磁控溅射铂抑制镀银表面的二次电子发射

降低表面的二次电子产额是抑制微波部件二次电子倍增效应和提升功率阈值的有效途径之一,目前主要采用在表面构造陷阱结构和沉积非金属薄膜的方法降低二次电子产额,其缺点是会改变部件的电性能.针对此问题,采用在表面沉积高功函数且化学惰性的金属薄膜来降低二次电子产额.首先,采用磁控溅射方法在铝合金镀银样片表面沉积100 nm铂,测量结果显示沉积铂后样片的二次电子产额最大值由2.40降至1.77,降幅达26%.其次,用相关唯象模型对二次电子发射特性测量数据进行了拟合,获得了在40-1500 eV能量范围内能够准确描述样片二次电子产额特性的Vaughan模型参数,以及在0-50 eV能量范围内能够很好地拟合二次电子能谱曲线的Chung-Everhart模型参数.最后,将获得的实验数据和相关拟合参数用于Ku频段阻抗变换器的二次电子倍增效应功率阈值仿真研究,结果表明通过沉积铂可将部件的功率阈值由7500 W提升至36000 W,证实了所提方法的有效性.研究结果为金属材料二次电子发射特性的研究提供实验数据参考,对抑制大功率微波部件二次电子倍增效应具有参考价值.     

绝缘体二次电子发射系数测量装置的研制

 成功研制了测量绝缘体二次电子发射系数的测量装置，该装置主要由栅控电子枪系统、真空系统和电子采集系统组成，测量装置产生的原电子流的能量范围为0.8~60 keV。采用单脉冲电子枪法，测量了原电子能量范围为0.8~45 keV的多晶MgO的二次电子发射系数。测量中，收集极(偏置盒)离材料表面设置为约35 mm，偏置电压设置为 45 V。测量得到：用磁控溅射法制备的MgO的二次电子发射系数最大值约为2.83，处于 2~26范围内，其对应的原电子能量约为980 eV。这表明该装置测量的绝缘体二次电子发射系数是可信的，但用磁控溅射法制备的MgO的二次电子发射系数较低，这可能是制备MgO时引入了过多的杂质在MgO二次电子发射体里面所引起的。     

高能电子辐照绝缘厚样品的表面电位动态特性

采用数值计算和实验测量相结合的方法, 阐明了高能电子束照射下绝缘厚样品的表面电位和电子产额动态特性. 结果表明: 由于电子在样品内部的散射和输运, 沿着深度方向, 空间电位先缓慢下降到最小值, 然后逐渐升高并趋近于零; 随着电子束照射, 样品的表面电位逐渐下降, 可至负千伏量级, 电子总产额逐渐增大至一个接近于1的稳定值; 电子束停止照射后, 长时间放置下, 表面电位将逐渐升高, 但带电并不会消除; 表面电位随电子束能量的升高近似线性下降, 随入射角的增大而升高, 而随样品厚度的增大仅略有下降.     

Backscattered electron spectra from graphite

The backscattered electron spectra from graphite sample were studied both experimentally and theoretically at impact energies between 500 and 5000 eV. The angle of the incident electron beam was 50° and the detection angle was 0° with respect to the surface normal, respectively. Monte Carlo (MC) simulations were performed based on the Classical Transport Theory (CTT) model to mimic the experimental spectra. In our simulations, both elastic and inelastic scattering of primary electrons and secondary electron emission from graphite are taken into account. There is found satisfactory agreement between measured and calculated electron spectra.     

Secondary electron spectra of gold under bombardment by very low-energy positrons

Measurements of the secondary electron energy spectra resulting from very low-energy positron bombardment of a polycrystalline Au surface are presented. The low-energy part of the secondary spectra contain significant contributions from two processes: (1) annihilation-induced Auger electrons that have lost energy before leaving the surface and (2) secondary electrons resulting from direct energy exchange with an incident positron. Our data indicate that the second process (direct energy exchange with the primary positron) is still important at and below 3 eV incident beam energy. Since energy conservation precludes secondary electron generation below an incident beam energy equal to the difference between the electron and positron work functions (∼3 eV), the fact that we still observe significant secondary electron emission at energies at or below this value provides strong evidence that the incident positrons are falling directly into the surface state and transferring all of the energy difference to an outgoing secondary electron. These measurements were also used to obtain the first experimentally determined upper limit on the intensity of the spectrum of Auger-induced secondary electrons.     

