静电激励MEMS微结构吸合电压尺寸效应研究

基于应变梯度弹性理论,研究了静电激励MEMS微结构吸合电压的尺寸效应。利用最小势能原理分别推导出含尺寸效应的一维梁模型和二维板模型的高阶控制方程。采用广义微分求积法和拟弧长算法对控制方程进行了数值求解。结果表明,随着结构尺寸的降低,新模型所预测的归一化的吸合电压呈非线性增长,表现出尺寸效应(特别是当结构尺寸与内禀常数在同一数量级时尺寸效应更加强烈);而相应的经典理论模型并不能预测此尺寸效应。两种新模型可视为相应经典理论的推广。本文有助于研究MEMS微结构的特性并对微结构的设计有潜在的应用价值。     

MEMS系统中微平板结构声振耦合性能研究

微机电系统(micro-electro-mechanical system,MEMS) 是指内部微结构尺寸在微米甚至纳米量级的微电子机械装置,是一个独立的智能系统. 长宽厚均处于微米量级的微平板为MEMS 中的典型结构,其声学和力学特性直接影响MEMS 的性能. 针对同时受声压激励和气膜力(通过考虑相同尺寸微平板振动引入) 作用的四边简支微平板结构,应用Cosserat 理论和Hamilton 原理,建立了考虑微尺度效应(本征长度和Knudsen 数)影响的声振耦合理论模型,并通过多重Fourier 展开法求解了耦合方程,得到了系统的传声损失结果. 通过频域分析,考虑微平板的不同振动频率、振动幅度和板间距,系统研究了不同尺度效应下微结构中气体薄膜所产生的阻尼力对微平板结构传声特性的影响. 研究发现尺度效应对于微结构的声振特性影响巨大,振动行为对微结构的传声特性也有很大影响,控制并减小微平板的振动幅度以及增大微平板的间距都能够提高微平板的声振性能. 研究结果为MEMS 中微平板的稳定性优化设计提供了理论参考.      

泡沫铝填充金属薄壁圆管的实验和理论研究

利用实验研究与理论分析相结合的方法研究了泡沫铝填充金属薄壁圆管在准静态侧向压缩下的力学响应.基于能量法,建立了泡沫铝填充圆管和金属薄壁圆管在侧向均匀压缩时的瞬时侧向力、平均侧向力和总吸能的理论公式.对泡沫铝填充管与金属薄壁圆管进行了准静态侧向压缩实验,并且将实验结果与理论公式进行了对比,结果表明理论预测值与实验结果吻合较好.基于建立的理论分析模型,研究了管的几何尺寸以及泡沫铝材料的密度对结构的瞬时侧向力、平均侧向力、总吸能和比吸能的影响.结果表明,在准静态侧向压缩下,泡沫铝填充管的总吸能大于对应的金属薄壁圆管;泡沫铝填充管的侧向压缩力和总吸能随管长度、壁厚和直径的增加而增大;当填充材料泡沫铝密度增大时,填充管的总吸能与侧向压缩力均增加.     

扩张道路收费站的元胞自动机模型

基于可变安全间距敏感驾驶模型对道路收费站系统进行了模拟研究. 与采用NS模型的收费站系统进行了比较, 发现在慢化概率较大时(p=0.5), 该模型不仅使道路的通行能力得到完全恢复, 还使其得到一定程度的提高; 当道路扩张区域长度L_{\rm B} \ge7时, 通行能力得到很好的恢复; 当L_{\rm B}<7时, 随着L_{\rm B}的减少, 通行能力也随之降低.      

