Anharmonic 1D actuator model including electrostatic and Casimir forces with fractional damping perturbed by an external force

We modeled a one-dimensional actuator including the Casimir and electrostatic forces perturbed by an external force with fractional damping. The movable electrode was assumed to oscillate by an anharmonic elastic force originated from Murrell–Mottram or Lippincott potential. The nonlinear equations have been solved via the Adomian decomposition method. The behavior of the displacement of the electrode from equilibrium position, its velocity and acceleration were described versus time. Also, the changes of the displacement have been investigated according to the frequency of the external force and the voltage of the electrostatic force. The convergence of the Adomian method and the effect of the orders of expansion on the displacement versus time, frequency, and voltage were discussed. The pull-in parameter was obtained and compared with the other models in the literature. This parameter was described versus the equilibrium position and anharmonicity constant.     

Analysis of nonlinear dynamic behavior of electrically actuated micro-beam with piezoelectric layers and squeeze-film damping effect

An analytical model based on a nonlinear deflection equation and the Reynolds equation is proposed to describe the dynamic behavior of an electrically actuated micro-beam with two piezoelectric layers. The proposed model takes explicit account of the fringing field effect, the axial stress effect, the residual stress effect, and the squeeze-film damping effect between the micro-beam and the lower electrode. The nonlinear governing equation of the micro-beam is solved using a hybrid computational scheme comprising the differential transformation method and the finite difference method. The validity of the analytical model and numerical solution procedure is demonstrated by comparing the result obtained for the pull-in voltage of a micro-beam actuated by a DC voltage only with that presented in the literature. It is shown that the nonlinear dynamic response of the micro-beam can be controlled using a combined driving scheme consisting of both the magnitude and the frequency of the AC actuating voltage and a DC driving voltage. The effects of the AC/DC actuating conditions, micro-beam geometry parameters, and squeeze-film damping force on the center-point displacement of the micro-beam are systematically examined. In addition, the actuating conditions which ensure the stability of the micro-beam are identified by means of phase portraits and Poincaré maps. In general, the results show that the analytical model and hybrid numerical scheme provide a feasible means of analyzing the dynamic response of a variety of electrostatically-actuated microstructures.     

考虑卡西米尔力的静电激励NEMS吸合特性及其尺寸效应研究

基于应变梯度理论和哈密顿原理,并考虑卡西米尔力的影响,建立了静电激励纳米机电系统(NEMS)的尺寸效应模型,并得到模型的控制方程和边界条件。然后,引入广义微分求积法和拟弧长算法,得到模型的数值解。结果表明,当考虑卡西米尔力的影响时,系统两极的吸合电压有所减小。并且,当系统尺寸达到一个临界值时(即两电极间距小于“最小间距”,或可变形电极长度超过“拉起长度”),系统会在没有外加电压的作用下自动发生吸合,这将为NEMS的优化设计和定量分析提供理论基础。     

Sensitivity analysis of pull-in voltage for RF MEMS switch based on modified couple stress theory

An approximate analytical model for calculating the pull-in voltage of a stepped cantilever-type radio frequency(RF) micro electro-mechanical system(MEMS) switch is developed based on the Euler-Bernoulli beam and a modified couple stress theory, and is validated by comparison with the finite element results. The sensitivity functions of the pull-in voltage to the designed parameters are derived based on the proposed model. The sensitivity investigation shows that the pull-in voltage sensitivities increase/decrease nonlinearly with the increases in the designed parameters. For the stepped cantilever beam, there exists a nonzero optimal dimensionless length ratio, where the pull-in voltage is insensitive. The optimal value of the dimensionless length ratio only depends on the dimensionless width ratio, and can be obtained by solving a nonlinear equation. The determination of the designed parameters is discussed, and some recommendations are made for the RF MEMS switch optimization.     

Upper and lower bounds for the pull-in parameters of a micro- or nanocantilever on a flexible support

An analytical method is proposed to accurately estimate the pull-in parameters of a micro- or nanocantilever beam elastically constrained by a rotational spring at one end. The system is actuated by electrostatic force and subject to Casimir or van der Waals forces according to the beam size. The deflection of the beam is described by a fourth-order nonlinear boundary value problem, or equivalently in terms of a nonlinear integral equation. New a priori analytical estimates on the solution from both sides are first derived and then lower and upper bounds for the pull-in parameters are obtained, with no need of solving the nonlinear boundary value problem. The lower and upper bounds turn out to be very close each other and in excellent agreement with the numerical results provided by the shooting method. The approach also provides accurate predictions for the pull-in parameters of a freestanding nanoactuator.     