电子离散发射模型的基础理论

 通过建立电子的离散发射模型并解析求解泊松方程,研究了两平行板电容器之间电子发散注入时电势的分布情况。结果表明：电子注的进入对无电子时两平板之间的电势产生了周期性和非周期性扰动,周期性扰动的平均效果为零,所以电子注产生的扰动主要由非周期性扰动体现。当电子的入射角度在0°～90°时,扰动出现了4个尖峰,除此之外电子注入对电势的扰动基本上为零,这从理论上解释了MICHELL的九粒子发射模型。     

Grid-based photogrammetry system for large scale sheet metal strain measurement

This paper presents a new approach to fast strain measurement with high accuracy for large scale sheet metal based on the surface circular grid and digital close range photogrammetry. A multi-block measuring method of discretization is implemented to archive large scale measurement. The sheet metal is separated into several blocks for respective calculating and joined together by common reference points. A surface circular searching method is presented for fast and robust 3D grid generation. A flexible bundle adjustment method is proposed for large amount 3D grid nodes reconstruction, which employs the conception of sampling points and is proved to be efficient. Furthermore, a multi-stage grid registration method is introduced to improve the accuracy of strain field by correcting the true deformation gradient tensor. A novel system is developed and performances well in actual large scale sheet metal strain measurement. Two accuracy tests confirm that the system strain measurement error is less than 0.2%.     

介质材料二次电子发射特性对微波击穿的影响

以介质填充的平行板放电结构为例,本文主要研究了介质填充后微波低气压放电和微放电的物理过程.为了探究介质材料特性对微波低气压放电和微放电阈值的影响,本文采用自主研发的二次电子发射特性测量装置,测量了7种常见介质材料的二次电子发射系数和二次电子能谱.依据二次电子发射过程中介质表面正带电的稳定条件,计算了介质材料稳态表面电位与二次电子发射系数以及能谱参数的关系.在放电结构中引入与表面电位相应的等效直流电场后,依据电子扩散模型和微放电中电子谐振条件,分别探讨了介质表面稳态表面电位的大小对微波低气压放电和微放电阈值的影响.结果表明,介质材料的二次电子发射系数以及能谱参数越大,介质材料的稳态表面电位也越大,对应的微波低气压放电和微放电阈值也越大.所得结论对于填充介质的选择有一定的理论指导价值.     

Electron loss spectroscopy of clean and oxygen covered GaAs(110) surfaces

Electron energy loss spectra of clean and oxygen covered GaAs(110) surfaces have been measured with a four grid retarding field analyser. Loss spectra of clean cleaved p- and n-type surfaces are slightly different and different states of adsorption for the oxygen on the two surfaces are found. The loss peaks which are common in the spectra obtained from clean surfaces of both types of material have been interpreted in terms of bulk and surface excitations. The data associated with the bulk excitations are in good agreement with previous optical and electron transmission data while loss peaks at 11.5 and 18.5 eV are interpreted as the surface plasma loss and a surface state transition respectively. For n-type material extra loss peaks were observed. In the case of oxygen adsorption on these surfaces new loss peaks were found at 13.5, 17.2 and 28.1 eV in both spectra and are assumed to be characteristic of the oxygen. Further, for n-type material an extra peak occurs at 8.2 eV.     

表面偶极子对扫描电子显微镜共振电子注入的影响

用共振电子注入法和第一性原理计算研究了硒(Se)单原子在Si(111)-7×7表面的吸附. 理论结果表明由于不同的电负性,表面Si原子会向吸附的Se原子发生电子转移,从而导致一个0.61 eV的表面偶极子形成. 该表面偶极子改变了Si表面的有效隧道能垒同时导致在样品和扫描电子显微镜针尖之间真空间隙中共振态能级的移动. 并且0.61 eV的表面偶极子会引起共振电子注入偏压向高电位移动0.45 V.     