含机械调频式动力吸振器的准零刚度隔振系统隔振性能分析

基于动力吸振器原理,在单自由度准零刚度隔振器基础上耦合可调频动力吸振器构成两自由度隔振系统。首先,对动力吸振器工作原理进行理论分析并提出其力学模型;其次,通过静力学分析,推导出系统满足零刚度条件时,各参数间的关系并分析其对系统刚度特性的影响;然后,建立两自由度隔振系统非线性动力学方程,利用谐波平衡法进行幅频响应解析分析,得到力传递率表达式;最后,数值分析动力吸振器阻尼、刚度、质量、激励力幅值和弹簧片有效长度对力传递率的影响规律,并与单自由度准零刚度隔振系统及两自由度线性隔振系统对比分析。结果表明：通过选择适当的动力吸振器参数不仅可以减小系统的起始隔振频率,增宽隔振频带,且还能加快系统力传递率在特定频段内的衰减速率,改善系统的低频隔振性能,实现激励频率的可适应性。     

城市快速路交通流速密关系模型优化研究

从实测得到的210920中国城市快速路“车速-车头间距”数据中, 选取包含26773条数据的3个样本作为不同类型交通流的代表, 对多个交通流“速-密关系”模型 进行参数优化和拟合优度比较研究, 给出优化模型参数的定性和定量规律. 修正形式的 Kerner-Konhauser平衡函数和Payne平衡函数通过参数优化, 分别在畅通和拥挤条件下具有 优度相对最高的拟合结果, Greenshields模型(等价地, m=3时的一维管流模型)则对介于 两种条件之间的实测数据具有优度相对最高的拟合结果.     

泡沫铝填充金属薄壁圆管侧向压缩的实验和理论

利用实验研究与理论分析相结合方法研究了泡沫铝填充金属薄壁圆管在准静态侧向压缩下的力学响应。基于能量法,建立了泡沫铝填充圆管和金属薄壁圆管在侧向均匀压缩时的瞬时侧向力、平均侧向力和总吸能的理论公式。对泡沫铝填充管与金属薄壁圆管进行了准静态侧向压缩实验,并且将实验结果与理论公式进行了对比,结果表明理论预测值与实验结果吻合较好。基于建立的理论分析模型,研究了管的几何尺寸以及泡沫铝材料的密度对结构的瞬时侧向力、平均侧向力、总吸能和比吸能的影响。结果表明,在准静态侧向压缩下,泡沫铝填充管的总吸能大于对应的金属薄壁圆管;泡沫铝填充管的侧向压缩力和总吸能随管长度、壁厚和直径的增加而增大;当填充材料泡沫铝密度增大时,填充管的总吸能与侧向压缩力均增加。     

考虑表面效应时正三角形孔边裂纹反平面剪切问题的断裂力学分析

基于表面弹性理论和保角映射,研究了远场反平面剪切载荷作用下考虑表面效应时正三角形孔边裂纹问题的断裂性能。给出了孔边应力场解答,获得了裂纹尖端应力强度因子解析解答。数值算例讨论了应力强度因子随三角形孔尺寸、裂纹长度和表面性能的变化规律。结果表明：当三角形孔尺寸在在纳米量级时,无量纲应力强度因子受孔隙尺寸影响显著;随着三角形孔尺寸的增大,本文结果趋近于经典断裂理论解答;无量纲应力强度因子随裂纹长度的增加,数值先增大而后减小;裂纹相对长度较小时,表面效应影响较弱;应力强度因子的尺寸效应受表面性能影响显著。     

考虑表面弹性效应时正三角形孔边裂纹反平面剪切问题的断裂力学分析

基于表面弹性理论和保角映射技术,研究了远场作用反平面剪切载荷作用下考虑表面弹性效应时正三角形孔边裂纹问题的断裂性能.给出了孔边应力场的精确解,获得了裂纹尖端应力强度因子的解析解答.数值算例中讨论了裂尖应力强度因子随三角形孔尺寸、裂纹长度和表面性能的变化规律.结果表明:当三角形孔的尺寸在纳米量级时,无量纲应力强度因子具有显著的尺寸效应;随着三角形孔尺寸的增大,论文结果趋近于经典断裂理论解答;无量纲应力强度因子随孔边裂纹长度的增加,先增大而后减小;当孔边裂纹长度较小时,表面效应影响较弱;应力强度因子的尺寸效应受表面性能影响显著.     

