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1.
玻璃衬底上中温制备多晶硅薄膜的量子态现象   总被引:1,自引:1,他引:0  
用PECVD法直接沉积的非晶硅(a-Si:H)薄膜用传统炉在中温退火,然后用拉曼光谱、XRD和SEM分析,发现晶粒大小随退火温度和退火时间呈现量子态现象.分析发现在传统炉中850℃下退火三个小时晶粒大小出现极大值,平均晶粒尺寸为30nm左右.  相似文献   

2.
用PECVD法直接沉积的非晶硅(a-Si:H)薄膜在中温情况下光退火,然后用XRD、Raman光谱和SEM分析,发现晶粒大小随退火温度和退火时间呈现量子态现象.平均晶粒大小为30nm左右.  相似文献   

3.
用快速光热退火制备多晶硅薄膜的研究   总被引:10,自引:3,他引:7  
用等离子体增强型化学气相沉积先得到非晶硅(a-Si:H)薄膜,再用卤钨灯照射的方法对其进行快速光热退火(RPTA),得到了多晶硅薄膜.然后,进行XRD衍射谱、暗电导率和拉曼光谱等的测量.结果发现,a-Si:H薄膜在RPTA退火中,退火温度在750℃以上,晶化时间需要2min,退火温度在650℃以下,晶化时间则需要2.5h;晶化后,晶粒的优先取向是(111)晶向;退火温度850℃时,得到的晶粒最大,暗电导率也最大;退火温度越高,晶化程度越好;退火时间越长,晶粒尺寸越大;光子激励在RPTA退火中起着重要作用.  相似文献   

4.
以反应磁控溅射方法沉积ZnO薄膜,然后在空气和H2S气氛中退火制备了六方相ZnS薄膜.用X射线衍射仪(XRD)、紫外-可见透射光谱和扫描电子显微镜(SEM)对薄膜进行表征.提高空气退火温度能够改善ZnS薄膜结晶性,而空气退火温度超过500℃则会降低ZnS薄膜结晶性.另外,当硫化退火温度低于400℃时,ZnO只能部分转变为ZnS,只有硫化温度等于或大于400℃时,ZnO才能全部转变为ZnS.硫化前后薄膜晶粒尺寸有显著变化.所得ZnS薄膜在可见光范围的透过率约为80;,带隙为3.61 ~3.70 eV.  相似文献   

5.
本文研究了退火对TiO2-Ta2 O5-CaCO3压敏陶瓷的压敏性能的影响,采用球磨-成型-烧结的传统方法制备TiO2-Ta2 O5-CaCO3压敏陶瓷,并将TiO2-Ta2 O5-CaCO3压敏陶瓷在不同温度下退火,用压敏直流参数仪测试样品的非线性系数α、压敏电压EB,采用XRD、SEM和STEM分析微观结构.结果表明,适宜温度下退火适当时间,可使晶粒适当长大,并使晶粒粒度分布均匀,减少气孔和提高致密度.退火过程中,半径较大的受主离子获得动能进一步向晶界偏析,增大晶界受主态密度,从而提高非线性系数α.晶粒适当长大,晶界数量和晶界总面积减小,有助于减小压敏电压;提高致密度可减小电阻率,从而进一步减小压敏电压.当掺杂浓度为0.20mol;,烧结温度为1350℃,700℃退火3 h的TiO2-Ta2O5-CaCO3压敏陶瓷获得最高的非线性系数和较低的压敏电压(α=8.6,EB=22.5 V·mm-1),优于没有退火样品.  相似文献   