Rippling effect on the structural response of electrostatically actuated single-walled carbon nanotube based NEMS actuators

Several nonlinear phenomena have shown to have significant effect on the electromechanical performance of single-walled carbon nanotube (SWCNT) based nanoelectromechanical (NEMS) devices. To name few: the van der Waals forces, the Casimir forces, the tip charge concentration and the rippling phenomenon. Some of these effects have been take care of in previous investigation; however, some have been disregarded in the mechanical models suggested for simulation of the SWCNT based structures. In this paper, the influence of rippling deformation on the vibration characteristics of SWCNT based actuators is investigated using a nonlinear Euler-Bernoulli beam theory that incorporates the effect of rippling deformation using an improved function including some correcting terms for the SWCNT curvature (rippling deformation). The influence of the Casimir and the van der Waals attraction forces are considered in the proposed model as well as the size-dependent behavior assuming the so-called Eringen nonlocal elasticity theory. The dynamic response of CNT is investigated based on time history and phase portrait plots of the CNT based nano-actuator. It is shown that the rippling deformation can significantly decrease the static as well as the dynamic pull-in voltage of the SWCNT based actuator. The rippling deformation of SWCNT decreases the dynamic pull-in time as well. Effect of various factors such as the DC actuation load and the Casimir attractive forces on the dynamic stability and the pull-in characteristics of the nano-actuator are examined. Results of the present study are beneficial to accurate design and fabrication of electromechanical CNT based actuators. Comparison between the obtained results and those reported in the literature by experiments and molecular dynamics, verifies the integrity of the present numerical analysis.     

Analytical modeling of static behavior of electrostatically actuated nano/micromirrors considering van der Waals forces

In this paper,the effect of van der Waals(vdW)force on the pull-in behavior of electrostatically actuatednano/micromirrors is investigated.First,the minimum potential energy principle is utilized to find the equation governing the static behavior of nano/micromirror under electrostatic and vdW forces.Then,the stability of static equilibrium points is analyzed using the energy method.It is foundthat when there exist two equilibrium points,the smaller oneis stable and the larger one is unstable.The effects of different design parameters on the mirror’s pull-in angle andpull-in voltage are studied and it is found that vdW forcecan considerably reduce the stability limit of the mirror.Atthe end,the nonlinear equilibrium equation is solved numerically and analytically using homotopy perturbation method(HPM).It is observed that a sixth order perturbation approximation can precisely model the mirror’s behavior.The results of this paper can be used for stable operation design andsafe fabrication of torsional nano/micro actuators.     

Dynamic analysis and design of electrically actuated viscoelastic microbeams considering the scale effect

Viscoelastic phenomena widely exist in MEMS materials, which may have certain effects on quasi-static behaviors and transition mechanism of nonlinear jumping phenomena. The static and dynamic behaviors of a doubly clamped viscoelastic microbeam actuated by one sided electrode are investigated in detail, based on a modified couple stress theory. The governing equation of motion is introduced here, which is essentially nonlinear due to its midplane stretching effect and electrostatic force. Through quasi-static analysis, the equilibrium position, pull-in voltage and pull-in location of the system are obtained with differential quadrature method and finite element method. The equivalent geometric nonlinear parameter is presented to explain the influence of the scale effect on the pull-in location. Different from elastic material, there are two kinds of pull-in voltages called as instantaneous pull-in voltage and the durable pull-in voltage in viscoelastic system. Then, Galerkin discretization and the method of multiple scales are applied to determine the response and stability of the system for small vibration amplitude. A new perturbation method to deal with viscoelastic term is presented. Theoretical expressions about the parameter spaces of linear-like vibration, hardening-type vibration and softening-type vibration are then deduced. The influence of viscoelasticity and scale effect on nonlinear dynamic behavior is studied. Results show that the viscoelasticity can reduce the effective elastic modulus and make the system tend to softening-type vibration; the scale effect can increase effective elastic modulus and make the system tend to hardening-type vibration. And most of all, simulation results of case studies are used to realize parameter optimization. Then parameter conditions of linear-like vibration, which is desired for many applications, are obtained. In this paper, the results of multi-physical field coupling simulation are used to verify the theoretical analysis.     

