MEMS系统中微平板结构声振耦合性能研究

微机电系统(micro-electro-mechanical system,MEMS) 是指内部微结构尺寸在微米甚至纳米量级的微电子机械装置,是一个独立的智能系统. 长宽厚均处于微米量级的微平板为MEMS 中的典型结构,其声学和力学特性直接影响MEMS 的性能. 针对同时受声压激励和气膜力(通过考虑相同尺寸微平板振动引入) 作用的四边简支微平板结构,应用Cosserat 理论和Hamilton 原理,建立了考虑微尺度效应(本征长度和Knudsen 数)影响的声振耦合理论模型,并通过多重Fourier 展开法求解了耦合方程,得到了系统的传声损失结果. 通过频域分析,考虑微平板的不同振动频率、振动幅度和板间距,系统研究了不同尺度效应下微结构中气体薄膜所产生的阻尼力对微平板结构传声特性的影响. 研究发现尺度效应对于微结构的声振特性影响巨大,振动行为对微结构的传声特性也有很大影响,控制并减小微平板的振动幅度以及增大微平板的间距都能够提高微平板的声振性能. 研究结果为MEMS 中微平板的稳定性优化设计提供了理论参考.      

考虑尺度效应的微梁静态弯曲数值分析

基于修正偶应力理论及表面弹性理论,本文提出了一种新的双曲线剪切变形梁模型,用于均匀微尺度梁的静态弯曲分析。该理论可以直接利用本构关系获得横向剪切应力,满足梁顶部和底部的无应力边界条件,避免了引入剪切修正因子。根据广义Young-Laplace方程建立了梁的内部与表面层的应力连续性条件,单一的变量场可以描述梁的位移模式。通过在位移场中考虑表面层厚度以及表面层的应力连续条件,可以使新模型能够更准确地预测微尺寸和表面能相关的尺度效应。通过Hamilton原理推导出了梁的控制方程和边界条件。应变能除了考虑经典弹性理论,还要考虑微结构效应和表面能。Navier-type的解析解适用于简支边界条件,而基于拉格朗日插值的微分求积法(DQEM)可以研究在不同边界条件下的力学响应。把该数值解与Navier方法得出的解析解作了对比,得出:微尺度梁在考虑表面能或微尺寸效应、不同载荷和梁高变化下的响应一致;当不考虑微结构相关性和表面能效应时,该模型退化为经典的欧拉梁模型。     

考虑卡西米尔力的静电激励NEMS吸合特性及其尺寸效应研究

基于应变梯度理论和哈密顿原理,并考虑卡西米尔力的影响,建立了静电激励纳米机电系统(NEMS)的尺寸效应模型,并得到模型的控制方程和边界条件。然后,引入广义微分求积法和拟弧长算法,得到模型的数值解。结果表明,当考虑卡西米尔力的影响时,系统两极的吸合电压有所减小。并且,当系统尺寸达到一个临界值时(即两电极间距小于“最小间距”,或可变形电极长度超过“拉起长度”),系统会在没有外加电压的作用下自动发生吸合,这将为NEMS的优化设计和定量分析提供理论基础。     

尺度依赖的静电驱动各向异性微板的Pull-in效应

在新修正偶应力理论的基础上建立了一种可用于分析静电驱动各向异性微板的尺度依赖模型。模型中包含有两个材料尺度参数,在考虑材料宏观各向异性的同时也考虑了微观各向异性程度对结构Pull-in特性的影响。通过虚功原理推导了静电驱动微板的非线性控制方程并显式地给出了Pull-in电压和挠度的表达式。算例结果表明:本文模型所预测的Pull-in电压和挠度分别大于和小于经典宏观板理论的预测结果,即反映了微尺度结构下的尺度效应。尺度效应的影响在板厚度与材料尺度参数接近时逐渐增加,而随着两者比值的增加,该影响逐渐减弱,最终可以忽略不计。此外,本文也讨论了初始间隙d对Pull-in电压以及尺度效应的影响。结果表明随着d的增加,Pull-in电压随之增大,而Pull-in挠度变化不大。     

考虑尺度影响的平面正交各向异性功能梯度微梁的屈曲分析

基于新修正偶应力理论,建立了能描述尺度效应的各向异性功能梯度微梁的屈曲分析模型。基于最小势能原理推导了控制方程及边界条件,并以简支梁为例分析了屈曲载荷及尺度效应受材料尺度参数和几何尺寸的影响。算例结果表明,在材料几何尺寸较小时,本文模型预测到的屈曲载荷明显大于传统理论的结果,有效地反映了尺度效应。几何尺寸较大时,尺度效应消失,本文模型将自动退化为传统宏观模型。模型反映出不同方向上的尺度参数对各向异性材料影响的效果不同。     

