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1.
双次曝光积分效应实现杂质浓度分布均匀化   总被引:3,自引:0,他引:3       下载免费PDF全文
 激光诱导扩散中,当入射激光光强为高斯分布甚至均匀分布时,微小扩散区的温度分布不均匀。由于扩散系数是温度的函数,必将导致扩散后杂质浓度分布的均匀性较差,无法制作出高性能的p-n结。提出采用多次激光诱导扩散的积分效应来实现杂质浓度分布的均匀化整形。对于InP衬底的CO2激光诱导Zn扩散,利用温度闭环测控系统测得的基片表面热斑温度场分布,分析计算了两次激光诱导扩散重叠区域的浓度分布积分效应。在此基础上模拟计算出,用双次曝光积分效应做杂质浓度分布的均匀化整形时,基片上两次激光照射位置的最佳间隔为20 μm。这为改进激光诱导扩散工艺,用多次曝光实现面均匀的杂质浓度分布奠定了理论基础。  相似文献   

2.
10.6μm激光诱导扩散中热致破坏的抑制   总被引:2,自引:0,他引:2  
在半导体激光诱导扩散实验中,用连续波CO2 10.6μm激光聚焦后照射基片表面。为实现局部区域的选择扩散,激光光斑半径仅数十微米。要使曝光区温度达到扩散实验要求,必须使曝光区功率密度很高。另一方面,Si、InP等半导体材料对10.6μm波长激光的吸收系数随温度的升高而增大,这导致实验时容易产生热致破坏,损伤基片。在分析热致破坏的产生机理后,提出了在聚焦激光束照射下,曝光区温度的数值计算方法。计算结果表明,在半导体基片初始温度为室温时,以恒定功率的激光束照射基片,曝光区温度不能稳定在扩散试验需要的温度范围。在此基础上,提出了预热基片及对曝光区温度进行实时控制等抑制热致破坏的方法,有效地克服了这一困难。这对于用激光微细加工制作出高性能的单片光电集成电路(OEICs)器件有重要意义。  相似文献   

3.
用激光微细加工制作平面型InGaAs/InP PIN 光探测器   总被引:3,自引:1,他引:2       下载免费PDF全文
 采用激光微细加工技术来制作单片集成光接收机的探测器,在制作过程中,用固态杂质源10.6 μm激光诱导Zn扩散工艺来进行探测器的p-区掺杂。制作出平面型顶部入射的InGaAs/InP PIN 光探测器,响应度为0.21 A/W。分析了激光诱导扩散中影响探测器性能的因素,因此提出了扩散温度自动控制、扩散区温度分布均匀化及激光焦斑与扩散区精确对准等相应的改进方法。  相似文献   

4.
TN241 2006042935微小激光曝光区域温度分布均匀化整形方法=Tempera-ture uniformity of the laser exposed area[刊,中]/王华明(电子科技大学光电信息学院.四川,成都(610054)) ,叶玉堂…∥光电工程.—2006 ,33(4) .—55-58提出了实现光束曝光区温度分布均匀化的方法。首先通过遗传算法设计一个16台阶的二元光学整形器件;针对二元光学只能应用于特定条件下的缺点,再引入液晶空间光调制方法,该方法可以对入射光束进行实时、可调控的整形,实现对曝光区温度分布进行实时控制。理论分析和仿真结果都表明,两种方法按照实际需要进行选择,可以有…  相似文献   

5.
李忠东  郭旗 《应用光学》1999,20(5):24-27
激光诱导扩散中的曝光区大小为10μm量级,其温度分布的测量是较困难的。本文报道一我中极微小面积的不接触及控制。文中介绍测控原理、实验装置,给出测量结果。  相似文献   

6.
目次高功率激光与光学高功率超短激光脉冲信噪比的研究王科钱列加1双次曝光积分效应实现杂质浓度分布均匀化王昱琳叶玉堂吴云峰等6高速转镜相机转速测量的同步传感系统满光明叶玉堂吴云峰等11分布式电极连续面型微变形反射镜力电耦合特性分析刘彦陈海清余洪斌等15kW级立式氧碘化学激光器的初步实验研究张岳龙房本杰陈方等21单元红外成像探测器的激光干扰实验研究葛成良范国滨梁正等25基于多对流速度的波前重构算法研究谢文科姜宗福31基于双F-P干涉仪的多普勒测风激光雷达的性能分析迟如利封素敏钟志庆等40基于晶体旋光效应的近场光学空间…  相似文献   

