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石英微透镜阵列的制作研究 总被引:2,自引:1,他引:1
叙述了采用氩离子束刻蚀的方法制作线列长方形拱面石英微透镜阵列.所制单元石英微透镜底部的外形尺寸为(300×106)um2,平均冠高7.07μm,平均曲率半径202.19μm,平均焦距404.38μm,平均F2数为3.82,平均光焦度2.47×103屈光度,扫描电子显微镜和表面探针测试表明,所制线列石英微透镜阵列的图形整齐均匀,单元长方形拱面石英微透镜的轮廓清晰,表面光滑平整.所制微透镜阵列用于高Tc超导红外探测器阵列的实验证实,微透镜的引入可以显著改善超导探测器的光响应特性. 相似文献
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用按需滴定技术制备聚合物微透镜阵列 总被引:5,自引:3,他引:2
采用高分子聚合物-单体混合溶液按需滴定-原位热聚合的新方法制作折射微透镜及其阵列.制备透镜的主要材料是甲基丙烯酸甲酯及其聚合物.制备的微透镜直径在1 mm~3 mm范围内,矢高为100 μm~400 μm,透镜焦距在1 mm~4 mm之间.所得微透镜在波长λ=1.55 μm处有很好的光学透过率(90%),适于作光通信耦合器件.用AFM-Ⅱ型原子力显微镜测得微透镜阵列的表面粗糙度Ra约等于0.9 nm,并通过液体的表面张力理论分析了微透镜的形成机理. 相似文献
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微透镜阵列是一种多功能的微光学元件,可以对入射光进行扩散、光束整形、光线均分、光学聚焦等调制,进而实现大视角、低像差、小畸变、高时间分辨率和无限景深等,在光电器件和光学系统的微型化、智能化和集成化方面具有重要的应用潜力.介绍了微透镜阵列的光学原理和发展历程,综述了喷墨打印、激光直写、丝网印刷、光刻技术、光聚合技术、热熔回流技术和化学气相沉积法等微透镜阵列制备技术,总结了微透镜阵列在成像传感、照明光源、显示和光伏等领域的应用进展,最后对微透镜阵列的发展方向进行了展望,讨论了曲面微透镜、叠加复眼系统以及微透镜与新型光电材料结合等新方向的发展趋势和未来挑战. 相似文献
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凹折射微透镜阵列的离子束刻蚀制作 总被引:1,自引:0,他引:1
利用光刻热熔成形工艺及离子束刻蚀制作 12 8× 12 8元凹微透镜阵列。所制硅及石英凹微透镜的典型基本图形分别为凹球冠形、凹柱形和矩顶凹面形。分析了在光致抗蚀剂柱凹微透镜图形制作过程中的膜系匹配特性 ,与制作该种微透镜有关的光掩模版的主要结构参数 ,以及光致抗蚀剂掩模工艺参数的控制依据等。探讨了在凹微透镜器件制作基础上利用成膜工艺开展平面折射微透镜器件制作的问题。采用扫描电子显微镜 (SEM)和表面轮廓仪测试了所制石英凹微透镜阵列的表面微结构形貌。给出了所制石英凹微透镜阵列远场光学特性的测试结果。 相似文献
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通过分析现有的基于在高温超导体超导转变温区的热效应及光子效应的薄膜型器件的结构特
点和光电特性,讨论了利用单片折射型微透镜进行高温超导薄膜红外探测器光电响应性能改
善的可行性,给出了几种典型的可与高温超导薄膜红外探测器耦合的单片面阵硅折射型微透镜阵列的SEM测试结果及主要的几项参数指标。 相似文献
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Hsin-Ta Hsieh 《Optics Communications》2011,284(21):5225-5230
In this paper, we present microlens arrays (MLA) with long focal length (in millimeter range) based on thermal reflow process. The focal length of microlens is usually in the same order of lens diameter or several hundred microns. To extend focal length, we made a photoresist (SU-8) MLA covered by a Polydimethylsiloxane (PDMS) film on a glass substrate. Because the refractive index difference between PDMS and photoresist interface is lower than that of air and MLA interface, light is less bended when passing through MLA and is focused at longer distance. Microlenses of diameters from 50 μm to 240 μm were successfully fabricated. The longest focal length was 2.1 mm from the microlens of 240 μm diameter. The numerical aperture (NA) was reduced 0.06, which is much lower than the smallest NA (~ 0.15) by regular thermal reflow processes. Cured PDMS has high transmittance and becomes parts of MLA without too much optical power loss. Besides, other focal lengths can be realized by modifying the refractive index different between two adjacent materials as described in this paper. 相似文献
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We report a simple method for fabricating a concave refractive microlens array (MLA) in solgel glass by using a proximity-effect-assisted reflow technique. The solgel concave refractive MLA that we fabricated had excellent surface smoothness; good dimensional conformity, with an 8.23% nonuniformity of the microlens elements; and structural perfection, with a biggest deviation of 1% from a perfect concave spherical crown. The relative error between the measured and the designed values of the concave MLA's focal length was only 1.83%. Compared with the conventional fabrication techniques for concave MLAs, the proposed method has significant advantages including simplicity, low cost, good element conformity, and smooth device surface. 相似文献