6.
采用脉冲激光沉积技术(PLD)在单晶Si衬底上制备了ZnO-SiO2复合薄膜.分别用SEM、XRD观察了样品在沉积态(300℃)及700℃和900℃下热退火后的形貌和结构.发现经700℃热处理后,样品中有第三相β-Zn2SiO4形成,经900℃热处理后的样品中硅锌矿型Zn2SiO4取代了β-Zn2SiO4成为第三相.研究了热退火处理前后样品的荧光特性变化,结果表明经700℃热处理后,荧光光谱与沉积态相比,紫外区域的发光强度有较大提高,可见光区域的宽带强度变弱;经900℃热处理后,紫外区域荧光强度与700℃处理相比略有减小,可见光发光带消失.  相似文献   

7.
基于PECVD制备多晶硅薄膜研究   总被引:3,自引:0,他引:3  
基于PECVD以高纯SiH4为气源研究制备多晶硅薄膜,在衬底温度550℃、射频(13.56MHz)电源功率为20W直接沉积获得多晶硅薄膜.采用X射线衍射仪(XRD) 和场发射扫描电子显微镜(SEM) 对多个样品薄膜的结晶情况及形貌进行分析,薄膜结晶粒取向均为<111>、<220>、<311>晶向.对550℃沉积态薄膜在900℃、1100℃时进行高温退火处理,硅衍射峰明显加强.结果表明,退火温度越高,退火时间越长,得到多晶硅薄膜表面晶粒趋于平坦,择优取向为<111>晶向,晶粒也相对增大.  相似文献   

8.
采用射频磁控溅射在二氧化硅衬底上沉积一层厚度200 nm的非晶In-Ga-Zn-O(IGZO)薄膜,并在IGZO膜层上沉积厚度分别为20 nm、50 nm、60 nm、70 nm、90 nm的SiNX薄膜覆盖层,于350℃条件下N2气氛中退火1 h.采用X射线衍射(XRD)、高分辨透射电子显微镜(HRTEM)、能量色散谱仪(EDS)对IGZO薄膜的微观结构及成分进行研究.研究结果表明,退火后无覆盖层的IGZO膜层仍为非晶状态,70 nm以上SiNX覆盖层下的IGZO薄膜不发生晶化.与此不同,20~60 nm的SiNX覆盖层下IGZO膜层与SiNX覆盖层的界面处存在纳米凸起柱,使IGZO薄膜与SiNX覆盖层的接触界面脱离,此厚度的SiNX覆盖层具有诱导非晶IGZO薄膜晶化的作用,IGZO膜层内部的晶粒直径约10 nm.成分分析结果表明,结晶处In原子含量增加,IGZO薄膜中In原子的局域团聚是IGZO薄膜发生晶化的原因.  相似文献   

9.
采用溶胶-凝胶法在SiO2/Si(100)衬底上制备了镍酸镧(LaNiO3,LNO)薄膜,并利用XRD、SEM、AFM和半导体参数分析仪等研究了退火升温速率对LNO薄膜结构和电学性能的影响.结果表明,溶胶-凝胶法制备的LNO薄膜呈现赝立方钙钛矿型多晶结构,呈(110)择优取向生长;薄膜表面平整、均匀、无裂纹.随着退火升温速率的增加,LNO薄膜的晶粒尺寸先增大后减小;其电阻率先减小后增大.在退火升温速率为20℃/min时,LNO薄膜晶粒尺寸达到最大值94 nm,电阻率达到最小值9.5 x10-4 Ω·m.  相似文献   

10.
本文在不同退火温度和时间下对KDP晶体进行退火实验,并对其光学质量进行了测试和分析.实验表明:合适的退火条件可以增加晶体的透过率、提高光学均匀性、减少散射颗粒,其中160℃为KDP晶体最佳退火温度.在相同的退火温度下,延长退火时间能够更好地提高晶体的光学均匀性和结构完整性.在160℃下退火48h能够使晶体的光损伤阈值提高28;,退火240h能够提高40;以上.  相似文献   