7.
二元振幅型面板用于光束空间整形   总被引:2,自引:2,他引:0  
谢杰  范薇  李学春  林尊琪 《光学学报》2008,28(10):1959-1966
为了提高高功率激光系统的整体效率和充分利用光能,需要对前端注入的高斯光束进行空间整形,实现驱动器终端激光的均匀化输出.采用振幅型二元面板对激光光束进行空间强度整形,利用误差扩散法进行了理论设计,数值摸拟了整形效果,同时讨论了面板加工误差以及空间滤波器的小孔大小等因素带来的影响.根据理论设计,分别加工了反高斯透射率分布和抛物线透射率分布的二元面板,并进行了整形实验,实现了各自的整形功能,并做了误差分析.实验让明二元面板能对激光光束的空间强度分布实现了精确的整形.  相似文献   

8.
离子束溅射沉积Ti-Ni薄膜及其电化学性能的研究   总被引:1,自引:0,他引:1  
利用离子束溅射沉积的方法在不同基片温度条件下制备了不同成分的Ti-Ni贮氢薄膜,研究了其电化学贮氢性能。结果表明:用离子束溅射沉积制备的Ti-Ni薄膜的结构为非晶状,薄膜对基片的附着力较强,在冲放电循环50次后仍为非晶态;在基片温度为350℃时制备的薄膜的结构为晶态,在多次放电循环后呈现非晶化趋势;Ti-Ni薄膜具有较高的电化学活性,晶化薄膜比晶态薄膜的最大放电容量高,但晶化薄膜的循环稳定性差。  相似文献   

9.
应用x射线衍射、透射电子显微镜和差示扫描量热实验技术,研究了FeCuNbBSi,FeBSi,FeMoBSi几种铁基非晶合金的激波诱导晶化.研究结果表明:非晶态合金激波诱导晶化中存在若干应用传统长程扩散相变理论难以解释的奇异物理效应.用非晶态合金激波流化晶化可以很好地解释激波诱导非晶晶化中的各种奇异物理效应. 关键词: 激波晶化 非晶态合金 激波流化 流体扩散  相似文献   

10.
为了将椭圆高斯光束整形为圆形平顶光束,设计了一种无中心遮拦反射式两镜整形系统。根据能量守恒思想,选择匀化洛伦兹函数作为出射光束平顶分布函数,建立了入射面和出射面之间的坐标变换关系;采用光程守恒原理和矢量形式的反射定律,推导了积分形式的整形系统两反射镜面形方程。利用数值解法计算出两反射镜的面形数据,经过光学设计软件仿真与系统参数分析,得到的圆形平顶光束在目标区域的照度均匀性大于95%。结果表明,这种整形系统可以明显提高椭圆高斯光束的平顶性,具有现实可行性。  相似文献   

11.
The VEPP-4M accelerator facility with a universal KEDR detector is designed to conduct experiments with colliding electron-positron beams. High-energy physics, nuclear physics, and studies using synchrotron radiation are the main directions of research with this facility. In addition, experiments on poorly explored issues in the physics of beams in the electron-positron storage ring and methodological studies to prepare an experiment aimed at testing corollaries of the CPT theorem for an electron and a positron are regularly conducted at the VEPP-4 facility. A number of works performed in recent years are described: studies to increase the accuracy of comparing the electron and positron spin precession frequencies by the resonant depolarization method; measurements of the count rate of Touschek electrons as a function of the beam energy in a wide range; comparison of the methods for measuring the beam energy spread; a study of the electron beam dynamics when a nonlinear betatron resonance is crossed.  相似文献   

12.
There has been much recent research into polarizing an antiproton beam, instigated by the recent proposal from the PAX (Polarized Antiproton eXperiment) project at GSI Darmstadt. It plans to polarize an antiproton beam by repeated interaction with a polarized internal target in a storage ring. The method of polarization by spin filtering requires many of the beam particles to remain within the ring after scattering off the polarized internal target via electromagnetic and hadronic interactions. We present and solve sets of differential equations which describe the buildup of polarization by spin filtering in many different scenarios of interest to projects planning to produce high-intensity polarized beams. These scenarios are: 1) spin filtering of a fully stored beam; 2) spin filtering while the beam is being accumulated, i.e. unpolarized particles are continuously being fed into the beam; 3) the particle input rate is equal to the rate at which particles are being lost due to scattering beyond the ring acceptance angle, the beam intensity remaining constant; 4) increasing the initial polarization of a stored beam by spin filtering; 5) the input of particles into the beam is stopped after a certain amount of time, but spin filtering continues. The rate of depolarization of a stored polarized beam on passing through an electron cooler is also shown to be negligible.  相似文献   

13.
M. Idrish Miah 《Optik》2011,122(20):1811-1813
Spin polarization in semiconductors was investigated by pump-probe measurements, where the transmissions of the samples were monitored with probe pulses with same and opposite circular polarizations. The spin polarization as a function of the pump-probe delay was estimated, and the polarization was found to decay in a sub-ns timescale. It was also found that the polarization depends strongly on photon energy of the pump beam. The pumping energy dependence of the spin polarization was discussed based on the inter-band transition probabilities.  相似文献   

