Femtosecond laser microfabrication of periodic structures using a microlens array |
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| Authors: | S Matsuo S Juodkazis H Misawa |
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| Institution: | (1) Graduate School of Engineering, The University of Tokushima and JST-CREST, 2-1 Minamijosanjimacho, Tokushima 770-8506, Japan;(2) Research Institute of Electronic Science, Hokkaido University and JST-CREST, N21, W10, CRIS Bldg., Kita-ku, Sapporo 001-0021, Japan |
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| Abstract: | A microlens array (MLA) was applied for femtosecond laser microfabrication. Two-dimensional periodic patterns that corresponded to the arrangement of lenses in the MLA were recorded by ablation on a glass surface. The two-dimensional periodic patterns were recorded by a single exposure without scanning of the laser beam or the sample, and worked as a grating. Optical resizing of the patterns and high efficiency of fabrication are demonstrated and discussed. PACS 42.82.Cr; 07.60.Pb; 42.62.Cf |
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