well suited for applications as time-multiplexed, full colour, high information content panels.     

硬质合金金刚石涂层工具基体真空渗硼预处理技术研究

研究了真空渗硼预处理硬质合金基体的表面组织、形貌、粗糙度,并在处理过的硬质合金基体上,用强电流直流伸展电弧等离子体CVD法沉积金刚石薄膜涂层.结果表明,真空渗硼预处理不仅可以有效地消除或控制钴在金刚石沉积时的不利影响,而且还显著粗化硬质合金基体表面.因此,提高了金刚石薄膜的质量和涂层的附着力,其临界载荷值达到1500N.     

Compositional mapping of GaSb wafers from as-grown crystals and after post-growth annealing treatments

Spatial compositional analysis has been carried out on single and polycrystal wafers of GaSb grown from stoichiometric and non-stoichiometric melts. In crystals grown from stoichiometric melt, the ratio of Ga to Sb is slightly more and remains uniform throughout. At the grain boundaries in polycrystals, the Sb content is more than in the other regions of the crystal. Crystals grown from either Ga- or Sb-rich melts exhibit inclusions of the excess component. Post-growth annealing treatments in vacuum and Ga-rich atmospheres have been performed. Heat treatments in vacuum atmosphere produce very little effect on the local composition of the crystal. On the other hand, localized crystallization at grain boundaries and inclusions takes place in the presence of excess gallium. It has been shown that annealing treatments in Ga ambient can produce defect-free wafers with extremely homogeneous composition. It is concluded that the excess Sb which is liberated from the crystal during growth resides at the grain boundaries and other extended defect centers. The vacant Sb sites are then responsible for the formation of the native acceptor centers like V_Ga and Ga_Sb.     

Rheed studies of the initial stages of the oxidation of tungsten

Reflection mode high energy electron diffraction (RHEED) has been used in an ultra high vacuum environment to study the initial stages of the oxidation of (100) and (110) tungsten single crystal surfaces.