11.
本文采用坩埚下降法,在真空密封的石英坩埚中成功生长出CsI-LiCl与CsI-LiCl:Na共晶闪烁体。通过扫描电子显微镜(SEM)观察晶体微结构表明该共晶中LiCl相与CsI相存在周期性的层状排列,CsI相的厚度在5 μm左右。共晶样品的X射线激发发射谱显示在CsI-LiCl和CsI-LiCl:Na共晶样品存在缺陷发光,在CsI-LiCl样品中还观察到了纯CsI的自陷激子(STE)发光。CsI-LiCl样品在α粒子激发下的多道能谱中观察到明显的全能峰,这一结果证明CsI-LiCl共晶可用于热中子探测的潜力。  相似文献   

12.
以聚丙烯腈(PAN)为载体,六水合硝酸铈[Ce(NO3)3·6H2O]为原料,采用静电纺丝法制备了Ce(NO3)3/PAN纤维,在空气中热处理得到CeO2微纳米纤维,通过XRD、BET和SEM对CeO2微纳米纤维进行表征。采用静态吸附实验探讨了CeO2微纳米纤维去除水溶液中氟离子的性能,考察了溶液pH值、初始氟离子浓度及共存阴离子等对吸附性能的影响。结果表明,pH=3时,CeO2微纳米纤维对F-的吸附性能最佳,CeO2吸附量随着F-浓度的增大呈上升趋势。CeO2微纳米纤维对F-的吸附等温线遵循Langmuir模型,二级动力学模型能很好地描述CeO2微纳米纤维对F-的吸附过程。CeO2微纳米纤维的除氟性能优良,可为其实际应用提供理论参考。  相似文献   

13.
Sideroxol (1), a kaurane diterpene which has the ent-7α,18-dihydroxy-15β,16β-epoxykaurane structure (MW = 320.47, C20H32O3) was obtained from the acetone extract of Sideritis leptoclada plant as well as from some other Sideritis species. It crystallizes in the orthorhombic space group P21, 21, 21 with a = 10.967(3), b = 24.555(5), c = 6.372(4) Å, Dc = 1.240 g cm−3, Z = 4, and refines to R = 0.065 for 721 independent reflections. The skeleton consists of three fused six-membered rings and a five-membered ring with fused epoxide. The six membered rings exhibited slightly distorted chair conformation. In addition to sideroxol, two kaurane and five kaurene diterpenes were isolated from the hexane and acetone extracts of the studied plant.  相似文献   

14.
Two new isostructural open‐framework zeotype transition metal borophosphate compounds, (H)0.5M1.25(H2O)1.5[BP2O8]·H2O (M = Co(II) and Mn(II)) were synthesized by mild hydrothermal method. The structure of compounds were characterized by single‐crystal X‐ray diffraction which have ordered, alternating, vertex‐sharing BO4, PO4, and (MO4)OM(H2O)2 groups with hexagonal, P 61 2 2 (No 178) space group and unit cell parameters for Co a = 9.4960(6) Å, c = 15.6230(13) Å, for Mn a = 9.6547(12) Å, c = 15.791(3) Å, Z = 1 for both of them. TGA/DTA analysis, IR spectroscopy were used for characterization. Magnetic susceptibility measurements for both of the compound indicate strong antiferromagnetic interaction between metal centers. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)  相似文献   

15.
We have studied the optical, structural and surface morphology of doped and undoped GaN thin films. The p- and n-type thin films have been successfully prepared by low-pressure MOCVD technique by doping with Mg and Si, respectively. The different carrier concentrations were obtained in the GaN thin films by varying dopant concentrations. Photoluminescence (PL) studies were carried to find the defect levels in the doped and undoped GaN thin films at low temperature. In the undoped GaN thin films, a low intensity and broad yellow band peak was observed. The donor–acceptor pair (DAP) emission and its phonon replicas were observed in both the Si or Mg lightly doped GaN thin films. The dominance of the blue and the yellow emissions increased in the PL spectra, as the carrier concentration was increased. The XRD and SEM analyses were employed to study the structural and surface morphology of the films, respectively. Both the doped and the undoped films exhibited hexagonal structure and polycrystalline nature. Mg-doped GaN thin films showed columnar structure whereas Si-doped films exhibited spherical shape grains.  相似文献   