考虑尺度影响的平面正交各向异性功能梯度微梁的屈曲分析

基于新修正偶应力理论，建立了能描述尺度效应的各向异性功能梯度微梁的屈曲分析模型。基于最小势能原理推导了控制方程及边界条件，并以简支梁为例分析了屈曲载荷及尺度效应受材料尺度参数和几何尺寸的影响。算例结果表明，在材料几何尺寸较小时，本文模型预测到的屈曲载荷明显大于传统理论的结果，有效地反映了尺度效应。几何尺寸较大时，尺度效应消失，本文模型将自动退化为传统宏观模型。模型反映出不同方向上的尺度参数对各向异性材料影响的效果不同。     

一种微构件拉伸测试系统及测试结构设计

微机电系统(Micro-Electro-Mechanical Systems,MEMS)的力学性能是研究MEMS可靠性的一个重要部分。目前,微结构片外拉伸测试的难点在于如何在实现较高精度的夹持和测试的同时能够较好地控制成本,这是本文着重解决的问题。首先,针对单晶硅各向异性湿法体硅工艺的特点,设计了一种新颖而经济的试样结构,利用力学分析确定其结构尺寸,通过有限元分析验证其合理性;其次,设计了一种简单经济的微结构片外拉伸测试系统;最后,加工出样本并进行准静载拉伸强度测试。结果表明:微梁尺寸增大,拉伸强度降低,同时验证了本装置在微结构拉伸准静载测试中的适用性。     

基于修正偶应力和高阶剪切变形理论的变截面微梁的自由振动

基于修正偶应力和高阶剪切理论建立了仅含有一个尺度参数的Reddy变截面微梁的自由振动模型,研究了变截面微梁自由振动问题的尺度效应和横向剪切变形对自振频率计算的影响。基于哈密顿原理推导了动力学方程与边界条件,并采用微分求积法求解了各种边界条件下的自振频率。算例结果表明,基于偶应力理论预测的变截面微梁的自振频率均大于经典梁理论的预测结果,即捕捉到了尺度效应。另外,梁的几何尺寸与尺度参数越接近,尺度效应就越明显,而梁的长细比越小,横向剪切变形对自振频率的影响就越明显。     

基于尺寸效应的FG-SMA微梁非线性自由振动特性研究

形状记忆合金具有相变温度低、输出应力高、能耗小、驱动电压低、可恢复应变大、生物相容性好等特性。随着形状记忆合金制备技术的进一步发展,有学者提出将功能梯度形状记忆合金材料用于微机电系统等智能微结构,将使其具有更优良的特性。因此开展机电多场耦合功能梯度形状记忆合金微结构的非线性自由振动特性研究具有重要研究价值。本文基于冯卡门几何非线性理论,综合考虑静电力和分子间作用力的影响,考虑尺寸效应,基于修正偶应力理论,建立两端固定的功能梯度形状记忆合金微梁模型,对功能梯度形状记忆合金微梁相变前后的机电耦合非线性自由振动问题进行深入研究,分析了尺寸效应参数、几何结构参数和相变参数等对功能梯度形状记忆合金微梁自由振动特性的影响。     

小尺度对振动简支单层碳纳米管边界条件的影响

以非局部弹性理论为基础,考虑了碳纳米管的小尺度效应,采用欧拉-伯努利梁模型给出了单层碳纳米管的动力学控制方程.研究了小尺度效应对振动简支单层碳纳米管边界条件的影响,并通过具体算例与经典连续介质理论的简支边界条件进行比较.结果表明:简支条件下考虑小尺度效应的非局部弹性理论和经典连续介质理论的边界条件具有同一性.     

Pull-in voltage analysis of electrostatically actuated MEMS with piezoelectric layers: A size-dependent model

A size-dependent model for electrostatically actuated microbeam-based MEMS (micro-electro-mechanical systems) with piezoelectric layers attached is developed based on a modified couple stress theory. By using Hamilton's principle, the nonlinear differential governing equation and boundary conditions of the MEM structure are derived. In the newly developed model, the residual stresses, fringing-field and axial stress effects are considered for the fixed–fixed microbeam with piezoelectric layers. The results of the present model are compared with those from the classical model. The results show the size effect becomes prominent if the beam dimension is comparable to the material length scale parameter (MLSP). The effects of MLSP, the residual stresses and axial stress on the pull-in voltage are also studied. The study may be helpful to characterize the mechanical and electrostatic properties of small size MEMS, or guide the design of microbeam-based devices for a wide range of potential applications.     