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扩展微透镜数值孔径范围的阶梯光刻热熔法研究 总被引:4,自引:1,他引:3
在微透镜阵列的光刻热熔制作法中,临界角效应严重影响了微透镜的制作范围和面形质量。在对临界角效应定性研究的基础上,提出了用阶梯光刻熔法来扩展热熔型微透镜阵列的数值孔径范围。实验结果表明,采用这一方法制作的微透镜,其单元孔径范围扩展为50 ̄900μm,相对口径范围扩大到为F/1 ̄F/10,并有效地改善了临界角效应对大孔径微透镜面形质量的影响。 相似文献
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微透镜阵列反应离子束蚀刻传递研究 总被引:4,自引:0,他引:4
提出了一种微透镜阵列复制的新方法-反应离子束蚀刻法(RIBE)它在工作原理和参数控制等方面较传统的蚀刻方法有很大的先进性,能够实现蚀刻过程的精确控制,本文详细阐述了反应离子蚀刻过程中的蚀刻选择性的控制方法,通过对各种蚀刻参数的控制,最终实现了微透镜阵列在硅等红外材料上面形传递的深度蚀刻,口径φ100μm的F/2微透镜阵列在硅基底上的传递精度达1:1.03,无侧向钻蚀。 相似文献
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Confocal microscopy with a refractive microlens-pinhole array 总被引:3,自引:0,他引:3
The stable setup of a confocal arrangement consisting of a combination of a refractive microlens and a pinhole array is presented. The focal plane of the microlenses lies at the rear surface of the substrate in the pinhole plane. By using a microscope objective one can image the stop array onto the object at a reduced size. Surface profiles of refractive and diffractive optical elements were measured with the help of this confocal microscope. 相似文献
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In this paper, a simple and accurate method based on Z-scan and parallel moiré deflectometry for measuring the focal length of microlenses is reported. A laser beam is focused by one lens and is re-collimated by another lens, and then strikes a parallel moiré deflectometer. In the presence of a microlens near the focal point of the first lens, the radius of curvature of the beam is changed; the parallel moiré fringes are formed only due to the beam divergence or convergence. The focal length of the microlens is obtained from the moiré fringe period graph without the need to know the position of the principal planes. This method is simple, more reliable, and completely automated. The implementation of the method is straightforward. Since a focused laser beam and Z-scan in free space are used, it can be employed for determining small focal lengths of small size microlenses without serious limitation on their size. 相似文献
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折射型微透镜列阵的光刻热熔法研究 总被引:8,自引:1,他引:7
研究了制作折射型微透镜列阵的一种新方法光刻胶热熔成形法,获得了20×20的折射型微透镜列阵,单元微透镜相对口径为F/2,单元透镜直径为90μm,中心间隔100μm,透镜的波像差小于1.3波长。本文详细阐述了光刻热熔法的基本原理及微透镜设计方法,并讨论了工艺参数对微透镜列阵质量的影响。 相似文献
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V. N. Il'in 《Journal of Applied Spectroscopy》1997,64(3):403-409
An interference method for measuring the refractive index and surface curvature of cylindrical microlenses is considered.
The method consists in probing microlenses by a dynamic interference pattern with a localization of order of several to tens
micrometers corresponding to the period of the interference fringes. Basic analytical expressions for evaluation of the curvature
radius and refractive index of the probed portion of the microlens are presented.
Institute of Electronics, Academy of Sciences of Belarus, 22, Logoiskii Trakt, Minsk, 220841, Belarus. Translated from Zhurnal
Prikladnoi Spektroskopii, Vol. 64, No. 3, pp. 390–395, May–June, 1997. 相似文献