Investigation of size-dependent quasistatic response of electrically actuated nonlinear viscoelastic microcantilevers and microbridges

This study investigates the size-dependent quasistatic response of a nonlinear viscoelastic microelectromechanical system (MEMS) under an electric actuation. To have this problem in view, the deformable electrode of the MEMS is modelled using cantilever and doubly-clamped viscoelastic microbeams. The modified couple stress theory in conjunction with Bernoulli–Euler beam theory are used for mathematical modeling of the size-dependent instability of microsystems in the framework of linear viscoelastic theory. Simultaneous effect of electrostatic actuation including fringing field, residual stress, mid-plane stretching and Casimir and van der Waals intermolecular forces are considered in the theoretical model. A single element of the standard linear solid element is used to simulate the viscoelastic behavior. Based on the extended Hamilton’s variational principle, the nonlinear governing integro-differential equation and boundary conditions are derived. Thereafter, a new generalized differential-integral quadrature solution for the nonlinear quasistatic response of electrically actuated viscoelastic micro/nanobeams under two different boundary conditions; doubly-clamped microbridge and clamped-free microcantilever. The developed model is verified and a good agreement is obtained. Finally, a comprehensive study is conducted to investigate the effects of various parameters such as material relaxation time, durable modulus, material length scale parameter, Casimir force, van der Waals force, initial gap and beam length on the pull-in response of viscoelastic microbridges and microcantilevers in the framework of viscoelasticity.     

Effect of geometric nonlinearity on dynamic pull-in behavior of coupled-domain microstructures based on classical and shear deformation plate theories

This paper investigates the dynamic pull-in behavior of microplates actuated by a suddenly applied electrostatic force. Electrostatic, elastic and fluid domains are involved in modeling. First-order shear deformation plate theory and classical plate theory are used to model the geometrically nonlinear microplates. The equations of motion are descritized by the finite element method. The effects of nonlinearity, fluid pressure, initial stress and different geometric parameters on dynamic behavior are examined. In addition, the influences of initial stress and actuation voltage on oscillatory behavior of microplates are evaluated.     

Non-linear dynamic instability of a double-sided nano-bridge considering centrifugal force and rarefied gas flow

Double-sided electromechanical nano-bridges can potentially be used as angular speed sensors and accelerometers in rotary systems such as turbine blades and vacuum pumps. In such applications, the influences of the centrifugal force and rarefied flow should be considered in the analysis. In the present study, the non-linear dynamic pull-in instability of a double-sided nano-bridge is investigated incorporating the effects of angular velocity and rarefied gas damping. The non-linear governing equation of the nanostructure is derived using Euler-beam model and Hamilton׳s principle including the dispersion forces. The strain gradient elasticity theory is used for modeling the size-dependent behavior of the system. The reduced order method is also implemented to discretize and solve the partial differential equation of motion. The influences of damping, centrifugal force, length scale parameters, van der Waals force and Casimir attraction on the dynamic pull-in voltage are studied. It is found that the dispersion and centrifugal forces decrease the pull-in voltage of a nano-bridge. Dynamic response of the nano-bridge is investigated by plotting time history and phase portrait of the system. The validity of the proposed method is confirmed by comparing the results from the present study with the experimental and numerical results reported in the literature.     

Design of nonlinear springs for attaining a linear response in gap-closing electrostatic actuators

Gap-closing electrostatic actuators are inherently nonlinear and their dynamic range is often limited by the pull-in instability. To overcome this, we propose a nonlinear spring that counteracts the nonlinear effects of electrostatic attraction. The nonlinear spring is designed to extend the stable range of the actuator and to enforce a linear electromechanical response. We present a method for designing elastic springs with monotonically increasing stiffness. The mechanism we propose is effective shortening of a straight clamed-guided beam flexure, by wrapping it over a cam. We consider two specific cases. The first case assumes the wrapped section of the beam flexure fully conforms to the cam shape. The second case assumes that there is a single contact point between the beam flexure and the cam. To validate the concept we have designed and measured the response of a nonlinear spring with a prescribed force–displacement law. Experimental measurements of a macro-scale spring are in good agreement with the model predictions.     