An Auger and X-ray photoelectron spectroscopic study of sodium metal and sodium oxide

Photoelectron and Auger electron measurements have been made on polycrystalline films of sodium metal evaporated in ultra high vacuum, and on Na₂O produced by in-situ oxidation by dry oxygen. Most of the spectra were recorded using Mg Kα (1254 eV) radiation but excitation by 5 keV electrons or monochromatized Al Kα (1487 eV) X-rays was used for specific purposes. Core and valence electron binding energies, photoionization cross-sections relative to Na 1s, KLL and KLV Auger energies and transition probabilities are reported. Energy losses in the metal and oxide are discussed and the relative intensities of surface and bulk plasmon losses have been used to calculate mean electron escape depths in the metal. When corrections were made for experimental geometry, escape depths of 10 Å at 180 eV and 31 Å at 1200 eV were obtained. An escape depth of 23 Å at 980 eV was obtained by Na 1s-Na K-Auger intensity correlation and this is consistent with the plasmon data. Data on Auger satellite lines are presented and, in particular, evidence has been obtained which indicates that a high energy satellite should not be attributed to a plasmon gain mechanism. Valence band influences on the KLV Auger spectra are discussed with reference to the XPS spectrum and other sources of valence band information. Unexpected structure was found in the KLV spectra of the metal which, pending thorough interpretation, offsets the sensitivity and resolution advantages which these spectra otherwise offer for valence band studies.     

Secondary electron spectroscopy of platinum and carbon surfaces

The surfaces of platinum single crystals, of carbon deposits on platinum and of pyrographite are examined by secondary electron spectroscopy under 100 eV electron excitation. The spectra contain characteristic peaks in the range 0–30 eV, which are interpreted as band-like in origin. The effects of gas adsorption, of the reconstruction at Pt(100), of the temperature and of ion bombardment induced disorder are reported. The secondary electron spectrum provides a criterion for distinguishing between amorphous and graphitic carbon surfaces. By contrast with the Auger spectrum, it is sensitive to the degree of crystalline order at the surface over distances of 10–100Å.     

Electron energy loss and Auger study of epitaxially grown Cu on Ni(100)

Auger and electron energy loss spectra have been measured on films of Cu epitaxially grown on Ni(100). The films were prepared under UHV conditions using a quartz crystal for monitoring the deposition rate. LEED measurements were taken to determine the orientation of the films. The presence of a monolayer of Cu on Ni(100) is enough to suppress the 3p-3d transition on the surface of the sample. The electron energy loss spectra were studied as a function of the primary electron energy (50 to 300 eV). The experimental results were qualitatively analyzed using recent theoretical calculations of Cooper and co-workers. The effect of a small Cu coverage on Ni(100) on the chemisorption of CO and O₂ was also studied. A strong suppression of CO chemisorption at room temperature was observed. In the case of O₂, large exposures are necessary in order to observe a significant amount of oxygen on the surface. The absence of any appreciable chemisorption on the surface of the metal is attributed to the lack of empty d-surface states.     

Low energy Auger and loss electron spectra from magnesium and its oxide

Data have been obtained from Auger and energy loss processes in clean metallic Mg, Mg during stages of oxidation, and UHV cleaved MgO(100) surfaces. Particular attention has been paid to twenty features below 200 eV in the Auger spectra from these surfaces. A comparison of spectra from the metal, oxidised metal surface, and single crystal MgO has enabled estimates to be made of surface charging effects, and the MgO steady state surface potential is found to be near + 10 V above ground. All the Auger features are given assignments, two of which are interfacial processes involving ionic initial states and metallic final states. Several features in the low energy Auger spectrum are attributed to diffraction of true secondary electrons.     