Pull-in analysis of electrically actuated viscoelastic microbeams based on a modified couple stress theory

A new beam model is developed for the viscoelastic microbeam based on a modified couple stress model which contains only one material length scale parameter. The governing equations of equilibrium together with initial conditions and boundary conditions are obtained by a combination of the basic equations of modified couple stress theory and Hamilton’s principle. This new beam model is then used for an electrically actuated microbeam-based MEMS structure. The dynamic and quasi-static governing equations of an electrically actuated viscoelastic microbeam are firstly given where the axial force created by the midplane stretching effect is also considered. Galerkin method is used to solve above equation and this method is also validated by the finite element method (FEM) when our model is reduced into an elastic case. The numerical results show that the instantaneous pull-in voltage, durable pull-in voltage and pull-in delay time predicted by this newly developed model is larger (longer) than that predicted by the classical beam model. A comparison between the quasi-static model results and the dynamic model results is also given.     

Dynamic pull-in phenomenon in MEMS resonators

We study the pull-in instability in microelectromechanical (MEMS) resonators and find that characteristics of the pull-in phenomenon in the presence of AC loads differ from those under purely DC loads. We analyze this phenomenon, dubbed dynamic pull-in, and formulate safety criteria for the design of MEMS resonant sensors and filters excited near one of their natural frequencies. We also utilize this phenomenon to design a low-voltage MEMS RF switch actuated with a combined DC and AC loading. The new switch uses a voltage much lower than the traditionally used DC voltage. Either the frequency or the amplitude of the AC loading can be adjusted to reduce the driving voltage and switching time. The new actuation method has the potential of solving the problem of high driving voltages of RF MEMS switches.     

Sensitivity analysis of pull-in voltage for RF MEMS switch based on modified couple stress theory

An approximate analytical model for calculating the pull-in voltage of a stepped cantilever-type radio frequency(RF) micro electro-mechanical system(MEMS) switch is developed based on the Euler-Bernoulli beam and a modified couple stress theory, and is validated by comparison with the finite element results. The sensitivity functions of the pull-in voltage to the designed parameters are derived based on the proposed model. The sensitivity investigation shows that the pull-in voltage sensitivities increase/decrease nonlinearly with the increases in the designed parameters. For the stepped cantilever beam, there exists a nonzero optimal dimensionless length ratio, where the pull-in voltage is insensitive. The optimal value of the dimensionless length ratio only depends on the dimensionless width ratio, and can be obtained by solving a nonlinear equation. The determination of the designed parameters is discussed, and some recommendations are made for the RF MEMS switch optimization.     

Impact dynamics of MEMS switches

During operation, a MEMS switch is activated by an applied voltage. This causes the switch, often a doped silicon microbeam, to be attracted toward (pulled-into) a substrate. The component–substrate contact completes a circuit and permits the flow of current. Calculations for the minimum voltage required to achieve quasi-static pull-in are well documented. But for these quasi-static pull-in voltages to be meaningful, the voltage would have to be increased gradually until the critical value V_pull-inV_{\mathrm{pull\mbox{-}in}} is reached and the switch closes. Of course, practical considerations might require the switch to cycle on and off quickly, i.e., dynamically. This is particularly true in the case of radio frequency (RF) MEMS switches. In this paper, a model is developed and used to consider the dynamic pull-in characteristics of a clamped-clamped microbeam. This model includes inertial effects, structural and air damping (squeeze-film damping), as well as the impact behavior of the microbeam with the substrate. Parameter combinations leading to various types of behavior (no pull-in, air-bounce, wall bounce, etc.) are clearly identified. In an attempt to ensure fast switch closure and limit bouncing, two new applied voltage profiles are considered.     

Pull-in instability of a typical electrostatic MEMS resonator and its control by delayed feedback

Pull-in instability of the electrostatic microstructures is a common undesirable phenomenon which implies the loss of reliability of micro-electromechanical systems. Therefore, it is necessary to understand its mechanism and then reduce the phenomenon. In this work, pull-in instability of a typical electrostatic MEMS resonator is discussed in detail. Delayed position feedback and delayed velocity feedback are introduced to suppress pull-in instability, respectively. The thresholds of AC voltage for pull-in instability in the initial system and the controlled systems are obtained analytically by the Melnikov method. The theoretical predictions are in good agreement with the numerical results. It follows that pull-in instability of the MEMS resonator can be ascribed to the homoclinic bifurcation inducing by the AC and DC load. Furthermore, it is found that the controllers are both good strategies to reduce pull-in instability when their gains are positive. The delayed position feedback controller can work well only when the delay is very short and AC voltage is low, while the delayed velocity feedback will be effective under a much higher AC voltage and a wider delay range.     