Closed-form solutions of the pull-in instability in nano-cantilevers under electrostatic and intermolecular surface forces

In this paper, a distributed parameter model is used to study the pull-in instability of cantilever type nanomechanical switches subjected to intermolecular and electrostatic forces. In modeling of the electrostatic force, the fringing field effect is taken into account. The model is nonlinear due to the inherent nonlinearity of the intermolecular and electrostatic forces. The nonlinear differential equation of the model is transformed into the integral form by using the Green’s function of the cantilever beam. Closed-form solutions are obtained by assuming an appropriate shape function for the beam deflection to evaluate the integrals. The pull-in parameters of the switch are computed under the combined effects of electrostatic and intermolecular forces. Electrostatic microactuators and freestanding nanoactuators are considered as special cases of our study. The detachment length and the minimum initial gap of freestanding nano-cantilevers, which are the basic design parameters for NEMS switches, are determined. The results of the distributed parameter model are compared with the lumped parameter model.     

Pull-in instability analyses for NEMS actuators with quartic shape approximation

The pull-in instability of a cantilever nano-actuator model incorporating the effects of the surface, the fringing field, and the Casimir attraction force is investigated. A new quartic polynomial is proposed as the shape function of the beam during the deflection, satisfying all of the four boundary values. The Gaussian quadrature rule is used to treat the involved integrations, and the design parameters are preserved in the evaluated formulas. The analytic expressions are derived for the tip deflection and pull-in parameters of the cantilever beam. The micro-electromechanical system (MEMS) cantilever actuators and freestanding nanoactuators are considered as two special cases. It is proved that the proposed method is convenient for the analyses of the effects of the surface, the Casimir force, and the fringing field on the pull-in parameters.     

Lyapunov exponents as a criterion for the dynamic pull-in instability of electrostatically actuated microstructures

The dynamic pull-in instability of double clamped microscale beams actuated by a suddenly applied distributed electrostatic force and subjected to non-linear squeeze film damping is investigated. A reduced order model is built using the Galerkin decomposition with undamped linear modes as base functions and verified through comparison with numerical finite differences solution. The stability analysis of a beam actuated by one and two electrodes symmetrically located at two sides of the beam and operated by a step-input voltage is performed by evaluating the largest Lyapunov exponent, the sign of which defines the character of the response. It is shown that this approach provides an efficient quantitative criterion for the evaluation of dynamic pull-in instability, especially when combined with compact reduced order models. Based on the Lyapunov exponent criterion, the influence of various parameters on the beam dynamic stability is investigated.     

Size-dependent dynamic pull-in instability of hydrostatically and electrostatically actuated circular microplates

In the present study, the dynamic pull-in instability and free vibration of circular microplates subjected to combined hydrostatic and electrostatic forces are investigated. To take size effects into account, the strain gradient elasticity theory is incorporated into the Kirchhoff plate theory to develop a nonclassical plate model including three internal material length scale parameters. By using Hamilton’s principle, the higher-order governing equation and the corresponding boundary conditions are obtained. Afterward, a generalized differential quadrature (GDQ) method is employed to discritize the governing differential equations along with simply supported and clamped edge supports. To evaluate the pull-in voltage and vibration frequencies of actuated microplates, the hydrostatic-electrostatic actuation is assumed to be calculated by neglecting the fringing field effects and utilizing the parallel plate approximation. Also, a comparison between the pull-in voltages predicted by the strain gradient theory and the degenerated ones is presented. It is revealed that increasing the dimensionless internal length scale parameter or decreasing the applied hydrostatic pressures leads to higher values of the pull-in voltage. Moreover, it is found that the value of pull-in hydrostatic pressure decreases corresponding to higher dimensionless internal length scale parameters and applied voltages.     