ON THE REAL DISPLACEMENT AND THE VIRTUAL DISPLACEMENT——AN IN-DEPTH DISCUSSION STARTING FROM THE CONCEPT OF NULL-WORK CONSTRAINT

阐述了分析力学中“理想约束”与理论力学动能定理部分“理想约束”概念的区别,举例说明了由此同名可能导致的问题,并建议在动能定理部分使用“无功约束”或“零功约束”的概念,以保持力学概念的一致性和独立性;对微分形式的动能定理在广义坐标空间进行变换得到了以广义坐标微分为指标的和式形式,并通过与Lagrange 方程的比较及实例论证了不能由此而得到系统动力学方程的原因。上述内容均从不同侧面反映了实位移与虚位移的本质区别,因此可作为对实位移与虚位移概念进行深刻理解的一种途径。     

Dynamic stability of electrostatic torsional actuators with van der Waals effect

The influence of van der Waals (vdW) force on the stability of electrostatic torsional nano-electro-mechanical systems (NEMS) actuators is analyzed in the paper. The dependence of the critical tilting angle and voltage is investigated on the sizes of structure with the consideration of vdW effects. The pull-in phenomenon without the electrostatic torque is studied, and a critical pull-in gap is derived. A dimensionless equation of motion is presented, and the qualitative analysis of it shows that the equilibrium points of the corresponding autonomous system include center points, stable focus points, and unstable saddle points. The Hopf bifurcation points and fork bifurcation points also exist in the system. The phase portraits connecting these equilibrium points exhibit periodic orbits, heteroclinic orbits, as well as homoclinic orbits.     

Non-linear dynamic instability of a double-sided nano-bridge considering centrifugal force and rarefied gas flow

Double-sided electromechanical nano-bridges can potentially be used as angular speed sensors and accelerometers in rotary systems such as turbine blades and vacuum pumps. In such applications, the influences of the centrifugal force and rarefied flow should be considered in the analysis. In the present study, the non-linear dynamic pull-in instability of a double-sided nano-bridge is investigated incorporating the effects of angular velocity and rarefied gas damping. The non-linear governing equation of the nanostructure is derived using Euler-beam model and Hamilton׳s principle including the dispersion forces. The strain gradient elasticity theory is used for modeling the size-dependent behavior of the system. The reduced order method is also implemented to discretize and solve the partial differential equation of motion. The influences of damping, centrifugal force, length scale parameters, van der Waals force and Casimir attraction on the dynamic pull-in voltage are studied. It is found that the dispersion and centrifugal forces decrease the pull-in voltage of a nano-bridge. Dynamic response of the nano-bridge is investigated by plotting time history and phase portrait of the system. The validity of the proposed method is confirmed by comparing the results from the present study with the experimental and numerical results reported in the literature.     

Dynamic behavior analysis of cantilever-type nano-mechanical electrostatic actuator

An investigation is performed into the nonlinear pull-in behavior of a cantilever-type nano-mechanical electrostatic actuator. In performing the analysis, the actuator is modeled as an Euler–Bernoulli beam and the influence of surface effects, the fringing field effect and the Casimir force effect are taken into explicit account. In general, analyzing the dynamic behavior of nanoscale electrostatic devices is challenging due to the nonlinear coupling of the electrostatic force and Casimir force. In the present study, this problem is resolved by using a hybrid computational scheme comprising the differential transformation method and the finite difference approximation technique. The feasibility of the proposed approach is demonstrated by the two cantilever-type micro-beams when actuated by a DC voltage. The numerical results show that the present results for the pull-in voltage deviate by no more than 1.47% from those presented in the literature using a different scheme. In addition, it is shown that surface effects play a significant role in determining the static deflection and pull-in voltage of the cantilever beam nano-beam. In general, the results confirm that the hybrid differential transformation/finite difference approximation method provides an accurate and computationally efficient means of simulating the nonlinear electrostatic behavior of nanostructure systems.     