14.
The 2D scattering problem of an electron by a magnetized nanoparticle is solved in the Born approximation with account of the dipole-dipole interaction of the magnetic moments of electron and nanomagnet. The scattering amplitudes in this problem are the two-component spinors. They are obtained as functions of the electron spin orientation, the electron energy and show anisotropy in scattering angle. The initially polarized beam of electrons scattered by the nanomagnet consists of electrons with no spin flipped and spin flipped. The majority of electrons with no spin flipped are scattered by small angles. The majority electrons with spin flipped are scattered in the vicinity of the scattering angles π/2 and 3π/2. This can be used as one more method of controlling the spin currents.  相似文献   

15.
A commercial electron spin analyser, based on spin-polarised low-energy electron diffraction (SPLEED) from W(1 0 0), has been characterised with incident polarised electron beams from a standard GaAs polarised electron source. The dependence of the Sherman function on the scattering energy and elapse time after CO-flash of the tungsten crystal of the analyser have been measured. The influence of the stray magnetic field on the performance of the analyser has been investigated. The spin analyser has been applied in monitoring the reorientation transition of the easy magnetisation direction of Fe films on W(1 1 0) upon the exposure of CO adsorbent on the surface.  相似文献   

16.
Optically oriented electron spin lifetime in n-doped gallium arsenide was measured via depolarization of the photoluminescence (PL) in a transverse magnetic field (Hanle effect). In order to measure the PL polarization, a time-resolved pump-probe experiment, where a pump pulse generates spin-polarized electrons and a probe pulse monitors their polarization, was employed. The PL polarization in dependences of the pump-probe delay, external magnetic field as well as of the sample temperature was studied. The PL polarization was found to decay exponentially with the pump-probe delay, from which the spin lifetime of the electrons was measured. The measured value was found to depend on the strength of the magnetic field and sample temperature.  相似文献   

17.
为精确地测量合肥电子储存环电子束的能量,建立了一套束流损失的测量装置,选择了一款对低能光子探测效率高的塑料闪烁体探测器,根据测量到的束流损失信号研制了一套数字化的信号处理电路,并进行了实际测量。测量结果表明该束流损失测量系统能够精确、灵敏地反映出束流损失的变化,可以用于自旋共振退极化法标定电子束能量的实验;并介绍了自旋共振退极化法的测量原理及依据的理论基础。  相似文献   

18.
《Physics letters. A》2014,378(18-19):1336-1340
Intrinsic electron spin relaxation due to the D'yakonov–Perel' mechanism is studied in monolayer Molybdenum Disulphide. An intervalley in-plane spin relaxation channel is revealed due to the opposite effective magnetic fields perpendicular to the monolayer Molybdenum Disulphide plane in the two valleys together with the intervalley electron–phonon scattering. The intervalley electron–phonon scattering is always in the weak scattering limit, which leads to a rapid decrease of the in-plane spin relaxation time with increasing temperature. A decrease of the in-plane spin relaxation time with the increase of the electron density is also shown.  相似文献   

19.
We propose in theory a curved nanowire structure that can both serve as a spin inverter and a spin polarizer driven by a periodic Rashba spin–orbit coupling (SOC) and a uniform Dresselhaus SOC. The curved section of the U-shaped quasi-one dimensional nanowire with an arc of radius R and circumferential length πR is divided into segments of equal length initially having only its inherent homogeneous Dresselhaus SOC. Then a Rashba-type SOC is applied at every alternating segment. By tuning the Rashba SOC strength and the incident electron energy, this device can flip the spin at the output of an incoming spin-polarized electron. On the other hand, this same device acts as a spin filter for an unpolarized input for which an outgoing electron with a non-zero polarization can be achieved without the application of an external magnetic field. Moreover, the potential modulation caused by the periodic Rashba SOC enables this device to function as an attenuator for a certain range of incident electron energies that can make the probability current density drop to 10−4 of its otherwise magnitude in other regimes.  相似文献   

20.
We theoretically investigate the spin-dependent Seebeck effect in an Aharonov–Bohm mesoscopic ring in the presence of both Rashba and Dresselhaus spin–orbit interactions under magnetic flux perpendicular to the ring. We apply the Green's function method to calculate the spin Seebeck coefficient employing the tight-binding Hamiltonian. It is found that the spin Seebeck coefficient is proportional to the slope of the energy-dependent transmission coefficients. We study the strong dependence of spin Seebeck coefficient on the Fermi energy, magnetic flux, strength of spin–orbit coupling, and temperature. Maximum spin Seebeck coefficients can be obtained when the strengths of Rashba and Dresselhaus spin–orbit couplings are slightly different. The spin Seebeck coefficient can be reduced by increasing temperature and disorder.  相似文献   

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