Dynamic analysis and design of electrically actuated viscoelastic microbeams considering the scale effect

Viscoelastic phenomena widely exist in MEMS materials, which may have certain effects on quasi-static behaviors and transition mechanism of nonlinear jumping phenomena. The static and dynamic behaviors of a doubly clamped viscoelastic microbeam actuated by one sided electrode are investigated in detail, based on a modified couple stress theory. The governing equation of motion is introduced here, which is essentially nonlinear due to its midplane stretching effect and electrostatic force. Through quasi-static analysis, the equilibrium position, pull-in voltage and pull-in location of the system are obtained with differential quadrature method and finite element method. The equivalent geometric nonlinear parameter is presented to explain the influence of the scale effect on the pull-in location. Different from elastic material, there are two kinds of pull-in voltages called as instantaneous pull-in voltage and the durable pull-in voltage in viscoelastic system. Then, Galerkin discretization and the method of multiple scales are applied to determine the response and stability of the system for small vibration amplitude. A new perturbation method to deal with viscoelastic term is presented. Theoretical expressions about the parameter spaces of linear-like vibration, hardening-type vibration and softening-type vibration are then deduced. The influence of viscoelasticity and scale effect on nonlinear dynamic behavior is studied. Results show that the viscoelasticity can reduce the effective elastic modulus and make the system tend to softening-type vibration; the scale effect can increase effective elastic modulus and make the system tend to hardening-type vibration. And most of all, simulation results of case studies are used to realize parameter optimization. Then parameter conditions of linear-like vibration, which is desired for many applications, are obtained. In this paper, the results of multi-physical field coupling simulation are used to verify the theoretical analysis.     

Size-dependent dynamic pull-in instability of hydrostatically and electrostatically actuated circular microplates

In the present study, the dynamic pull-in instability and free vibration of circular microplates subjected to combined hydrostatic and electrostatic forces are investigated. To take size effects into account, the strain gradient elasticity theory is incorporated into the Kirchhoff plate theory to develop a nonclassical plate model including three internal material length scale parameters. By using Hamilton’s principle, the higher-order governing equation and the corresponding boundary conditions are obtained. Afterward, a generalized differential quadrature (GDQ) method is employed to discritize the governing differential equations along with simply supported and clamped edge supports. To evaluate the pull-in voltage and vibration frequencies of actuated microplates, the hydrostatic-electrostatic actuation is assumed to be calculated by neglecting the fringing field effects and utilizing the parallel plate approximation. Also, a comparison between the pull-in voltages predicted by the strain gradient theory and the degenerated ones is presented. It is revealed that increasing the dimensionless internal length scale parameter or decreasing the applied hydrostatic pressures leads to higher values of the pull-in voltage. Moreover, it is found that the value of pull-in hydrostatic pressure decreases corresponding to higher dimensionless internal length scale parameters and applied voltages.     

Influence of size effect and elastic boundary condition on the pull-in instability of nano-scale cantilever beams immersed in liquid electrolytes

In this study, the static pull-in instability of nanocantilever beams immersed in a liquid electrolyte is theoretically investigated. In modeling the nanocantilever beam, the effects of van der Waals forces, elastic boundary condition and size dependency are considered. The modified couple stress theory, containing material length scale parameter, is used to interpret the size effect which appears in micro/nanoscale structures. The modified Adomian decomposition (MAD) method is used to gain an approximate analytical expression for the critical pull-in parameters which are essential for the design of micro/nanoactuators. The results show that the beam can deflect upward or downward, based on the values of the non-dimensional parameters. It is found that the size effect greatly influences the beam deflection and is more noticeable for small thicknesses. Neglecting size effect overestimates the deflection of the nanobeam. The findings reveal that the increase of ion concentration increases the pull-in voltage but decreases the pull-in deflection. Furthermore, an increase in ion concentration increases the influence of size-dependent effect on pull-in voltage.     

Numerical analysis of theoretical model of the RF MEMS switches

An improved electromechanical model of the RF MEMS (radio frequency microelectromechanical systems) switches is introduced, in which the effects of intrinsic residual stress from fabrication processes, axial stress due to stretching of beam， and fringing field are taken into account. Four dimensionless numbers are derived from the governing equation of the developed model. A semianalytical method is developed to calculate the behavior of the RF MEMS switches. Subsequently the influence of the material and geometry parameters on the behavior of the structure is analyzed and compared, and the corresponding analysis with the dimensionless numbers is conducted too. The quantitative relationship between the presented parameters and the critical pull-in voltage is obtained, and the relative importance of those parameters is given.