Rippling effect on the structural response of electrostatically actuated single-walled carbon nanotube based NEMS actuators

Several nonlinear phenomena have shown to have significant effect on the electromechanical performance of single-walled carbon nanotube (SWCNT) based nanoelectromechanical (NEMS) devices. To name few: the van der Waals forces, the Casimir forces, the tip charge concentration and the rippling phenomenon. Some of these effects have been take care of in previous investigation; however, some have been disregarded in the mechanical models suggested for simulation of the SWCNT based structures. In this paper, the influence of rippling deformation on the vibration characteristics of SWCNT based actuators is investigated using a nonlinear Euler-Bernoulli beam theory that incorporates the effect of rippling deformation using an improved function including some correcting terms for the SWCNT curvature (rippling deformation). The influence of the Casimir and the van der Waals attraction forces are considered in the proposed model as well as the size-dependent behavior assuming the so-called Eringen nonlocal elasticity theory. The dynamic response of CNT is investigated based on time history and phase portrait plots of the CNT based nano-actuator. It is shown that the rippling deformation can significantly decrease the static as well as the dynamic pull-in voltage of the SWCNT based actuator. The rippling deformation of SWCNT decreases the dynamic pull-in time as well. Effect of various factors such as the DC actuation load and the Casimir attractive forces on the dynamic stability and the pull-in characteristics of the nano-actuator are examined. Results of the present study are beneficial to accurate design and fabrication of electromechanical CNT based actuators. Comparison between the obtained results and those reported in the literature by experiments and molecular dynamics, verifies the integrity of the present numerical analysis.     

Pull-in instability analyses for NEMS actuators with quartic shape approximation

The pull-in instability of a cantilever nano-actuator model incorporating the effects of the surface, the fringing field, and the Casimir attraction force is investigated. A new quartic polynomial is proposed as the shape function of the beam during the deflection, satisfying all of the four boundary values. The Gaussian quadrature rule is used to treat the involved integrations, and the design parameters are preserved in the evaluated formulas. The analytic expressions are derived for the tip deflection and pull-in parameters of the cantilever beam. The micro-electromechanical system (MEMS) cantilever actuators and freestanding nanoactuators are considered as two special cases. It is proved that the proposed method is convenient for the analyses of the effects of the surface, the Casimir force, and the fringing field on the pull-in parameters.     

Closed-form solutions of the pull-in instability in nano-cantilevers under electrostatic and intermolecular surface forces

In this paper, a distributed parameter model is used to study the pull-in instability of cantilever type nanomechanical switches subjected to intermolecular and electrostatic forces. In modeling of the electrostatic force, the fringing field effect is taken into account. The model is nonlinear due to the inherent nonlinearity of the intermolecular and electrostatic forces. The nonlinear differential equation of the model is transformed into the integral form by using the Green’s function of the cantilever beam. Closed-form solutions are obtained by assuming an appropriate shape function for the beam deflection to evaluate the integrals. The pull-in parameters of the switch are computed under the combined effects of electrostatic and intermolecular forces. Electrostatic microactuators and freestanding nanoactuators are considered as special cases of our study. The detachment length and the minimum initial gap of freestanding nano-cantilevers, which are the basic design parameters for NEMS switches, are determined. The results of the distributed parameter model are compared with the lumped parameter model.     