16.
The solubility of Ag2O was measured for the Na2O–B2O3 and Na2O–B2O3–Al2O3 system with the rotating crucible method and static method, respectively, under air atmosphere at temperatures ranging from 1273 to 1423 K. The contamination of melts from crucibles could be avoided by the rotating crucible method, with which it became possible to measure the solubility of Ag2O for the Na2O–B2O3 system above the melting point of Ag for the first time. It was found that the addition of Na2O decreases the solubility of Ag2O while the addition of Al2O3 had little effect on the solubility. The effect of Na2O and Al2O3 on the solubility of Ag2O is expressed by interaction coefficients and is analyzed in terms of the basicity of melts. The solubility of Ag2O in Na2O–B2O3–Al2O3 melts increased with increased temperature. This phenomena was explained by a small enthalpy change in oxidation of silver.  相似文献   

17.
H. Doweidar 《Journal of Non》2011,357(7):1665-1670
Data of density, refractive index and thermal expansion coefficient for B2O3-SiO2 and GeO2-SiO2 glasses have been analyzed. The volumes of the structural units are the same found for the vitreous B2O3, GeO2 and SiO2. The volume of any structural unit is constant over the entire composition region of the glass system. The same has been found for the differential refraction and unit refraction of the structural units in these glasses. Different features are observed for the differential expansion of the structural units. There is a considerable change with composition in the differential expansion of BO3, GeO4 and SiO4 units. The effect is attributed to a change in the asymmetry of vibrations with the number of Si-O-B or Si-O-Ge linkages in the matrix. The thermal expansion coefficient is mainly determined by the contribution of B2O3 or GeO2 in the concerned glasses.  相似文献   

18.
The X-ray crystal structure of 1,6-bis(N-cyano-p-methoxy-anilino)-2,4-hexadiyne, C22H18N4O2, is determined. The crystal packing is dominated by phenyl stacking interactions. Weak C–H···N hydrogen bonds help align the molecules. C–H··· hydrogen bonding is not apparent.  相似文献   

19.
Cd1 − xFexTe single crystals were prepared by vapour phase growth method in the composition range of 0 ≤ x ≤ 0.03. Chemical analysis, surface morphology, structural investigations and electrical properties were carried out by EDAX, SEM, XRD, TEM and transport technique, respectively. Microscopic variations between the target and actual compositions were noticed. Morphology studies revealed that dislocation aided growth is active in the present crystals. TEM and XRD studies confirmed that the samples of all compositions crystallized in zinc blende structure, and the lattice parameters varied almost linearly decreases with Fe content. At room temperature, the resistivity of the Cd1 − xFexTe crystals of all compositions (x = 0.01, 0.015, 0.02, 0.025 and 0.03) lies in the range of 3.5-6.5 M Ω, the activation energies lie in the range of 63-133 meV, and the samples were show the ‘p’ type conductivity.  相似文献   

20.
本文基于密度泛函理论的平面波超软赝势方法,采用第一性原理研究了含Cd空位缺陷CdS和含S空位缺陷纤锌矿CdS的几何结构、能带结构、电子态密度及光学性质。通过计算分析可知,含Cd空位缺陷的CdS体系均为p型半导体,含S空位缺陷的CdS体系跃迁方式均由直接跃迁变为间接跃迁。Cd、S空位缺陷的CdS体系的态密度总能量降低。空位CdS体系相较于本征CdS体系的静介电常数均有提高,并随着空位浓度的增大而增大,Cd空位缺陷体系更为明显,极化能力得到显著提升。空位Cd的CdS体系相较于本征CdS体系在红外波段存在明显的吸收,空位S的CdS体系相较于本征CdS体系在可见光波段存在明显的吸收。  相似文献   

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