栅网结构碳纳米管冷阴极电子光学系统的设计

基于碳纳米管冷阴极实验测试结果,采用三维粒子模拟软件对大面积碳纳米管冷阴极的场致发射特性进行了仿真,研究了栅网结构不同尺寸对碳纳米管冷阴极场致发射特性及电子注通过率的影响,并在此基础上设计出面积压缩比为18,输出电流密度为14.9 A/cm2的带状注电子枪。为进一步研制碳纳米管冷阴极电子光学系统和相关微波、毫米波电真空辐射源器件提供了技术基础。     

Thermodynamic investigation of an insulator irradiated by a low-energy electron beam

The surface of an insulating material irradiated by a beam of low energy electrons charges positively if the yield of secondary electron is greater than unity. For such a dynamical equilibrium, the thermodynamic properties have been investigated by measuring the surface potential in response to a temperature oscillation of the material. It is shown that an oscillation amplitude of 0.4 K at 530 K induces an oscillation of the surface potential of about 0.5 volts. The frequency dependence indicates a monotonous decrease in the response with decreasing frequency, extrapolating to zero at zero frequency. We propose that this modification of the surface charge is driven by the temperature dependence of a gas of charged particles in equilibrium with the vacuum level.     

Auger electron and characteristic energy loss spectra of plutonium

The Auger electron and characteristic loss spectra of plutonium have been obtained for the first time using a four grid retarding potential analyzer. The surface of this reactive metal was prepared by scribing in situ in good vacuum with a titanium carbide blade. Oxygen and carbon impurities were still present after scribing. The origin of the Auger electron and loss peaks is suggested, and a correlation is made with the peaks observed for uranium dioxide by Ellis and Campbell.     

Interactions of the directed plasma from a cathodic arc withelectrodes and magnetic fields

Curved magnetic ducts are frequently used to remove macroscopic-sized droplets from the plasma stream of cathodic vacuum arcs. The plasma of a cathodic vacuum arc in a magnetic filter is characterized by a strongly directional ion velocity (corresponding to 20-100 eV) and magnetized electrons. In the first section of this paper the effects of these features on the I-V characteristic curves of planar probes are identified and explained using a simple model. This is then used to interpret the interaction of the plasma with the walls of a biased quarter torus duct. Two small electrodes placed on the outer and inner sections of the curved duct wall show that the I-V characteristic is determined primarily by the electron-ion current balance at the wall on the outside of the curve. The application of a bias to a planar electrode on the outer wall section was found to give the same increase in throughput as a positive bias applied to the entire duct with the advantage of a much smaller electron current being drawn by the biasing power supply. The improvement in duct throughput achievable with positive-biasing of the duct wall was found to depend on both the configuration and strength of the magnetic field in the quarter torus filter. The plasma density profile and potential were unaffected by the application of the bias     

Plasmon effects in electron energy loss and gain spectra in aluminium

Oberservations of the low energy secondary and Auger electron spectra and the electron energy loss spectra from a clean aluminium surface have been made and the results are compared with other recent studies including that of Jenkins and Chung (1971). Low energy emissions at 5.7 eV and 10.3 eV are associated with the creation of single electron excitations in the valence band by plasmon decay. An apparent anomaly in the plasmon loss and gain peaks associated with the Auger spectrum is discussed.     

Electron energy loss spectroscopic investigation of palladium metal and palladium(II) oxide

Electron energy loss spectra (ELS) obtained from polycrystalline Pd metal and PdO powder using primary electron energies ranging from 100 to 1150 eV have been obtained and examined in an attempt to gain a better understanding of the origins of the loss features and to assess the utility of ELS in investigations of Pd catalysts. The two sets of ELS spectra differ significantly. The ELS spectra from Pd metal exhibit a predominant peak at 6.5 eV, shown to arise from a surface plasmon excitation, and two broad features at 25.1 and 31.9 eV, which originate from bulk loss processes. The broad features consist of several overlapping losses due mainly to interband transitions from the d-band, though a bulk plasmon excitation is believed to produce a feature near 24 eV. Two distinct peaks are present at 3.7 and 7.6 eV in the ELS spectra obtained from PdO, while a broad region of intensity appears over the range from 20 to 40 eV. The peak at 3.7 eV is attributed to a transition between the top of the valence band and the bottom of the conduction band. The feature at 7.6 eV is broad and arises from several overlapping features that are most likely caused by interband transitions rather than collective excitations. Furthermore, the ELS spectra obtained from PdO and oxidized Pd are also quite different indicating that ELS can provide useful information for determining the bonding states of oxygen on Pd-containing catalysts.