Investigation of size-dependent quasistatic response of electrically actuated nonlinear viscoelastic microcantilevers and microbridges

This study investigates the size-dependent quasistatic response of a nonlinear viscoelastic microelectromechanical system (MEMS) under an electric actuation. To have this problem in view, the deformable electrode of the MEMS is modelled using cantilever and doubly-clamped viscoelastic microbeams. The modified couple stress theory in conjunction with Bernoulli–Euler beam theory are used for mathematical modeling of the size-dependent instability of microsystems in the framework of linear viscoelastic theory. Simultaneous effect of electrostatic actuation including fringing field, residual stress, mid-plane stretching and Casimir and van der Waals intermolecular forces are considered in the theoretical model. A single element of the standard linear solid element is used to simulate the viscoelastic behavior. Based on the extended Hamilton’s variational principle, the nonlinear governing integro-differential equation and boundary conditions are derived. Thereafter, a new generalized differential-integral quadrature solution for the nonlinear quasistatic response of electrically actuated viscoelastic micro/nanobeams under two different boundary conditions; doubly-clamped microbridge and clamped-free microcantilever. The developed model is verified and a good agreement is obtained. Finally, a comprehensive study is conducted to investigate the effects of various parameters such as material relaxation time, durable modulus, material length scale parameter, Casimir force, van der Waals force, initial gap and beam length on the pull-in response of viscoelastic microbridges and microcantilevers in the framework of viscoelasticity.     

Reduced-order models for microelectromechanical rectangular and circular plates incorporating the Casimir force

We consider the von Kármán nonlinearity and the Casimir force to develop reduced-order models for prestressed clamped rectangular and circular electrostatically actuated microplates. Reduced-order models are derived by taking flexural vibration mode shapes as basis functions for the transverse displacement. The in-plane displacement vector is decomposed as the sum of displacements for irrotational and isochoric waves in a two-dimensional medium. Each of these two displacement vector fields satisfies an eigenvalue problem analogous to that of transverse vibrations of a linear elastic membrane. Basis functions for the transverse and the in-plane displacements are related by using the nonlinear equation governing the plate in-plane motion. The reduced-order model is derived from the equation yielding the transverse deflection of a point. For static deformations of a plate, the pull-in parameters are found by using the displacement iteration pull-in extraction method. Reduced-order models are also used to study linear vibrations about a predeformed configuration. It is found that 9 basis functions for a rectangular plate give a converged solution, while 3 basis functions give pull-in parameters with an error of at most 4%. For a circular plate, 3 basis functions give a converged solution while the pull-in parameters computed with 2 basis functions have an error of at most 3%. The value of the Casimir force at the onset of pull-in instability is used to compute device size that can be safely fabricated.     

Anharmonic 1D actuator model including electrostatic and Casimir forces with fractional damping perturbed by an external force

We modeled a one-dimensional actuator including the Casimir and electrostatic forces perturbed by an external force with fractional damping. The movable electrode was assumed to oscillate by an anharmonic elastic force originated from Murrell–Mottram or Lippincott potential. The nonlinear equations have been solved via the Adomian decomposition method. The behavior of the displacement of the electrode from equilibrium position, its velocity and acceleration were described versus time. Also, the changes of the displacement have been investigated according to the frequency of the external force and the voltage of the electrostatic force. The convergence of the Adomian method and the effect of the orders of expansion on the displacement versus time, frequency, and voltage were discussed. The pull-in parameter was obtained and compared with the other models in the literature. This parameter was described versus the equilibrium position and anharmonicity constant.     

Sensitivity analysis of pull-in voltage for RF MEMS switch based on modified couple stress theory

An approximate analytical model for calculating the pull-in voltage of a stepped cantilever-type radio frequency(RF) micro electro-mechanical system(MEMS) switch is developed based on the Euler-Bernoulli beam and a modified couple stress theory, and is validated by comparison with the finite element results. The sensitivity functions of the pull-in voltage to the designed parameters are derived based on the proposed model. The sensitivity investigation shows that the pull-in voltage sensitivities increase/decrease nonlinearly with the increases in the designed parameters. For the stepped cantilever beam, there exists a nonzero optimal dimensionless length ratio, where the pull-in voltage is insensitive. The optimal value of the dimensionless length ratio only depends on the dimensionless width ratio, and can be obtained by solving a nonlinear equation. The determination of the designed parameters is discussed, and some recommendations are made for the RF MEMS switch optimization.