人工晶体生长设备真空系统的优化设计

真空系统的应用在现代科研生产领域中起着越来越重要的作用,越来越被人们所重视.真空系统设计的好坏,直接影响着晶体生长设备的成功与否,而提高真空系统的密封性,降低真空系统的漏气率是提高真空性能的主要措施.本文简要阐述了提高真空系统的密封性和降低漏气率的一些措施,包括真空系统设计中的结构设计、密封形式的选择、密封材质的选用等,提出了一种新型的静密封结构,从而提高了真空系统的密封性能.

Vacuum System Design of Crystal Growing Equipment

The application of vacuum system is playing more and more an important role in the modern scientific research and manufacturing fields.People also pay more attention to it.For an equipment requesting vacuum system, whether the vacuum system is designed successfully or not,it will directly influence the equipment's performance.In order to improve the vacuum system, we often take the following measures: first, strong seal; second, lower leakage. This paper mainly describes how to ensure the vacuum system's structure and to choose material during the design and a new type of stable seal structure making vacuum seal better is put forward.