Static and dynamic responses of a microcantilever with a T-shaped tip mass to an electrostatic actuation

In this study, nonlinear static and dynamic responses of a microcantilever with a T-shaped tip mass excited by electrostatic actuations are investigated. The electrostatic force is generated by applying an electric voltage between the horizontal part of T-shaped tip mass and an opposite electrode plate. The cantilever microbeam is modeled as an Euler–Bernoulli beam. The T-shaped tip mass is assumed to be a rigid body and the nonlinear effect of electrostatic force is considered. An equation of motion and its associated boundary conditions are derived by the aid of combining the Hamilton principle and Newton's method.An exact solution is obtained for static deflection and mode shape of vibration around the static position. The differential equation of nonlinear vibration around the static position is discretized using the Galerkin method. The system mode shapes are used as its related comparison functions. The discretized equations are solved by the perturbation theory in the neighborhood of primary and subharmonic resonances.In addition, effects of mass inertia, mass moment of inertia as well as rotation of the T-shaped mass, which were ignored in previous works, are considered in the analysis. It is shown that by increasing the length of the horizontal part of the T-shaped mass, the amount of static deflection increases,natural frequency decreases and nonlinear shift of the resonance frequency increases. It is concluded that attaching an electrode plate with a T-shaped configuration to the end of the cantilever microbeam results in a configuration with larger pull-in voltage and smaller nonlinear shift of the reso-nance frequency compared to the configuration in which the electrode plate is directly attached to it.     

Reduced-order models for microelectromechanical rectangular and circular plates incorporating the Casimir force

We consider the von Kármán nonlinearity and the Casimir force to develop reduced-order models for prestressed clamped rectangular and circular electrostatically actuated microplates. Reduced-order models are derived by taking flexural vibration mode shapes as basis functions for the transverse displacement. The in-plane displacement vector is decomposed as the sum of displacements for irrotational and isochoric waves in a two-dimensional medium. Each of these two displacement vector fields satisfies an eigenvalue problem analogous to that of transverse vibrations of a linear elastic membrane. Basis functions for the transverse and the in-plane displacements are related by using the nonlinear equation governing the plate in-plane motion. The reduced-order model is derived from the equation yielding the transverse deflection of a point. For static deformations of a plate, the pull-in parameters are found by using the displacement iteration pull-in extraction method. Reduced-order models are also used to study linear vibrations about a predeformed configuration. It is found that 9 basis functions for a rectangular plate give a converged solution, while 3 basis functions give pull-in parameters with an error of at most 4%. For a circular plate, 3 basis functions give a converged solution while the pull-in parameters computed with 2 basis functions have an error of at most 3%. The value of the Casimir force at the onset of pull-in instability is used to compute device size that can be safely fabricated.     

Pull-in analysis of electrically actuated viscoelastic microbeams based on a modified couple stress theory

A new beam model is developed for the viscoelastic microbeam based on a modified couple stress model which contains only one material length scale parameter. The governing equations of equilibrium together with initial conditions and boundary conditions are obtained by a combination of the basic equations of modified couple stress theory and Hamilton’s principle. This new beam model is then used for an electrically actuated microbeam-based MEMS structure. The dynamic and quasi-static governing equations of an electrically actuated viscoelastic microbeam are firstly given where the axial force created by the midplane stretching effect is also considered. Galerkin method is used to solve above equation and this method is also validated by the finite element method (FEM) when our model is reduced into an elastic case. The numerical results show that the instantaneous pull-in voltage, durable pull-in voltage and pull-in delay time predicted by this newly developed model is larger (longer) than that predicted by the classical beam model. A comparison between the quasi-static model results and the dynamic model results is also given.     

Pull-in voltage analysis of electrostatically actuated MEMS with piezoelectric layers: A size-dependent model

A size-dependent model for electrostatically actuated microbeam-based MEMS (micro-electro-mechanical systems) with piezoelectric layers attached is developed based on a modified couple stress theory. By using Hamilton's principle, the nonlinear differential governing equation and boundary conditions of the MEM structure are derived. In the newly developed model, the residual stresses, fringing-field and axial stress effects are considered for the fixed–fixed microbeam with piezoelectric layers. The results of the present model are compared with those from the classical model. The results show the size effect becomes prominent if the beam dimension is comparable to the material length scale parameter (MLSP). The effects of MLSP, the residual stresses and axial stress on the pull-in voltage are also studied. The study may be helpful to characterize the mechanical and electrostatic properties of small size MEMS, or guide the design of microbeam-based devices for a wide range of potential applications.